Petitioner Bluehouse Global Ltd.
`Petitioner Bluehouse Global Ltd.
`
`Ex. 1001
`EX. 1001
`
`

`

`(12) United States Patent
`(10) Patent No.:
`US 9,293,545 B2
`
`Yamazaki et al.
`(45) Date of Patent:
`Mar. 22, 2016
`
`USOO9293545B2
`
`(54) SEMICONDUCTOR DEVICE
`
`(56)
`
`(71) Applicant: Semiconductor Energy Laboratory
`Co., Ltd., Atsugi-shi, Kanagawa-ken
`(JP)
`
`(72)
`
`Inventors: Shunpei Yamazaki, Setagaya (JP);
`Kengo Akimoto, Atsugi (JP); Daisuke
`Kawae, Yamato (JP)
`
`(73) Assignee: Semiconductor Energy Laboratory
`Co., Ltd., Atsugi-shi, Kanagawa-ken
`(JP)
`
`( * ) Notice:
`
`Subject to any disclaimer, the term of this
`patent is extended or adjusted under 35
`U.S.C. 154(b) by 0 days.
`
`(21) Appl.No.: 14/451,680
`
`(22)
`
`Filed:
`
`Aug. 5, 2014
`
`(65)
`
`Prior Publication Data
`
`US 2014/0339556 A1
`
`NOV. 20,2014
`
`Related US. Application Data
`
`(63) Continuation of application No. 13/763,874, filed on
`Feb. 11, 2013, now Pat. No. 8,803,146, which is a
`continuation of application No. 12/613,769, filed on
`Nov. 6, 2009, now Pat. No. 8,373,164, which is a
`continuation of application No. 12/606,262, filed on
`Oct. 27, 2009, now abandoned.
`
`(30)
`
`Foreign Application Priority Data
`
`Nov. 7, 2008
`
`(JP) ................................. 2008-287187
`
`(51)
`
`Int. Cl.
`H01L 29/786
`H01L 29/41 7
`
`(2006.01)
`(2006.01)
`(Continued)
`
`(52) US. Cl.
`CPC ...... H01L 29/41 733 (2013.01), H01L 27/1225
`(2013.01), H01L 27/1288 (2013.01),
`(Continued)
`
`(58) Field of Classification Search
`CPC ............ H01L 29/7869; H01L 29/4908; H01L
`27/1225; H01L 51/105; H01L 51/0508;
`H01L 51/0512; H01L 51/0545
`See application file for complete search history.
`
`References Cited
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`
`5,731,856 A
`5,744,864 A
`
`3/1998 Kim et al.
`4/1998 Cillessen et al.
`
`(Continued)
`
`FOREIGN PATENT DOCUMENTS
`
`CN
`EP
`
`101283444 A
`0895219 A
`
`10/2008
`2/1999
`
`(Continued)
`OTHER PUBLICATIONS
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`Demb0.H et a1., “RFCPUS on Glass and Plastic Substrates Fabri-
`cated by TFT Transfer Technology”, IEDM 05: Technical Digest of
`International Electron Devices Meeting, Dec. 5, 2005, pp. 1067-
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`
`(Continued)
`
`Primary Examiner 7 Marvin Payen
`Assistant Examiner 7 Jeremy Joy
`(74) Attorney, Agent, or Firm 7 Eric J. Robinson; Robinson
`Intellectual Property Law Ofiice, PC.
`
`(57)
`
`ABSTRACT
`
`A structure by which electric -field concentration which might
`occur between a source electrode and a drain electrode in a
`bottom-gate thin film transistor is relaxed and deterioration of
`the switching characteristics is suppressed, and a manufac-
`turing method thereof. A bottom-gate thin film transistor in
`which an oxide semiconductor layer is provided over a source
`and drain electrodes is manufactured, and angle 01 ofthe side
`surface of the source electrode which is in contact with the
`oxide semiconductor layer and angle 02 ofthe side surface of
`the drain electrode which is in contact with the oxide semi-
`conductor layer are each set to be greater than or equal to 20°
`and less than 90°, so that the distance from the top edge to the
`bottom edge in the side surface of each electrode is increased.
`
`20 Claims, 37 Drawing Sheets
`
`
`
`
`
`100
`
`
`
`
`
`
`BLUEHOUSE EXHIBIT 1001
`Page 2 of 66
`
`BLUEHOUSE EXHIBIT 1001
`Page 2 of 66
`
`

