`
`
`UNITED STATES PATENT AND TRADEMARK OFFICE
`__________
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`__________
`
`
`LAM RESEARCH CORP.,
`
`Petitioner
`
`v.
`
`DANIEL L. FLAMM,
`
`Patent Owner
`___________
`
`U.S. Patent No. RE40,264 E
`
`Issued: April 29, 2008
`
`Named Inventor: Daniel L. Flamm
`
`Title: MULTI-TEMPERATURE PROCESSING
`___________
`
`PETITION FOR INTER PARTES REVIEW
`
`OF U.S. PATENT NO. RE40,264 E
`
`SECOND PETITION
`
`
`
`Mail Stop: PATENT BOARD
`Patent Trial and Appeal Board
`U.S. Patent & Trademark Office
`P.O. Box 1450
`Alexandria, VA 22313-1450
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`Page 1 of 68
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`Samsung Exhibit 1019
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`IPR Case No. Unassigned
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` U.S. Patent No. RE40,264
` Petition 2
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`TABLE OF CONTENTS
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`Page
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`I.
`
`INTRODUCTION ....................................................................................... 1
`
`II. MANDATORY NOTICES PURSUANT TO 37 C.F.R. § 42.8 ................. 3
`
`A. Notice of Real Party-In-Interest (37 C.F.R. § 42.8(b)(1)) ................. 3
`
`B. Notice of Related Matters (37 C.F.R. § 42.8(b)(2)) ........................... 3
`
`C. Designation of Lead and Back-up Counsel (37 C.F.R. §
`42.8(b)(3)) .......................................................................................... 3
`
`D.
`
`E.
`
`F.
`
`Service Information (37 C.F.R. § 42.8(b)(4)) .................................... 3
`
`Payment of Fees (37 C.F.R. § 42.103) ............................................... 3
`
`Certification of Grounds for Standing (37 C.F.R. §
`42.104(a)) ........................................................................................... 4
`
`III.
`
`CHALLENGE AND RELIEF REQUESTED ............................................ 4
`
`A.
`
`Specific Art and Statutory Ground(s) on which the
`Challenges are Based ......................................................................... 4
`
`IV.
`
`THE '264 PATENT ..................................................................................... 6
`
`A.
`
`B.
`
`Representative Claim 37 .................................................................... 6
`
`The '264 Patent Disclosure ................................................................. 8
`
`1.
`
`2.
`
`3.
`
`4.
`
`Multi-Temperature Etching .................................................... 8
`
`Substrate Holder and Heat Transfer Device ........................... 8
`
`Temperature Sensor ................................................................ 8
`
`Control System ....................................................................... 9
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`V.
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`PERSON HAVING ORDINARY SKILL IN THE ART ........................... 9
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`Page
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`VI.
`
`CLAIM CONSTRUCTION ........................................................................ 9
`
`A.
`
`B.
`
`C.
`
`"portion of the film," "film portion," and "film portions" ................ 10
`
`"preselected time interval" and "preselected time period" ............... 12
`
`"etching … the portions of the film comprises radiation" ............... 12
`
`VII. THERE IS A REASONABLE LIKELIHOOD THAT AT LEAST
`ONE CLAIM OF THE '264 PATENT IS UNPATENTABLE ................ 14
`
`A. Ground 1: Claims 27, 28, 30, 33, 35-39, 42, 43, 45, 46, 49,
`51-54, 66, 67, and 69 are Rendered Obvious by Tegal in
`View of Matsumura and Narita under 35 U.S.C. § 103(a) .............. 14
`
`1.
`
`2.
`
`3.
`
`4.
`
`5.
`
`6.
`
`7.
`
`8.
`
`9.
`
`Tegal in View of Matsumura and Narita, Teaches All
`the Limitations of Independent Claim 27 ............................. 14
`
`Chart for Claim 27 ................................................................ 21
`
`Tegal in View of Matsumura and Narita Teaches All
`the Limitations of Dependent Claims 28, 30, 33, 35,
`36, and 66 .............................................................................. 24
`
`Chart for Claims 28, 30, 33, 35, 36, and 66 ......................... 27
`
`Tegal in View of Matsumura and Narita Teaches All
`the Limitations of Independent Claim 37 ............................. 28
`
`Chart for Claim 37 ................................................................ 36
`
`Tegal in View of Matsumura and Narita Teaches All
`the Limitations of Dependent Claims 38, 39, 42, 43,
`45, 46, 49, and 67 .................................................................. 40
`
`Chart for Claims 38, 39, 42, 43, 45, 46, 49, and 67 ............. 46
`
`Tegal in View of Matsumura and Narita Teaches All
`the Limitations of Independent Claim 51 ............................. 48
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`Page
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`10.
