UNITED STATES PATENT AND TRADEMARK OFFICE
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`
`TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD,
`Petitioner,
`
`v.
`
`GODO KAISHA IP BRIDGE 1,
`Patent Owner.
`
`Case IPR2017-01843
`Patent 7,893,501
`
`PATENT OWNER’S DEMONSTRATIVES
`
`Demonstrative Exhibit
`
`1
`
`
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`
`TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD,
`Petitioner,
`
`v.
`
`GODO KAISHA IP BRIDGE 1,
`Patent Owner.
`
`Case IPR2017-01843
`Patent 7,893,501
`
`PATENT OWNER’S DEMONSTRATIVES
`
`Demonstrative Exhibit
`
`1
`
`
`
`’501 patent at Claim 1
`
`Demonstrative Exhibit
`
`2
`
`
`
`POR at 28
`
`’501 patent at Claim 1
`
`Demonstrative Exhibit
`
`3
`
`
`
`POR at 28
`
`’501 patent at Claim 1
`
`Demonstrative Exhibit
`
`Petition at 42
`
`4
`
`
`
`’501 patent at Claim 1
`
`Misra (Ex.-1204), Fig. 7 (annotated)
`
`POR at 6
`
`Demonstrative Exhibit
`
`POR at 28
`
`Petition at 42
`
`5
`
`
`
`BRI Of “Film” Is A Thin Coating Of One Or More Layers
`
`’501 patent at Claim 1
`
`POR at 28
`
`’501 patent at 5:60-63 (cited POR at 30)
`
`American Heritage College Dictionary
`Third Edition: Film, Ex. 2228
`Demonstrative Exhibit
`
`POR at 29
`
`6
`
`
`
`Under Patent Owner’s BRI Of “Film” All Grounds Fail
`
`POR at 28
`
`POR at 6
`
`7
`
`’501 patent at Claim 1
`
`Misra (Ex.-1204), Fig. 7 (annotated)
`
`Demonstrative Exhibit
`
`
`
`Petitioner’s Narrow Interpretation Of “Film”
`Is Not Remotely The BRI
`
`’501 patent at Claim 1
`
`Misra (Ex.-1204), Fig. 7 (annotated)
`
`POR at 6
`
`Petition at 42
`
`Demonstrative Exhibit
`
`Shanfield Opening Decl., Ex. 1202, at ¶115
`
`8
`
`
`
`Petitioner’s Narrow Interpretation Of “Film”
`No Intrinsic Support
`
`Shanfield Opening Decl., Ex. 1202, at ¶115
`
`Petition at 42-43
`
`Demonstrative Exhibit
`
`9
`
`
`
`Petitioner’s Narrow Interpretation Of “Film”
`No Intrinsic Support
`
`Shanfield Opening Decl., Ex. 1202, at ¶115
`
`Petition at 42-43
`
`Demonstrative Exhibit
`
`’501 patent at 5:60-63 (cited POR at 30)
`
`10
`
`
`
`Petitioner’s Narrow Interpretation Of “Film”
`Ignores The Specification
`
`’501 patent at 5:60-63 (cited POR at 30)
`
`Petition at 42
`
`Demonstrative Exhibit
`
`Shanfield Opening Decl., Ex. 1202, at ¶115
`
`11
`
`
`
`Shanfield Testified Petitioner’s Narrow Interpretation Of “Film”
`Is Inconsistent With Specification
`
`’501 patent at 5:60-63 (cited POR at 30)
`
`Petition at 42
`
`Shanfield Opening Decl., Ex. 1202, at ¶115
`
`Shanfield Reply Depo, Ex. 2232, at 161:10-162:15
`(cited at Patent Owner’s Observations, Paper 30, #16)
`
`Demonstrative Exhibit
