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`UNITED STATES PATENT AND TRADEMARK OFFICE
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`BEFORE THE PATENT TRIAL AND APPEAL BOARD
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`MICROSOFT CORPORATION,
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`Petitioner,
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`UNILOC 2017 LLC,
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`Patent Owner.
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`U.S. Patent No.: 6,836,654
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`Issued: Dec. 28, 2004
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`Application No.: 09/739,507
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`Filed: Dec. 18, 2000
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`Title: ANTI-THEFT PROTECTION
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`FOR A RADIOTELEPHONY DEVICE
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`DECLARATION OF STEVEN HARRIS
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`MICROSOFT CORP.
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`EXHIBIT 1007
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`SAMSUNG EXHIBIT 1007
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`SAMSUNG EXHIBIT 1007
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`Patent 6,836,654
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`I, Steven Harris state and declare as follows:
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`I am over 18 years of age and am competent to make this Declaration.
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`I make this Declaration based on my own personal knowledge, based on my
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`knowledge and review ofthe business records andpractices of the University of
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`I am currently employed as the Assistant Dean for Collections and
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`Knowledge Access Services at the University of Nevada-Reno. I have been
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`employedin this position since 2013.
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`I obtained a Master’s Degree in Library Science in 1991, and since
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`that time, | have been employed with academiclibraries at various universities
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`Through my professional experience, I have become knowledgeable
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`about the Library’s normal business practices with respect to how the Library
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`receives, catalogs, indexes, shelves, and makes available to the public its books,
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`journals, periodicals, and other collections.
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`Attached as Exhibit A to this Declaration is a true and accurate copy
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`of the papertitled “Communication Device Inactivity Password Lock,” by Charles
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`P. Schultz, Motorola Technical Developments, v. 29, Nov. 1996. Exhibit A, pp.
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`14-15. The exhibit includes photographs of the Library’s black boundedition that
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`holds volumes 27-29 of Motorola Technical Developments. Exhibit A, pp. 7, 17.
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`DECLARATION OF STEVEN HARRIS
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`Patent 6,836,654
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`The Library has continuously maintained a cataloging system such
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`that any memberofthe public could search for the offerings at the Library.
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`Motorola Technical Developments waspart of this system. The Library’s records
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`indicate that the Library regularly received, cataloged, and shelved Motorola
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`Technical Developments from 1983 (volume 3) to 2000 (volume 42).
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`In the 1996 timeframe, the Library’s cataloging and shelving
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`procedure for Motorola Technical Developments periodical included placing the
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`volume on the public shelf upon receipt from the publisher. It was further the
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`Library’s practice to send out for binding three volumesat a time. As noted above,
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`pages 7 and 19 of Exhibit A are photographs of the physical binderat the Library
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`that contains the Schultz paperidentified in paragraph 6.
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`The Library has maintained andusedin its ordinary course of
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`business an automated library catalog to track the Library’s collections since prior
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`to 1996. Attached as Exhibit B to this Declaration is a true and accurate screen shot
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`from the Library’s automated library catalog, showing that a record was created on
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`July 18, 1997 for volumes 27-29 of Motorola Technical Developments. The July
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`18, 1997 date represents the date when the Library received the physical bound
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`collection of volumes 27-29 from the binding company.
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`It was the Library’s practice to send out the loose three volumes for
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`binding after receiving the next onein the collection. That is, volumes 27-29 were
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`DECLARATION OF STEVEN HARRIS
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`Patent 6,836,654
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`sent out for binding after receiving volume 30 of Motorola Technical
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`Developments. Thus, volume 30 wasreceived prior to July 18, 1997 (the date the
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`bound collection of volumes 27-29 were received back from the binding
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`Based on the Library’s practice at the time, the Library would re-
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`shelve the bound collection as soon as possible upon receipt of the bound
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`collection, and typically within one or two business days. Thus, the bound
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`collection that included Exhibit A would have been back on the public shelves
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`before July 31, 1997.
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`It was also the Library’s normal practice to date stamp each individual
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`volume uponreceipt from the publisher. Here, the date stamp of volume 29 has
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`becomeillegible. However, based onall available information, the Library
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`received, shelved, and made Exhibit A available to the public, prior to July 18,
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`1997 because as noted above, the Library shelved volume 29 prior to receiving
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`volume 30.
