Piezoelectric
`Devices -
`from Bulk
`to Thin-Film 2019
`
`From Technologies to Markets
`
`Sample
`
`© 2019
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`SAMSUNG V. NEODRON
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`Exhibit 2013
`Page 1
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`

`

`ABOUT THE AUTHOR
`Biography & contact
`
`Jérôme Mouly
`
`Jerôme Mouly serves as a Senior Technology & Market Analyst & Business Developer specialized in microtechnologies for inkjet & bioMEMS sensors.
`Since 2000, he has participated in more than 100 marketing and technological analyses for industrial groups, start-ups and institutes. Previously, Jerome
`was involved in a support action for value creation of smart miniaturized systems research projects at Yole Finance Innovation, part of Yole
`Développement. Jérôme holds a Master of Physics from the University of Lyon (France).
`
`Email: mouly@yole.fr
`
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
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`TABLE OF CONTENTS
`
`Introduction and glossary
`
`Executive summary
`
`Context
`o Introduction to piezoelectricity
`o Piezoelectric materials
`o Application markets for sensors, actuators, and transducers
`
`p3
`
`p15
`
`p41
`
`o Inkjet printheads
`o Micropumps
`o Inertial sensors
`o RF filters
`o PMUT
`o Linear motors, autofocus
`o Other/emerging devices
`o Transition analysis
`o Product roadmap
`
`p61
`Market forecasts
`o Piezoelectric device market 2018 - 2024 for sensors, actuators, and transducers,
`by type (bulk vs. thin-film)
`o Piezoelectric device market 2018 - 2024 for sensors, actuators, and transducers,
`by application
`o Penetration of thin-film vs. bulk-based devices
`o Market dynamics, per application
`
`Market share and supply chain
`o Bulk device players
`o Thin-film device players
`o Thin-film device players - market share
`o Focus on foundry players
`
`Technology trends for thin-film-based technologies
`o Thin-film materials
`o Equipment and process flow
`o Deposition process analysis and comparison
`
`Market trends
`o Speakers
`o Microphones
`
`p72
`
`Conclusions
`
` p162
`
` p171
`
` 192
`
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
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`

`

`COMPANIES CITED IN THIS REPORT
`
`AIST, aixACCT, Akoustis, American Elements, Applied Materials, audiopixels, Balluff, Baumer, Bosch,
`Broadcom, Brother, BSAC, CEA Léti, Ceramtec, Chirp Microsystems, CTS, Danchip, Debiotech, EPFL,
`EPSON, FESTO, Fraunhofer IPMS, Fujifilm Dimatix, Fujiceramics, Georgia Tech Institute,
`GLOBALFOUNDRIES, Hereaus, Hionix, Honeywell, Huricane, IMEC, Kistler, Konica Minolta, Meggitt,
`Micromo, Mitsubishi Chemical, MSE Supplies, Murata, NGK-NTK Technical Ceramics, Obducat, Oce-
`Canon, Oxford Instruments, Panasonic, Penn State University, Pepperl+Fuchs, Philips Innovation
`Services, Physik Instrumente, Picosun, Piezo motor, Piezosystems Jena, poLight, Praxair, Qorvo, Ricoh,
`Qualcomm, Rohm Semiconductor, Schneider Electric, Screen, Silex Microsystems, Silicon Sensing
`Systems, Sintef, SolMateS, SPTS-an Orbotech company, STMicroelectronics, SUSS MicroTec, TE
`Connectivity, TDK EPCOS, TDK Invensense, TTP Ventus, Turck, Tyndall, USound, ULVAC, Umicore,
`University of Twente, Vermon, Vesper, VTT, Xaar, X-FAB, Youtec
`
`And many more…
`
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
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`OBJECTIVES OF THE REPORT
`
`• We have decided to perform a technology and market report on piezoelectric devices to analyze transition
`from bulk to thin film for the following reasons:
`• What kind of applications are concerned by bulk to thin-film transition (Past and future)
`• What kind of applications remain Bulk
`• What kind of applications are created thanks to thin film piezo deposition
`• Time of development (analysis of current products like microspeakers, autofocus, Inkjet)
`
`• The objectives of the reports are :
`• Provide an overview of piezo devices and related applications:
`• Description of the key piezo applications for sensors, actuators, and transducers
`
`• Analysis of the transition from bulk to thin-film piezo devices
`• Analyze deposition trends:
`• Global manufacturing techniques and material trends
`• Focus on deposition techniques used for thin-film piezo devices
`• Describe each player’s product roadmap and expected year of market entry
`•
`Supply chain analysis
`• Foundry players and technology choice
`• Furnish market data and forecasts for piezo-based sensors, actuators, and transducers
`• Piezo device production forecast 2018 - 2024 in units, value, and wafers, by application
`• Market share for main thin-film device manufacturers
`
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
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`SCOPE OF THE REPORT
`
`Properties covered
`
`Piezoelectric effect
`
`Pyroelectric effect
`
`Ferroelectric properties
`
`Material types
`
`Bulk piezoelectric devices
`
`Thin-film piezoelectric
`devices
`
`Yours needs are out
`of the report’ scope?
`
`Contact us for a custom:
`Jérôme Azémar, Technical
`Project Development Director
`azemar@yole.fr
`+33 6 27 68 69 33
`
`Legend:
`
`Covered
`
`Not covered
`
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
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`METHODOLOGIES & DEFINITIONS
`
`Yole’s market forecast model is based on the matching of several sources:
`
`Preexisting
`information
`
`Market
`Volume (in Munits)
`ASP (in $)
`Revenue (in $M)
`
`Information
`Aggregation
`
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
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`

