`(12) Patent Application Publication (10) Pub. No.: US 2003/0151637 A1
`(43) Pub. Date:
`Aug. 14, 2003
`Nakamura et al.
`
`US 2003O151637A1
`
`(54) EJECTING METHOD AND EJECTING
`APPARATUS
`(75) Inventors: Shinichi Nakamura, Okaya-shi (JP);
`Yoshiaki Yamada, Nagano-ken (JP);
`Tsuyoshi Kitahara, Matsumoto-shi
`(JP); Satoru Katagami, Nagano-ken
`(JP)
`Correspondence Address:
`OLIFF & BERRIDGE, PLC
`P.O. BOX 19928
`ALEXANDRIA, VA 22320 (US)
`(73) Assignee: SEIKO EPSON CORPORATION,
`Tokyo (JP)
`(21) Appl. No.:
`10/301,917
`(22) Filed:
`Nov. 22, 2002
`(30)
`Foreign Application Priority Data
`
`Nov. 28, 2001 (JP)...................................... 2001-362739
`
`Publication Classification
`
`(51) Int. Cl." ...................................................... B41J 2/015
`(52) U.S. Cl. ................................................................ 347/20
`
`
`
`(57)
`
`ABSTRACT
`
`In an inkjet apparatus for manufacturing a color filter 1, ink
`jet heads 22 having a plurality of nozzle 27 are disposed in
`a linear manner. Filter element member is ejected to a
`motherboard 12 from a plurality of nozzles 27 four times so
`as to form the filter element 3 in a predetermined thickness.
`By doing this, it is possible to prevent difference in the
`thickness in a plurality of the filter elements 3 and to
`equalize light transparency in planar manner. Thus, in an
`ejecting apparatus, a color filter can be formed in more
`common way at low cost and more efficiently. Also, it is
`possible to provide an ejecting apparatus which can equalize
`factorS Such as electrooptical characteristics of the elec
`trooptical members, color displaying characteristics by the
`liquid crystal apparatuses, and illuminating characteristics
`by an EL Surface.
`
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`Patent Application Publication Aug. 14, 2003 Sheet 1 of 48
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`US 2003/0151637 A1
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`
`
`FIG.
`
`'S', 'S's 'S's 'SS'
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`US 2003/0151637 A1
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`
`
`FIG 2
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`FIG. 3
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`
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`'S', 'S', 'S'S' S
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`US 2003/0151637 A1
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`FIG. 4
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`
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`Patent Application Publication Aug. 14, 2003 Sheet 5 of 48
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`US 2003/0151637 A1
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`1.8inch
`
`
`
`
`
`
`
`On OBE
`
`EDO
`DD
`
`D D
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`Patent Application Publication Aug. 14, 2003 Sheet 6 of 48
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`US 2003/0151637 A1
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`FIG. 6A
`
`13(13B)
`FIG. 6B N
`
`
`
`13(13G) 13(3R)
`
`12(2)
`
`
`
`3(3B) 3 (3G) 3(3R)
`
`FIG. 6C
`
`3(3B) 3 (3G) 3 (3R) 4
`
`FIG. 6D
`
`
`
`6 NŽNf NSSN 6
`12(2)
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`Patent Application Publication Aug. 14, 2003 Sheet 7 of 48
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`US 2003/0151637 A1
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`FIG 7A
`STRIPE
`
`FIG 7B
`
`MOSAIC
`
`FIG. 7C
`DELTA
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`
`
`
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`
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`ZZZZZCaer·
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`US 2003/0151637 A1
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`Patent Application Publication Aug. 14, 2003 Sheet 9 of 48
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`FIG. 9
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`
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`FIG 10
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`
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`Patent Application Publication Aug. 14, 2003 Sheet 11 of 48
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`FIG.