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`DECLARATION OF STEVEN HARRIS
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`Patent 6,836,654
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`I, Steven Harris, do hereby declare andstate, that all statements made herein
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`of my own knowledgeare true andthatall statements made on information and
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`belief are believed to be true; and further that these statements were made with the
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`knowledge that willful false statements and the like so made are punishable by fine
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`or imprisonment, or both, under Section 1001 of Title 18 of the United States
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`Code.
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`Dated: Tu ne (3, WO J wo / VA
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`Signature
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`DECLARATION OF STEVEN HARRIS
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`EXHIBIT A
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`MOTOROLA
`
`This is Volume 27 ofMotorola
`Technical Developments. It represents
`a significantcollection oftechnical
`innovations developed by scientists
`and engineersfrom a number of
`Motorolafacilities and derivedfrom
`a wide variety ofscientific and
`engineering disciplines.
`
`These technical developments are
`published to promote and advancethe
`technicalarts throughout the world.
`
`Subsequent volumeswill be published
`from time to time on an as-needed basis
`as determined by Motorola’ staff:
`
`MOTOROLATechnical Developmentsis published periodically by Motorola, Inc. Schaumburg,Illinois 60196.
`Inquiries should be directed to Patent Department, 1303 East Algonquin Road, Schaumburg,Illinois 60196.
`© Copyright Motorola,Inc. 1996. Printed in U.S.A. The publication of these technical disclosures
`does not constitute a grant of any license underanypatent.
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`Page 8 of 19
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`does notconstitute
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`MOTOROLA
`
`This is Volume 29 ofMotorola
`Technical Developments. It represents
`a significantcollection oftechnical
`innovations developed by scientists
`and engineersfrom a number of
`Motorolafacilities and derivedfrom
`a wide variety ofscientific and
`engineering disciplines.
`These technical developments are
`published topromote and advance the
`technicalarts throughoutthe world.
`Subsequent volumes will bepublished
`from time to time on an as-neededbasis
`as determined by Motorola’ staff:
`
`Motorola,Inc. Schaumburg,Illinois
`sodically by
`i
`.
`:
`MOTORO
`LA Technical Developments1Spublished peri
`ce eee a ise
`ly
`Inquiries should be directed to Patent Department, 1303 East AlgonquinR ne
`cation ofthese technical disclos
`+
`U.S.A. The publi
`ted in U
`se any peter
`© Copyright Motorola, Inc. 1996. Prin a grant ofany license Un
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`60196.
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`Page 9
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`
`
`By JeffFreeman
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`By Steve Van Swol
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`Dan Hoory and John Lane
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`TiLinktoDDSLineConverter ene eee a cea anne ea aie simtielell ela zelalt rie ieee a aaa
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`UsingSwitchingMOSFETsin Low-Noise FrontEndAmplifiers’... 05 i505. 055 SUEDE gee 10-11
`ByBliav Zipper, Yehuda Eder and Yair Shapira
`VIHWE:ARapidPrototypeTranslatorfromVerilog-XLLanguagetoHardwareEmulation ......--+--+-+-->>
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`©Motorola,Inc. 1996
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`Novenber 1996
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`Technical Developments
`a
`\
`
`Contents
`Low Distortion, Wide Band Voltage Controlled Oscillator Modulation. .........----. 6-002,
`By Wayne Shepherd, Gus Leizerovich and Raul Salvi
`Interactive TV Alpha Paging System PL Ate AMD ERA MEANS ERE ke ye ERR emma «
`By Greg Coonley, Eugene Lopatukhin and Frank Falcone
`PCB Layoutfor Compensation of Coefficient ofThermal Expansion (CTE) Differences ...................,,
`By Allen Hertz, David Tribbey and Charles Parr
`Selective Call Blocking .......... REE nr eee n tenn ee beeen tee eee eee eas
`By James Hymel and Christian Herrick
`
`62-64
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`65
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`66-68
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`69-70
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`Default Wide Area Trunking. 3, sers Gs he cya scyiyece es Sad ace deg P44 Pa ESTAS Wa Gee Gy oa Maca eaters
`By Steve Norwood and Kurt Stefans
`
`71-72
`
`Robust Methodology and Software for Algorithmic Testing of Memory Arrays ...........................,
`By Anup§. Tirumala, Clark G. Shepard and Daniel T. Marquette
`Concentric Cell Handover and Assignment Algorithms .................0..0000 0002 cece cece cece eee.