`WHY THIS REPORT?
`
`• Piezoelectricity has been exploited during the world war for military applications (Sonar), using its
`ultrasound capabilities.
`
`• More than ultrasound, piezoelectricity has a double effect of sensing and actuating, representing a high
`number of possible applications from industrial to consumer, through automotive and medical.
`
`• Most of the piezoelectric devices are bulky and expensive devices, used for specific high end applications.
`Moreover, their manufacturing process is not serial, avoiding possibility to reach high volume markets and
`possible cost reduction.
`
`• New development on piezoelectric materials and formulation allows thin film deposition of piezoelectric
`materials. It gives opportunity to integrate thin film deposition in a MEMS / CMOS process.
`
`• This report is presenting how which kind of devices are turning to thin film technologies, what are the
`challenges linked to the changes, what are the business opportunities.
`
`• It describes the market and technology trends, and is giving insights on players and related
`interconnections, collaboration and competition.
`
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
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`

`

`WHAT IS PIEZOELECTRICITY?
`
`Definition
`
`• Piezoelectricity is the ability of some materials to generate an electric charge in response to
`applied mechanical stress.
`
`• A piezoelectric effect is reversible.
`
`Pressure exerted
`
`Piezoelectricity
`and its
`reversible effect
`
`Piezo material
`
`Piezo material
`
`Voltage measured
`
`Voltage applied
`
`Actuation
`
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
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`PIEZOELECTRIC CERAMIC
`
`Format and applications
`
`Sensor elements
`
`Actuator elements
`
`Medical doppler
`
`Distance detection
`
`Park assist
`
`Flow level detection
`
`Autofocus
`
`Micro-nano-positioning
`
`Devices
`
`Speakers
`
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
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`

`

`PIEZOELECTRIC BULK PLAYERS
`
`Business models
`
`•
`
`In the bulk piezoelectric industry, the piezo material is a key part of the final system and the business models
`are numerous. From monocrystal to piezo ceramics, and from piezo element to final systems, the players are
`finding where is their key added value from externalizing or manufacturing internally.
`
`Monocrystal makers
`
`Piezoelectric ceramic makers
`
`Example of Kislter: the company
`has developed its PiezoStar
`Crystals using a Czochralsky
`process. The company is
`controlling all the processes
`from the quartz production to
`the sensor device.
`
`Raw
`materials
`
`• From powders to calcination,
`mixing and ball milling
`
`No specific interest at
`that stage
`
`"Green"
`parts
`
`• Shaped and
`pressed
`
`Interest of some players
`at this stage (ex:
`Automotive industry)
`
`Sintered
`ceramics
`
`•The piezo ceramic
`is sintered at
`1250°C to 1350°C
`
`Interest of some
`players at this stage
`performing electrode
`deposition
`
`Poling
`process
`
`•Final sensor
`/ actuator
`
`Most of the
`interest
`
`Courtesy of Kistler
`
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
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`

