US009615901B2
`
`(12) United States Patent
`US 9,615,901 B2
`(10) Patent N0.:
`
` Babayofl et al. (45) Date of Patent: Apr. 11, 2017
`
`
`(54) METHOD AND APPARATUS FOR IMAGING
`THREE-DIMENSIONAL STRUCTURE
`
`(71) Applicant: Align Technology, Inc., San Jose, CA
`(US)
`
`(72)
`
`Inventors: Noam Babayofl, Rishon Le Zion (IL);
`Isaia Glaser-Inbari, Givataim (IL)
`
`(73) Assignee: Align Technology, Inc., San Jose, CA
`(US)
`
`(52) US. Cl.
`CPC .............. A61C 9/0066 (2013.01); A6IB 1/06
`(2013.01); A6IB 1/24 (2013.01); A6IB 5/0064
`(2013.01); A6IB 5/0088 (2013.01); A6IB
`5/1077 (2013.01); A61C 9/0053 (2013.01);
`A6IC 13/0004 (2013.01); GOIB 11/24
`(2013.01); G013 11/25 (2013.01); A613
`”00096 (201301); A613 5/4547 (201301)
`(58) Field of Classification Search
`CPC .................................... A61B 1/06; A61B 1/24
`USPC ......................................... 356/601, 603, 609
`See application file for complete search history.
`
`( * ) Notice:
`
`Subject to any disclaimer, the term of this
`patent is extended or adjusted under 35
`U.S.C. 154(b) by 25 days.
`
`(56)
`
`References Cited
`US. PATENT DOCUMENTS
`
`(21) Appl’ NO“ 14/743’765
`.
`(22)
`Flled:
`Jun. 18, 2015
`
`(65)
`
`Prior Publication Data
`US 2015/0282903 A1
`Oct. 8, 2015
`
`2,467,432 A
`3,013,467 A
`
`4/1949 Kesling
`12/1961 Minsky
`.
`(Contmued)
`
`FOREIGN PATENT DOCUMENTS
`3031677 A
`5/1979
`517102 B2
`7/1981
`
`AU
`AU
`
`Related US. Application Data
`(60) Continuation of application No. 14/141,259, filed on
`Dec. 26, 2013, now Pat. No. 9,089,277, which is a
`
`(Continued)
`
`OTHER PUBLICATIONS
`
`(30)
`
`(Contmued)
`Foreign Application Priority Data
`
`Bertin, “Sensors,” 1996, p. 17.
`(Continued)
`
`Aug. 5, 1998
`
`(IL) .......................................... 125659
`
`(51)
`
`Int. Cl.
`GOIB 11/24
`A61C 9/00
`A613 ”24
`A613 5/00
`A613 5/107
`A61C 13/00
`GOIB 11/25
`
`(2006.01)
`(2006.01)
`(200601)
`(200601)
`(200601)
`(200601)
`(2006.01)
`(Continued)
`
`Primary Examiner * Roy M Punnoose
`(74) Attorney, Agent, or Firm 7 Wilson Sonsini Goodrich
`& Rosati
`
`ABSTRACT
`(57)
`An apparatus for determining surface topology of a portion
`of a three-dimensional structure is provided, that includes a
`probing member, an illumination unit, a light focusing
`optics, a translation mechanism, a detector and a processor.
`
`20 Claims, 5 Drawing Sheets
`
`
`
`
`
`1 54A
`
`‘
`
`3SHAPE EXHIBIT 1001
`SSHAPE EXHIBIT 1001
`3Shape v. Align
`3Shape V. Align
`IPR2019-00152
`IPR2019—00152
`
`