`By G. Eastwick and J. Hopkinson
`High Frequency CMOSBuffer Amplifier ...... 2.2.2... 000.e eee ee cece en.
`By Scott Humphreys
`EmergencyAlert System for Automobiles ..... 2200.20... cc ccc cece eee.
`By Anthony Allen
`iyiModel Pawlotepe: Pieces ic ccc ar. eat clc, 25 w ayxnss,< 22 HRSG DRED ee hii bad eownendddbdan ann
`By Chris Nelson, Robert Shisler and E. Derek Smith
`OT oeee eeen 82
`By Wille Kottke
`Creiprinting Paste for SelfAlionimg «5.5 gee) ciclo cha MER vstetaidtins “cis lo
`By Allen Hertz, Hank Liebman and David Tribbey
`Side Ward Insertion Gripper for Automated Assembly in Horizontal Plane ..............................
`By Kiron P Gore
`Communication Device Inactivity Password Lock... .........................-.. 0.0 91-92
`By Charles P Schultz
`Integrated Stacked Gate Oxide and Interpoly Oxide ....................................00000000..
`By Craig Cavins, Ko-Min Chang, Craig Swift, Hsing-Huang Tseng and Wayne Paulson
`Password Modification in a Distributed Computer System.....................................022..
`By Chee Ma, Eustathios Vlachogiannis, Chun Hsu and Burhanuddin Hussain
`Multicolor Laminate Bieamatre Hipiles Cae oa wack wom aeene e556 ook bk one bk RRS
`By Ronald Scott Lipton, Harry Fuerhaupter, Kenneth Storts and Brian Black
`Compact Extender Service BN So iain rere eater 8 y Wel taoStee'sosaoeOLEhwnbkitenae ke 100-101
`
`
`RAVincsarClaiayPeatMeare euasas wesnes ee
`Predictive Key Loading During Late Entry Receptions .......................... 102-103
`By Curtis D, Lehman and Mark Ciena,hceh Es es B04 8 FHS
`Absolute Heading Sensor Blunder Detection Usin
`i
`i
`-107
`a
`g Relative Heading Sensor and Road Segment..............-
`By Yilin Zhao, Leslie G. Seymour and Elisha M. Kozikaro
`=
`Vialess Multilayer Ball Grid Arra: IC Pac
`By Yutaka Doi
`DMN,
`Wahi a ss sy bla ecg 9nd deena c
`
`
`
`© Motorola, Inc. 1996
`
`ii
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`Ce
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`aes des ou 4 asec. ceesceeidicanncn,
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`80
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`$3-86
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`87-90
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`93-94
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`95-96
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`November1996
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`Page 11
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`
`(*) MOTOROLA
`TechnicalDevelopments
`——STNee
`Contents
`The Washing Machine Turbo-Cull....... 26-222. 22.0.2,
`By Brian Webband Jim Perkims
`Automated Voice Message Re-broadcastin a Trunked Dispatch Radio System
`By Gerald Capehart
`Methodof Providing Automatic Voice Message Delivery in a Trunked Dispatch Radio S
`By Gerald Capehart and Dutch Bailey
`NNR SN ieee Si
`A Self-Aligning Electrostatic-Discharge-Protected Surface-Mount Right-Angle Light Emittine
`Dj
`By Robert R. Kornowski and Daniel R. Schroeder
`Light
`HattingDinard ts. 112-115
`ile
`OTAR Using One-Time Pads. . ......... . .oaal aes le ee
`116
`By Thomas P Ryan and Hans Christopher Sowa.susJessi)Wining.[oie ie es ae
`
`OTAR Rekey Authorization... 2.6.05 44,7. secate hn setkareyas geen esce 17
`By Hans Christopher Sowa
`Rots.
