UNITED STATES PATENT AND TRADEMARK OFFICE
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`
`MICROSOFT CORPORATION,
`Petitioner,
`
`v.
`
`UNILOC 2017 LLC,
`Patent Owner.
`
`U.S. Patent No.: 6,836,654
`Issued: Dec. 28, 2004
`Application No.: 09/739,507
`Filed: Dec. 18, 2000
`
`Title: ANTI-THEFT PROTECTION
`FOR A RADIOTELEPHONY DEVICE
`
`DECLARATION OF STEVEN HARRIS
`
`Page 1
`
`

`

`Patent 6,836,654
`
`1.
`
`2.
`
`I, Steven Harris state and declare as follows:
`
`I am over 18 years of age and am competent to make this Declaration.
`
`I make this Declaration based on my own personal knowledge, based on my
`
`knowledge and review of the business records and practices of the University of
`
`Nevada-Reno Library ("Library").
`
`3.
`
`I am currently employed as the Assistant Dean for Collections and
`
`Knowledge Access Services at the University of Nevada-Reno. I have been
`
`employed in this position since 2013.
`
`4.
`
`I obtained a Master's Degree in Library Science in 1991, and since
`
`that time, I have been employed with academic libraries at various universities
`
`across the United States.
`
`5.
`
`Through my professional experience, I have become knowledgeable
`
`about the Library's normal business practices with respect to how the Library
`
`receives, catalogs, indexes, shelves, and makes available to the public its books,
`
`journals, periodicals, and other collections.
`
`6.
`
`Attached as Exhibit A to this Declaration is a true and accurate copy
`
`of the paper titled "Communication Device Inactivity Password Lock," by Charles
`
`P. Schultz, Motorola Technical Developments, v. 29, Nov. 1996. Exhibit A, pp.
`
`14-15. The exhibit includes photographs of the Library's black bound edition that
`
`holds volumes 27-29 of Motorola Technical Developments. Exhibit A, pp. 7, 17.
`
`DECLARATION OF STEVEN HARRIS
`
`Page2
`
`

`

`Patent 6,836,654
`
`7.
`
`The Library has continuously maintained a cataloging system such
`
`that any member of the public could search for the offerings at the Library.
`
`Motorola Technical Developments was part of this system. The Library's records
`
`indicate that the Library regularly received, cataloged, and shelved Motorola
`
`Technical Developments from 1983 (volume 3) to 2000 (volume 42).
`
`8.
`
`In the 1996 timeframe, the Library's cataloging and shelving
`
`procedure for Motorola Technical Developments periodical included placing the
`
`volume on the public shelf upon receipt from the publisher. It was further the
`
`Library's practice to send out for binding three volumes at a time. As noted above,
`
`pages 7 and 19 of Exhibit A are photographs of the physical binder at the Library
`
`that contains the Schultz paper identified in paragraph 6.
`
`9.
`
`The Library has maintained and used in its ordinary course of
`
`business an automated library catalog to track the Library's collections since prior
`
`to 1996. Attached as Exhibit B to this Declaration is a true and accurate screen shot
`
`from the Library's automated library catalog, showing that a record was created on
`
`July 18, 1997 for volumes 27-29 of Motorola Technical Developments. The July
`
`18, 1997 date represents the date when the Library received the physical bound
`
`collection of volumes 27-29 from the binding company.
`
`10.
`
`It was the Library's practice to send out the loose three volumes for
`
`binding after receiving the next one in the collection. That is, volumes 27-29 were
`
`DECLARATION OF STEVEN HARRIS
`
`Page 3
`
`

`

`Patent 6,836,654
`
`sent out for binding after receiving volume 30 of Motorola Technical
`
`Developments. Thus, volume 30 was received prior to July 18, 1997 (the date the
`
`bound collection of volumes 27-29 were received back from the binding
`
`computer).
`
`11. Based on the Library's practice at the time, the Library would re(cid:173)
`
`shelve the bound collection as soon as possible upon receipt of the bound
`
`collection, and typically within one or two business days. Thus, the bound
`
`collection that included Exhibit A would have been back on the public shelves
`
`before July 31, 1997.
`
`12.
`
`It was also the Library's normal practice to date stamp each individual
`
`volume upon receipt from the publisher. Here, the date stamp of volume 29 has
`
`become illegible. However, based on all available information, the Library
`
`received, shelved, and made Exhibit A available to the public, prior to July 18,
`
`1997 because as noted above, the Library shelved volume 29 prior to receiving
`
`volume 30.
`
`DECLARATION OF STEVEN HARRJS
`
`Page4
`
`