`

`piezoMEMS
`
`Fingerprint
`Ultra sonic
`
`piezoMEMS
`
`µspeakers
`
`Qualcomm fingerprint sensor
`
`Audio Pixels MEMS-based speaker
`
`THE DIFFERENT MEMS SENSORS, AND ACTUATORS, AND WHERE THEY CAN COMBINE
`
`SENSORS
`
`ACTUATORS
`
`Movement
`
`Environment
`
`Optical sensors
`
`Optical MEMS
`
`Microfluidics
`
`RF
`
`Micro structures
`
`components
`
`Watches
`
`Probes
`
`Micro tips
`
`Resonator
`
`Filter
`
`Switch
`
`Biochips
`
`Drug delivery
`
`piezoMEMS
`Ink jet heads
`
`Optical benches
`
`piezoMEMS
`
`Auto-Focus
`
`Micromirrors
`
`3D sensing
`
`Vision
`
`Micro bolometers
`
`ALS, RGB
`
`Hyperspectral
`
`PIR & thermopiles
`
`Fingerprint
`
`FTIR
`
`Temperature
`
`Particles
`
`Humidity
`
`Gas
`
`piezoMEMS
`Sound and ultra
`
`sonic
`
`Pressure
`
`Magnetometers
`
`Gyroscopes
`
`Accelerometers
`
`IMUs (6 to 9 DOF)
`
`“closed” package
`6 to 9+ DOF
`combos
`
`“open” package
`environmental combos
`
`Optical combos
`
`Possible
`integration with
`opto combos
`
`Debiotech micro
`pump
`
`Avago-Broadcom
`FBAR Filter
`
`Spiromax Patek
`Philippe
`
`FLIR Lepton One
`
`Apple dot projector
`
`Texas Instruments DLP
`
`SiTime oscillator
`
`poLight AF
`
`Possible integration with environment
`combos
`
`InvenSense
`MPU9250
`
`ST pressure sensor
`
`Bosch BME680
`
`Infineon microphone
`
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
`
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`

`

`PIEZOELECTRIC APPLICATIONS : COEXISTENCE OF BOTH TECHNOLOGIES, BULK &
`THIN-FILM
`
`Bulk piezoelectric technologies
`
`Thin-Film piezoelectric technologies
`
`Shock sensors
`
`Acoustic
`emission sensors
`
`Force & strain
`sensors
`
`Flow level
`sensors
`
`Braille cells
`
`Scalpels
`
`Sonars
`
`Touch panels
`
`Linear motor
`positioning
`
`Dental scalers
`
`Flow meters
`
`Distance
`detection
`
`Microphones
`
`Accelerometers
`
`RF Filters
`
`Inkjet printheads
`
`Microspeakers
`
`Ultrasound
`transducers
`
`Gyroscopes
`
`MEMS
`Micromirrors
`
`Micropumps
`
`Weldings
`
`Legend:
`
`Sensors
`
`Actuators
`
`Transducers
`
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
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`

`

`PIEZOELECTRIC BASED DEVICES MARKET : THIN FILM & BULK
`
`$60 000
`
`$50 000
`
`$40 000
`
`$30 000
`
`$M
`
`$20 000
`
`$10 000
`
`$0
`
`2018
`
`2019
`
`2020
`
`2021
`
`2022
`
`2023
`
`2024
`
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
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`

