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`Electronicdesign Com Content Content 73777 73777 Fig1 Sm
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`TECHNOLOGIES > COMPONENTS
`
`What’s The Difference Between Piezoelectric And Piezoresistive
`Components?
`Piezo comes from the Greek word “piezein,” which means “squeeze” or “apply some
`pressure.” Whether they take form as a transducer or sensor, piezo components all
`operate as the result of some degree of physical pressure placed upon them. Most piezo
`devices are piezoelectric or piezoresistive, and each has its appropriate applications.
`
`Mat Dirjish
`APR 18, 2012
`
`Samsung Electronics Co. Ltd. et al v. Neodron Ltd
`Exhibit 2006
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`Piezo comes from the Greek word “piezein,” which means “squeeze” or “apply some pressure.”
`Whether they take form as a transducer or sensor, piezo components all operate as the result
`of some degree of physical pressure placed upon them. Most piezo devices are piezoelectric or
`piezoresistive, and each has its appropriate applications.
`
` 
`
`Piezoelectric Eect
`
`Under pressure, vibration, or other forms of stress, piezoelectricity forms in certain materials,
`particularly crystals. Essentially, the piezoelectric effect is merely the result of stressing a
`piezo element—crystal, ceramic, or biological matter—to generate a charge or voltage.
`
`The piezoelectric effect is linear. The amount of charge generation is proportional to the
`amount of stress placed upon the piezo material. Interestingly, this effect is reversible (Fig. 1).
`Applying a charge to the piezo material generates a mechanical response or a pulse. As a
`result, piezoelectric components find employment in sound production and detection apps,
`voltage and frequency generation, and a plethora of measurement systems.
`
`Electronicdesign Com Content Content 73777 73777 Fig1 Sm
`
`1. The piezo tweeter, a.k.a., horn, on the left provides a cost alternative for standard magnetic-
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`Samsung Electronics Co. Ltd. et al v. Neodron Ltd
`Exhibit 2006
`IPR2020-00308
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`coil speakers on the right. On its own, the piezo horn responds only to high frequencies,
`eliminating the need for a frequency-compensating crossover network.
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`One example of this reverse deployment is the highly cost-effective and efficient piezo tweeter
`or horn found in inexpensive consumer-audio speaker systems in place of the somewhat more
`expensive magnetic-coil high-frequency driver with a paper cone. A piezo tweeter uses a
`piezoelectric crystal, which generates a small voltage when subjected to vibration or pressure.
`
`When functioning as a high-frequency reproduction device (tweeter), however, the crystal is
`subjected to a voltage—the high-voltage audio signal coming from the receiver or amplifier.
`The crystal deforms in variation with its input signal and audibly reproduces the input.
`
`The inexpensive piezo crystal responds only to high frequencies, around 4 kHz and above,
`making this arrangement cost-effective (Fig. 2). Therefore, it requires no crossover with
`numerous passive components to operate as a tweeter in a two- or three-way speaker system.
`Sometimes, depending on the design, placing an inexpensive electrolytic capacitor in series
`with the piezo horn provides protection by blocking low frequencies that might blow the horn.
`
`2. On the left, the piezoelectric material generates a voltage under pressure or vibration. On
`the right, the piezoelectric effect is reversible by applying voltage to the piezoceramic for a
`variety of sound- or pulse-generation purposes.
`
`On a historical note, Pierre and Jacques Curie are credited with the discovery and
`demonstration of the piezoelectric effect in 1880. Notably, the brothers did not realize the
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`Samsung Electronics Co. Ltd. et al v. Neodron Ltd
`Exhibit 2006
`IPR2020-00308
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`