`Methodto Derive a Unique Encryption Key for a Private Call without using a Key Exchange..................
`By Hans Christopher Sowa
`
`4
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`i ee eee ane
`
`109
`
`ill
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`118-119
`
`Method to Encrypt TG ID, Algorithm ID, and Key ID of a Project 25 Transmission
`in an Encrypted Control Channel System... yalqeh sie scene eee eee ec ek 120
`By Hans Christopher Sowa
`
`IDEN Subscriber Airtime: Usage. Mindler «ii...
`By Darin Minter and Tony Belkin
`
`3.15
`
`is e-scecea sige na ord eer nore tees a, eee ee ee 121-122
`
`Audio Delay and Speech Collision Resolution ... 0... 11.0... cc cece eee eee eee teen e eee aes
`By Steven Charnota and Tony Belkin
`
`123-124
`
`
`
`
`Over Conveyor, Non-Intrusive, Liftand Locate ............0.0..02 22 eee eee eee ne eee 125-126
`By Scott Hovey and Carl Davis
`Dynamic White and Black Level Control for Document Imaging ........... 22... ee eevee ee eee eens 127-128
`By Paul Guidarini
`Setting a Modem’s Initial AT String in a Digital Radio Network... .........--. 2-0-0052 e reece reese 129-130
`By Ed Benyukhis, Barry Chan and Rod Averbuch
`‘Two Stages Dialing in a Digital Radio Network... .. 0.0... 6-0-0200 eee ere teen ester n essen eres s ees
`By Ed Benyukhis, Barry Chan and Rod Averbuch
`ResourcesAllocation Algorithm for Intracell Calls ...........-.000200050seecetsesetr ete essss ees
`By Boris Spektor, Naum Spektor and Anatoly Belkin
`A
`Cooling System for Communication Equipment Cabinets Using an
`Active Ventilation System Designed to Prevent Moisture Condensation .....-------+s-- st 0r
`By James K. Gehrke and William Morrison
`; egWigOeonsAme=oa 137
`
`Voice Activated Caller ID System for Spectrum Efficient Two Way Ralid.. cose eee
`By James K. Gehrke and James W. Dejmek
`138
`Affiliation Database Restoration Using Remote Site Affiliation Time Stamps... .------- +7777
`By Briana Hoffman
`Wrnack iia
`Pager Serial Number. ...¢.sacass esse sens degueeeets = eee
`By Andrew Fuehl and Eduardo Gonzalez
`Proper Code Detector Utilizing Decoded Pitch. .......---.----000.resn
`By Esteban Yepez, ITI and Ferdie Brillantes
`User Hierarchy for SmartZone Manager Applications......------.. 7007
`By LanaS. Dubinsky
`
`131-132
`
`133-134
`
`135-136
`
`141-142
`
`7
`
`143
`
`© Motorola,Inc. 1996
`
`fo
`Page 12 of 19
`
`4
`il
`
`November 1996
`
`Page 12
`
`
`Page 12
`
`Page 12 of 19
`
`

`

`
`(i) MOTOROLA
`
`MOTOROLA
`Technical Developments
`
`
`
`
`Technical Developments
`
`Overthe AirSite Alias for Private Trunked Systems...-.-.--- +--+ sre rrr urs steer eee 144-146
`By Matthew Pope, Daniel J. McDonald and Rob Biggs
`A Pager with a Language Translator... 2.2202 Se NS EHI NESS G peer rete ee eee
`By Cathal Timothy Breen
`Wet chemical etching ofunmaskedsilicon regions
`1) Mesa 2-to-Mesa 1 overlap spacing
`148-149
`Verification and Identification of Accessories for use with Radios ©. © = ©. 0 eee eee,
`is performed in semiconductor discrete processing
`2) Mesa | and Mesa?etch depths
`By Robert B, End and Christopher W. Wright
`to form deep moat and mesa device terminations,
`3) Mesa 1 and Mesa? etch depth sequence
`The contourofresulting moat/mesa silicon sidewall
`Sealed Connector Assembly for Low-Cost, High Thermal Conductivity Package ...-..---.--.----- 0... 00,
`150-151
`4) Choice ofmask sequence
`By Peter Collier
`_
`is very steep and leads to inadequate (thin or miss-
`ing) photoglass at the top ofthe silicon step (see
`hotodetector ArrayS ......-..--.0...20.000,
`i
`ioni
`;
`:
`An Inexpensive Passive Method of Aligning Fibers to Laseror P’
`By Chimioohes K. ¥. Chun, PCRL,Barbara Foley, PCRL and James Knapp, APDAC
`Figure 1). In addition, the sidewall’s large negative
`contour angle acts to limit the junction’s bulk break-
`Multiple Power Supply Beta-Squared ESD Circuit Protection... .......--- +--+ ee eee eters 156-157
`down voltage. An improved moat/mesasilicon
`By Bob Berger
`contouring process was achieved using overlapping
`TFSOIwith Improved Oxidation Resistance ....... 2-2. 2-1-0 eo veer teeny 158-159
`silicon etch regions. The following fourfactors were
`By N. David Theodore, Marco Racanelli and Tom Wetteroth
`found to control the moat/mesa contour:
`Method of Maintaining Queued Call Requests During Replacementof Control Channel Frequency .............
