US005605600A
`5,605,600
`[11] Patent Number:
`United States Patent 5
`9
`9
`Feb. 25, 1997
`[45] Date of Patent:
`Mulleret al.
`
`
`NAIA ARTA
`
`[54] ETCH PROFILE SHAPING THROUGH
`WAFER TEMPERATURE CONTROL
`
`[75]
`
`Inventors: Karl P. Muller; Klaus B. Roithner,
`:
`.
`potoFWappingers a Bernhard
`>
`Pougnkeepsie,
`Watanabe, Hopwell Junction,all of
`N.Y.
`
`.
`[73] Assignees: International Business Machines
`Corporation, Armonk, N.Y.; Siemens
`Aktiengeselishaft, Munich, Germany;
`Kabushiki Kaisha Toshiba, Tokyo,
`Japan
`
`4,533,430
`8/1985 Bower o.....eesccseesssecsssessseees 156/651.1 X
`
`4,855,017
`8/1989 Douglas...........
`156/661.11 X
`4,903,754
`2/1990 Hirscher et al.
`.......cssssssessesseee 165/1
`ferns erloey Fakeset avee
`3nena
`
`.
`3963,
`oriuchi
`et
`al.
`.
`
`5,001,423
`3/1991 Abram et al. cscs 324/158
`
`3/1992 Amemiyaet al.
`5,093,579
`250/453.1
`
`10/1992 Horiuchi etal. .
`5,155,331
`219/121.43
`
`5,191,218
`3/1993 Mori etal....
`250/453.11
`
`cesesseesseeeees 156/643
`5,203,958
`4/1993 Arai et al. oo.
`12/1993 Wada crecsseccsssssscsessesnesssssssnses 165/80.1
`5,267,607
`
`....eccsssscesseeeeees 437/228
`5,270,266 12/1993 Hirano et ab.
`
`3/1994 Nozawa etal. ..
`5,290,381
`156/345
`
`6/1994 Tsuboneet al.
`.
`5,320,982
`437/228
`11/1994 Tepmann w..ccsscscsesceceeseeesssenaceees 165/1
`5,366,002
`5,458,734 10/1995 Tsukamoto .......ccsscseseceeees 156/651.1
`
`[21] Appl. No.: 402,378
`[22]
`Filed:
`Mar. 13, 1995
`
`ccccsssssssseseesssccsscesssssessesees HOIL 21/302
`[51] Tite Cae ann
`
`[52] US. Che nnceeseseeeeseceee
`. 156/643.1; 156/659.11;
`156/657.1; 156/651.1; 216/67; 216/37;
`216/80
`[58] Field of Search o.....scscsscssscssssee 156/643.1, 657.1,
`156/659.11, 651.1, 662.1, 345 P; 216/2,
`41, 67, 37, 80; 204/192.32, 192.37, 298.31
`
`[56]
`
`References Cited
`
`U.S. PATENT DOCUMENTS
`4/1981 King ou....eessseesesssessessessseeseseees 148/1.5
`
` 7/1984 Holden... _
`
`4/1985 Holden 0...cessesesessssessesessesesesees 165/1
`
`4,261,762
`4,457,359
`4,508,161
`
`Primary Examiner—William Powell
`Attorney, Agent, or Firm—Banner & Witcoff, Ltd.
`57
`ABSTRACT
`7]
`In a methodofetch profile shaping through wafer tempera-
`ture control during an etch process wherein deposition of a
`passivation film is temperature dependent, a gap between a
`Semiconductor waferto be etched anda cathodeis pressur-
`ized ata first pressure, and the pressure in the gap is changed
`to a secondpressure at a predetermined time during the etch
`process, thereby altering heat transfer from the semiconduc-
`tor wafer to the cathode. The temperature of the wafer is
`adjusted one or more times during an etching process to
`control profile shaping of deep trenches, contact holes and
`shapes for mask opening shaping during the etch process.