`
`12
`
`
`
`’501 patent
`at 5:60-63
`(cited POR at 30)
`
`Shanfield Reply
`Depo., Ex. 2232,
`at
`33:15-35:14
`(Patent Owner’s
`Observations,
`Paper No. 30, #16)
`
`13
`
`Petition at 42
`
`Shanfield Opening Decl., Ex. 1202 at ¶115
`Demonstrative Exhibit
`
`
`
`Shanfield Incorrectly Testified That Claim 1 Requires The
`Silicon Nitride Film Impart Stress
`
`’501 patent at Claim 2
`
`’501 patent at Claim 1
`
`Demonstrative Exhibit
`
`Patent Owner’s Mot. to Exclude,
`Paper No. 31 at 5
`
`14
`
`
`
`Shanfield Reply Depo., Exhibit 2232, at 45:3-18
`(Patent Owner’s Observations, Paper No. 30, #9)
`
`Shanfield Opening Decl., Ex. 1202, at 41
`
`Shanfield Reply Depo., Exhibit 2232, at 160:20-23
`(Patent Owner’s Observations, Paper No. 30, #9)
`
`Demonstrative Exhibit
`
`15
`
`
`
`Shanfield Reply Depo., Exhibit 2232 at 50:13-20
`(Patent Owner’s Observations, Paper No. 30, #15)
`
`Shanfield Reply Depo., Exhibit 2232 at 48:14-50:5
`(Patent Owner’s Observations, Paper No. 30, #15)
`
`Demonstrative Exhibit
`
`16
`
`
`
`Petitioner’s Improper Coaching
`
`* * * *
`[omitted objections and call to the Board]
`
`Shanfield Reply Depo., Ex. 2232 at 175:17-24
`(Patent Owner’s Observations, Paper No. 30, #1)
`
`Shanfield Reply Depo., Ex. 2232 at 176:4-16
`(Patent Owner’s Observations, Paper No. 30, #1)
`
`Shanfield Reply Depo., Ex. 2232 at 167:14-21; 170:11-172:16
`(Patent Owner’s Observations, Paper No. 30, #1)
`
`Demonstrative Exhibit
`
`17
`
`
`
`Shanfield Testified A Spacer Is Not A “Film”
`
`* * * *
`
`Shanfield Opening Depo., Ex. 2210 at 289:5-18, 298:4-10
`(cited POR at 10)
`
`Shanfield Opening Depo., Ex. 2210 at 374:23-376:2
`(cited Paper No. 27 at 1)
`
`Demonstrative Exhibit
`
`18
`
`
`
`“[A] POSA would have understood that “films” and spacers
`are not mutually exclusive, and indeed it was common …
`to have a “film” act as a spacer.” (POR at 76)
`
`POR at 36
`
`Glew Decl., Ex. 2208 at ¶78 (cited at POR at 75)
`
`‘501 patent at 6:41-45
`(cited POR 36)
`
`Demonstrative Exhibit
`
`POR at 37
`
`19
`
`
`
`Misra’s Layers 20 And 23 Are Contiguous And Form
`A Film Of Silicon Nitride
`
`* * * *
`
`* * * *
`
`POR at 50
`
`Shanfield Opening Depo., Ex. 2210 at 259:18-23, 261:1-7,
`261:13-21 (cited POR at 48)
`Demonstrative Exhibit
`
`POR at 49
`POR at 49
`
`20
`
`
`
`Cross Examination Revealed Shanfield Understands That
`“Film” Has A Broader Meaning In The Art
`
`Shanfield Opening Depo., Ex. 2210 at 306:14-20
`(cited POR at 33)
`
`Demonstrative Exhibit
`
`21
`
`
`
`Cross Examination Revealed Shanfield Understands That
`“Film” Has A Broader Meaning In The Art
`
`* * * *
`