`By Alan Grau and Bob Clinkert
`Wavy Omega Strap for Modular Interconnect Thermal Expansion Considerations .........................
`By Ken Bieda, Jerry McFarlin and Roy Stone
`
`IMPROVED SILICON CONTOURING PROCESS
`by John Gunnison and Mark Schoenberg
`
`The Mesa | photo/etch process is followed by a
`second photo/etch process thatutilizes an oversized
`Mesa 2 mask. By proper selection ofthe Mesa 1 and
`Mesa 2 etch depths, Tespectively, the moat/mesa side-
`walls can be optimally recontoured (see Figure 2
`and 3). Recontoured sidewalls have a much smaller
`contour angle which offers superior photoglass step
`coverage and improvedelectrical parameters.
`
`147
`
`-155
`
`160-164
`
`165-166
`
`Brez yr RESOUNCe APUNE Pere etna eee el eee castes os ls sk anya oes Bk weed wale es ula 167-169
`By Tau-Lien Chang, Derek Oxley and Kethees Ketheesan
`
`Synchronization of Interzone Audio Resources Capability Information ............................0205.
`By Vijay Agarwal and Brigitte Darcel
`
`170
`
`Jitter:Based Adaptive HqAalizauOM :<.t3,6 ta one eee Neste hele & bine foes od pee Pee a we la eed 171-172
`By David Feldbaumer, Rimon Shookhtim and Mark Weaver
`
`Apparatusfor Protecting Wafer Placement Vacuum Chucks....................- 00 ccc cv ee eveverevees
`By Anthony Robert Weeks
`
`173-174
`
`Chameleon Assembly/atdl lest Carrier teres ele see oie cess bb ecaigpuee sec ne eee ge wa i ee ere ae eas
`By Brian A. Webb and Bob Wentworth
`
`175
`
`Variable Data Representation forHigher-Speed
`Performance and Reduced-Power Consumption in Precharged Cireuits..................0..000200--005 176-17
`By Merit Hong
`
`‘
`
`Backside Cooling Method for Power Devices... 2... ccc ccc ccc cee eeuceccccebeveees
`By Leonard J. Borucki, Erik W. Egan and Thomas E.Zirkle
`A Processfor Efficient String Matching... 2... 00.00c cece cc ccccceeeeees
`By James H.Tolar
`be So Mieke Pew Drecmder tt FPGNS 5c Gio cc cade leds ions cng aoue aus cccbiadiaiaicusaminaaanesa
`By Dandas Tang and Michael Shieh
`Methodfor Etching Goldinan MRIE| ccc ccc cee ce yee ces
`By Doug Mitchell, Frank Carney and Harry Geyer
`Demers EMEMM of CEO a tg ae 6
`By Garland D. Cotney
`
`a fo cersc
`
`ano necenne seals heb heals asters 187-188
`
`179-180
`
`181-183
`
`184-185
`
`186
`
`
`
`Photoglass
`
`Photoglass is missing or very
`thin due to steep moat/mesa
`sidewall
`
`
`
`
`Silicon
`
`
`
`Fig. 1
`
`© Motorola, Inc. 1996
`
`iv
`
`November 1996
`
`© Motorola, Inc, 1996
`
`November 1996
`
`
`Page 13 of 19
`
`Page 13
`
`
`Page 13
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`Page 13 of 19
`
`

`

`
`
`(M) MOTOROLA
`Technical Developments
`ee
`
`COMMUNICATION DEVICE INACTIVITY PASSWORD LOCK
`
`by Charles P. Schultz
`
`When a communication device (radio, phone,
`etc,), iS misplaced orleft unattended, someone other
`than the authorized user could use it, leaving the
`legitimate user responsible for the consequences,
`financial or otherwise. A password lock feature
`currrently allows users to “Jock” their radios from
`use unless a correct password is entered, but this
`feature would not be activated when the deviceis
`accidentally misplaced, or the user hastily leaves his
`radio behind while attending to some urgent mat-
`ter, An improvementover the current radio lock fea-
`ture would be for the device to becomelocked after
`it is inactive for a preprogrammed period of time,
`similar to computer screen “locking” programs.
