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`UNITED STATES PATENT AND TRADEMARK OFFICE
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`BEFORE THE PATENT TRIAL AND APPEAL BOARD
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`MICROSOFT CORPORATION,
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`Petitioner,
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`UNILOC 2017 LLC,
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`Patent Owner.
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`US. Patent No.: 6,836,654
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`Issued: Dec. 28, 2004
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`Application No.: 09/739,507
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`Filed: Dec. 18, 2000
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`Title: ANTI-THEFT PROTECTION
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`FOR A RADIOTELEPHONY DEVICE
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`DECLARATION OF STEVEN HARRIS
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`MICROSOFT CORP.
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`EXHIBIT 1007
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`SAMSUNG EXHIBIT 1007
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`SAMSUNG EXHIBIT 1007
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`Patent 6,836,654
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`1, Steven Harris state and declare as follows:
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`I am over 18 years of age and am competent to make this Declaration.
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`I make this Declaration based on my own personal knowledge, based on my
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`knowledge and review of the business records and practices of the University of
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`I am currently employed as the Assistant Dean for Collections and
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`Knowledge Access Services at the University of Nevada-Reno. I have been
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`employed in this position since 2013.
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`I obtained a Master’s Degree in Library Science in 1991, and since
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`that time, I have been employed with academic libraries at various universities
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`across the United States.
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`Through my professional experience, I have become knowledgeable
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`about the Library’s normal business practices with respect to how the Library
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`receives, catalogs, indexes, shelves, and makes available to the public its books,
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`journals, periodicals, and other collections.
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`Attached as Exhibit A to this Declaration is a true and accurate copy
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`of the paper titled “Communication Device Inactivity Password Lock,” by Charles
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`P. Schultz, Motorola Technical Developments, V. 29, Nov. 1996. Exhibit A, pp.
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`14-15. The exhibit includes photographs of the Library’s black bound edition that
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`holds volumes 27—29 of Motorola Technical Developments. Exhibit A, pp. 7, 17.
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`DECLARATION OF STEVEN HARRIS
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`Patent 6,836,654
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`The Library has continuously maintained a cataloging system such
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`that any member of the public could search for the offerings at the Library.
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`Motorola Technical Developments was part of this system. The Library’s records
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`indicate that the Library regularly received, cataloged, and shelved Motorola
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`Technical Developments from 1983 (volume 3) to 2000 (volume 42).
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`In the 1996 timeframe, the Library’s cataloging and shelving
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`procedure for Motorola Technical Developments periodical included placing the
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`volume on the public shelf upon receipt from the publisher. It was further the
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`Library’s practice to send out for binding three volumes at a time. As noted above,
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`pages 7 and 19 of Exhibit A are photographs of the physical binder at the Library
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`that contains the Schultz paper identified in paragraph 6.
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`The Library has maintained and used in its ordinary course of
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`business an automated library catalog to track the Library’s collections since prior
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`to 1996. Attached as Exhibit B to this Declaration is a true and accurate screen shot
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`from the Library’s automated library catalog, showing that a record was created on
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`July 18, 1997 for volumes 27-29 of Motorola Technical Developments. The July
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`18, 1997 date represents the date when the Library received the physical bound
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`collection of volumes 27-29 from the binding company.
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`It was the Library’s practice to send out the loose three volumes for
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`binding after receiving the next one in the collection. That is, volumes 27—29 were
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`DECLARATION OF STEVEN HARRIS
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`Patent 6,836,654
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`sent out for binding after receiving volume 30 of Motorola Technical
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`Developments. Thus, volume 30 was received prior to July 18, 1997 (the date the
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`bound collection of volumes 27-29 were received back from the binding
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`computer).
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`Based on the Library’s practice at the time, the Library would re-
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`shelve the bound collection as soon as possible upon receipt of the bound
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`collection, and typically within one or two business days. Thus, the bound
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`collection that included Exhibit A would have been back on the public shelves
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`before July 31, 1997.
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`It was also the Library’s normal practice to date stamp each individual
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`volume upon receipt from the publisher. Here, the date stamp of volume 29 has
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`become illegible. However, based on all available information, the Library
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`received, shelved, and made Exhibit A available to the public, prior to July 18,
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`1997 because as noted above, the Library shelved volume 29 prior to receiving
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`volume 30.