`

`PIEZOELECTRIC BASED DEVICE MARKET
`2018-2024 Thin film devices forecast
`
`Total market
`
`XXXXXXXXX
`
`Optical actuators (AF, Micromirrors, AO,…)
`
`$XXM
`
`$XXM
`
`$6.2B
`CAGR 12.6%
`
`A 12.6%
`CAGR is
`expected in
`the next 6
`years with
`BAW Filters
`as the main
`driver.
`
`XXXXXXXXX
`
`XXXXXXXXX
`
`XXXXXXXXX
`
`Microphones
`
`XXXXXXXXX
`
`XXXXXXXXX
`
`$XXM
`
`$2.6B
`
`$XXM
`
`$XXB
`
`$XXM
`
`2018
`
`$XXM $XXM
`
`$XXM
`CAGR XX%
`
`$XXM
`CAGR XX%
`
`$XXM
`CAGR XX%
`
`$XXB
`CAGR XX%
`
`$XXM
`CAGR XX%
`
`$XXM
`CAGR XX%
`
`2024e
`
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
`
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`

`

`SPEAKERS AND MICROSPEAKERS
`
`MEMS piezo-based speakers – Technology highlights
`
`• USound technology is based on Piezoelectric actuation. A PZT
`thin film is deposited on silicon substrates. The PZT material is
`extending or schrinking when a current is applied.
`
`• Based on this piezo effect, multiple cantilevers are produced
`and create a translation of a piston up and down. Compare to a
`coil based speaker, cantilevers replace the magnet.
`
`• Mounting a membrane on the top of the piston, a sound could
`be generated by the displacement of air created.
`
`Working principle; Source: USound
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
`
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`

`

`SPEAKERS AND MICROSPEAKERS
`
`MEMS speakers size and performance
`
`Performance and Value
`
`Coil based speakers
`
`Balanced armature
`speakers
`
`Speakers
`
`Minispeakers
`
`Speaker core
`
`MEMS speakers
`
`Dynamic speakers
`
`• Audio output for phones
`•
`Integrated by phone manufacturers
`
`Final system footprint (diameter)
`
`5mm
`
`< 1cm
`
`1cm – 5 cm
`
`10cm – 20cm
`
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
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`

`

`INKJET PRINTHEADS
`
`Applications
`
`100
`
`Functional printing
`
`Ceramic tiles
`
`Bulk PZT domain
`
`Thin film PZT printheads
`for high resolution
`
`10
`
`Document /
`mail printing
`
`Textile
`
`Labels
`
`Consumer &
`office printing
`
`Graphics - posters
`
`Thin film PZT printheads
`for high volume
`
`300
`
`600
`
`Photo
`
`1200
`
`Resolution (dpi)
`
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
`
`18
`
`Drop volumes (pL)
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`

`

`INKJET PRINTHEADS
`
`Still resistance in the conventional printhead
`
`• Kyocera is leading the high-end printhead market for industrial applications.
`
`• The company has a long history with piezoelectric ceramics and is not investigating into thin film
`PZT deposition. The company is strengthening efforts in bulk PZT capability with high accuracy
`positioning of actuators over nozzles and a proprietary process to form PZT actuators and
`electrodes.They are producing ceramic based actuator sheets.
`
`• The company is able to produce a 4.2" printhead with 5300 nozzles and reaching 1200 dpi. Thickness
`of the ceramic sheet is 0.5mm
`
`Kyocera actuator sheet – state of the art.
`Inegrated in 4.2" printhead; Credits: Kyocera
`
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
`
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`

`

`INERTIAL SENSORS
`
`Thin film based gyroscope
`
`Working principle and application of the gyroscope in the computer – ECU collect
`all data to determine action; Credits: Panasonic Industrial devices & solutions
`
`MEMS silicon forks with thin film PZT covering fork surface; Credits: Panasonic
`Industrial devices & solutions
`
`• Panasonic is the only player having commercialized an inertial sensor (Gyroscope) using thin film PZT technology.
`
`• Oscillating forks are coated with the piezoelectric material. Forks are moving in the X-axis and detection is done on the Z-axis when
`movement occurred.
`
`• The main application for Panasonic piezo based Gyro is automotive rollover detection.
`
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
`
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`