`Shanfield Depo., Ex. 2210 at 342:12-17; 343:19-24
`(cited POR at 51)
`
`Demonstrative Exhibit
`
`22
`
`
`
`Cross Examination Revealed Shanfield Understands That
`“Film” Has A Broader Meaning In The Art
`
`Shanfield Opening Depo.,
`Ex. 2209, at 54:8-55:9
`(cited POR at 47)
`
`POR at 47
`
`Demonstrative Exhibit
`
`23
`
`
`
`POR at 28
`
`’501 patent at Claim 1
`
`Demonstrative Exhibit
`
`24
`
`
`
`‘501 Patent’s Prosecution History Confirms Plain Meaning of
`The Protruding Gate Electrode Limitation
`
`8/6/2010 Amendment, Ex.1203, at 2
`
`8/6/2010 Amendment, Ex.1203, at 8 (cited in POR at 3)
`
`Demonstrative Exhibit
`
`25
`
`
`
`’501-patent (Ex.-1201), Fig. 1 (annotated)
`
`POR at 60
`
`8/6/2010 Amendment, Ex.1203, at 8 (cited in POR at 3)
`
`’501 patent at 7:5-9 (cited in POR at 59)
`
`’501-patent (Ex.-1201), Fig. 4A (annotated)
`
`POR at 60
`
`Demonstrative Exhibit
`
`’501 patent at 9:62-66 (cited in POR at 59)
`
`26
`
`
`
`’501-patent (Ex.-1201), Fig. 1 (annotated)
`
`POR at 60
`
`’501 patent at 7:5-9 (cited in POR at 59)
`
`’501-patent (Ex.-1201), Fig. 4B (annotated)
`
`’501-patent (Ex.-1201), Fig. 4A (annotated)
`
`POR at 60
`
`’501-patent (Ex.-1201), Fig. 4C (annotated)
`
`’501 patent at 9:62-66 (cited in POR at 59)
`
`Demonstrative Exhibit
`
`POR at 29
`
`27
`
`
`
`8/6/2010 Amendment, Ex.1203, at 9 (cited in POR at 3)
`
`gate
`electrode
`does not
`protrude
`
`gate
`electrode
`does not
`protrude
`
`surface level of alleged silicon
`nitride film located at both side
`surfaces of the gate electrodes
`
`Xiang (Ex.-2202), Fig. 1
`(annotated)
`
`surface level of silicon nitride
`film located at both side surfaces
`of the gate electrodes
`
`Misra (Ex.-1204), Fig. 7
`(annotated)
`
`Demonstrative Exhibit
`
`POR at 64
`
`28
`
`
`
`surface level of
`alleged silicon
`nitride film
`located at both
`side surfaces of
`the gate electrodes
`
`8/6/2010 Amendment, Ex.1203, at 9 (cited in POR at 3)
`
`gate
`electrode
`does not
`protrude
`
`gate
`electrode
`does not
`protrude
`
`Matsuda (Ex.-2203), Fig. 9A (annotated)
`
`surface level of silicon nitride
`film located at both side surfaces
`of the gate electrodes
`
`Misra (Ex.-1204), Fig. 7
`(annotated)
`
`Demonstrative Exhibit
`
`POR at 64
`
`29
`
`
`
`gate
`electrode
`does not
`protrude
`
`surface level of silicon nitride
`film located at both side
`surfaces of the gate electrodes
`
`Misra (Ex.-1204), Fig. 7
`(annotated)
`
`’501-patent (Ex.-1201), Fig. 1 (annotated)
`
`surface level of
`alleged silicon
`nitride film
`located at both
`side surfaces of
`the gate electrodes
`
`Matsuda (Ex.-2203), Fig. 9A (annotated)
`
`’501-patent (Ex.-1201), Fig. 4A (annotated)