`

`US 9,615,901 B2
`
`Page 2
`
`Related U.S. Application Data
`
`continuation of application \o. 13/784,511, filed on
`Mar. 4, 2013, now Pat. No. 8,638,448, which is a
`continuation of application \o. 13/619,906, filed on
`Sep. 14, 2012, now Pat. No. 8,638,447, which is a
`continuation of application \o. 13/082,623, filed on
`Apr. 8, 2011, now Pat. No. 8,310,683, which is a
`continuation of application \o. 12/654,699, filed on
`Dec. 29, 2009, now Pat. No. 7,944,569, which is a
`continuation of application \o. 12/314,064, filed on
`Dec. 3, 2008, now Pat. No. 7,796,277, which is a
`continuation of application \o. 11/652,055, filed on
`Jan. 11, 2007, now Pat. No. 7,477,402, which is a
`continuation of application \o. 11/377,403, filed on
`Mar. 17, 2006, now Pat. No. 7,230,725, which is a
`continuation of application \o. 11/175,186, filed on
`
`Jul. 7, 2005, now Pat. No.
` 7,092,107, which is a
`
`continuation of application \o. 10/692,678, filed on
`Oct. 27, 2003, now Pat. No. 6,940,611, which is a
`division of application No. 09/775,298, filed on Feb.
`1, 2001, now Pat. No. 6,697,164, which is a contin-
`uation of application No. PCT/lL99/00431, filed on
`Aug. 5, 1999.
`
`Int. Cl.
`A613 1/06
`A613 [/00
`
`(51)
`
`(56)
`
`(2006.01)
`(2006.01)
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`3,950,851
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`4,755,139
`4,763,791
`4,793,803
`4,798,534
`4,836,778
`4,837,732
`
`>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>
`
`10/1968
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`5/1972
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`6/1973
`5/1974
`1/1975
`11/1975
`12/1975
`4/1976
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`Kesling
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`4,937,928
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`4,964,770
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`4,983,334
`5,011,405
`5,017,133
`5,027,281
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`5,055,039
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`5,100,316
`5,121,333
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`5,128,870
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`5,131,843
`5,131,844
`5,139,419
`5,145,364
`5,176,517
`5,184,306
`5,186,623
`5,239,178
`5,257,203
`5,273,429
`5,278,756
`5,312,249
`5,328,362
`5,338,198
`5,340,309
`5,342,202
`5,353,073
`5,368,478
`5,372,502
`5,381,236
`5,382,164
`5,386,292
`5,388,988
`5,395,238
`5,431,562
`5,440,326
`5,440,496
`5,447,432
`5,452,219
`5,454,717
`5,456,600
`5,474,448
`RE35,169
`5,518,397
`5,528,735
`5,533,895
`5,542,842
`5,549,476
`5,562,448
`5,573,493
`5,587,912
`5,605,459
`5,607,305
`5,613,936
`5,614,075
`5,621,648
`5,645,420
`5,645,421
`5,655,653
`5,671,056
`5,683,243
`5,692,894
`5,725,376
`
`>>>>>>>>>>>>>>>>>>>>m>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>
`
`7/1989
`7/1989
`7/1989
`8/1989
`10/1989
`11/1989
`12/1989
`1/1990
`6/1990
`6/1990
`7/1990
`7/1990
`10/1990
`12/1990
`1/1991
`4/1991
`5/1991
`6/1991
`7/1991
`10/1991
`10/1991
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`6/1992
`7/1992
`7/1992
`7/1992
`7/1992
`8/1992
`9/1992
`1/1993
`2/1993
`2/1993
`8/1993
`10/1993
`12/1993
`1/1994
`5/1994
`7/1994
`8/1994
`8/1994
`8/1994
`10/1994
`11/1994
`12/1994
`1/1995
`1/1995
`1/1995
`2/1995
`3/1995
`7/1995
`8/1995
`8/1995
`9/1995
`9/1995
`10/1995
`10/1995
`12/1995
`3/1996
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`7/1996
`8/1996
`8/1996
`10/1996
`11/1996
`12/1996
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`3/1997
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`Breads et a1.
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`
`

`

`US 9,615,901 B2
`
`Page 3
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`(56)
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`
`5,725,378
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`5,740,267
`5,742,700
`5,799,100
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`6,062,861
`6,068,482
`6,099,314
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`6,152,731
`6,183,248
`6,190,165
`6,217,325
`6,217,334
`6,244,861
`6,263,234
`6,309,215
`6,315,553
`6,322,359
`6,350,120
`6,382,975
`6,398,548
`6,402,707
`6,482,298
`6,524,101
`6,554,611
`6,572,372
`6,629,840
`6,697,164
`6,705,863
`6,722,880
`6,885,464
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`7,184,150
`7,230,725
`7,319,529
`7,477,402
`7,511,829
`7,630,089
`7,724,378
`7,796,277
`7,944,569
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`
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