`

`Patent 6,836,654
`
`I, Steven Harris, do hereby declare and state, that all statements made herein
`
`of my own knowledge are true and that all statements made on information and
`
`belief are believed to be true; and further that these statements were made with the
`
`knowledge that willful false statements and the like so made are punishable by fine
`
`or imprisonment, or both, under Section 1001 of Title 18 of the United States
`
`Code.
`
`Dated: ~ ne / J,1 ~0 Jq A :: ✓1/~
`
`Signature
`
`DECLARATION OF STEVEN HARRIS
`
`Page 5
`
`

`

`EXHIBIT A
`EXHIBIT A
`
`PPPPP
`
`Page 6
`
`

`

`
`
` .- WW;
`
`”‘Wifilwc‘flfllfllfiflfllflflm
`
`MOTOROLA
`
`TECHNICAL
`DEVELOPMENTS
`
`
`
`Page 7
`
`

`

`MOTOROLA
`
`This is Volume 2 7 ofMotorola
`Yiechnical Developments. It represents
`a significant collection oftechnical
`
`innovations developed by scientists
`
`and engineersfrom a number of
`
`Motorolafacilities and derivedfrom
`
`a wide variety ofscientific and
`
`engineering disciplines.
`
`These technical developments are
`
`published to promote and advance the
`
`technical arts throughout the world.
`
`Subsequent volumes will be published
`
`from time to time on an as-needed basis
`as determined by Motorolas stafl?
`
`MOTOROLA Technical Developments is published periodically by Motorola. Inc. Schaumburg. Illinois 60196.
`
`Inquiries should be directed to Patent Department. 1303 East Algonquin Road. Schaumburg. Illinois 60196.
`
`© Copyright Motorola. Inc. 1996. Printed in U.S.A. The publication ofthese technical disclosures
`does no! constitute a grant of any license under any patent.
`
`
`
`Page 8
`
`

`

`MOTOROLA
`
`This is Volume 29 ofMotorola
`
`
`
`
`
`Technical Developments. It represents
`a significant collection oftechnical
`innovations developed by scientists
`and engineersfrom a number of
`Motorolafacilities and derivedfrom
`a wide variety ofscientific and
`engineering disciplines.
`
`Inquiries should be direct
`
`These technical developments are
`published to promote and advance the
`technical arts throughout the world.
`t volumes will bepublished
`.
`needed baszs
`
`Subsequen
`
`Inc. Schaumbul'
`-
`-
`T
`I
`MO [0R0 A echnical Developments ispublished penodlcally by Motorola,Road, Schaumburgs
`mam-.1303 East A1gonquifl
`-
`these technical alsclovaes
`ed to Patent Depa
`_
`.
`.
`of
`‘9 Cepyright Motorola Inc. 1996. Printed m U.S.A.Tl1€ publlcfiigny patent.
`does not constitute a gram ofany 11051153 um
`
`Page 9
`
`Page 9
`
`