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`DECLARATION OF STEVEN HARRIS
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`Patent 6,836,654
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`1, Steven Harris, do hereby declare and state, that all statements made herein
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`of my own knowledge are true and that all statements made on information and
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`belief are believed to be true; and further that these statements were made with the
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`knowledge that willful false statements and the like so made are punishable by fine
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`or imprisonment, or both, under Section 1001 of Title 18 of the United States
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`Code.
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`,1
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`Signature
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`DECLARATION OF STEVEN HARRIS
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`EXHIBIT A
`EXHIBIT A
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`312: munu¢|WfliflWflmfimjlmj®u5wu
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`® MOTOROLA
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`This is Volume 2 7 ofMotorola
`Technical Developments. It represents
`a significant collection oftechnical
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`innovations developed by scientists
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`and engineersfrom a number of
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`Motorolafacilities and derivedfrom
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`a wide variety ofscientific and
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`engineering disciplines.
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`These technical developments are
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`published to promote and advance the
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`technical arts throughout the world.
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`Subsequent volumes will be published
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`from time to time on an as-needed basis
`as determined by Motorola is stafl?
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`MOTOROLA Technical Developments is published periodically by Motorola. Inc. Schaumburg, Illinois 60196.
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`Inquiries should be directed to Patent Department. l303 East Algonquin Road. Schaumburg. Illinois 60196.
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`© Copyright Motorola. Inc. 1996. Printed in USA. The publication ofthese technical disclosures
`does not constitute a grant of any license under any patent.
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`Page 8 of 19
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`Page 8
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`Page 8 of 19
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`MOTOROLA
`
`This is Volume 29 ofMotorola
`
`72’chnical Developments. It represents
`a significant collection oftechnical
`innovations developed by scientists
`and engineersfrom a number of
`Motorolafacilities and derivedfrom
`a wide variety ofscientific and
`engineering disciplines.
`
`These technical developments are
`published to promote and advance the
`technical arts throughout the world.
`Subsequent volumes will bepublished .
`from time to time on an as—needed baszs
`as determined by Motorolais stafif
`
`Inqulries should be directed to Palen
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`
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`1y by
`MOTOROLA Technical Developments is published periodical
`S haumbutg,
`Road. c
`tDepartmenL 1303 East
`tent.
`© Copyright Motorola, Inc 1996. Prin
`.
`does not constitute a gram ofany hcense underany 138
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`Algonquin
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`|—
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`Page 9 0f19
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`® M
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`impel—A
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`TechnicalDevelopments
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`,WayRadio Signaling through Vibmting Molor in External Microphone ......................
`‘ H. Karl and Bob Schukoi
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`27 32
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`34—39
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`40
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`4142
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`53-55
`56-59
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`60-6
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`By Gordon T. Fadie
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`..
`Independenlkesel
`ByJoseph Cohen, David F21rhi and Shmuci Barman
`TlljnktoDDSLineConverleI-_,MH,,..,..............,....A.............A..............
`UsingSwitchingMOSFETSin Low—NoiseFrontEndAmplifiers .....................................
`ByElia'vZipper,Yehuda Edcr and Yair Shapiro
`VZHWE:ARapidPrototype'Ihmslator from Verilog-XLLanguagetoHardwareEmulation ..................
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`By Jefi'Freeman
`VoiceChannelSiteSwitching.....
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`BySteveVanSwol
`MessagEPreviewThroughSmtuslcons.................,......................,.....
`ByJelfreyChia
`WmPowerVohageRegulator._...,...o.....................................
`ByI-l. D. Bush
`OxygenaledMemllizafion System for Superior Adhesion to Polyetherimide (FED/GlassConlposim ------------
`By Reggie Barnes, John Holley. Kevin Arledge and Tom Swirbel
`Register-naught Level (RTL) Delay Modeling and a Method ‘0' m”9"“ WWW """"""""""""
`By Kayhan Kucukcakar
`MoldFdPiaSfiflfiflDegmeAntennaSupport.......,..._......................
`BY 8111 Phelps
`Parametric IIRFilter Design Method Based On Arbitrary Magnum Specification ........................
`BY Dan Hoory and John Lane
`
`Umnthgemng..,......._...,.._.........