`

`MICROPHONES
`
`VESPER MEMS
`
`New piezoelectric MEMS are disrupting the traditional
`capacitive microphone approach. This could have huge implications
`for noise-canceling technology.
`
`For now, capacitive technology is widely used in the mobile phone
`market but the preferred high-end technology remains ECMs.
`
`Disruptor
`or
`innovator?
`
`Features
`
`•
`Small size: 3.76mm x 2.65mm x 0.96mm package
`• Ultra-low noise, bottom-port
`•
`Low part-to-part variation
`• High dynamic range
`• Durable piezoelectric MEMS construction
`• Drop-in replacement for existing capacitive MEMS
`microphones
`
`Vesper is now selling parts on Digikey and other online
`distributors.
`
`Courtesy of Vesper MEMS
`
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
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`

`

`RF FILTERS
`
`Thin film piezoelectric material for BAW Filters
`
`• BAW Filters are using AlN piezo material (between electrodes) deposited on a cavity (FBAR) or a substrate with bragg
`reflector stack.
`
`Credits: SPTS – Orbotech group
`
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
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`

`

`SOL-GEL FOR PZT DEPOSTION
`
`STMicroelectronics process
`
`Sol-gel process flow
`
`• STMicroelectronics is using Sol-Gel technology for deposition of thin film PZT.
`
`• The companys is achieving final thickness by repeating each step "n" times.
`
`Cross-section of a thin film PZT deposited on
`substrate and between 2 electrodes.
`
`• STMicroelectronics obtains a very dense film structure. An example is shown above
`with cross section and detailed view.The film is flat with very small grain.
`
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
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`

`

`YOLE GROUP RELATED REPORTS
`Yole Développement
`
`Contact our
`Sales Team
`for more
`information
`
`Ultrasound Sensing Technologies for
`Medical, Industrial and Consumer
`Applications 2018
`
`5G’s Impact on RF Front-End Module
`and Connectivity for Cell Phones 2018
`
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
`
`24
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`

`

`YOLE GROUP RELATED REPORTS
`System Plus Consulting
`
`Contact our
`Sales Team
`for more
`information
`
`RF Front-End Module
`Comparison 2018
`
`Epson PrecisionCore Printhead
`with MicroTFP Inkjet Dies
`
`Xaar 1201 GS2p5 PZT
`Printhead
`
`©2019 | Piezoelectric Devices: From Bulk to Thin-Film 2019 | www.yole.fr | SAMPLE
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`