`
`26 Claims, 8 Drawing Sheets
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`U.S. Patent
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`Feb. 25, 1997
`
`Sheet 3 of 8
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`5,605,600
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`—@— CATHODE COOLANT AT 30°C
`—&- CATHODE COOLANT AT 10°C
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`WATERTEMPERATURE(°C)
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`ETCH TIME (min)
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`Page 4 of 15
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`U.S. Patent
`
`Feb. 25, 1997
`
`Sheet 4 of 8
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`5,605,600
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`Feb. 25, 1997
`
`Sheet 7 of 8
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`U.S. Patent
`
`5,605,600
`
`
`FIG. 6A
`
`FIG. 6B
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`Page 8 of 15
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`

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`US. Patent
`
`Feb. 25, 1997
`
`Sheet 8 of 8
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`5,605,600
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`5,605,600
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`1
`ETCH PROFILE SHAPING THROUGH
`WAFER TEMPERATURE CONTROL
`
`BACKGROUND OF THE INVENTION
`
`1. Technical Field
`
`The present invention relates to a method for forming
`specific etched shapes of deep trenches, contact holes, and
`mask openings on a semiconductor wafer. The present
`invention furtherrelates to structures formedin these etched
`openings such as capacitors which are formed in etched deep
`trenches.
`
`2. Description of Related Art
`semiconductor
`In manufacturing integrated circuits,
`wafers may be completely coated with one or morelayers of
`materials such as silicon dioxide, silicon nitride, or a metal.
`The unwanted material is then selectively removed using
`one or more etching processes, for example, by etching
`through a mask. Sometimes various patterns are etched
`directly onto the semiconductor surface. For example, cir-
`cular holes or grooves may be made where trench capacitors
`are to be formed. Most integrated circuit etching removes
`material in selected regions only and is carried out using a
`series of related processing steps. First, a semiconductor
`wafer is coated with an adherent and etch-resistant photo-
`resist. The photoresistis then selectively removed to leave a
`desired pattern. Etching is then carried out to transfer the
`mask pattern to the underlying material. The photoresist is
`then removed (stripped) and the wafer is cleaned.
`Possible kinds of etching include wet chemical, electro-
`chemical, plasma etching, reactive ion etching, ion beam
`milling, sputtering, and high-temperature vapor etching.
`Plasma etching is now commonly used in fine-geometry
`applications
`such as
`the fabrication of semiconductor
`memory devices. As the integration density of semiconduc-
`tor integrated circuits increases,
`it will be desirable to
`improve the controllability of such etching processes for
`forming specific shapes of etched features such as deep
`trenches, contact holes, and openings on a semiconductor
`wafer.
`
`SUMMARYOF THE INVENTION
`
`The instant invention relates to a method ofetch profile
`shaping through wafer temperature control wherein the
`temperature of the wafer is changed at one or more prede-
`termined times during an etching process,resulting in two or
`more distinct sidewall profiles in a single deep trench.
`Specific deep trench shapes, contact hole shapes, and shapes
`for mask open etching can be achieved by means of 1) a
`variation of the helium or other gas pressure in the gap
`between the wafer and cathode during etching (the backfill-
`ing pressure of the wafer); 2) a variation of the applied RF
`power,i.e., increasing or decreasing ion bombardmentof the
`wafer; or 3) a variation of the cathode coolant temperature.
`With reference to the method of varying the wafer back-
`filling pressure, the wafer temperature can be controlled
`effectively by changing the pressureofthe gasfilled into the
`gap between the wafer and the cathode.If this pressure is
`changed during the etch process, different taper angles for
`the upper and lower portions of the trenches can be
`achieved. This pressure change can be accomplished in a
`very short period of time and thus has an immediate effect
`on the wafer temperature.
`Accordingly, a method for etch profile shaping through
`wafer temperature control during an etch process wherein
`deposition of a passivation film is temperature dependent
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`according to the present invention includes the steps of
`pressurizing a gap between a semiconductor wafer to be
`etched and a cathode at a first pressure, and changing the
`pressure in the gap to a second pressure at a predetermined
`time during the etch process, thereby altering heat transfer
`from the semiconductor wafer to the cathode.
`
`With reference to the method of varying the applied RF
`power, wafer temperature may be effectively controlled
`during etching by increasing or decreasing the applied RF
`power, thereby respectively increasing or decreasing the ion
`bombardmentof the wafer. When the applied RF power(ion
`bombardment) is increased,
`the wafer temperature rises.
`When the applied RF power
`(ion bombardment)
`is
`decreased,
`the wafer temperature falls. By varying the
`applied RF power, the temperature of the wafer may be
`rapidly altered during the etching process.