`
`This invention allows the user to program an
`inactivity timer which would be reset each time a
`“physical input” occurs. If the timer expires, the com-
`munication device enters the “locked” mode and
`begins operation on a pre-programmedrevert chan-
`nel whichis defined by one of the personalities stored
`inthe device’s memory. Ifthe device is operating on
`asystem that requires registration with asite, it will
`unregister prior to locking. The device optionally
`sends an over-the-air signal on the revert channel
`indicating the radio’s ID andits “locked”status. This
`could alert a dispatcher to use a feature such as
`Remote Monitor to aid in locating a lost or stolen
`device. While locked, the device will not route any
`audio to its speaker. The device will receive and
`respond to over-the-air signaling,
`including an
`
`3%
`
`oe
`
`=
`transmission from the base station which
`unlock”
`can be used to assist users who have forgotten their
`passwords. The device is subject to the same
`unlocking procedure as the present radio password
`lock feature and, upon unlocking,it will register on
`the current site, if applicable. The device storesits
`locked state in non-volatile memory so it remains
`locked when poweris cycled.
`
`For the purposesof this feature, a wide variety
`ofactionsare classified as “physical inputs”so legit-
`imate operation will not be interrupted. In addition
`to keypad, button and switch activation, receiving
`bus messages for memory reprogrammingwill reset
`the timer to insure that reprogrammingwill not be
`interrupted. A motion-sensing device and circuit
`could also be added to prevent the device from
`locking while it is being carried around in dispatch
`mode.
`
`Someof the devices operating modeswill inhibit
`the activation of the inactivity timer. In order to
`facilitate factory testing orfield servicing ofthe device,
`the inactivity timer will not activate when it is in
`“test mode” or during rekeying. The timerwill also
`remain inactive during Over-The-Air Programming
`(OTAP) and Over-The-Air-Rekeying (OTAR). To pre-
`vent interruption of critical transmissions, locking
`will be inhibited during Emergency feature trans-
`missions, and during phonecalls to emergency serv-
`ices such as 911.
`
`1996
`
`© Motorola, Inc. 1996
`
`9]
`
`Page 14 of 19
`
`November 1996
`
`a |'
`
`Page 14
`
`Page 14 of 19
`
`

`

`(M\) MOTOROLA
`(S) MOTOROLA
`Technical Developments
`Technical Developments
`
`—Se
`
`
`
`Device Inactivity Password Lock
`
`
`
`RADIO IDLE
`
`EXPIRED?
`
`
`
`
`STATUS AND
`BLANK DISPLAY
`
`
`
`
`
`LOCKING SEQUENCE
`=.