`
`
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`Patent Application Publication Aug. 14, 2003 Sheet 12 of 48
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`US 2003/0151637 A1
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`FIG. 2A
`
`NK SUPPLYING
`APPARATUS
`
`37
`
`FIG. 12B
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`c
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`Af SS A1/A1A1772 YZZ A77
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`Patent Application Publication Aug. 14, 2003 Sheet 13 of 48 US 2003/0151637 A1
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`F.G. 13
`
`
`
`27
`
`1
`
`28-o- o o O p to o O p n o O o O p O o to u e to
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`Patent Application Publication Aug. 14, 2003. Sheet 14 of 48
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`US 2003/0151637 A1
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`FIG. 14
`
`73
`
`14
`
`69
`
`
`
`
`
`CPU
`CLEANING
`CALCULATION SECTION
`CAPPING
`CALCULATION SECTION
`WEIGHT MEASURING
`CALCULATION SECTON
`DOTTING
`CALCULATION SECTION
`DOTTING STARTING
`POSITION
`CALCULATION SECTION
`MAN SCANNING CONTROL
`CALCULATION SECTION
`SUB-SCANNING CONTROL
`CALCULATION SECTION
`NOZZLE NUECTION
`CONTROL
`CALCULATION SECTION
`
`MEMORY
`PROGRAM SOFTWARE
`R. G.B NK NJECTION
`POSITION DATA
`SUB-SCANNING
`AMOUNT DATA
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`71
`
`HEAD POST ON CONTROLLING
`APPARATUS Z MOTOR, a MOTOR
`(3 MOTOR. Y MOTOR
`
`BASE BOARD POSITION
`CONTROLLING APPARATUS
`(6) MOTOR)
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`MAN SCANNING
`DRWING PULSE MOTOR
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`SUB-SCANING
`DRIVING PULSE MOTOR
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`17
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`18
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`19
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`21
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`72
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`I/O
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`HEAD
`DRWING CIRCUIT
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`22
`NK UET
`HEAD
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`BASE BOARD
`SUPPLYING APPARATUS
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`INPUTTING APPARATUS
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`DISPLAY
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`ELECTRONIC BALANCE
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`CLEANING APPARATUS
`
`CAPPING APPARATUS
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`23
`
`67
`
`68
`
`78
`
`77
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`76
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`FIG. 15
`
`Sl
`
`
`
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`INTIAL SETTING
`
`El GRS' YES
`MEASUREMENT TIMING
`p
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`st
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`YES
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`S3
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`MOVE HEAD TO ELECTRONIC BALANCE
`
`S4
`MEASURE INK WEIGHT FOR ALL NOZZLES
`S
`5
`
`CONTROL INK NJECTION WOLTAGE
`
`MOVE HEAD TO CLEAN ING SECTION
`S8
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`CLEANING
`
`S7
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`NO
`suPPLY BASE BOARD (P0s TON LOCATION PIN) -S9
`POSITIONINGBASE BOARD (g ROTATION) S10
`DOTTING SiaRTING POSITION -S11
`IN MOTHER BOARD IS DETERMINED
`MOVE HEAD TODOTTING STARTING POSITION S12
`
`MAN SCANNING AND NK NJECTION
`
`S19
`MOVE TO NEXT
`ARRAY CF AREA
`S18
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`NO
`
`-S22
`
`
`
`
`
`END OF
`MAN SCANNING OF
`LINE 1 IN MOTHER
`BOARD 2
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`
`
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`
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`
`
`S15
`
`RECOVERY MOVEMENT
`SUB-SCANNING MOVEMENT
`S16
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`-
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`- - -
`
`
`
`1 END OF
`
`SUB-SCANNING FOR
`ARRAY CF1 N MOTHER
`BOARD 2
`
`
`
`YES
`
`END
`
`END OF
`ALL ARRAYS CF N
`MOTHER BOARD
`?