`

`PIEZOELECTRIC DEVICES: FROM BULK TO THIN-FILM 2019
`Market & Technology Report - June 2019
`
`How strongly will piezoelectric's good vibrations resonate in the device market?
`FROM BULK TO THIN-FILM PIEZO DEVICES – A MOMENTUM-BUILDING
`TRANSITION!
`
`REPORT KEY FEATURES
`• Introduction to piezoelectric
`devices: sensors, actuators,
`and transducers based on the
`piezoelectric effect
`• From bulk piezoelectric materials
`(quartz, ceramics, polymers) to
`thin-film materials (using piezo
`solutions or PVD targets)
`• 2018 - 2024 market forecasts for
`piezo devices (in units, value, and
`wafers (for thin-film-based devices
`concerning wafers))
`• Market trends, by device type
`(inkjet heads, inertial MEMS, micro-
`mirrors, micropumps, RF filters,
`etc.) and product availability
`• Detailed analysis of the
`manufacturing process and
`challenges ahead, including
`technology roadmaps
`• Piezoelectric device supply chain,
`focusing on key industrial market
`players’ positioning: device makers,
`equipment & materials suppliers
`
`This is definitely a bright period for piezoelectric
`devices! Telecommunication and 5G’s imminent
`arrival, personal assistants, consumer wearables,
`fingerprint and medical devices are all candidates
`for using the piezo effect. Since the beginning of
`the 20th century, when quartz was a material
`of choice for sonar in military applications,
`piezoelectricity has evolved into several usage
`types with a diversity of applications. Today,
`piezoelectric properties offer great opportunities
`to be used in three device types: sensor, actuator,
`and transducer.
`Bulk piezo devices are made of a structured
`piece of quartz or ceramic and are integrated
`in products ranging from very common to high-
`end. On the other side, advanced materials and
`techniques have only been developed since the
`early 2000s, i.e. those which use semiconductor
`processes to meet the twin challenges of
`miniaturization and high integration required for
`mobile phones, consumer products, and inkjet
`printheads. Thin-film piezoelectric deposition
`techniques are gaining increasing importance
`within the MEMS industry, with different materials
`being used (i.e. lead zirconate titanate (PZT) and
`aluminium nitride (AlN)) - each with particular
`specifications that differentiate their performance
`as more suitable for sensors or actuators. For
`example, Epson completed construction of its
`new MEMS printhead factory in order to triple
`production of its PrecisionCore printheads: a full
`
`MEMS printhead using a thin-film PZT deposition
`process.
`While several devices have begun transitioning
`from bulk to thin-film piezo materials, the specific
`use-case still influences the choice of bulk or
`thin-film
`types. Piezoelectric micromachined
`ultrasound transducers (PMUT) are a perfect
`example of the transition from bulk to thin-film
`piezo method, and PMUT devices have recently
`been well-publicized for fingerprint and gesture
`recognition applications. Another promising
`sector is medical imaging, in which bulk and thin-
`film-based devices (for imaging probes) will co-
`exist depending on the usage and performance
`required. Considering advancements for bulk piezo
`materials, TDK recently unveiled speakers with
`a thickness of 0.45mm - 0.7mm, demonstrating
`another approach for obtaining the thinnest-
`possible layer from bulk piezo material. Overall,
`it’s important to understand that transition is not
`competition: thin-film and bulk methods are two
`complementary approaches.
`Yole Développement’s report describes this
`transition and the most promising applications,
`from microspeakers to MEMS autofocus, through
`Film Bulk Acoustic Resonator (FBAR) , complete
`with a status report and product availability
`roadmap. Also included is a deep dive into the
`performance associated with usage in sensors,
`actuators, and transducers, describing the market
`trends and technology choices.
`
`Piezoelectric applications - Coexistence of two technologies: bulk and thin-film
`Bulk piezoelectric technologies
`Thin-film piezoelectric technologies
`
`Shock sensors
`
`Acoustic
`emission sensors
`
`Force & strain
`sensors
`
`Flow level
`sensors
`
`Braille cells
`
`Scalpels
`
`Sonars
`
`Touch panels
`
`Linear motor
`positioning
`
`Dental scalers
`
`Flow meters
`Distance
`detection
`
`Microphones
`
`Accelerometers
`
`RF Filters
`
`Inkjet printheads
`
`Microspeakers
`
`Ultrasound
`transducers
`
`Gyroscopes
`
`MEMS
`micromirrors
`
`Micropumps
`
`Weldings
`
`Legend
`
`Sensors
`
`Actuators
`
`Transducers
`
`(Yole Développement, June 2019)
`
`SAMSUNG V. NEODRON
`IPR2020-00308
`Exhibit 2013
`Page 26
`
`