`Accordingly, a second method for etch profile shaping
`through wafer temperature control during an etch process
`wherein deposition of a passivation film is temperature
`dependent according to the present invention includes the
`steps of applying a first level of RF powerto a wafer during
`a first time period of an etching process, and,after the first
`period of time, applying a second level of RF powerto the
`wafer, thereby rapidly altering the wafer temperature during
`the etching process.
`With reference to varying the cathode coolant tempera-
`ture, wafer temperature control during etching can be
`accomplished by altering the cathode coolant temperature,
`thereby increasing or decreasing the heat transfer from the
`wafer to the chuck and changing the temperature of the
`wafer.
`
`Accordingly, a third method for etch profile shaping
`through wafer temperature control during an etch process
`wherein deposition of a passivation film is temperature
`dependent according to the present invention includes the
`steps of applying cathode coolant ofa first temperature to a
`cathode during a first time period of an etching process, and,
`after the first period of time, applying cathode coolant at a
`second temperature to the cathode,
`thereby altering the
`wafer temperature during the etching process.
`Various additional advantages and features of novelty
`which characterize the invention are further pointed out in
`the claims that follow. However, for a better understanding
`of the invention and its advantages, reference should be
`made to the accompanying drawings and descriptive matter
`whichillustrate and describe preferred embodiments of the
`invention.
`
`BRIEF DESCRIPTION OF THE DRAWINGS
`
`FIGS. 1 and 2 illustrate deep trenches with different
`tapers.
`FIG. 3 provides a graph of the temperature change of a
`wafer during a dry etching process using cathode coolants of
`two different temperatures.
`FIG.4 provides a diagram of an etching apparatus used to
`carry out
`the etching method according to the present
`invention.
`
`FIGS. 5A and 5B illustrate deep trenches with desired
`upper and lower sidewall taper produced by the method
`according to the present invention.
`FIGS. 6A, 6B, and 6C provide diagrams of the formation
`and structure of the layers used in a deep trench etching
`process during which the method according to the present
`invention is performed.
`
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`5,605,600
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`3
`DETAILED DESCRIPTION
`
`Thepresent invention will be described below in terms of
`an etch process during the fabrication of a semiconductor
`memory device. However, the invention is not limited in this
`respect and is generally applicable to any etch process
`involving a side wall passivation film where the deposition
`of the passivation film is temperature dependent.
`The requirements for highly integrated memory chips, for
`example, 256 megabit DRAM memory chips, combine high
`aspectratio features with tight critical dimension and shape
`requirements. It has been found, for example, that the shape
`of the deep trenches in which the trench capacitors of such
`memory chips are formed is important. Vertical trench side
`walls result in maximum memory capacity of each capacitor
`formed within the deep trenches, but mayalso result in voids
`in the polysilicon whichis usedto fill the trenches. Tapered
`trench side walls produce void-free polysilicon fillings but
`reduce the memory capacitance of the capacitors. Therefore,
`the optimum trench profile has tapered upper side walls
`where voids in the polysilicon are most disturbing to the
`operation of the memory device and substantially vertical
`lower side walls in order to maximize memory capacity.
`Suchtrench capacitors require trenches having a depth of 8
`micrometers and openings approximately 0.3 micrometers
`by 0.5 micrometers in width. For void-free filling of the
`trenches, slightly tapered side walls in the upper part of the
`trench are advantageous. For example, a taper angle of
`approximately 87.5° to 88.5° from the surface of the wafer
`to a depth of approximately 1.5 micrometers of the trench is
`desirable. Below the tapered depth of approximately 1.5
`micrometers,
`the trench side walls should be vertical or
`nearly vertical to maximize the capacitor surfacearea.
`The deep trench etch process may be based on HBr/
`fluorine chemistry with small additions of oxygen. The
`oxygen forms together with silicon containing etch products
`a wall passivation film. The deposition of the side wall
`passivation film is dependent upon wafer temperature.
`Lower temperatures lead to stronger deposition, faster
`reduction mask opening diameter and thus a strongertaper.
`Higher wafer temperatures can side wall deposition to a
`point where reentrant profiles can be achieved.
`Examplesof trenches formed when a waferis held at one
`temperature during etching are illustrated in FIGS. 1 and 2.
`Use of a cathode coolant having a temperature of 10° C.
`during a deep trench etching process using HBr, NF, and O,
`results in a lower wafer temperature (e.g., 125° C.) and
`trenches being strongly tapered as shown in FIG. 1. Use of
`a cathode coolant having a temperature of 30° C. during the
`same deep trench etching process results in a higher wafer
`temperature (e.g., 145° C.) and trenches being less tapered
`as shown in FIG. 2.