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`converse piezoelectric effect, which Gabriel Lippmann demonstrated in mathematical form
`around 1881.
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`Piezoresistive Eect
`
`The piezoresistive effect also involves pressure or stress. However, changes in resistance
`across the piezo material are the product, not a charge or voltage. It is a change in electrical
`resistance of a semiconductor material due to mechanical stress.
`
`Probably the most basic piezoresistive devices are, obviously, piezo resistors (Fig. 3). Form
`factors include integrated resistor networks, potentiometers, and accelerometers. Made from
`semiconductor materials, piezoresistive devices most commonly are used in pressure
`measurement.
`
`3. When pressure is applied to a piezo resistor, depending on the material, its resistance
`increases.
`
`In 1856, Lord Kelvin noted the change of resistance in mechanically loaded metal devices.
`Almost 100 years later, C.S. Smith described the piezoresistive effect in silicon and germanium
`in 1954.
`
`The most common components that rely on the piezoelectric and piezoresistive effects
`include, but are not restricted to, transducers and sensors. And as you might have guessed,
`most applications are in detection and measurement.
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`Samsung Electronics Co. Ltd. et al v. Neodron Ltd
`Exhibit 2006
`IPR2020-00308
`
`

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`Transducers
`
`Transducers convert energy from one form to another. Stated earlier, piezoelectric
`transducers work both ways. They can convert mechanical energy such as pressure and
`vibration to electrical energy like voltage or current. They also can operate in reverse,
`converting electrical energy into mechanical energy such as sound or vibration.
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`Piezoresistive transducers convert mechanical energy into proportionate levels of resistance.
`They do not convert any form of stimulus to a voltage or current, nor are they reverse active
`like their piezoelectric cousins, meaning they cannot convert resistance levels to some other
`form of energy. Both piezoelectric and piezoresistive transducers come in a wide variety of
`shapes and packages.
`
`Probably the most common piezoelectric component is the disk-shaped variety (Fig. 4). The
`ultra-thin metal disk comes in a range of diameters. Construction is the same for all sizes.
`Piezo crystals occupy the center portion of the disk. The outer metal circle and body back is
`the ground for the component.
`
`4. The thin metal disk is the most common package for piezoelectric transducers. The piezo
`crystal or material is housed in the center portion, and the rest of the metal package is the
`ground.
`
`Hookup is a breeze, requiring just two wires: a hot and a ground. This format also is popular
`since the thin disk fits into the tightest of quarters. It can be sandwiched between two flat
`surfaces or simply attached to any flat surface.
`
`Piezoresistive transducers tend to be somewhat larger due to their use of semiconductor
`materials (Fig. 5). However, depending on the application, many housings, sizes, and shapes
`are available to accommodate compact or larger designs. Since these resistive components
`only work one way, converting mechanical stimuli into resistance, they find regular
`employment in pressure-measurement applications.
`
`Samsung Electronics Co. Ltd. et al v. Neodron Ltd
`Exhibit 2006
`IPR2020-00308
`
`

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`5. Using silicon semiconductor material for the piezoresistive effect, piezoresistive transducers
`tend to be slighter larger than their piezoelectric counterparts.
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`Sensors
`
`Sensors detect or measure (or sometimes detect and measure) physical quantities such as
`distance, pressure, motion, and temperature. They perform their job via conversion. For
`example, a thermocouple converts a temperature into a readable voltage.
`
`Piezoelectric sensors rely on the piezoelectric effect to measure a plethora of parameters such
`as pressure, strain, or force by, once again, converting them to voltages. Technically, one can
`justifiably say that piezoelectric sensors and transducers are one and the same. But
`piezoelectric sensors, more often than not, operate purely as sensors and not in the
`aforementioned reverse mode, i.e., applying voltage to generate an effect.
`
`Additionally, piezoelectric sensors are electromechanical components exhibiting near zero
`deflection. As a result, they respond across a fairly high-frequency bandwidth and exhibit
`consistent linearity over a wide amplitude range. They are also available in a wide selection of
`sizes and lengths (Fig. 6).
`
`6. Maintaining a fairly low profile and available in numerous sizes and lengths, piezoelectric
`sensors exhibit near zero deflection, making them both rugged and responsive to high
`frequencies.
`
`Samsung Electronics Co. Ltd. et al v. Neodron Ltd
`Exhibit 2006
`IPR2020-00308
`
`