`
` STORE LOCKED
`
`
`Charles P. Schultz
`
`INTEGRATED STACKEDGATE OXIDE AND INTERPOLY OXIDE
`by Craig Cavins, Ko-Min Chang,Craig Swift, Hsing-Huang Tseng and Wayne Paulson
`
`PURPOSE:
`
`For microcontrollers with embedded EEPROM,
`burn-in cost can be as high as $0.25 per part. The
`dominant burn-in failure mode has been the
`EEPROMselect gate failures. A processfor 1.2 ym
`design rules uses a 350A thermaloxidefor the select
`gate. It is desirable to make this select gate dielec-
`tric more robust in order to reduce or eliminate the
`burn-in failures and thereby eliminate the need for
`acostly burn-in.
`
`The integration ofthe 1.2m processis such that
`the select gate dielectric is formed concurrently with
`the interpoly dielectric for the EEPROM bit cell, and
`the logic gate dielectric is identical to the select gate
`dielectric. The enmeshmentofthese processes gives
`little latitude for significantly improving the quality
`of the select gate dielectric within the confines of a
`conventional approach which is to grow a thermal
`select gate oxide while simultaneously growing a
`thermal interpoly oxide.
`
`Oneprior art solution is to use an interpoly ONO
`stack with the top oxide layer being a CVD layer
`which can also form atleast part of the peripheral
`transistor dielectric. The disadvantage here is that
`for some self-aligned NVMintegrations and for most
`non-self-aligned NVM integrations, the use of an
`ONOinterpoly dielectric requires an additional
`masking step to pattern the ONO.
`
`PROPOSAL:
`
`Theidea here is to use a stacked gate oxide for
`both the select gate dielectric (also forms the logic
`gate dielectric for the 1.2 ym process) and the
`interpoly dielectric. The advantages of stacked gate
`
`oxides are well known.! Theprocess sequence starts
`with a pre-diffusion clean which cleans the single
`crystal silicon surface in the select gate (and logic
`gate) area andcleans the surface ofthe first poly
`floating gate. An initial thin thermal oxide mayor
`may not be grown asthefirst layer of the stacked
`oxide. Then a CVD oxide is deposited. The ratio of
`CVD oxide thickness to final gate oxide thickness
`may be optimized, but a CVD oxide thickness which
`is approximately halfof the final desired thickness
`is a goodstarting point (CVD oxide ~ 175A for 1.2
`ym process). Finally, an oxidizing annealofthe CVD
`layer is performed. This anneal may also be designed
`to grow an additional layer of thermal oxide under
`the CVD layer. The temperature and time of the
`anneal should be optimized to achieve the required
`quality and thickness requirements of the select gate
`and interpoly oxides as well as to provide the neces-
`sary impetus for diffusion ofany previously introduced
`dopants. Figure 1 shows a cross-sectional represen-
`tation of the EEPROM cell with the conventional
`and proposedprocess.
`
`SUMMARY:
`Using a stacked gate oxide to simultaneously
`form the select gate and interpoly dielectric for a
`stand-alone or embedded NVM can provide excep-
`tional quality dielectrics which will lead toa burn-in
`failure rate reduction and a significant cost savings
`when burn-in is eliminated. This process integra-
`tion is achieved without additional masking steps.
`
`REFERENCES:
`[1] H.-H. Tseng, PJ. Tobin, /EDM Technical Digest,
`P 321, 1993.
`
`
`
`
` REGISTERED ON
`A SYSTEM?
`
` SWITCH TO REVERT
`
`CHANNEL
`
`
`
`
` Y
`
`
` SEND ID AND STATUS
`ON REVERT CHANNEL
`
`SEND LOCKED
`STATUS?
`
`UNLOCK SUCCESSFUL
`
`STAY LOCKED UNTIL
`
`© Motorola, Inc, 1996
`
`92
`
`November 1996
`
`1
`
`© Motorola, Inc. 1996
`
`93
`
`November 1996
`
`
`
`
`
`Page 15 of 19
`
`Page 15
`
`
`Page 15
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`Page 15 of 19
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`

`

`Engineering Library (262)
`University of Nev: da, Reno
`
`Reno, NV 89557-0044
`
`Page 16 of 19
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`Page 16
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`Page 17
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`
`
`
`
`
`
`
`EXHIBIT B
`EXHIBIT B
`
`
`
`
`Page 18
`
`Page 18 of 19
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`

`

`
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