`BYMellssa Freitag and Michael Ambrose
`gafllflgicforGlobalSynchroniznfion...................................
`flames McDonald and Nandini Srinivasan
`DieFaCEDecoul'
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`BYLeOHiggins
`p
`ys
`PingCaacrtorS terns
`EEK—matingLOW'POWI‘ ReceiverFront-EndProtectionCircuit ...........................
`Y SCOtt Kunesh
`30913112Concentration MeasurementTechniqueinTFSOIDefices .......................
`Y
`ankH. Shin, Dieter K. Schroder and Syd R. “filson
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`El3:11I1;llcedl)rfiinFul'milfionf0l’l.5TFlnsh.._.,.............
`my P‘ Shuma KO-Min Chang andwlumn J. Taylor
`ATethnique [‘3' Near Continuous MeasurementofAs [on ConcentrationinWater -----------
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`BY Eric S. Johnson
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`O Marcia, Inc. 1995
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`Technical Developments
`M
`M
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`Contents
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`Low Distortion, Wide Band Voltage Controlled Oscillator Modulation ..................................
`By Wayne Shepherd, Gus Leizerovich and Raul Salvr
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`Interactive TV Alpha Paging System '. ........................................................
`By Greg Coonley, Eugene Lopatukhrn and Frank Falcone
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`62-64
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`65
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`PCB Layout for Compensation of Coefficient of Thermal Expansion (CI'E) Differences .
`By Allen Hertz, David Tribbey and Charles Parr
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`66-68
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`Selective Call Blocking .......... _ ........................................................
`By James Hymel and Christian Herrick
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`Default Wide Area Trunking ..............................................................
`By Steve Norwood and Kurt Stefans
`
`Robust Methodology and Software for Algorithmic Testing of Memory Arrays ............................
`By Anup S. Tirumala, Clark G. Shepard and Daniel T. Marquette
`
`Concentric Cell Handover and Assignment Algorithms ............................................
`By G. Eastwick and J. Hopkinson
`
`High Frequency CMOS Buffer Amplifier .....................................................
`By Scott Humphreys
`
`Emergency Alert System for Automobiles .....................................................
`By Anthony Allen
`
`Hybrid Model Prototype Process ..........................................................
`By Chris Nelson, Robert Shjsler and E. Derek Smith
`
`Back Lit Hard Keys .....................................................................
`By Wille Kottke
`
`Overprinting Paste for Self-Aligning .........................................................
`By Alien Hertz, Hank Liebrnan and David Tribbey
`
`Side Ward Insertion Gripper for Automated Assembly in Horizontal Plane ..............................
`By Kiron B Gore
`
`Communication Device Inactivity Password Lock .................................................
`By Charles B Schultz
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`59-70
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`71 -72
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`73-74
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`75-75
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`77-79
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`80
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`81
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`82
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`83-86
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`87-90
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`91-92
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`Integmfed Stacked Gate Oxide and Interpoly Oxide ..............................................
`By Craig Cavms, Ko-Min Chang, Craig Swift, Hsing-Huang Tseng and Wayne Paulson
`Password Modification in a Distributed Computer System ..........................................
`By Chee Ma, Eustathios Vlachogiannis, Chun Hsu and Burhanuddin Hussein
`Multicolor Laminate Pressure Feeler Gauge ...................................................
`By Ronald Scott Lipton, Harry Fuerhaupter, Kenneth Storts and Brian Black
`Compact Extender Service Tray .................................... 100-101
`By A. V1ncent Clayton
`........................
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`93-94
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`95-96
`
`97-99
`
`o Motorola Inc. 1995
`
`['1'
`
`November1996
`
`Page 11
`\— —
`Page 11 of19
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`Predictive Key Loading During Late Entry Receptions .............................. 102-103
`By Curtis D. Lehman and Mark Gonsalves
`"""""""""
`‘
`'
`Absolute Heading Sensor Blunder Detection Usin
`g Relative Heading Sensor and Road Se
`-
`.
`.
`By Yilrn Zhao, Leslie G. Seymour and Elisha M. Kozikaro
`Vialess Multilayer Ball Grid Arra 1C Fee
`By Yutaka Doi
`y
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`kage ..................................................
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`ent ...............