`YES
`BASE BOARD IS EECTED -S20
`NSTRUCTNS2 No
`END OF DOTTING
`YES
`CAPPING
`
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`US 2003/0151637 A1
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`FIG 16
`
`37B
`
`B NK SUPPLYING
`APPARAUS
`
`37G
`
`G NK SUPPLYING
`APPARATUS
`
`37R
`
`R NK SUPPLYNG
`APPARATUS
`
`
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`Patent Application Publication Aug. 14, 2003 Sheet 17 of 48
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`US 2003/0151637 A1
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`FIG. 1 7
`
`(FIRST BASE BOARD)
`
`FORM REFLECTION LAYER
`
`FORM FIRST ELECTRODE
`
`FORM ORIENTED FILM
`
`RUBBNG PROCESSING
`
`FORM SEALING MEMBER
`
`DFFUSE SPACER
`
`P1
`
`P2
`
`P3
`
`P4
`
`P5
`
`P6
`
`(SECOND BASE BOARD)
`
`COLOR FILTER
`
`FORM SECOND ELECTRODE
`
`FORM ORIENTED FILM
`
`RUBB ING PROCESSING
`
`P11
`
`P12
`
`P13
`
`P4
`
`P21
`
`P23
`
`P24
`
`ATTACHING BY BONDING AGENT
`P22
`
`FIRST BREAK
`
`POUR L. QUID CRYSTAL AND
`SEAL PORT FOR POURN
`
`CLEANING LIQUID CRYSTAL
`25
`
`SECOND BREAK
`
`MOUNTING
`
`P26
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`Patent Application Publication Aug. 14, 2003 Sheet 18 of 48
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`US 2003/0151637 A1
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`
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`N
`ce
`e
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`US 2003/0151637 A1
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`
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`Patent Application Publication Aug. 14, 2003 Sheet 20 of 48
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`US 2003/0151637 A1
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`FIG. 20
`
`FORM ACTIVE ELEMENT
`FORM PXEL ELECTRODE
`P52
`
`FORM BANK
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`P51
`
`PLASMA PROCESSING
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`FORM POSITIVE HOLE
`POURING LAYER
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`P53
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`P54
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`REMOVE SOLVENT
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`SODIFY
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`P55
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`P56
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`P57
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`NJECT R LLUMINATING MEMBER
`AND G LLUMINATING MEMBER
`P58
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`REMOVE SOLVENT
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`CONJUGATION
`
`P59
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`SUPPLY B LLUMINATING MEMBER
`
`FORM FACING ELECTRODE
`
`P60
`
`P61
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`Patent Application Publication Aug. 14, 2003 Sheet 21 of 48
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`US 2003/0151637 A1
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`FIG 2 A
`205 N
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`220
`Y
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`FIG 21B
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`Patent Application Publication Aug. 14, 2003 Sheet 22 of 48
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`US 2003/0151637 A1
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`w
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`Patent Application Publication Aug. 14, 2003 Sheet 23 of 48
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`US 2003/0151637 A1
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`Patent Application Publication Aug. 14, 2003 Sheet 24 of 48
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`US 2003/0151637 A1
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`Patent Application Publication Aug. 14, 2003 Sheet 27 of 48
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`US 2003/0151637 A1
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`FIG. 27
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`Patent Application Publication Aug. 14, 2003 Sheet 28 of 48
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`Patent Application Publication Aug. 14, 2003 Sheet 29 of 48
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`US 2003/0151637 A1
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`Patent Application Publication Aug. 14, 2003 Sheet 30 of 48
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`FIG. 30
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`Patent Application Publication Aug. 14, 2003 Sheet 31 of 48
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`Patent Application Publication Aug. 14, 2003 Sheet 32 of 48
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`FIG. 32
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`MAN SCANNING DIRECTION
`(X AXIS DIRECTION)
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`Patent Application Publication Aug. 14, 2003 Sheet 33 of 48
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`US 2003/0151637 A1
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`FIG. 33A
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`12
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`SAMSUNG EX. 1009 - 34/82
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`Patent Application Publication Aug. 14, 2003 Sheet 34 of 48
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`FIG. 34
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`(S1) 22 6a
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`SAMSUNG EX. 1009 - 35/82
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`Patent Application Publication Aug. 14, 2003 Sheet 35 of 48
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`US 2003/0151637 A1
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`FIG 35
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`504
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`Patent Application Publication Aug. 14, 2003 Sheet 36 of 48
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`US 2003/0151637 A1
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`FIG. 36
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`SAMSUNG EX. 1009 - 37/82
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`Patent Application Publication Aug. 14, 2003 Sheet 37 of 48
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`FIG. 37B
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`FIG. 37C
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`FIG. 37D
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`520b
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`SAMSUNG EX. 1009 - 38/82
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`Patent Application Publication Aug. 14, 2003 Sheet 38 of 48
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`FIG. 38A
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`SAMSUNG EX. 1009 - 39/82
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`Patent Application Publication Aug. 14, 2003 Sheet 39 of 48
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`540B
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`Patent Application Publication Aug. 14, 2003 Sheet 40 of 48
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`FIG. 40
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`Patent Application Publication Aug. 14, 2003 Sheet 41 of 48
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`FIG. 41A
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`FIG. 41B
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`570 513A 513B 570 53A 513B
`53
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`FIG. 43
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`580
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`FIG. 45
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`FIG. 46 J)
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`FIG. 48
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`490
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`FIG. 49
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`FIG 51A
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`l
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`90
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`180
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`NOZZLE NO.