`
`POR at 60
`
`gate
`electrode
`does not
`protrude
`
`gate
`electrode
`does not
`protrude
`
`surface level of alleged silicon
`nitride film located at both side
`surfaces of the gate electrodes
`
`Xiang (Ex.-2202), Fig. 1
`(annotated)
`
`Demonstrative Exhibit
`
`POR at 64, 65
`
`30
`
`
`
`’501-patent (Ex.-1201), Fig. 1 (annotated)
`
`POR at 60
`
`Petition at 9
`
`’501 patent at 7:5-9 (cited at POR at 60)
`
`’501-patent (Ex.-1201), Fig. 4A (annotated)
`
`POR at 60
`
`Demonstrative Exhibit
`
`’501 patent at 9:62-66 (cited at POR at 60)
`
`31
`
`
`
`Shanfield Testified He Did Not Consider If Petitioner’s Narrow
`Interpretation Of “Film” Is Consistent With The Prosecution History
`
`8/6/2010 Amendment, Ex.-1203 at 9 (cited in POR at 3)
`
`gate
`electrode
`does not
`protrude
`
`Xiang (Ex.-2202), Fig. 1
`(annotated)
`
`POR at 64
`
`Demonstrative Exhibit
`
`POR at 15
`
`
`
`3232
`
`
`
`Benefits Of The Claimed
`Protruding Gate Electrode Limitation
`
`’501 patent at Claim 2
`
`’501 patent at Claim 1
`
`Demonstrative Exhibit
`
`33
`
`
`
`Glew Decl., Ex. 2208, at ¶ 36 (cited in POR at 19)
`
`’501-patent (Ex.-1201), Fig. 1 (annotated)
`
`POR at 60
`
`‘501 Patent, Ex.-1201, Portion of Fig. 1 (annotated)
`
`Glew Decl., Ex. 2208, at ¶ 36 (cited in POR at 19)
`
`’501 patent at 4:42-52 (cited in POR at 20)
`
`Glew Decl., Ex. 2208, at ¶ 38 (cited in POR at 19)
`
`Demonstrative Exhibit
`
`34
`
`
`
`’501-patent (Ex.-1201), Fig. 1 (annotated)
`
`POR at 60
`
`’501-patent (Ex.-1201), Fig. 4B (annotated)
`
`POR at 29
`
`’501 patent at 4:50-52 (cited in POR at 19)
`
`* * * *
`
`’501 patent at 8:22-33 (Cited at POR 22)
`
`’501-patent (Ex.-1201), Fig. 4A (annotated)
`
`’501-patent (Ex.-1201), Fig. 4C (annotated)
`
`POR at 60
`
`POR at 29
`
`’501 patent at 8:1-9 (cited at POR at 20)
`
`Demonstrative Exhibit
`
`35
`
`* * * *
`
`’501 patent at 8:59-9:3 (Cited at POR at 22)
`
`
`
`Silicon nitride film
`
`Silicon nitride film
`covers more of the
`source/drain regions
`
`Silicon nitride film
`covers more of the
`source/drain regions
`and the side surface
`of the gate electrode
`
`’501 patent (Ex.-1201),
`Figures 1, 4A, and 4B (annotated)
`
`’501-patent (Ex.-1201), Fig. 1 (annotated)
`
`Glew Decl., Ex. 2208, ¶ 50 (cited in POR at 25)
`
`POR at 23-24
`
`Demonstrative Exhibit
`
`Glew Decl., Ex. 2208, ¶ 50 (cited in POR at 25)
`
`36
`
`
`
`Under Patent Owner’s BRI Of “Film” All Grounds Fail
`
`POR at 28
`
`POR at 6
`
`37
`
`’501 patent at Claim 1
`
`Misra (Ex.-1204), Fig. 7 (annotated)
`
`Demonstrative Exhibit
`
`
`
`’501 patent at Claim 1
`
`Institution Decision, Paper No. 10 at 8