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`gm
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`-107
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`Page 11
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`® MOTOROLA
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`Contents
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`The Washing Machine Turbo-Cull ..............................
`By Brian Wobb and Jim Perkins
`
`Automated Voice Message lie-broadcast in a '[i'unked Dispatch Radio System
`By Gerald Capehart
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`............................
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`109
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`Method of Providing Automatic Voice Message Delivery in a 'lhinked Dispatch Radi S
`By Gerald Capehart and Dutch Bailey
`0 Wm .................
`A Self-Aligning Electrostatic—Discharge-Protected Surface-Mount Right-An e Li
`tE .
`.
`_
`By Robert R. Kornowski and Daniel R. Schroeder
`gt
`gh mllflng Dlflde ..........
`OTAR Using One-Time Pads .................................................
`By Thomas B Ryan and Hans Christopher Sowa
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`............
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`11]
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`112-115
`116
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`OTARRekeyAuthorization. 117
`By Hans Christopher Sowa
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`Method to Derive a Unique Encryption Key for a Private Call without using a Key Exchange ..................
`By Hans Christopher Sowa
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`118-119
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`Method to Encrypt TG ID Algorithm ID, and Key ID of a Project 25 Transmission
`in an Encrypted Control Channel System ....................................................
`By Hans Christopher Sowa
`
`iDEN Subscriber Airtime Usage Minder ......................................................
`By Darin Minter and Tony Belkin
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`Audio Delay and Speech Collision Resolution ..................................................
`By Steven Charnota and Tony Belkin
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`120
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`121-122
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`123-124
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`Over Conveyor, Non-Intrusive, Lift and Locate .................................................
`By Scott Hovey and Carl Davis
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`125-126
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`Dynamic White and Black Level Control for Document Imaging .....................................
`By Paul Guidarini
`
`Setting a Modem’s Initial AT String in a Digital Radio Network ......................................
`By Ed Benyukhis, Barry Chan and Rod Averbuch
`TWO Stages Dialing in a Digital Radio Network ..................................................
`BY Ed Benyukhis, Barry Chan and Rod Averbuch
`
`Resources Allocation Algorithm for Intracell Calls ...............................................
`BY Boris Spektor, Naum Spektor and Anatoly Belkin
`
`Cooling SYStem for Communication Equipment Cabinets Using an
`-
`'
`'
`'
`-
`Active Ventilation System Designed to Prevent Moisture Condensation .......................
`BY James K. Gehrke and William Morrison
`'
`I
`Veice Activated Caller ID SyStein for Spectrum Efficient Two Way Radio ........................
`BY James K. Gehrke and James W. Dejmek
`Affiliation Database Restoration Using Remote Site Affiliation Time Stamps .............................
`By Briana Hoffman
`
`........
`
`........
`
`127-128
`
`129-130
`
`131-132
`
`133-134
`
`_
`135 136
`
`137
`
`138
`
`139-140
`
`141-142
`
`PagerserialNun-lber.."I"""-----n.............-.--..
`By Andrew Fuehl and Eduardo Gonzalez
`Proper Code DBlBCtOI' Utilizing Decoded Pitch ............................................
`By Esteban Yepez, III and Ferdie Brillantes
`User Hieerhy for SmartZone Manager Applications ...................................
`By Lana S. Duhinsky
`
`I'Vl-iiliv-IAII
`
`V
`
`I
`
`‘
`
`143
`
`
`
`
`‘
`I
`
`‘
`
`©Motorola. lnc. 1996
`
`l—
`
`Page 12 of 19
`
`‘ ' '
`
`l
`l”
`Page 12
`
`November 1996
`
`Page 12
`
`Page 12 of 19
`
`

`

`
`
`Technical Developments
`
` M
`
`® ”WROLA
`
`Echnical Developments
`M
`
`
`m I
`
`MPROVED SILICON CONTOURING PROCESS
`
`by John Gunnison and Mark Schoenberg
`
`Wet chemical etching ofunmasked silicon regions
`is performed in semiconductor discrete processing
`to form deep moat and mesa device terminations.