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`FIG 51 B
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`306
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`OOOOOOOOOOOOOOO)
`OOOOOOOOOOOOOD
`OOOOOOOOOOOOO
`OOD OOOOOOOOOOC
`OOOOOOOOOODDD
`OOOOOOOOOOOOOOO
`OOOOOOOOOOOOOOO
`ODDDDDDDDDDD
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`P1
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`P2
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`P1
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`P2
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`P1
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`Aug. 14, 2003
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`E.JECTING METHOD AND EJECTING
`APPARATUS
`
`BACKGROUND OF THE INVENTION
`0001) 1. Field of the Invention
`0002 The present invention relates to anejecting method
`for ejecting a fluid liquid material and relates to an apparatus
`therefor. Also, the present invention relates to an electroop
`tical apparatuS Such as a liquid crystal apparatus, an elec
`troluminescent apparatus (hereinafter called an EL appara
`tus), an electrophoretic apparatus, and a plasma display
`panel apparatus (hereinafter called a PDP apparatus). Also,
`the present invention relates to a manufacturing method for
`an electron emission apparatus for manufacturing electroop
`tical apparatuses and relates to a manufacturing apparatus
`therefor. Also, the present invention relates to a color filter
`which is used in electrooptical apparatus, and to a manu
`facturing method for the color filter, and to a manufacturing
`apparatus therefor. Furthermore, the present invention
`relates to an electrooptical member, a Semiconductor appa
`ratus, an optical member, a device having a base member
`Such as a reagent inspection member, a manufacturing
`apparatus for the device having the base member, and the
`manufacturing apparatus therefor.
`0003 2. Description of Related Art
`0004 Recently, display apparatuses which are electroop
`tical apparatuses Such as liquid display apparatuses, and an
`EL apparatuses are commonly used for display Sections in
`electronic devices Such as mobile phones, a mobile com
`puters, etc. Also, recently, it is more common for full color
`display operation to be performed by the display appara
`tuses. For example, full color display operation by a liquid
`crystal apparatus is performed by passing a light which is
`modulated by a liquid crystal layer through a color filter. The
`color filter is formed by disposing color filter elements in a
`dot form, Such as those of R (red), G (green), and B (blue),
`on a Surface of a base board which is made from a glass
`member or a plastic member in a predetermined disposition
`method Such as Stripe-disposition, delta-disposition, and
`mosaic disposition.
`0005 Also, in full color display operation by an EL
`apparatus, EL luminescent layerS Such as those of R (red), G
`(green), and B (blue) in dot form are disposed on a Surface
`of the base board made of a glass member or a plastic
`member in a predetermined disposition Such as Stripe
`disposition, delta-disposition, and mosaic disposition. Con
`Sequently, these EL luminescent layers are Sandwiched by a
`pair of electrodes; thus a picture element pixel is formed. By
`controlling Voltage which is applied to these electrodes for
`each picture element pixel, these picture element pixels are
`illuminated in an intended color; thus, full color display
`operation is realized.
`0006 Conventionally, it has been known that photoli
`thography methods may be used for performing a patterning
`operation on color filter elements Such as those of R (red),
`G (green), and B (blue) of the color filter and a patterning
`operation for color picture element pixels. Such as those of R
`(red), G (green), and B (blue) of the EL apparatus. However,
`there were problems in that manufacturing processes of the
`photolithography method were complicated and large quan
`tities of coloring materials and photoresist were consumed;
`thus, manufacturing cost increased.
`
`0007. In order to solve this problem, a method was
`proposed for forming a filament which is disposed in a dot
`array form and an EL luminescent layer by ejecting a filter
`element member and EL luminescent member in a dot form
`by an inkjet method.
`0008 Here, a method for forming a filament and an EL
`luminescent layer in dot form by an ink jet method is
`explained. Here, a plurality of filter elements 303 which are
`disposed in dot form as shown in FIG.50B are formed in an
`inner region of a plurality of panel areas 302 which are
`disposed on a Surface of a large base board which is made
`from a glass member or a plastic member Such as a moth
`erboard 301 as shown in FIG.50A by inkjet method. In this
`case, as shown in FIG. 50C, for example, a plurality of main
`scanning operations (twice in FIG. 50C) are performed on
`one piece of panel area 302 by an inkjet head 306 as a liquid
`drop ejecting head having a nozzle array 305 containing a
`plurality of nozzles 304 in arrays as shown by arrows A1 and
`A2 in FIG. 50B. During the main scanning operation, by
`ejecting a filter material Such as an ink from a plurality of
`nozzles selectively, a filter element 303 is formed in an
`intended position.