`
`Misra (Ex.-1204), Fig. 7 (annotated)
`
`POR at 6
`
`Demonstrative Exhibit
`
`POR at 8
`
`38
`
`
`
`Institution Decision, Paper No. 10 at 18
`
`’501 patent at Claim 1
`
`Misra (Ex.-1204), Fig. 7 (annotated)
`
`POR at 6
`
`Demonstrative Exhibit
`
`POR at 11
`
`39
`
`
`
`Even if Misra/Tsai’s Silicon Nitride Layers 20, 23
`Are Considered Distinct Films, Misra/Tsai Still Does
`Not Satisfy The Limitations Of Claim 1 (POR at 71)
`
`Ex.1203 at 9 (cited in POR at 3)
`
`gate electrode
`does not protrude
`
`surface level of alleged silicon
`nitride film located at both side
`surfaces of the gate electrodes
`
`Xiang (Ex.-2202),
`Fig. 1 (annotated)
`
`POR at 64
`
`Petition at 43
`
`Ex.1203 at 9 (cited in POR at 3)
`
`surface level of alleged silicon
`nitride film located at both side
`surfaces of the gate electrodes
`
`’501 patent at Claim 1
`
`gate electrode
`does not protrude
`
`Demonstrative Exhibit
`
`Matsuda (Ex.-2203), Fig. 9A (annotated)
`
`POR at 65
`
`40
`
`
`
`Petitioner’s Reply Improperly Changed Petitioner’s
`Theory Of Unpatentability (Paper No. 27, at 52)
`
`* * * *
`
`Petition, Paper No. 2 at 51-52
`
`Demonstrative Exhibit
`
`Petition, Paper No. 2 at 42
`
`41
`
`
`
`Petitioner’s Reply to POR, Paper No. 22 at 4
`
`Demonstrative Exhibit
`
`42
`
`
`
`Shanfield Opening Depo., Ex.
`2210 at 287:21-288:4
`(Paper No. 27 at 1)
`
`Shanfield Reply Depo.,
`Ex. 2232 at 38:3-8
`(Patent Owner’s
`Observations, Paper No.
`30, #18)
`
`Shanfield Reply Depo.,
`Ex. 2232 at 36:18-37:7
`(Patent Owner’s
`Observations, Paper No.
`30, #17)
`
`Demonstrative Exhibit
`
`43
`
`
`
`* * * *
`
`Petitioner’s Reply to POR, Paper No. 22 at 4
`
`Ariosa Diagnostics v. Verinata Health, Inc.,
`805 F.3d 1359, 1367 (Fed. Cir. 2015)
`(cited in Patent Owner’s Identification of New
`Arguments in Petitioner’s Reply, Paper No. 27 at 2)
`
`Demonstrative Exhibit
`
`44
`
`
`
`Petitioner’s Resp. to Patent Owner’s Identification of New
`Arguments in Petitioner’s Reply, Paper No. 28 at 1
`
`Shanfield Reply Depo., Ex. 2210 at 287:21-288:4
`(cited Paper No. 27 at 1)
`
`* * * *
`
`Shanfield Reply Depo., Ex. 2232 at 38:3-8
`(Patent Owner’s Observations, Paper No. 30, #18)
`
`Ariosa, 805 F.3d at 1367 (cited in Patent Owner’s Identification
`of New Arguments in Petitioner’s Reply, Paper No. 27 at 2)
`Demonstrative Exhibit
`
`Shanfield Reply Depo., Ex. 2232 at 36:18-37:7
`(Patent Owner’s Observations, Paper No. 30, #17)
`
`45
`
`
`
`Petition at 42
`
`Shanfield Reply Depo., Ex. 2210 at 287:21-288:4
`(cited Paper No. 27 at 1)
`
`Shanfield Reply Depo., Ex. 2232 at 38:3-8
`(cited Paper Owner’s Observations, Paper No. 30, #18)