`

`US 9,293,545 B2
` Page 2
`
`(2006.01)
`2006 01
`(
`~
`)
`(2006.01)
`(2006.01)
`(200601)
`(200601)
`
`(51)
`
`(56)
`
`Int. Cl.
`H01L 51/05
`H01L 29/49
`H01L 51/10
`H01L 27/12
`H01L 21/28
`H01L 21/02
`(52) US. Cl.
`CPC .......... H01L29/4908(2013.01);H01L 29/786
`(2013.01); H01L 29/7869 (2013.01); H01L
`29/78696 (2013.01); H01L 51/0508 (2013.01);
`H01L 51/0512(2013.01);H01L 51/0545
`(2013~01);H01L 51/105 (2013-01);H01L
`21/02554 (2013.01); H01L 21/02565 (2013.01);
`H01L 21/0263] (2013.01)
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`US 9,293,545 B2
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`US. Patent
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`Mar. 22, 2016
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`Mar. 22, 2016
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`US. Patent
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`Mar. 22, 2016
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`Sheet 19 of 37
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`U.S. Patent
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`Ddar.22,2016
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`Sheet 20 of 37
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`BLUEHOUSE EXHIBIT 1001
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`U.S. Patent
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`Mar. 22, 2016
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`Sheet 21 of 37
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`U.S. Patent
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`Mar. 22, 2016
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`Sheet 22 of 37
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`BLUEHOUSE EXHIBIT 1001
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`BLUEHOUSE EXHIBIT 1001
`Page 28 of 66
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`US. Patent
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`Mar. 22, 2016
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`Sheet 23 of 37
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`US 9,293,545 B2
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`BLUEHOUSE EXHIBIT 1001
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`BLUEHOUSE EXHIBIT 1001
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`US. Patent
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`Mar. 22, 2016
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`Sheet 24 of 37
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`US 9,293,545 B2
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`FIG. 24
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`BLUEHOUSE EXHIBIT 1001
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`BLUEHOUSE EXHIBIT 1001
`Page 30 of 66
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`U.S. Patent
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`Ddar.22,2016
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`Sheet250f37
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`US 9,293,545 B2
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`FIG. 25A
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`BLUEHOUSE EXHIBIT 1001
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`US. Patent
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`Mar. 22, 2016
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`Sheet 26 of 37
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`US 9,293,545 B2
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`FIG. 26A
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`BLUEHOUSE EXHIBIT 1001
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`BLUEHOUSE EXHIBIT 1001
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`US. Patent
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`Mar. 22, 2016
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`Sheet 27 of 37
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`US 9,293,545 B2
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`FIG. 2 7
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`BLUEHOUSE EXHIBIT 1001
`Page 33 of 66
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`BLUEHOUSE EXHIBIT 1001
`Page 33 of 66
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`US. Patent
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`Mar. 22, 2016
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`Sheet 28 of 37
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`US 9,293,545 B2
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`FIG. 28
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`BLUEHOUSE EXHIBIT 1001
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`BLUEHOUSE EXHIBIT 1001
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`U.S. Patent
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`Ddar.22,2016
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`Sheet290f37
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`US 9,293,545 B2
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`FIG. 29
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`BLUEHOUSE EXHIBIT 1001
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`BLUEHOUSE EXHIBIT 1001
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`US. Patent
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`Mar. 22, 2016
`
`Sheet 30 of 37
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`US 9,293,545 B2
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`FIG. 30A
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`BLUEHOUSE EXHIBIT 1001
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`BLUEHOUSE EXHIBIT 1001
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