`0009. The filter element 303 is formed by disposing
`colorS Such as those of R, G, and B in a preferred disposition
`Such as Stripe-disposition, delta-disposition, and mosaic
`disposition as explained above. By doing this, in an ink
`ejecting process by an inkjet head 306 as shown in FIG.
`50B, the inkjet head 306 for ejecting colors such as those
`of R, G, and B are provided for three colors in advance.
`Consequently, by using these inkjet heads 306 one by one,
`three-color disposition of R, G, and B is performed on one
`motherboard 301.
`0010. However, generally, the amount of ink which is
`ejected by a plurality of nozzles 304 contained in a nozzle
`array 305 of the inkjet head 306 varies among a plurality of
`nozzles. This is caused by ink ejection characteristics shown
`in FIG. 51A in which ink ejection amount is maximum in
`a position which corresponds to two ends of the nozzle array
`305, and ink ejection amount is less in a middle position of
`the two ends of the nozzle array 305. Ink ejection amount is
`least in a positions between the two ends of the nozzle array
`305 and the middle position thereof
`0011. Therefore, as shown in FIG. 50B, when a filter
`element 303 is formed by an inkjet head 306, dense streaks
`are formed on positions P1 and/or P2 corresponding to both
`ends of the inkjet head 306 as shown in FIB. 51B. Thus,
`there is a problem in that planar translucency of the color
`filter becomes non-uniform.
`0012. On the other hand, a plurality of panel areas 302 is
`formed on the motherboard 301, and it is proposed that a
`filter element 303 can be formed efficiently when the inkjet
`head is disposed in an overall area in width dimension of the
`motherboard 301 crossing a main Scanning direction of the
`inkjet head by using a longitudinal inkjet head. However,
`when a different size of motherboard 301 is used according
`to the panel area 302, an inkjet head having a different size
`is necessary for each of the cases; thus, the cost increases.
`
`SUMMARY OF THE INVENTION
`0013 The present invention was made in consideration of
`the above-mentioned problems. An object of the present
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`invention is to provide an ejecting method for forming filter
`elements efficiently with low manufacturing cost in a more
`common way by using a liquid drop ejecting head Such as an
`inkjet, and an apparatus therefor, an electrooptical apparatus
`and manufacturing method therefor and a manufacturing
`apparatus therefor, a color filter and manufacturing method
`therefor and a manufacturing apparatus therefor, a device
`having a base member, and controlling method therefor and
`a manufacturing apparatus therefor.
`0.014
`(1) The ejecting apparatus is characterized in com
`prising:
`0015 a liquid drop ejecting head having a plurality
`of nozzles aligned for ejecting a fluid liquid material
`onto a Substance to receive the ejection;
`0016 a holding member for holding a surface on
`which a plurality of the nozzles of the liquid drop
`ejecting head for ejecting the liquid material are
`disposed in line So as to face a Surface of the
`Substance to receive the ejection having a Space
`between the Surface which has the nozzles and the
`Surface of the Substance to receive the ejection; and
`0017 a moving member which moves at least one of
`the holding member or the Substance to receive the
`ejection relatively Such that the liquid drop ejecting
`head is along the Surface of the Substance to receive
`the ejection, wherein
`0018 array of the nozzles which are disposed on
`each of the liquid drop ejecting heads are disposed
`in a direction which crosses the Substance to
`receive the ejection diagonally to a direction of
`relative movement to the Substance to receive the
`ejection.