`

`7
`
`
`
`LALfi°’°"°
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`.
`.
`_
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`......
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`_
`_
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`31,13?GunnisonandMark Schoenberg
`SiliconContouringl’nm-ss .
`Two-WE?Radio Signaling through Vibrating Motor in External Microphone ......................
`ByDavidH. Karl and BOD Schukm
`'
`leRSSI Sampling
`By Rafael Dial
`Sofiwarelndependentlleset
`ByJoseph Cohen, David Farhi and Shmucl Barman
`T1 Link to DDS Line Converter
`By Gordon T. Fadie
`.
`.
`.
`.
`.
`.
`.
`.
`.
`UsingSwitchingMOSFETsinlmw—NoiseantEndAmplifiers .
`By Eliav Zipper, Yehuda Eder and Yair Shapiro
`VII-NE:A Rapid Prototype Moslator from Verilog-XL Languageto HardwareEnmlation ..................
`VoieeChannelSiteSwilching .....
`MmagePreviewThroughStatuslcons.
`'
`By Jelfrey Chia
`MlcmPonerVoltageRegulator.,..........................................,..
`ByH. D. Bush
`.
`.
`-
`OxygemtedMetallization System for SuperiorAdhesion to Polyethenmtde(PEI);fGlassComposites ............
`BY Reggie Barnes, John Holley, Kevin Arledge and Tom Swirbel
`Register-Transfer Level (RTL) Delay Modeling and a Methodfor RTLDelayCalculation-------------------
`BY Kfiyhan Kucukcakar
`MoldFdPlaSfiC360Deg1-eeAntennaSupport...................................................
`BY Bill Phelps
`Parametric IIRFilter Design Method Based On Arbitrary Magnitude Specification ........................
`BYDan Hoory and John Lane
`
`By Jell”Freeman
`
`By Steve Van Swol
`
`'
`DieFaceDecou'
`DllngCa acntorS terns
`
`Ugeml’age'li’ning......
`BYMelissa Freitag and Michael Ambrose
`gapmgicerlObaJSYnchmnizafion..,,........................................----
`.
`-
`'
`.
`“311165 McDonald and Nandini Srinivasan
`.....
`BYLeoHiggins
`9
`VS
`Self-matingLow‘Ptlwer Receiver Front-End Protection Circuit ........................
`......
`BysmttK““°Sh
`1]:ngConcenn-afion MeasurementTechniqueinTFSOIDefines .....................
`‘
`.
`_
`'
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`Y
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`EghsncednminFOI'mafionforIS'I‘Flashu................
`army R Shum, Ko-Min Chang andWilliam J. Taylor
`________________
`gTechniq'leforNearContinuousMeasurementofAs[onConcentrationinWater -----
`yEl'lc S. JohnSOH
`
`1-2
`3
`4-5
`
`6-7
`
`8-9
`
`10.11
`12-16
`17-18
`19-21
`22-23
`6
`2
`24'
`27 32
`
`33
`
`3439
`
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`53-55
`55.59
`60-61
`
`meer [996
`
`
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`1
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`9 Motorola, lnc. 1996
`
`l—
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`Page 10
`
`

`

` M
`
`Technical Developments
`u
`
`Contents
`
`Low Distortion, Wide Band Voltage Controlled Oscillator Modulation ..................................
`By Wayne Shepherd, Gus Leizerovich and Raul Salvl
`
`Interactive TV Alpha Paging System '. ........................................................
`By Greg Coonley, Eugene Lopatukhm and Frank 1321100116
`
`62-64
`
`65
`
`PCB Layout for Compensation of Coefficient of Thermal Expansion (CFE) Differences .
`By Allen Hertz, David Tribbey and Charles Parr
`
`.
`
`.
`
`.
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`_
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`
`66-68
`
`Selective Call Blocking .......... . --------------------------------------------------------
`By James Hymel and Christian Hernck
`
`Default Wide Area Trunking ..............................................................
`By Steve Norwood and Kurt Stefans
`
`Robust Methodology and Software for Algorithmic Testing of Memory Arrays ............................
`By Anup S. Tirumala, Clark G. Shepard and Daniel T. Marquette
`
`Concentric Cell Handover and Assignment Algorithms ............................................
`By G. Eastwick and J. Hopkinson
`
`High Frequency CMOS Bufl'er Amplifier .....................................................
`By Scott Humphreys
`
`Emergency Alert System for Automobiles .....................................................
`By Anthony Allen
`
`Hybrid Model Prototype Process ...........................................................
`By Chris Nelson, Robert Shjsler and E. Derek Smith
`
`Back Lit Hard Keys .....................................................................
`By Wille Kottke
`
`Overprinting Paste for Self-Aligning .........................................................
`By Allen Hertz, Hank Liebman and David Tribbey
`
`Side Ward Insertion Gripper for Automated Assembly in Horizontal Plane ..............................
`By Kiron R Gore
`
`69-70
`
`71 -72
`
`73-74
`
`75-75
`
`77-79
`
`80
`
`81
`
`82
`
`83-86
`
`87-90
`
`Communication Device Inactivity Password Lock .
`By Charles I? Schultz
`
`.
`
`.. .............................................
`
`91—92
`
`93-94
`
`Integrated Stacked Gate Oxide and Interpoly Oxide ..............................................
`By Craig Cavms, Ko-Min Chang, Craig Swift, Hsing-Huang Tseng and Wayne Paulson
`Password Modification in a Distributed Computer System ..........................................
`By Chee Ma, Eustathios Vlachogiannis, Chun Hsu and Burhanuddin Hussain
`Multicolor Laminate Pressure Feeler Gauge ...................................................
`By Ronald Scott Lipton, Harry Fuerhaupter, Kenneth Storts and Brian Black
`Compact Extender Service Tray .......................................... 100-101
`By A. Vlncent Clayton
`"""""""""
`
`95-96
`
`97-99
`
`
`
`PWdiCfiYE KEY Loading During Late Entry Receptions ............................................
`By Cums D. Lehman and Mark Gonsalves
`'
`'
`Absolute Heading Sensor Blunder Detection Usin
`g Relatlve Heading Sensor and Road Se
`.
`.
`.
`gm
`BY Yilm Zhao, Leslie G. Seymour and Elisha M. Kozikaro
`Vialess Multilayer Ball Grid Array 1C Package ........................
`By Yutaka Doi
`..........................
`
`ent ...............
`
`102403
`
`04'107
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`1
`
`103
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`a Motorola. Inc. 1996
`
`['1'
`
`N0vember1996
`
`Page 11g —
`
`Page 11
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`