`The change in taper angle of the deep trenches shown in
`FIGS.1 and 2 can becorrelated with the increasing wafer
`temperature during the etch period. Before the plasmais
`ignited, the wafer is close to ambient temperature. Shortly
`after the plasma is ignited, for example using a radio
`frequency (RF) powerof 1.3 kilowatts, the wafer tempera-
`ture increases rapidly as shown in the chart of FIG. 3 in
`which wafer temperature is plotted against time during the
`conventional dry etching process. The wafer temperatures
`are plotted for two cathode cooling fluid temperatures, 10°
`C. and 30° C. The curves showthat the wafer temperature
`tises to over 100° C.in the first minute of etching and then
`remains fairly constant over the remaining duration of the
`etching process. Within the first minute, an etch depth of
`approximately 1.5 micrometers is reached. The remaining
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`six minutes of the etching period create approximately 6
`micrometers of additional trench depth.
`A method which improvesthe controllability of the etch-
`ing process and which produces deep trenches having the
`advantageous characteristics
`set
`forth above will be
`described with reference to FIGS. 4-6. While the methodis
`described in the context of deep trench etching for a trench
`capacitor of a semiconductor memory device, it may also be
`used for etch profile shaping of contact holes, shapes for
`mask open etching and other appropriate etch processes as
`noted above.
`
`With reference to FIGS. 6A-C, deep trench etching for
`producing the desired trench profile may be performed using
`a hard mask including layers of different materials, for
`example, 800 nm TEOS (layer 601) on 240 nm of LPCVD
`(low pressure chemical vapor deposition) nitride (SIN)
`(layer 602). For example, LPCVD nitride layer 602 and
`TEOS layer 601 are successively deposited on a semicon-
`ductor substrate 604 as shown in FIG. 6A.A resist 600 is
`then formed above the TEOSlayer 601. A mask open etch
`is performed to transfer the deep trench pattern through the
`TEOSlayer 601 and the LPCVDnitride layer 602 as shown
`in FIG, 6B. Theresist layer 600 is then removed, and etching
`is performed on substrate 604 to form a deeptrench 610.
`During the etching process, a passivation film is deposited
`on the sidewalls of the TEOSlayer 601, the LPCVD nitride
`layer 602 and the trench 610. Examplesof such a deposition
`of passivation film on the sidewalls of the LPCVD nitride.
`layer 602 and trench 610 are shown in FIG. 6C markedas
`611 and 612. During the etching process, upper portions of
`the TEOSlayer 601are etched away by ion bombardmentas
`indicated by layer lines 606a—b, 607a—b, and 608a—b.
`Onetype of etch chamberstructure used to carry out the
`method according to the present invention is shown in FIG.
`4. The etch chamber100is partially surroundedbya rotating
`permanent magnet assembly 101 including a dipole ring
`permanent magnet which rotates mechanically around the
`chamberon an axis of rotation 102. Inside the etch chamber
`100, a wafer 104 is mounted on an electrostatic chuck (ESC)
`105 which suspends the wafer 104 at a distance above a
`cathode 106 to which, for example, 13.56 MHz of RF power,
`is applied through an electrode 107. A mask(e.g., layer 602
`in FIGS. 6A-C)is positioned on the surface of the semi-
`conductor wafer 104. The cathode 106is liquid cooled with
`a suitable coolantliquid at a predetermined temperature. The
`etch plasma 103is ignited at the beginning of the etching
`process in the upper portion of the etch chamber 100. The
`pressure within the etch chamber100 is kept constant during
`the etching process.
`The gap 110 between the wafer 104 and chuck 105 on the
`top and the cathode 106 onthe bottom is filled with helium
`or one or more other suitable gases with a pressure in the
`range of 1 to 10 Torr to assure a good heat transfer between
`the wafer 104 and the ESC 105. If helium gas is used, the
`ESC 105 is said to have a helium backfilling. In the
`apparatus of FIG. 4, the gap 110 is filled with gas such as
`Helium slightly after ignition of the plasma 103, as the
`plasmacreates the electric path neededto hold the wafer 104
`onto the ESC 105 when backfilling pressure is applied.
`However, other appropriate initial procedures may be used
`with other types of etching devices which are employed to
`carry out the method accordingto the presentinvention.