`0019. In the present invention, a liquid drop ejecting head
`having a plurality of nozzles aligned for ejecting a fluid
`liquid material is moved relatively along a Surface of a
`Substance to receive the ejection Such that a Surface on
`which these liquid drop ejecting heads are disposed face a
`Surface of the Substance to receive the ejection having a
`Space therebetween. The same liquid material is ejected to
`the Substance to receive the ejection from each nozzle of a
`plurality of the liquid drop ejecting heads. The nozzle array
`which is disposed on each of the liquid drop ejecting head
`is disposed in a first direction which crosses a direction
`diagonally in which the nozzle array is moved relatively to
`the Substance to receive the ejection By doing this, the same
`liquid material is ejected from nozzles of a plurality of the
`liquid drop ejecting head which are disposed in line. There
`fore, it is possible to eject a liquid material in a wide range
`by using an ordinary and common Specification liquid drop
`ejecting head. Therefore, it is possible to reduce costs by
`using conventional common Specification liquid drop eject
`ing heads instead of a special design liquid drop ejecting
`head. In addition, by adjusting the number of the liquid drop
`ejecting heads which are Supposed to be disposed in line, it
`is possible to Set the liquid drop ejecting head according to
`the positions to which the liquid material is ejected. Thus,
`the liquid drop ejecting head can be used more commonly.
`0020. Also, in the present invention, it is preferable that
`a plurality of the liquid drop ejecting heads be disposed in
`a Second direction which crosses the Substance to receive the
`ejection diagonally to a direction of relative movement to
`
`the Substance to receive the ejection. By doing this, a
`plurality of the liquid drop ejecting heads are disposed So as
`to be diagonal to a main Scanning direction in which the
`liquid drop ejecting head is moved along a Surface of the
`Substance to receive the ejection. For example, when nozzles
`are disposed on a line, a pitch Such as an interval at which
`the liquid material is ejected becomes narrower than a pitch
`between the nozzles. For example, the Substance to receive
`the ejection to which a liquid material is ejected is used for
`a display apparatus, and the displaying condition becomes
`finer. Furthermore, an interference caused between neigh
`boring liquid drop ejecting heads can be prevented; thus, it
`is possible to make the apparatus Smaller.
`0021. Also, in the present invention, it is preferable that
`the shape of a plurality of the liquid drop ejecting heads be
`Substantially the same as each other. By doing this, it is
`possible to make the liquid drop ejecting heads correspond
`to the area to which the liquid material is ejected. Thus, the
`Structure of the apparatus becomes Simpler, and the produc
`tivity increases, and the cost can be reduced.
`0022. In the present invention, it is preferable that each
`one of a plurality of the liquid drop ejecting heads have the
`Same number of nozzles. By doing this, each of a plurality
`of the liquid drop ejecting heads has the same number of
`nozzles, ant it is therefore easy to delineate a predetermined
`pattern Such as a Stripe, a mosaic, and delta for a disposition
`pattern for a plurality of liquid drop ejecting heads.
`0023. In the present invention, it is preferred that each
`one of a plurality of the liquid drop ejecting heads have
`nozzles which are located at the Same corresponding posi
`tion. By doing this, it is preferable that a position in which
`nozzles of a plurality of the liquid drop ejecting head are
`formed in the same positions among the liquid drop ejecting
`heads. By doing this, it is easy to delineate a predetermined
`pattern Such as a Stripe, a mosaic, and delta for a disposition
`pattern for a plurality of liquid drop ejecting heads.
`0024.
`Furthermore, it is preferable that each of a plurality
`of the liquid drop ejecting heads have the nozzles aligned in
`an array in nearly and equal interval. By doing this, the
`nozzles of a plurality of the liquid drop ejecting head are
`aligned in an array in nearly equal interval. Therefore, it is
`easy to delineate a predetermined pattern Such as a Stripe, a
`mosaic, and a delta for a disposition pattern for a plurality
`of liquid drop ejecting heads.
`0025. Also, it is preferable that the liquid drop ejecting
`heads be formed in nearly a rectangular shape along a
`direction of the nozzles which are disposed. By doing this,
`the liquid drop ejecting head is formed in nearly a rectan
`gular shape along a direction of the nozzles which are
`disposed; therefore, it is possible to realize a Smaller liquid
`drop ejecting head, and reduce interference of the liquid
`drop ejecting head by other Structures. Therefore, it is
`possible to realize a Smaller liquid drop ejecting head more
`easily.