`

`
`® MOTOROLA
`
`Echnica! Developments
`
`mC
`
`ontents
`
`The Washing Machine Turbo-Cull
`...........................................
`By Brian Webb and Jim Perkins
`Automated Voice Message Rte-broadcast in a linked Dispatch Radio System IIII
`By Gerald Capehart
`
`......................
`
`109
`
`110
`
`Method of Providing Automatic Voice Message Delivery in a Tnmked Dis atch Radi
`0 System --------------
`By Gerald Capehart and Dutch Bailey
`p
`tE -
`-
`.
`A Self-Aligning Electrostatic-Discharge—Protected Surface-Mount Right-An e Li
`gh muting Diode """"""" 112-115
`By Robert R. Kornowski and Daniel R. Schroeder
`g1
`OTAR Using One-Time Pads ................................................
`115
`By Thomas B Ryan and Hans Christopher Sowa
`
`"""""""
`
`11]
`
`OTARRekeyAuthorization
`By Hans Christopher Sowa
`
`'
`
`'
`
`’
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`'
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`'
`
`'
`
`'
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`‘
`
`117
`
`Method to Derive a Unique Encryption Key for a Private Cali without using a Key Exchange ..................
`By Hans Christopher Sowa
`
`118-119
`
`Method to Encrypt TG ID Algorithm ID, and Key ID of a Project 25 Transmission
`in an Encrypted Control Channel System ....................................................
`By Hans Christopher Sowa
`
`iDEN Subscriber Airtime Usage Minder ......................................................
`By Darin Minter and Tony Belkin
`
`Audio Delay and Speech Collision Resolution ..................................................
`By Steven Charnota and Tony Belkin
`
`120
`
`121-122
`
`123-124
`
`Over Conveyor, Non-Intrusive. Lift and Locate .................................................
`By Scott Hovey and Carl Davis
`
`125-126
`
`Dynamic White and Black Level Control for Document Imaging .....................................
`By Paul Guiderini
`
`Setting a Modem’s initial AT String in a Digital Radio Network ......................................
`By Ed Benyukhis, Barry Chan and Rod Averbuch
`Tho Stages Dialing in a Digital Radio Network ..................................................
`By Ed Benyukhis, Barry Chan and Rod Averbuch
`
`Resources Allocation Algorithm for Intracell Calls ...............................................
`BY Boris Spektor, Naum Spektor and Anatoly Belkin
`
`Cooling System for Communication Equipment Cabinets Using an
`-
`-
`.
`.
`.
`Active Ventilation System Designed to Prevent Morsture Condensatlou .......................
`BY James K. Gehrke and William Morrison
`'
`I
`'
`V9169 Activated Caller ID System for Spectrum Efficient Two Way Radio .......................
`By iames K. Gehrke and James W Dejmek
`Affiliation Database Restoration Using Remote Site Affiliation Time Stamps .............................
`By Emma Hoffman
`PagEISerialNumber._...,.,............................
`By Andrew Fuehl and Eduardo Gonzalez
`Proper COde Dated” Utilizing Decoded Pitch ............................................
`By ESteban Yepez,111 and Ferdie Brillantes
`U591" Hierarchy for SmarIZone Manager Applications ..................................
`BY Lana S. Dubinsky
`
`,
`
`.
`
`‘
`
`........
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`.........
`
`127-128
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`129-130
`
`131-132
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`133-134
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`_
`135 136
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`l37
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`138
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`139-140
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`141-142
`
`143
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`November [996
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`@ MmROLA
`Technical Deveio
`W
`
`Technical Developments
`69 MOTOROLA
`
`
`
`
`Over the Air Site Alias for Private Trunked Systems. ..............................................
`By Matthew Pope, Daniel J. McDonald and Rob Biggs
`
`144-146
`
`APagerwitliaLanguageTranslator
`By Cathal Timothy Breen
`
`Verification and Identification of Accessories for use with Radios .....................................