`
`Shanfield Opening Decl., Ex. 1202 at ¶115
`Demonstrative Exhibit
`
`46
`
`
`
`Petitioner’s Coaching During Deposition
`
`Demonstrative Exhibit
`
`Patent Owner’s Motion to Exclude,
`Paper No. 31 at 1
`
`47
`
`
`
`Petitioner’s Leading Questions
`
`Shanfield Reply Depo., Ex. 2232 at 160:20-23
`(Paper No. 31 at 2)
`
`Shanfield Reply Depo., Ex. 2232 at 144:1-145:17
`(Paper No. 31 at 1)
`
`Demonstrative Exhibit
`
`48
`
`
`
`Petitioner’s Leading Questions Enabled Shanfield to Answer
`Questions He Previously Could Not Answer
`
`Shanfield Reply Depo., Ex. 2232 at 144:1-12
`(Paper No. 31 at 1)
`
`Shanfield Opening Depo., Ex. 2210 at 230:15-231:7
`(Paper No. 31 at 5)
`
`Demonstrative Exhibit
`
`49
`
`
`
`Petitioner’s Improper Coaching
`
`* * * *
`[omitted objections and call to the Board]
`
`Shanfield Reply Depo., Ex. 2232 at 175:17-24
`(Paper No. 31 at 1)
`
`Shanfield Reply Depo., Ex. 2232 at 176:4-16
`(Paper No. 31 at 1)
`
`Shanfield Reply Depo., Ex. 2232 at 167:14-21; 170:11-172:16
`(Paper No. 31 at 1)
`
`Shanfield Reply Depo., Ex. 2232 at 173:1-3
`(Paper No. 31 at 8)
`Demonstrative Exhibit
`50
`
`
`
`Summary
`
`1.
`
`2.
`
`3.
`
`4.
`
`5.
`
`6.
`
`7.
`
`8.
`
`Shanfield Decl., Ex. 1202, ¶115 is verbatim
`Petition at 42
`
`“Separate structures because … different
`process steps and serve separate function.”
`Shanfield Decl., Ex. 1202, ¶115
`
`Shanfield Decl., Ex. 1202, ¶115 does not
`consider ’501 Patent at 5:60-63.
`
`“In that context … it doesn’t matter if they’re
`created by the same process.” Shanfield Reply
`Depo., Ex. 2232, at 33:15-35:14
`
`“Claim 1 … requires … stress.” Shanfield
`Reply Depo., Exhibit 2232, at 160:20-23
`
`“[Shanfield] hadn’t given thought to films that
`might have other functions.” Shanfield Reply
`Depo., Exhibit 2232 at 48:14-50:5.
`
`“Relation between dependent and
`independent claims” – “needed to be
`instructed on.” Shanfield Reply Depo., Ex.
`2232 at 175:17-24, 173:1-3
`
`“Did not even consider whether …
`interpretations … read … onto Xiang” POR
`15. Shanfield Depo., Ex.2210, at 389:8-390:2
`
`Shanfield
`
`POR
`
`“Extrinsic evidence
`confirms … a film that
`serves as a spacer …
`refer[ed] to … as a
`“film.”” POR at 36 (Ex.-
`2208(Glew-Decl.), ¶¶81-
`86).
`
`“Misra’s NF3 etch cannot
`produce fluorocarbon
`film … removes any
`fluorocarbons.” POR 49
`
`“23 … It’s a spacer, not a
`film.” Shanfield Opening
`Depo., Ex. 2210, at
`289:5-18
`
`“Layer 20 and spacers 23
`… not …in contact
`because the NF3 etch …
`produce[s] fluorocarbon
`film between the two.”
`POR 48 (Shanfield Depo.,
`Ex. 2210 at 261:13-21,
`267:7-11, 272:15-
`273:24).