`In a method ofetch profile shaping through wafer tem-
`perature control according to the present invention,
`the
`gas-filled gap 110 is pressurized at a first pressure fora first
`time period duringthe etching process. Atthe end ofthefirst
`
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`5,605,600
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`5
`time period, the pressure in the gap 110 is rapidly changed
`to a second pressure for a second period of time which may
`be the remainder of the etching process time. The heat
`transfer coefficients of the gas-filled gap 110 are strongly
`pressure dependent. Furthermore, the pressure in the gap 110
`can be changed rapidly. Rapid changesto the pressure in the
`gap 110 have a significant impact on the wafer temperature
`because the heat capacity (e.g., 0.705 J/gK) of the object
`whose temperature is to be changed,i.e., the wafer 104,is
`minimal. The change in pressure affects the heat transfer
`from the wafer 104 to the cooled cathode 106 by controlling
`the thermal conductivity between the wafer 104 and the ESC
`105. A reduction in pressure reduces the heat transfer from
`the wafer 104, and thus increases the wafer temperature.
`Similarly, an increase in pressure increases heat transfer
`from the wafer 104 and thus decreases the wafer tempera-
`ture.
`
`As a result of the change in pressure in the gap 110 atthe
`endofthefirst time period, the temperature of the wafer 104
`rapidly changes, thereby determining the shape of the deep
`trenches or contact holes, or shapes for mask openetching.
`Because the pressure change may be accomplished in a very
`short time, the effect on the temperature of the wafer 104 is
`immediate. For example, the temperature of the wafer 104
`may be increased by approximately 50° C. over a time of
`several seconds.
`
`FIGS. 5A and 5Billustrate deep trenches that are formed
`using the backfilling pressure variation method according to
`the present invention. Specifically, the initial pressure of the
`helium-filled gap 110 is 15 Torr. This initial pressure is
`maintained for 70 secondsof etch time. After 70 seconds, the
`gap pressure is decreased to 5 Torr for the remaining 6
`minutes of etch time. A 30° C. coolant may be used.
`According to this particular etch process, after the plasmais
`ignited using 1.0 to 1.5 KW of RF power,
`the wafer
`temperature rises rapidly. The thermal conductivity between
`the wafer 104 and the ESC 105is relatively high to achieve
`a rapid heat transfer from the wafer 104 to the cathode 106,
`resulting in a lower wafer temperature and the desired
`tapered sidewall profile for the upper portion 501 of the
`trench. After 70 seconds, the pressure in the gap 110 is
`decreased to 5 Torr, decreasing the thermal conductivity
`between the wafer 104 and the ESC 105 and thus decreasing
`the heat transfer from the wafer 104 to the cathode 106. This
`allows the wafer 104 to heat up more, thereby reducing the
`taper and resulting in the desired vertical sidewall profile for
`the lower portion 502 of the trenches over the remaining 6
`minutes of the etching process.
`FIG.5Aillustrates the full trenches formed by the method
`according to the present invention, and FIG. 5B illustrates
`the upper portion of the trenches shown in FIG. 5A,includ-
`ing upper portion 501 and part of lower portion 502 shown
`in FIG. 5A. The taper angles of the trenches shown in FIGS.
`5A and 5B are 87.6° for the upper 1.5 micrometers (marked
`as 501) of the trenches and 90° for the lower portion (marked
`as 502) of the trenches. These trenches meet the shape
`requirements for highly integrated DRAM memory chips.
`The method of varying backfilling pressure to control
`trench profile shaping according to the present invention
`also enables control of the etch rate such that the etch rate
`may be varied one or more times during a single etching
`process. During the etching process, a passivation film, for
`example, a silicon oxide film, is continuously deposited on
`the exposed surfaces including the trench sidewalls. Ion
`bombardmentcontinually removes the deposited passivation
`film. During an etching process, it may be desirable to alter
`the equilibrium between passivation film deposition and
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`passivation film removal by ion bombardment one or more
`times, for example, to achieve a specific etch rate combined
`with a desired trench shape. For example,
`if the wafer
`temperature is raised, ion bombardment remains constant
`and deposition of the passivation film is diminished, result-
`ing in a faster silicon etch rate and a more vertical trench
`sidewall profile. If the wafer temperature is lowered, ion
`bombardment remains constant and passivation film depo-
`sition is enhanced, resulting in a reduced etch rate and a
`more tapered trench sidewall profile. Therefore, the method
`of varying wafer temperature according to the present inven-
`tion may be used to control the etch rate during a single
`etching process by varying the etch rate one or more times
`during the etching process.