`By Robert B. End and Christopher W. Wright
`
`Sealed Connector Assembly for Low-Cost, High Thermal Conductivity Package ..........................
`By Peter Collier
`
`'
`'
`'
`'
`-
`detector Arrays .......................
`An Inex ensive Passrve Method of Aligning Fibers to Laser or Photo
`By Chrigtopher K. Y Chun, PCRL, Barbara Foley, PCRL and James Knapp, APDAC
`Multiple Power Supply Beta-Squared ESD Circuit Protection .......................................
`By Bob Berger
`
`TFSOI with Improved Oxidation Resistance ...................................................
`By N. David Theodore, Marco Racanelli and Tom Wetteroth
`
`147
`
`143-149
`
`150_151
`
`152-155
`
`156-157
`
`158-159
`
`Method of Maintaining Queued Call Requests During Replacement of Control Channel Frequency _
`By Alan Gran and Bob Ciinkert
`
`.
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`160-164
`
`Wavy Omega Strap for Modular Interconnect Thermal Expansion Considerations .........................
`By Ken Bieda, Jerry McFarlin and Roy Stone
`
`165-166
`
`FuzzyLogicResourceAlgorithm
`By Tau-Lien Chang, Derek Oxley and Kethees Ketheesan
`
`Synchronization of Inteizone Audio Resources Capability Information .................................
`By Vijay Agarwal and Brigitte Darcel
`
`167—169
`
`170
`
`Jitter-Based Adaptive Equalization ..........................................................
`By David Feldbaurner, Rimon Shookhtim and Mark Weaver
`
`171-1722
`
`Apparatus for Protecting Wafer Placement Vacuum Chucks .........................................
`By Anthony Robert Weeks
`
`173-174
`
`Chameleon Assembly and Test Carrier .......................................................
`By Brian A. Webb and Bob Wentworth
`
`175
`
`Variable Data Representation for Higher-Speed
`Performance and Reduced-Power Consumption in Precharged Circuits ...............................
`By Merit Hong
`
`.
`.
`.
`.
`Backside Cooling Method for Power Devices .
`ByLeonardJ.Borucki,ErikW.EganandThomasB.IZ-irlile -
`
`I
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`I
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`I “I
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`176-178
`
`179-130
`
`A Process for Efficient String Matching .......................................................
`By James H. Tolar
`
`131-133
`
`2T09ModePinDecodertorFPGA’s
`By Dandas Tang and Michael Shieh
`
`Method for Etching Gold in an MRIE ........................................................
`By Doug Mitchell, Frank Carney and Harry Geyer
`
`184-185
`
`186
`
`Windowed Tape-Pair ....................................................................
`By Garland D. Cotney
`
`137'188
`
`
`
`IMPROVED SILICON CONTOURING PROCESS
`
`by John Gunnison and Mark Schoenberg
`
`Wet chemical etching of unmasked silicon regions
`is performed in semiconductor discrete processing
`to form deep moat and mesa device terminations.
`The contour of resulting moat/mesa silicon sidewall
`is very steep and leads to inadequate (thin or miss-
`ing) photoglass at the top of the silicon step (see
`Figure 1). In addition, the sidewall’s large negative
`contour angle acts to limit the junction’s bulk break-
`down voltage. An improved moat/mesa silicon
`contouring process was achieved using overlapping
`silicon etch regions. The following four factors were
`found to control the moat/mesa contour:
`
`1) Mesa 2-to-Mesa l overlap spacing
`2) Mesa 1 and Mesa 2 etch depths
`3) Mesa 1 and Mesa 2 etch depth sequence
`4) Choice ofmask sequence
`
`The Mesa 1 photo/etch process is followed by a
`second photo/etch process that utilizes an oversized
`Mesa 2 mask. By proper selection ofthe Mesa 1 and
`Mesa 2 etch depths, respectively, the moat/mesa side-
`walls can be optimally recontoured (see Figure 2
`and 3). Recontoured sidewalls have a much smaller
`contour angle which offers superior photoglass step
`coverage and improved electrical parameters.
`
` Photoglass is missing or very
`Photoglass
`/ thin due to steep moat/mesa
`
`sidewall
`
`Fig. 1
`
`9 Motorola, Inc. 1996
`
`iv
`
`NOVEMb€r1996
`
`o Motorola Inc. £996
`
`1
`
`November I 996
`
`Page 13
`
`Page 13
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`