`The contour of resulting moat/mesa silicon sidewall
`is very steep and leads to inadequate (thin or miss-
`ing) photoglass at the top of the silicon step (see
`Figure 1). In addition, the sidewall’s large negative
`contour angle acts to limit the junction’s bulk break-
`down voltage. An improved moat/mesa silicon
`contouring process was achieved using overlapping
`silicon etch regions. The following four factors were
`found to control the moat/mesa contour:
`
`1) Mesa 2-to-Mesa l overlap spacing
`2) Mesa 1 and Mesa 2 etch depths
`3) Mesa 1 and Mesa 2 etch depth sequence
`4) Gimme ofmask sequence
`
`The Mesa 1 photo/etch process is followed by a
`second photo/etch process that utilizes an oversized
`Mesa 2 mask. By proper selection ofthe Mesa 1 and
`Mesa 2 etch depths, respectively the moat/mesa side-
`walls can be optimally recontoured (see Figure 2
`and 3). Recontoured sidewalls have a much smaller
`contour angle which oifers superior photoglass step
`coverage and improved electrical parameters.
`
`
`Photogiass is missing or very
`Photoglass
`/ thin due to steep moat/mesa
`
`sidewall
`
`Fig. 1
`
`Contents
`
`Over the Air Site Alias for Private Trunked Systems. ..............................................
`By Matthew Pope, Daniel J. McDonald and Rob Biggs
`
`1444 46
`
`APagervidthaLanguageTranslator
`By Cathal Timothy Breen
`
`Verification and Identification of Accessories for use with Radios .....................................
`By Robert B. End and Christopher W. Wright
`
`Sealed Connector Assembly for Low-Cost, High Thermal Conductivity Package ..........................
`By Peter Collier
`
`'
`'
`'
`-
`-
`tor Arrays .......................
`An lnex ensrve Passrve Method of Aligning Fibers to Laser or Photodetec
`By Chrigtopher K. Y Chun, PCRL, Barbara Foley, PCRL and James Knapp, APDAC
`Multiple Power Supply Beta-Squared ESD Circuit Protection .......................................
`By Bob Berger
`
`TFSOI with Improved Oxidation Resistance ...................................................
`By N. David Theodore, Marco Racanelli and Tom Wetteroth
`
`147
`
`148-149
`
`150-151
`
`152—155
`
`156-157
`
`158-159
`
`Method of Maintaining Queued Call Requests During Replacement of Control Channel Frequency .............
`By Alan Grau and Bob Clinkert
`
`160-164
`
`Wavy Omega Strap for Modular Interconnect Thermal Expansion Considerations .........................
`By Ken Bieda, Jerry McFarlin and Roy Stone
`
`Fuzzy Logic Resource Algorithm ...........................................................
`By Tau-Lien Chang, Derek Oxley and Kcthees Ketheesan
`
`Synchronization of Interzone Audio Resources Capability Information .................................
`By Vijay Agarwal and Brigitte Darcel
`
`165- 1 66
`
`167-169
`
`170
`
`Jitter-Based Adaptive Equalization ..........................................................
`By David Feldbaurner, Rimon Shookhtim and Mark Weaver
`
`171-172
`
`Apparatus for Protecting Wafer Placement Vacuum Chucks _________________________________________
`By Anthony Robert Weeks
`
`173-174
`
`Chameleon Assembly and Test Carrier .......................................................
`By Brian A. Webb and Bob Wentworth
`
`175
`
`Variable Data Representation for Higher-Speed
`Performance and Reduced—Power Consumption in Precharged Circuits ...............................
`By Merit Hong
`
`Backside Cooling Method for Power Devices ___________________________________________________
`By Leonard J. Borucki, Erik W. Egan and Thomas E. Zirkle
`
`176-178
`
`179— 180
`
`A Process for Efficient String Matching .......................................................
`By James H. Tolar
`
`181-183
`
`2 To 9 Mode Pin Decoder for FPGA’s ........................................................
`By Dandas Tang and Michael Shieh
`
`184—185
`
`Method for Etching Gold in an MRIE ........................................................
`By Doug Mitchell, Frank Carney and Harry Geyer
`Windowed Tape-Pair ....................................................................