`
`Demonstrative Exhibit
`
`
`
`5151
`
`
`
`Conclusion
`
`Misra (Ex.-1204), Fig. 7 (annotated)
`
`POR at 6
`
`’501 patent at Claim 1
`
`POR at 28
`
`Demonstrative Exhibit
`
`Petition at 42
`
`52
`
`
`
`Misra Is Not “Nearly Identical” To Figure 1 Of The ’501 Patent
`(POR 54)
`
`’501-patent (Ex.-1201), Fig. 1 (annotated)
`
`POR at 55
`
`’501 patent at 8:10-13 (cited at POR 55)
`
`Petition at 42
`
`Misra (Ex.-1204), Fig. 7 (annotated)
`
`POR at 56
`
`Demonstrative Exhibit
`Misra, Ex. 1204 at 6:37-40 (cited at Petition at 53)
`
`53
`
`
`
`* * * *
`
`Shanfield Reply Depo., Exhibit 2232 at 56:17-21; 57:5-58:2
`(Patent Owner’s Observations, Paper No. 30, #1)
`
`Shanfield Reply Decl., Exhibit 1232 at ¶ 20
`
`Shanfield Reply Depo., Exhibit 2232 at 160:20-23
`(Patent Owner’s Observations, Paper No. 30, #1)
`
`Demonstrative Exhibit
`
`54
`
`
`
`Shanfield Reply Depo., Ex. 2232 at 51:22-53:6
`(Paper No. 37 at 1)
`
`Shanfield Reply Depo., Ex. 2232 at 160:20-23
`(Patent Owner’s Observations, Paper No. 30, #1)
`
`Demonstrative Exhibit
`
`55
`
`
`
`Petitioner’s Reply, Paper No. 22 at 10
`
`Xiang (Ex.-2202), Fig. 1 (annotated)
`
`POR at 69
`
`Misra (Ex.-1204), Fig. 7 (annotated)
`
`POR at 69
`Demonstrative Exhibit
`
`Shanfield Reply Depo., Ex. 2232 at 78:20-80:5
`(cited Patent Owner’s Observations, Paper 30, #8)
`
`56
`
`
`
`’501 patent at Claim 1
`
`’501 patent at 5:60-63
`(cited POR at 7)
`
`POR at 28
`
`POR at 31-32
`
`Stacked layers on
`the substrate
`
`Adjacent side-by-side
`layers on the substrate
`
`Figure 1: Vertical vs. Horizontal Layers
`
`Glew Decl., Ex. 2208, ¶ 70 (cited in POR at 33)
`Demonstrative Exhibit
`
`Glew Decl., Ex. 2208, ¶ 70 (cited in POR at 33)
`
`57
`
`
`
`Shanfield Interprets The ’501 Patent Specification To Further
`Narrow Petitioner’s Interpretation of “Film”
`
`’501 patent at 5:60-63
`(cited POR at 7)
`
`Stacked layers on
`the substrate
`
`Adjacent side-by-side
`layers on the substrate
`
`Figure 1: Vertical vs. Horizontal Layers
`
`Glew Decl., Ex. 2208 at 35
`(cited POR at 19)
`
`Two films deposited side-by-side, each applying its own
`compressive stress
`
`Shanfield Reply Decl., Ex. 1232 at ¶ 40
`
`Demonstrative Exhibit
`
`58
`
`
`
`Petitioner’s Narrow Interpretation Of “Film” Is
`Inconsistent With The ’501 Patent’s Specification
`
`’501 patent at 5:60-63
`(cited POR at 7)
`
`Glew Decl., Ex.2208, ¶ 71 (cited in POR at
`33)
`
`Stacked layers on
`the substrate
`
`Adjacent side-by-side
`layers on the substrate
`
`Figure 1: Vertical vs. Horizontal Layers
`
`Glew Decl., Ex.2208, (cited in POR at 33)
`
`POR at 34
`
`Demonstrative Exhibit
`
`POR at 34, Fig. 4B
`
`59
`
`
`
`Petitioner’s Narrow Interpretation Of “Film” Is Inconsistent
`With The ‘501 Patent’s Specification
`
`Demonstrative Exhibit