`

`
`
`
`
`@uoronou
`
`Technical Developments
`
`m C
`
`OMMUNICATION DEVICE INACTIVITY PASSWORD LOCK
`
`by Charles P. Schultz
`
`When a communication device (radio. phone,
`etc), is misplaced or left unattended, someone other
`than the authorized user could use it. leaving the
`legitimate user responsible for the consequences,
`financial or otherwise. A password lock feature
`mently allows users to “lock” their radios from
`use unless a correct password is entered, but this
`feature would not be activated when the device is
`accidentally misplaced, or the user hastily leaves his
`radio behind while attending to some urgent mat-
`ter.An improvement over the current radio lock fea-
`ture would be for the device to become locked alter
`itis inactive for a preprogrammed period of time,
`similar to computer screen “locking“ programs.
`
`This invention allows the user to program an
`inactivity timer which would be reset each time a
`“physical input” occurs. If the timer expires, the com-
`munication device enters the “locked“ mode and
`begins operation on a ore-programmed revert chan—
`nel which is defined by one of the personalities stored
`inthe device’s memory. lt‘the device is operating on
`asystem that requires registration with a site, it will
`unregister prior to locking. The device optionally
`sends an over—the-air signal on the revert channel
`indicating the radio‘s ID and its “locked" status. This
`could alert a dispatcher to use a feature such as
`Remote Monitor to aid in locating a lost or stolen
`device. While locked, the device will not route any
`audio to its speaker. The device will receive and
`respOnd to over-the-air signaling,
`including an
`
`“unlock” transmission from the base station which
`can be used to assist users who have forgotten their
`passwords. The device is subject to the same
`unlockmg procedure as the present radio password
`lock feature and, upon unlocking, it will register on
`the current site, if applicable. The device stores its
`locked state in non-volatile memory so it remains
`locked when power is cycled.
`
`For the purposes of this feature, a wide varietv
`ofactions are classified as “physical inputs” so legit-
`imate operation will not be interrupted. In addition
`to keypad, button and switch activation, receiving
`bus messages for memory reprogramming will reset
`the timer to insure that reprogramming will not be
`interrupted. A motion-sensing device and circuit
`could also be added to prevent the device from
`locking while it is being carried around in dispatch
`mode.
`
`Some of the devices operating modes will inhibit
`the activation of the inactivity timer. In order to
`facilitate factory testing or field servicing of the device.
`the inactivity timer will not activate when it is in
`“test mode” or during rekeying. The timer will also
`remain inactive during Over-The-Air Programming
`(OTAP) and Over-The-Air—Rekeying (OTAR). To pre-
`vent interruption of critical transmissions, locking
`will be inhibited during Emergency feature trans-
`missions, and during phone calls to emergency serv—
`ices such as 911-
`
`r996
`
`oMun-ola Inc. 1996
`
`91
`
`November 19%
`
`Eage i!
`
`Page 14
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`