`By Garland D. Cotney
`
`186
`
`137' 1 88
`
`
`
`e Motorola, inc. 1995
`
`[v
`
`November 1996
`
`0 Motorola, inc. 1996
`
`November 1996
`
`Page 13
`Page 13 of 19
`
`Page 13
`
`Page 13 of 19
`
`

`

`
`
`Technical Developments
`
`m C
`
`OMMUNICATION DEVICE INACTIVITY PASSWORD LOCK
`
`by Charles P. Schultz
`
`L
`
`When a communication device (radio, phone,
`etc), is misplaced or left unattended, someone other
`than the authorized user could use it, leaving the
`legitimate user responsible for the consequences,
`financial or otherwise. A password lock feature
`currrently allows users to “lock” their radios from
`use unless a correct password is entered, but this
`feature would not be activated when the device is
`accidentally misplaced, or the user hastily leaves his
`radio behind while attending to some urgent mat-
`ter.An improvement over the current radio lock fea-
`turcwould be for the device to become locked alter
`itis inactive for a preprogrammed period of time,
`similar to computer screen “locking“ programs.
`
`This invention allows the user to program an
`inactivity timer which would be reset each time a
`“physical input” occurs. If the timer expires, the com—
`munication device enters the “locked" mode and
`begins operation on a pre-programmed revert chan-
`nelwhich is defined by one of the personalities stored
`inthe device’s memory. [l'the device is operating on
`asystem that requires registration with a site, it will
`unregister prior to locking. The device optionally
`sends an over-the-air signal on the revert channel
`indicating the radio‘s ID and its “locked“ status. This
`could alert a dispatcher to use a feature such as
`Remote Monitor to aid in locating a lost or stolen
`device. While locked, the device will not route any
`audio to its speaker. The device will receive and
`reSlJOHd to over-the-air signaling,
`including an
`
`‘unlock” transmission from the base station which
`can be used to assist users who have forgotten their
`passwords. The device is subject to the same
`unlockmg procedure as the present radio password
`lock feature and, upon unlocking, it will register on
`the current site, if applicable. The device stores its
`locked state in non-volatile memory so it remains
`locked when power is cycled.
`
`For the purposes of this feature, a wide variety
`of actions are classified as “physical inputs" so legit-
`imate operation will not be interrupted. In addition
`to keypad, button and switch activation, receiving
`bus messages for memory reprogramming will reset
`the timer to insure that reprogramming will not be
`interrupted. A motion-sensing device and circuit
`could also be added to prevent the device from
`looking while it is being carried around in dispatch
`mode.
`
`Some of the devices operating modes will inhibit
`the activation of the inactivity timer. In order to
`facilitate factory testing or field servicing ofthe device,
`the inactivity timer will not activate when it is in
`“test mode” or during rekeying. The timer will also
`remain inactive during Over—The-Air Programming
`(OTAP) and Over-The—Air—Rekeying (OTAR). To pre-
`vent interruption of critical transmissions. locking
`will be inhibited during Emergency feature trans-
`missions, and during phone calls to emergency serv—
`ices such as 911.
`
`1996
`
`0W3, Inc. 1996
`
`91
`
`Page 14 of 19
`
`ftltwember 19%
`
`gage I!
`
`Page 14
`
`Page 14 of 19
`
`

`

`@ MOTOROLA
`Technical Developments
`
`
`® MOTOROLA
`m
`
`
` Technical Developments
`
`Device inactivity Passward Lock
`
`LOCKING SEQUENCE
`
`
`
`RADIO IDLE
`
`
`
`
`
`
`TIM
`EXPIRED?
`
`
`STORE LOCKED
`
`
`STATUS AND
`
`
`BLANK DISPLAY
`
`
`
`Charles I’. Schultz
`
`INTEGRATED STACKED GATE OXIDE AND INTERPOLY OXIDE
`
`by Craig Cavins, Ko-Min Chang, Craig Swift, Hsing-Huang Tseng and Wayne Paulson
`
`PURPOSE:
`
`For microcontrollers with embedded EEPROM,
`burn-in cost can be as high as $0.25 per part. The
`dominant burn-in failure mode has been the
`EEPROM select gate failures. A process for 1.2 pm
`design rules uses a 350A thermal oxide for the select
`gate. It is desirable to make this select gate dielec-
`tric more robust in order to reduce or eliminate the
`burn-in failures and thereby eliminate the need for
`a costly burn-in.