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`11.
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`12.
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`13.
`
`Chart for Claim 51 ................................................................ 51
`
`Tegal in View of Matsumura and Narita Teaches All
`the Limitations of Dependent Claims 52-54 and 69 ............. 52
`
`Chart for Claims 52-54 and 69 ............................................. 53
`
`Reasons for Combinability for Claims 27, 28, 30, 33,
`36-39, 42, 43, 45, 46, 49, 51-54, 66, 67, and 69 ................... 54
`
`14.
`
`Reasons for Combinability for Claim 35 .............................. 56
`
`B. Ground 2: Claim 29 is Rendered Obvious by Tegal in View
`of Matsumura, Narita, and Ooshio under 35 U.S.C. § 103(a) ......... 57
`
`1.
`
`2.
`
`Chart for Claim 29 ................................................................ 58
`
`Reasons for Combinability for Claim 29 .............................. 59
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`TABLE OF AUTHORITIES
`
`Page(s)
`
`
`Cases
`Agilent Techs. Inc. v. Affymetrix, Inc.,
`No. C 06-05958 JW, 2008 WL 7348188
`(N.D. Cal. June 13, 2008) ....................................................................... 10
`
`Ariosa Diagnostics v. Isis Innovation Ltd. Patent Owner,
`IPR2012-00022 (MPT), 2013 WL 2181162
`(P.T.A.B. Feb. 12, 2013) .......................................................................... 4
`
`Curtiss-Wright Flow Control Corp. v. Velan, Inc.,
`438 F.3d 1374 (Fed. Cir. 2006) .............................................................. 11
`
`Gardner v. TEC Sys., Inc.,
`725 F.2d 1338 (Fed. Cir.),
`cert. denied, 469 U.S. 830 (1984)........................................................... 21
`
`In re Alappat,
`33 F.3d 1526 (Fed. Circ. 1994) .............................................................. 41
`
`In re Freeman,
`573 F.2d 1237 (CCPA 1978) .................................................................. 41
`
`In re Keller,
`642 F.2d 413 (C.C.P.A. 1981) .................................................................. 3
`
`In re Mouttet,
`686 F.3d 1322 (Fed. Cir. 2012) ................................................................ 3
`
`In re Noll,
`545 F.2d 141 (CCPA 1976) .................................................................... 41
`
`In re Prater,
`415 F.2d at 1403 (CCPA 1969) .............................................................. 41
`
`In re Woodruff,
`919 F. 2d 1575 (Fed. Cir. 1990) ............................................................. 21
`
`
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`Page(s)
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`
`KSR Int'l. Co. v. Teleflex Inc.,
`550 U.S. 398 (2007).................................................................................. 2
`
`Sakraida v. Ag. Pro., Inc.,
`425 U.S. 273 (1976)
`(reh'g denied, 426 U.S. 955 (1976) .......................................................... 2
`
`Statutes
`
`35 U.S.C. § 102 ................................................................................................... 5
`
`35 U.S.C. § 311-319............................................................................................ 1
`
`35 U.S.C. § 314 ................................................................................................... 6
`
`Rules
`
`37 C.F.R. § 42.100 .............................................................................................. 1
`
`37 C.F.R. § 42.103 .............................................................................................. 3
`
`37 C.F.R. § 42.104 ........................................................................................ 4, 10
`
`37 C.F.R. § 42.15 ................................................................................................ 4
`
`37 C.F.R. § 42.22 ................................................................................................ 4
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`37 C.F.R. § 42.8 .................................................................................................. 3
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`EXHIBIT LIST
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`
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`
`
`Exhibit
`1001
`
`Description
`U.S. Patent No. RE40,264 (the '264 patent)
`
`1002
`
`1003
`
`1004
`
`1005
`
`1006
`
`1007
`
`1008
`
`1009
`
`1010
`
`1011
`
`1012
`
`European Patent Application Number 90304724.9 (Tegal)
`
`U.S. Patent No. 5,151,871 (Matsumura)
`
`U.S. Patent No. 4,913,790 (Narita)
`
`U.S. Patent No. 4,645,218 (Ooshio)
`
`Declaration of Joseph L. Cecchi, Ph.D.