`

`PIEZOELECTRIC DEVICES: FROM BULK TO THIN-FILM 2019
`
`A $48.5B MARKET OPPORTUNITY FOR BULK AND THIN-FILM PIEZO DEVICES
`
`The piezoelectric market for sensors, actuators, and
`transducers is expected to reach $48.5B in 2024,
`with a 12.6% CAGR from 2018 - 2024 on comparable
`devices. Thin-film piezo-based devices are driving
`
`2018 - 2024 piezoelectric-based device market: thin-film vs. bulk
`
`the piezoelectric market’s growth, though market
`share is still in favour of bulk-based devices, which
`remains a strong technology in the piezo market. In
`both the bulk and thin-film device markets, RF filters
`lead with surface acoustic waves (SAW) and bulk
`acoustic waves (BAW), respectively. Broadcom and
`Qorvo are the major thin-film players in the RF filters
`arena, with 5G as well as an increasing number of
`frequencies are strongly boosting the market.
`The recent fundraising efforts of consumer players
`like Amazon in thin-film-based companies to support
`the development of piezo microspeakers and MEMS
`piezo microphones confirm mainstream interest in
`technologies that are able to work with ultra-low
`power. Bulk piezo devices offer the high actuation
`performance that is expected in a number of
`applications, from inkjet printheads to linear motors
`achieving very precise movements.
`This report forecasts the growth of bulk and thin-
`film piezo devices over the next five years, illustrating
`the trends and dynamics of these two methods,
`with a market focus on thin-film-based devices, by
`application.
`
`%
`
`5 . 3
` 1 2 . 2 %
`
`2
`
`0
`
`2
`
`-
`
`8
`
`4: 1
`A G R
`C
`C A G R 2 0 1 8 - 2 0 2 4:
`
`1
`
`0
`
`2
`
`2018
`
`2020
`2019
`Piezoelectric thin-film devices
`(Yole Développement, June 2019)
`
`2022
`2021
`Piezoelectric bulk devices
`
`2023
`
`2024
`
`60
`
`50
`
`40
`
`30
`
`$B
`
`20
`
`10
`
`0
`
`THIN-FILM DEPOSITION PROCESS - WHAT’S YOUR CHOICE?
`
`Specific to thin-film techniques, several MEMS
`foundries have internalized a piezo process in their
`fab. AlN requires extensive knowledge for piezo
`layer deposition, since PZT is an exotic material
`for integration in a semiconductor fab. In terms
`of deposition, two technologies are competing:
`Sol-Gel and PVD (sputtering or pulsed laser
`deposition - PLD). Sol-Gel offers better intrinsic
`film properties, with good uniformity and higher
`breakdown voltages. But when considering high-
`volume production, throughput becomes a major
`
`consideration and this is where Sol-Gel exhibits
`limitations.
`Most MEMS IDMs and foundries have already made
`their process choices. Fujifilm Dimatix and Bosch
`have chosen sputtering, while STMicroelectronics
`and Rohm Semiconductor will pursue Sol-Gel
`techniques. Equipment manufacturers play an
`important role in developing the right process: for
`example, SolMAteS, a Netherlands-based equipment
`manufacturer, recently announced that its PLD
`technology has entered the next 5G base-station
`
`Thin-film piezoelectric ecosystem: the major players*
`Materials
`Fabless / IDM**
`Foundry
`Equipment
`
`*Non-exhaustive list of companies
`(Yole Développement, June 2019)
`
`** Integrated Device Manufacturers
`
`3
`
`SAMSUNG V. NEODRON
`IPR2020-00308
`Exhibit 2013
`Page 27
`
`