`
`The integration ofthe 1.2,um proaess is such that
`the select gate dielectric is formed concurrently with
`the interpoly dielectric for the EEPROM bit cell, and
`the logic gate dielectric is identical to the select gate
`dielectric. The enmeshment of these processes gives
`little latitude for significantly improving the quality
`of the select gate dielectric within the confines of a
`conventional approach which is to grow a thermal
`select gate oxide while simultaneously growing a
`thermal interpoly oxide.
`
`One prior art solution is to use an interpoly ONO
`stack with the top oxide layer being a CVD layer
`which can also form at least part of the peripheral
`transistor dielectric. The disadvantage here is that
`for some self-aligned NVM integrations and for most
`non-self-aligned NVM integrations, the use of an
`ONO interpoly dielectric requires an additional
`masking step to pattern the ONO.
`
`PROPOSAL:
`
`oxides are Well known.1 The process sequence starts
`w1th a pre—dlifusmn clean which cleans the single
`crystal Slltcon surface in the select gate (and logic
`gate)- area and cleans the surface of the first poly
`floating gate. An initial thin thermal oxide may or
`may not be grown as the first layer of the stacked
`oxrde. Then a CVD oxide is deposited. The ratio of
`CVD oxide thickness to final gate oxide thickness
`may be optimized, but a CVD oxide thickness which
`is approximately half of the final desired thickness
`is a good starting point (CVD oxide .~. 175A for 1.2
`pm process). Finally, an oxidizing anneal of the CVD
`layer is performed. This anneal may also be designed
`to grow an additional layer of thermal oxide under
`the CVD layer. The temperature and time of the
`anneal should be optimized to achieve the required
`quality and thickness requirements of the select gate
`and interpoly Oxides as well as to provide the neces-
`sary impetus for diffusion ofany previously introduced
`dopants. Figure 1 shows a cross-sectional represen'
`tation of the EEPROM cell with the conventional
`and proposed process.
`
`SUMMARY:
`
`Using a stacked gate oxide to simultaneously
`form the select gate and interpoly dielectric for a
`stand-alone or embedded NVM can provide excep-
`tional quality dielectrics which will lead to a burn-in
`failure rate reduction and 21 Significant cost savings
`when burn-in is eliminated. This process integra-
`tion is achieved without additional masking steps.
`
`The idea here is to use a stacked gate oxide for
`both the select gate dielectric (also forms the logic
`gate dielectric for the 1.2 pm process) and the
`interpoly dielectric. The advantages of stacked gate
`
`REFERENCES:
`[l] H -H. Tseng, RJ. Tobin, [EDM Technical Digest.
`P3211 1993‘
`
`REGISTERED ON
`A SYSTEM?
`
`SWITCH TO REVERT
`CHANNEL
`
`
`
`
`
`
`SEND LOCKED
`STATUS?
`
`Y
`
`SEND ID AND STATUS
`0N REVERT CHANNEL
`
`STAY LOCKED UNTIL
`UNLOCK SUCCESSFUL
`
`
`
`
`o Motor-01mm 1996
`
`92
`
`Novembef1996
`
`9 Motorola. tnc. I996
`
`1
`
`93
`
`'
`-
`511996
`Nuremb-
`
`
`Page 15
`
`
`
`Page 15 of 19
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`Page 15
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`Page 15 of 19
`
`

`

`Engineefinf} k")! (262)
`Unéversiiy o.‘ fu‘ux': ~13. Reno
`Reno, NV 813557-{2044
`
`
`
`Page 16 of 19
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`Page 17 of 19
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`
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`
`
`
`
`EXHIBIT B
`EXHIBIT B
`
`
`
`
`Page 18
`
`Page 18 of 19
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`

`

` h, Sierra - University of Nevada, Reno— Librarv- Steven Harris -- Associate Dean - HES-02254
`Eite Edit Eta-w go Ioois Reflorte Admin
`flelp
`
`motorula technical developments
`
`
`
`Motorola technical developments
`T1 .MBT
`
`DEBT-5236
`
`ud
`
`Summary
`
`Record
`
`i IQEUEQS-I
`
`Net checked out
`
`Item—Level Holds
`
`Last Updated: 05-21-2019 Created: 07-13-199? Revisions: 15
`”5502254
`
`
`ud I
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`Bib—Level Holds
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`COPY I?
`ICDDE1
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`ICC-DEE
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`INVENTORY DATE
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