`

`Piezoresistive sensors are a bit more sophisticated in their design and the piezo they employ.
`For instance, they can employ thin metal-film resistors, single-crystal silicon, and other
`variations. It stands to reason that both the application and the budget will most likely
`determine which material to choose.
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`The piezoresistive sensor is a mainstay in pressure-measurement applications. According to
`Maxim Integrated Products, mono-crystalline silicon pressure sensors have come into wide
`use lately. Built on semiconductor technology, the resistance change (piezoelectric effect) is
`notably higher than exhibited in standard strain gauges. Therefore, the sensitivity of mono-
`crystalline sensors is higher than the sensitivity of most other types.
`
`Available in a wider array of packaging options, piezoresistive sensors offer sensitivities
`beyond 10 mV/V and stable linearity at constant temperature. They also reliably track
`pressure changes without hysteresis (Fig. 7). Disadvantages include significant nonlinear
`dependence of the full-scale signal on temperature up to 1%/Kelvin, initial offsets up to 100%
`of full scale or more, and offset drift with temperature.
`
`7. Piezoresistive sensors are available in a wider array of packaging options and specify
`sensitivities greater than 10 mV/V.
`
`Summary
`
`Piezo components are highly functional devices operating in measurement, safety, and test
`apps, to name a few, in markets as diverse as medical, musical (pickups in acoustic guitars and
`fingerboard sensitizers in electric guitars), military, and automotive.
`
`Piezoelectric components convert mechanical energy to electrical energy and vice versa, while
`piezoresistive devices convert mechanical energy to resistance values and that’s it. They do not
`work in reverse like their piezoelectric counterparts.
`
`The resistive components are a bit more sophisticated in design and therefore tend to be a bit
`more expensive. Both components have one important thing in common, though. With a bit of
`imagination, their efficient and creative applications are virtually endless.
`
`References
`
`Samsung Electronics Co. Ltd. et al v. Neodron Ltd
`Exhibit 2006
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`1. “What Is a Piezoelectric Transducer?”
`2. “Piezoresistive Sensors”
`3. “Piezoresistive and Piezoelectric MEMS Strain Sensors for Vibration Detection,” Stanley
`Kon, Ken Oldham, and Roberto Horowitz
`4. “Piezoelectric and Piezoresistive Sensors”
`5. “What is the difference between Piezoelectric and Piezoresistive Accelerometer?”
`6. “Performance of Piezoresistive and Piezoelectric Sensors in Pulsed Reactor
`Experiments,” Keith E. Holbert, et al
`7. “Demystifying Piezoresistive Pressure Sensors”
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`RESOURCES > WEBCASTS
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`FPC Connectors: Addressing the Demands of Today’s Power and Signal
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`An Electronic Design-hosted on-demand webinar sponsored by TE Connectivity
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`NOV 19, 2019
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`Available On-Demand
`Originally Broadcast: Thursday, December 19, 2019
`Sponsor: TE Connectivity
`Duration: 30 Minutes
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`Summary:
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`No two applications are quite the same in terms of their demands.  Engineering designs for
`power and signal applications continue to evolve and demand that profiles take up less space,
`are lighter in weight, and can withstand varying environmental conditions.  Join TE
`Connectivity Product Manager Joseph Proffitt on December 19th to discuss how to address
`tough design specs without compromising on connection reliability.
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`Joseph Proffitt, Product Manager, TE Connectivity
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`Joseph Proffitt is a Product Manager for TE Connectivity’s Data and Devices business unit,
`with global responsibility for Flex & Display and Ribbon Cable product lines. Joseph joined TE
`in 2009, and has held roles in product management, pricing excellence, continuous
`improvement, and account management. Joseph graduated from Central Penn College, with a
`BS of Business Administration.
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`Joseph is married, has a one-year old son, two dogs, and enjoys golfing, fishing and hunting.
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