`
`American Heritage Dictionary, Third Edition, 1993
`
`Merriam-Webster's Collegiate Dictionary, Tenth Edition, 1993
`
`Curriculum Vitae of Joseph L. Cecchi, Ph.D.
`
`'264 Patent Prosecution History, 7/25/2005 Applicant's Response
`
`Daniel L. Flamm and G. Kenneth Herb, "Plasma Etching
`Technology – An Overview" in Plasma Etching, An
`Introduction, Dennis M. Manos and Daniel L. Flamm, eds.
`(Academic Press, San Diego, 1988)
`
`J.W. Coburn and Harold F. Winters, Journal of Vacuum Science
`and Technology, 16, (1979)
`
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`IPR Case No. Unassigned
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` U.S. Patent No. RE40,264
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` Petition 2
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`In accordance with 35 U.S.C. §§ 311-319 and 37 C.F.R. § 42.100 et seq.,
`
`Petitioner Lam Research Corporation ("Lam" or "Petitioner") respectfully requests
`
`that the Board institute inter partes review of claims 27-30, 33, 35-39, 42, 43, 45,
`
`46, 49, 51-54, 66, 67, and 69 ("challenged claims") of U.S. Patent No. RE40,264 E
`
`("the '264 patent") (Ex. 1001), which is owned by Daniel L. Flamm ("Flamm" or
`
`"Patent Owner"), and cancel those claims because they are unpatentable in view of
`
`prior art patents and printed publications.
`
`I.
`
`INTRODUCTION
`
`The twenty-two claims challenged in this Petition are all directed to a
`
`method for processing a substrate in the manufacture of a semiconductor device.1
`
`In the method, a substrate is placed on a substrate holder in a chamber. The
`
`substrate holder has a temperature sensor. Some claims also recite a substrate
`
`temperature sensor, a substrate holder temperature control circuit, and a substrate
`
`temperature control circuit. The substrate is processed at a first temperature and
`
`then at a second temperature.
`
`
`1 Claims 13-26, 64, and 65 are challenged in a first IPR, filed concurrently
`
`with this IPR. Claims 27, 31, 32, 34, 37, 40, 41, 44, 47, 48, and 50 are challenged
`
`in a third IPR, filed concurrently with this IPR. Claims 51, 55-63, 68, 70, and 71
`
`are challenged in a fourth IPR, filed concurrently with this IPR.
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` Petition 2
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`As set forth below, the claims of the '264 patent are obvious because they
`
`are nothing more than the result of Flamm combining "familiar elements according
`
`to known methods" to "yield predictable results." KSR Int'l. Co. v. Teleflex Inc.,
`
`550 U.S. 398, 416 (2007). As the Supreme Court has held, "when a patent 'simply
`
`arranges old elements with each performing the same function it had been known
`
`to perform' and yields no more than one would expect from such an arrangement,
`
`the combination is obvious." Id. at 417 (quoting Sakraida v. Ag. Pro., Inc., 425
`
`U.S. 273, 282, reh'g denied, 426 U.S. 955 (1976)). The key question is whether
`
`the alleged improvement "is more than the predictable use of prior art elements
`
`according to their established functions." Id. As set forth below, the answer to this
`
`question is "no" for the '264 patent because, well before the purported invention,
`
`processing a substrate in a chamber at a first temperature and then at a second
`
`temperature was well known. Patents and printed publications predating the
`
`purported invention disclosed chambers having elements such as temperature
`
`sensors for substrate holders and substrates and control systems for accurately
`
`controlling the temperature of a substrate holder or a substrate during processing.
`
`It would have been obvious to a person having ordinary skill in the art to use
`
`the teachings of these references to practice the method of the challenged claims.
`
`Notably, "[t]he test for obviousness is not whether the features of a secondary
`
`reference may be bodily incorporated into the structure of the primary reference . .
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`. ." In re Keller, 642 F.2d 413, 425 (C.C.P.A, 1981). Rather, "obviousness focuses
`
`on what the combined teachings would have suggested." In re Mouttet, 686 F.3d
`
`1322, 1330 (Fed. Cir. 2012) (citations omitted).
`
`II. MANDATORY NOTICES PURSUANT TO 37 C.F.R. § 42.8
`A. Notice of Real Party-In-Interest (37 C.F.R. § 42.8(b)(1))
`The real-party in interest for this Petition is Lam Research Corporation.