`0026. Also, in the present invention, it is preferable that
`a plurality of the liquid drop ejecting heads be disposed in
`the Second direction which diagonally crosses a direction in
`which the Substance to receive the ejection moves relatively
`Such that the nozzles are disposed nearly parallel with each
`other. By doing this, a plurality of the liquid drop ejecting
`heads are moved relatively along a Surface of the Substance
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`to receive the ejection So as to move along a direction in
`which the liquid drop ejecting head moves relatively along
`a Surface of the Substance to receive the ejection crosses
`diagonally a direction in which the nozzles are disposed
`nearly linearly. Therefore, the nozzles are disposed diago
`nally to a main Scanning direction in which a plurality of the
`liquid drop ejecting heads moves along a Surface of the
`Substance to receive the ejection. Thus, a pitch with Such an
`interval at which the liquid material is ejected becomes
`narrower than a pitch between the nozzles. For example, the
`Substance to receive the ejection to which the liquid material
`is ejected is used for a display apparatus, and displaying
`condition becomes finer. Furthermore, an interference
`caused between neighboring liquid drop ejecting heads can
`be prevented; thus, it is possible to minimize the size of the
`apparatuS.
`0027. Also, in the present invention, it is preferable that
`the array of the nozzles of a plurality of the liquid drop
`ejecting head be disposed in a direction which diagonally
`crosses a direction in which the nozzles move relatively to
`the Substance to receive the ejection, and the array of the
`nozzles of a plurality of the liquid drop ejecting head are
`disposed So as to be parallel with each other. By doing this,
`a plurality of the liquid drop ejecting heads and the nozzles
`are disposed in a direction which croSSes diagonally a
`direction in which the liquid drop ejecting heads are moved
`relatively along a Surface of the Substance to receive the
`ejection. Thus, a pitch at Such an interval at which the liquid
`material is ejected becomes narrower than a pitch between
`the nozzles. For example, the Substance to receive the
`ejection to which the liquid material is ejected is used for a
`display apparatus, and displaying condition becomes finer.
`Furthermore, an interference caused between neighboring
`liquid drop ejecting heads can be prevented; thus, it is
`possible to minimize the size of the apparatus. Also, a
`plurality of ejection areas to which the liquid material is
`ejected are formed easily in one region; therefore, liquid
`material ejecting efficiency is improved. Also, it is possible
`to eject the liquid material to one region in a multiple
`manner from the liquid drop ejecting head; thus, ejection
`amount can be equalized in the ejection area easily.
`0028. Also, in the present invention, it is preferable that
`a plurality of the liquid drop ejecting heads neighboring each
`other disposed in a direction of a relative movement to the
`Substance to receive the ejection So that portions of the liquid
`drop ejecting heads overlaps each other. By doing this, the
`neighboring liquid drop ejecting head are disposed Such that
`a portion of the liquid drop ejecting heads overlap each other
`to a main Scanning direction in which the liquid drop
`ejecting heads are moved along a Surface of the Substance to
`receive the ejection. Therefore, interference caused between
`neighboring liquid drop ejecting heads can be reliably
`prevented; thus, it is possible to minimize the Size of the
`apparatuS.
`0029. Also, in the present invention, it is preferable that
`a plurality of the liquid drop ejecting heads be disposed in
`a Staggered manner in a plurality of arrayS. By doing this, the
`liquid drop ejecting heads neighboring each other do not
`interfere with each other, thus, there is no area to which the
`liquid material is not ejected between the liquid drop eject
`ing heads. Thus, it is possible to obtain desirable ejection of
`the liquid material in a continuous manner.
`
`0030 Also, in the present invention, it is preferable that
`the ejecting apparatus have an ejection detecting device for
`detecting the liquid material which is ejected from the
`nozzle. By doing this, by detecting the ejection of the liquid
`material from the nozzle by the ejection detecting device, it
`is possible to prevent uneven ejection of the liquid material
`So as to obtain desirable ejection of the liquid material
`stably.
`0031. Also, in the present invention, it is preferable that
`the ejection detecting device detect the ejection of the liquid
`material in at least one of the Steps including a Step for
`ejecting the liquid material from the nozzle to the Substance
`to receive the ejection and a previous Step, and a consecutive
`Step. By doing this, by detecting the ejection of the liquid
`material in at least one of the Steps including a Step for
`ejecting the liquid material from the nozzle to the Substance
`to receive the ejection and a previous Step, and a consecutive
`Step, it is possible to detect the ejection condition of the
`liquid material in at least one of the Steps including a step for
`ejecting the liquid material from the nozzle to the Substance
`to receive the ejection and a previous Step, and a consecutive
`Step. Therefore, it is possible to detect the ejection condition
`of the liquid material just before the ejection or immediately
`after the ejection. Therefore, it is possible to acknowledge
`the ejection