`

`® MOTOROLA
`Technical Developments
`
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`@ MOTOROLA
`
`Echnicai Developments
`
`N I
`
`NTEGRATED STACKED GATE OXIDE AND INTERPOLY OXIDE
`
`by Craig Cavins, Ko-Min Chang, Craig Swift, Hsing-Huang Tseng and Wayne Paulson
`
`PURPOSE:
`
`For microcontrollers with embedded EEPROM,
`burn-in cost can be as high as $0.25 per part. The
`dominant burn-in failure mode has been the
`EEPROM select gate failures. A process for 1.2 pm
`design rules uses 3 350A thermal oxide for the select
`gate. It is desirable to make this select gate dielec—
`tric more robust in order to reduce or eliminate the
`burn-in failures and thereby eliminate the need for
`a costly burn—in.
`
`The integration of the 1.2pm process is such that
`the select gate dielectric is formed concurrently with
`the interpoly dielectric for the EEPROM bit cell, and
`the logic gate dielectric is identical to the select gate
`dielectric. The enmeshment of these processes gives
`little latitude for significantly improving the quality
`of the select gate dielectric within the confines of a
`conventional approach which is to grow a thermal
`select gate oxide while simultaneously growing a
`thermal interpoly oxide.
`
`One prior art solution is to use an interpoly ONO
`stack with the top oxide layer being a CVD layer
`which can also form at least part of the peripheral
`transistor dielectric. The disadvantage here is that
`for some self-aligned NVM integrations and for most
`non-seif-aligned NVM integrations, the use of an
`ONO interpoly dielectric requires an additional
`masking step to pattern the ONO.
`
`PROPOSAL:
`
`oxides are well known.1 The process sequence starts
`w1th a pre—d1flusron clean which cleans the single
`crystal Silicon surface in the select gate (and logic
`gate) area and cleans the surface of the first pair
`floatmg gate. An initial thin thermal oxide may or
`may not be grown as the first layer of the stacked
`ox1de. Then a CVD oxide is deposited. The ratio of
`CVD oxide thickness to final gate oxide thickness
`may be optimized, but a CVD oxide thickness which
`is approximately half of the final desired thickness
`is a good starting point (CVD oxide 2:: 175A for 1.2
`pm process). Finally, an oxidizing anneal of the CVD
`layer is performed. This anneal may also be designed
`to grow an additional layer of thermal oxide under
`the CVD layer. The temperature and time of the
`anneal should be optimized to achieve the required
`quality and thickness requirements of the select gate
`and interpoly oxides as well as to provide the neces-
`sary impetus for diffusion ofany previously introduced
`dopants. Figure 1 shows a cross-sectionai represeno
`tation of the EEPROM cell with the conventional
`and proposed process.
`
`SUMMARY:
`
`Using a stacked gate oxide to simultaneously
`form the select gate and interpoly dielectric for a
`stand-alone or embedded NVM can prowde excep-
`tional quality dielectrics which will lead to a burn-in
`failure rate reduction and a significant cost savings
`when burn-in is eliminated. This process integra-
`tion is achieved without additional masking steps.
`
`The idea here is to use a stacked gate oxide for
`both the select gate dielectric (also forms the logic
`gate dielectric for the 1.2 pm process) and the
`intefDOIY dielectric. The advantages of stacked gate
`
`REFERENCES:
`
`[l] H -H. Tseng, RJ. Tobin, IEDM Technical Digest.
`P. 321, 1993.
`
`
`
`
`
`
`SEND LOCKED
`STATUS?
`
`Y
`
`SEND ID AND STATUS
`ON REVERT CHANNEL
`
`STAY LOCKED UNTIL
`UNLOCK SUCCESSFUL
`
`9 Mmmla. inc. 1996
`
`92
`
`November 1996
`
`‘
`
`© Motorota. Inc. 1996
`
`93
`
`'Vorfmh't IM
`
`
`Page 15
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`Page 15
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`

`

`Engineering Larry (262)
`Universfiy of Her :Ia. Reno
`Reno, NV 89557—{i044
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`Page 16
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`NIVERSITY OF NEVAD
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