`

`and receiver market through a production site
`located in the USA.
`This report covers the piezoelectric device
`supply chain from R&D to major end-users,
`
`with a focused analysis on equipment and device
`manufacturers, describing their process flows
`and technology choices.
`
`MARKET & TECHNOLOGY REPORT
`
`REPORT OBJECTIVES
`Provide an overview of piezo devices and related applications:
`• Description of the key piezo applications for sensors, actuators, and transducers
`• Analysis of the transition from bulk to thin-film piezo devices
`Analyze deposition trends:
`• Global manufacturing techniques and material trends
`• Focus on deposition techniques used for thin-film piezo devices
`Describe each player’s product roadmap and expected year of market entry:
`• Supply chain analysis
`• Foundry players and technology choice
`Furnish market data and forecasts for piezo-based sensors, actuators, and transducers:
`• Piezo device production forecast 2018 - 2024 in units, value, and wafers, by application
`• Market share for main thin-film device manufacturers
`COMPANIES CITED IN THE REPORT (non exhaustive list)
`AIST, aixACCT, Akoustis, American Elements, Applied Materials, audiopixels, Balluff, Baumer, Bosch,
`Broadcom, Brother, BSAC, CEA Léti, Ceramtec, Chirp Microsystems, CTS, Danchip, Debiotech,
`EPFL, EPSON, FESTO, Fraunhofer IPMS, Fujifilm Dimatix, Fujiceramics, Georgia Tech Institute,
`GLOBALFOUNDRIES, Hereaus, Hionix, Honeywell, Huricane, IMEC, Kistler, Konica Minolta, Meggitt,
`Micromo, Mitsubishi Chemical, MSE Supplies, Murata, NGK-NTK Technical Ceramics, Obducat, Oce-
`Canon, Oxford Instruments, Panasonic, Penn State University, Pepperl+Fuchs, Philips Innovation
`Services, Physik Instrumente, Picosun, Piezo motor, Piezosystems Jena, poLight, Praxair, Qorvo, Ricoh,
`Qualcomm, Rohm Semiconductor, Schneider Electric, Screen, Silex Microsystems, Silicon Sensing
`Systems, Sintef, SolMateS, SPTS-an Orbotech company, STMicroelectronics, SUSS MicroTec, TE
`Connectivity, TDK EPCOS, TDK Invensense, TTP Ventus, Turck, Tyndall, USound, ULVAC, Umicore,
`University of Twente, Vermon, Vesper, VTT, Xaar, X-FAB, Youtec and many more…
` TABLE OF CONTENTS (complete content on i-Micronews.com)
`Introduction and glossary
`3
`> Micropumps
`> Inertial sensors
`Executive summary
`15
`> RF filters
`41
`Context
`> PMUT
`> Introduction to piezoelectricity
`> Linear motors, autofocus
`> Piezoelectric materials
`> Other/emerging devices
`> Application markets for sensors, actuators,
`> Transition analysis
`and transducers
`> Product roadmap
`61
`Market forecasts
`Market share and supply chain 162
`> Piezoelectric device market 2018 - 2024 for
`> Bulk device players
`sensors, actuators, and transducers,
`> Thin-film device players
`by type (bulk vs. thin-film)
`> Thin-film device players - Market share
`> Piezoelectric device market 2018 - 2024 for
`> Focus on foundry players
`sensors, actuators, and transducers,
`Technology trends for thin-film-based
`by application
`technologies
`> Penetration of thin-film vs. bulk-based devices
`> Market dynamics, per application
`> Thin-film materials
`> Equipment and process flow
`Market trends
`> Deposition process analysis and comparison
`> Speakers
`Conclusions
`192
`> Microphones
`Yole Développement's presentation
`195
`> Inkjet printheads
`
`171
`
`72
`
`RELATED REPORTS
`Benefit from our Bundle & Annual Subscription offers and access our analyses at the best available
`price and with great advantages
`
`• Ultrasound Sensing Technologies for Medical,
`Industrial and Consumer Applications 2018
`• 5G’s Impact on RF Front-End Module and
`Connectivity for Cell Phones 2018
`• RF Front-End Module Comparison 2018
`• Xaar 1201 GS2p5 PZT Printhead
`• Epson PrecisionCore Printhead with MicroTFP
`Inkjet Die
`Find all our reports on www.i-micronews.com
`
`AUTHOR
`Jérôme Mouly serves as a Senior
`Technology & Market Analyst & Business
`Developer specialized in microtechnologies
`for inkjet & bioMEMS sensors at Yole
`Développement (Yole). Jérôme is supporting
`the development of strategic projects,
`following leading customers of the company,
`within the Life Sciences & Healthcare
`division. Since 2000, he is also engaged in
`more than 100 marketing and technological
`analyses for industrial groups, start-ups
`and institutes related to semiconductor &
`medical technologies industry, in the field of
`inkjet functional printing, wearable sensors
`and connected medical devices. Jérôme
`is also regularly involved in international
`conferences, giving presentations and
`delivering keynotes. Jérôme Mouly holds
`a Master of Physics from the University of
`Lyon (France).
`
`SAMSUNG V. NEODRON
`IPR2020-00308
`Exhibit 2013
`Page 28
`
`

`

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`ABOUT YOLE DEVELOPPEMENT
`Founded in 1998, Yole Développement has grown to become a group of companies providing marketing, technology and strategy consulting, media and
`corporate finance services, reverse engineering and reverse costing services and well as IP and patent analysis. With a strong focus on emerging applications
`using silicon and/or micro manufacturing, the Yole group of companies has expanded to include more t