`In addition to the method ofetch profile shaping through
`backfilling pressure variations described above, a second
`method of etch profile shaping through wafer temperature
`control according to the present invention is accomplished
`by varying the applied RF powerduring the etching process.
`As more RF poweris applied, the ion bombardmentof the
`water 104 increases, and the temperature of the wafer 104
`increases. If the applied RF poweris reduced, ion bombard-
`ment decreases as does the wafer 104 temperature. The
`temperature change to the wafer 104 as a result of applied
`RF power variations is rapid,
`thereby allowing for etch
`profile shaping by changing the wafer temperature at one or
`more times during the etching process.
`In the method accordingto the present invention in which
`trench profile shaping is accomplished by varying the
`applied RF power, an increase in the applied RF power may
`result in a decrease in the selection ratio or selectivity of the
`etching process. Theselectivity of the etching processis the
`ratio betweenthe etchrate of the material to be patterned and
`a material not to be etched which can be a masking material,
`e.g., TEOS in the present example, or a stopping layer. A
`high selectivity in the present example indicates that the
`material to be patterned can be etched with minimal etching
`of the masking material, while a low selectivity indicates
`that a significant amount of the masking material will also be
`etched. In the method of varying the applied RF power
`according to the present invention, as the applied RF power
`increases, the ion bombardmentof the wafer increases (the
`ion current density and energy of the ions bombarding the
`wafer and mask increase), thereby decreasing selectivity of
`the etching process. Therefore, increases in the applied RF
`power may be limited in order to achieve or maintain a
`desired selectivity.
`Further, in the method of varying the applied RF power
`according to the present invention, as increasing RF power
`is applied, the plasma constituents may also change. For
`example, if NF; gas is used in the etching process, the
`increased power may further fragment this gas. This effect
`may also limit the amount of increase of applied RF power
`during the etching process.
`A third method of etch profile shaping through wafer
`temperature control according to the present invention is
`accomplished by changing the temperature of the cathode
`coolant circulated within the cathode 106 during the etching
`process. By increasing the temperature of the cathode cool-
`ant, the heat conductivity between the wafer 104 and the
`ESC105 is decreased(less heat is transferred from the wafer
`104 to the ESC 105), thereby heating up the wafer 104. If the
`temperature of the cathode coolant is decreased, the heat
`conductivity between the wafer 104 and the ESC 105 is
`increased (moreheatis transferred from the wafer 104 to the
`ESC 105), thereby cooling the wafer 104.
`Current methods of varying the cathode coolant during
`the etching process are too slow to be used in on-line
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`5. A method according to claim 4, wherein said first level
`of RF power is less than said second level of RF power,
`thereby increasing said temperature of said waferafter said
`first time period.
`6. A method according to claim 4, wherein said first time
`periodis at least one minute.
`7. A method for etch profile shaping through wafer
`temperature control during an etching process wherein depo-
`sition of a passivation film is temperature dependent, com-
`prising the steps of:
`temperature to a
`applying cathode coolant of a first
`cathode within an etching chamber duringa first time
`period of an etching process; and
`after said first period of time, applying cathode coolant of
`a second temperature to said cathode, thereby altering
`the temperature of said wafer during the etching pro-
`cess.
`
`7
`processing of wafers. For example, a 20° C. change in
`cathode coolant temperature is accomplished over a period
`of approximately % hour. However, this method of etch
`profile shaping through wafer temperature control may be
`used in off-line applications. Also, more efficient and more
`rapid methods of varying the temperature of the cathode
`coolant will increase the applicability of this method of
`wafer temperature variation during etching.
`The three methodsofetch profile shaping throughvaria-
`tions of wafer temperature during etching according to the
`presentinvention may be used forall etch processesinvolv-
`ing a side wall passivation film where the deposition of the
`passivation film is temperature dependent. For example, a
`deep trench etch process may be based on HBr/NF, chem-
`istry with small additions of O,. The oxygen formstogether
`with the silicon-containing etch products (¢.g., SiF,) a side
`wall passivation film (e.g., SiO,). The deposition ofthe side
`wall passivation film is dependent upon the wafer tempera-
`ture. Lower temperatures lead to stronger deposition, faster
`8. A method according to claim 7, wherein said first
`reduction of the mask opening diameter, and thus a stronger
`cathode coolant temperature is less than said second cathode
`taper. Higher wafer temperatures can reduce the side wall
`coolant temperature, thereby increasing said temperature of
`deposition of the passivation film to the point where reen-
`said semiconductor wafer after said first time period.