`
`Glew Decl., Ex. 2208, at ¶¶ 75-77 (cited in POR at 34-35)
`
`60
`
`
`
`Petitioner’s Reply, Paper No. 22 at 10
`
`Xiang at Fig. 2
`
`Glew Decl., Ex. 2208 at ¶ 146
`(cited POR at 68)
`Demonstrative Exhibit
`
`Glew Decl., Ex. 2208 at ¶ 146
`
`61
`
`
`
`Petitioner’s Reply, Paper No. 22 at 10
`
`Demonstrative Exhibit
`
`POR, Paper No. 20, at 68-69
`
`62
`
`
`
`Xiang at Fig. 9
`
`Xiang (Ex.-2202), Fig. 1 (annotated)
`
`POR at 69
`
`Demonstrative Exhibit
`
`Glew Depo., Ex. 1231 at 127:3-129:20
`(Patent Owner’s Observations, Paper No. 30, #19)
`
`63
`
`
`
`Xiang at Fig. 9
`
`Xiang (Ex.-2202), Fig. 1 (annotated)
`
`POR at 69
`
`Shanfield Reply Depo., Ex. 2232 at 164:2-165:2
`
`Demonstrative Exhibit
`
`64
`
`
`
`’501 patent at Fig. 4a
`
`’501 patent at Fig. 1
`
`’501 patent at 5:1-15
`(Patent Owner’s Observations, Paper No. 30, #21)
`
`’501 patent at 4:61-66
`(Patent Owner’s Observations, Paper No. 30, #21)
`
`’501 patent at 7:62-64
`(Patent Owner’s Observations, Paper No. 30, #21)
`
`Demonstrative Exhibit
`’501 patent at 8:1-6
`(Patent Owner’s Observations, Paper No. 30, #21)
`
`65
`
`
`
`’501-patent (Ex.-1201), Fig. 4B (annotated)
`
`POR at 61
`
`’501-patent (Ex.-1201), Figure 4B
`(annotated, side-by-side-layers)
`
`POR at 62
`
`Demonstrative Exhibit
`
`’501 patent at 5:60-63
`(cited POR 7)
`
`66
`
`
`
`Stacked layers on
`the substrate
`
`Adjacent side-by-side
`layers on the substrate
`
`Figure 1: Vertical vs. Horizontal Layers
`
`’501 patent at Fig. 1
`
`Glew Decl., Ex. 2208, ¶ 70
`(cited POR at 32)
`
`’501 patent at Fig. 4A
`
`Two films deposited side-by-side, each applying its
`own compressive stress
`
`Shanfield Reply Decl., Ex. 1232 at 27
`
`Shanfield Reply Decl., Ex. 1232 at ¶ 40
`Demonstrative Exhibit
`
`Glew Decl., Ex. 2208 at ¶ 36
`(cited POR at 19)
`
`67
`
`
`
`Two films deposited side-by-side, each applying
`its own compressive stress
`
`Shanfield Reply Decl., Ex. 1232 ¶ 40
`
`Glew Decl., Ex. 2208 at ¶ 36
`(cited POR at 19)
`
`’501 patent at Fig. 1
`
`* * * *
`
`’501 patent at 4:61-66
`(Patent Owner’s Observations, Paper No. 30, #21)
`
`Shanfield Reply Depo., Ex. 2232 at 66:5-9; 67:2-8
`(Patent Owner’s Observations, Paper No. 30, #21)
`
`Demonstrative Exhibit
`
`68
`
`
`
`Claim 1 Does Not Only Require That The Gate Electrode
`Protrude from Some Part Of The Silicon Nitride Film
`
`Ex.-1203 at 8 (cited in POR at 3)
`
`’501-patent (Ex.-1201), Fig. 1 (annotated)
`
`POR at 60
`
`’501 patent at 9:62-66 (cited in POR 59)
`
`’501-patent (Ex.-1201), Fig. 4A (annotated)
`
`POR at 60
`
`’501-patent (Ex.-1201), Fig. 4B (annotated)
`
`’501-patent (Ex.-1201), Fig. 4C (annotated)
`
`POR at 29
`
`Demonstrative Exhibit
`
`POR at 29
`
`69
`
`
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