`trant profiles can be achieved. Therefore, rapid changes in
`9. A methodof etch profile shaping through wafer tem-
`the temperature of the wafer at a predeterminedtime during
`perature control during an etch process wherein deposition
`the etching process control the etch profile shaping of the
`of a passivation film is temperature dependent, comprising
`deep trenches, contact holes, etc. As discussed above, these
`the steps of:
`rapid wafer temperature changes mayalso be usedto control
`pressurizing a gap between a semiconductor wafer and a
`the etch rate during the etching process.
`cathode at a first pressure duringafirst period of an
`In manufacturing a 256-Megabit DRAM,capacitors are
`etching process to bring the temperature of the semi-
`formed in the deep trenches whichare etched in the manner
`conductor waferto a first temperature suchthatafirst
`30
`described above. These capacitors may be formed using any
`amount of passivation film is deposited during thefirst
`known technique such as the technique described in Nesbit
`period of the etching process; and
`et al., “A 0.6 Micrometer” 256-Megabit DRAM Cell with
`Self-Aligned BuriEd STrap (BEST),” IEDM Dig. Tech.
`changing the pressure in said gap to a second pressure
`Papers, December 1993, pp. 627-630, which is expressly
`after said first period of the etching process to bring the
`incorporated herein by reference.
`temperature of the semiconductor wafer to a second
`While the present
`invention has been particularly
`temperature such that a second amount of passivation
`described with reference to the preferred embodiments, it
`film is deposited after the first period of the etching
`process.
`should be readily apparentto those of ordinary skill in the art
`that changes and modifications in form and details may be
`10. A method according to claim 9, wherein said first
`made without departing from the spirit and scope of the
`pressure is greater than said second pressure, said first
`invention. It is intended that the appended claims include
`temperature is less than said second temperature, and said
`such changes and modifications.
`first amount of deposited passivation is greater than said
`Weclaim:
`second amount of deposited passivation film.
`1. A method ofetch profile shaping wafer temperature
`11. A methodof deep trench profile shaping through wafer
`control during an etch process wherein deposition of a
`temperature control during an etch process wherein deposi-
`passivation film is temperature dependent, comprising the
`tion of a passivation film is temperature dependent, com-
`steps of:
`prising the stepsof:
`pressurizing a gap between a semiconductor wafer to be
`pressurizing a gap between a semiconductor wafer and a
`etched and a cathodeat a first pressure; and
`cathode ata first pressure during a first period of a deep
`changing the pressuring in said gap to a second pressure
`trench etching process to bring the temperature of the
`at a first time during the etch process, thereby altering
`semiconductor wafer to a first temperature such that a
`heat transfer from said semiconductor wafer to said
`first amount of passivation film is deposited on side-
`cathode.
`walls of one or more deep trenches during the first
`2. A method according to claim 1, wherein said gapis
`period of the etching process; and
`pressurized with helium gas.
`changing the pressure in said gap to a second pressure
`3. A method according to claim 1, wherein said first
`after said first period of the deeptrenchetching process
`pressure is higher than said second pressure, thereby reduc-
`to bring the temperature of the semiconductor waferto
`ing said heat transfer at said first time.
`a second temperature such that a second amount of
`4. A method for etch profile shaping through wafer
`passivation film is deposited on the sidewalls of said
`temperature control during an etching process wherein depo-
`one or more deep trenches after the first period of the
`sition of a passivation film is temperature dependent, com-
`etching process.
`prising the steps of:
`12. A method according to claim 11 wherein said first
`applying a first level of RF power to a wafer duringa first
`pressure is higher than said second pressure, said first
`time period of an etching process; and
`temperature is lower than said second temperature, and said
`after said first period of time, applying a second level of
`first amountof deposited passivation film is greater than said
`RF power to the wafer, thereby rapidly altering the
`second amount of deposited passivation film, resulting in
`temperature of said wafer during the etching process.
`said one or more deep trenches having tapered upper side-
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