`
`B. Notice of Related Matters (37 C.F.R. § 42.8(b)(2))
`The '264 patent is presently at issue in the declaratory judgment action Lam
`
`Research Corp. v. Daniel L. Flamm, Case 5:15-cv-01277-BLF (N.D. Cal.) and in
`
`the infringement action Daniel L. Flamm v. Samsung Electronics Co., Ltd., et al.,
`
`Case 1:15-cv-613-LY (W.D. Tex.).
`
`C. Designation of Lead and Back-up Counsel (37 C.F.R. § 42.8(b)(3))
`Lead Counsel: Michael R. Fleming (Reg. No. 67,933)
`
`Backup Counsel: Samuel K. Lu (Reg. No. 40,707)
`
`Address: Irell & Manella LLP, 1800 Avenue of the Stars, Suite 900,
`
`Los Angeles, CA 90067 | Tel: (310) 277-1010 | Fax: (310) 203-7199
`
`Service Information (37 C.F.R. § 42.8(b)(4))
`
`D.
`Please address all correspondence to the lead and backup counsel above.
`
`Petitioner also consents to email service at LamFlammIPR@irell.com.
`
`Payment of Fees (37 C.F.R. § 42.103)
`
`E.
`The Office is authorized to charge Deposit Account No. 09-0946 for any
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` Petition 2
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`fees required for this Petition, including the fee set forth in 37 C.F.R. § 42.15(a),
`
`referencing Docket No. 153405-0053 (264IPR), and for any other required fees.
`
`F. Certification of Grounds for Standing (37 C.F.R. § 42.104(a))
`Petitioner certifies that the '264 patent is eligible for inter partes review and
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`that Petitioner is not barred or estopped from requesting an inter partes review of
`
`the challenged claims of the '264 patent on the grounds identified herein.
`
`Petitioner has filed a declaratory judgment action for non-infringement of the
`
`claims of the '264 patent, Lam Research Corp. v. Daniel L. Flamm, Case 5:15-cv-
`
`01277-BLF (N.D. Cal.). Petitioner has not filed a declaratory judgment action for
`
`invalidity of the claims of the '264 patent. See, e.g., Ariosa Diagnostics v. Isis
`
`Innovation Ltd. Patent Owner, IPR2012-00022 (MPT), 2013 WL 2181162, at *5
`
`(P.T.A.B. Feb. 12, 2013). Flamm has not yet filed an answer asserting
`
`counterclaims for infringement of the '264 patent in the N.D. Cal. action.
`
`III. CHALLENGE AND RELIEF REQUESTED
`Pursuant to 37 C.F.R. § 42.22(a)(1) and §§ 42.104(b) and (b)(1), Petitioner
`
`challenges claims 27-30, 33, 35-39, 42, 43, 45, 46, 49, 51-54, 66, 67, and 69 of the
`
`'264 patent. Petitioner respectfully requests inter partes review and cancellation of
`
`the challenged claims of the '264 patent based on the grounds detailed below.
`
`A.
`
`Specific Art and Statutory Ground(s) on which the Challenges are
`Based
`
`Pursuant to 37 C.F.R. § 42.104(b)(2), inter partes review of the '264 patent
`
`
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` Petition 2
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`is requested in view of the following references, each of which is prior art to the
`
`'264 patent under 35 U.S.C. § 102(b): European Patent Application Number
`
`90304724.9 to Lachenbruch et al. ("Tegal," Ex. 1002) filed on May 1, 1990 by
`
`Tegal Corp. and published on Nov. 28, 1990 as Publication No. 0399676A1; U.S.
`
`Patent No. 5,151,871 to Matsumura et al. ("Matsumura," Ex. 1003) issued on Sept.
`
`29, 1992; U.S. Patent No. 4,913,790 to Narita et al. ("Narita," Ex. 1004) issued on
`
`April 3, 1990; and U.S. Patent No. 4,645,218 to Ooshio et al. ("Ooshio," Ex. 1005)
`
`issued on Feb. 24, 1987.
`
`Each of the above references qualifies as prior art under pre-AIA 35 U.S.C.
`
`§ 102(b) because each was published or issued more than one year prior to the
`
`earliest priority date recited by the '264 patent, Dec. 4, 1995. The references in this
`
`Petition were not before the Examiner during the prosecution of the '264 patent or
`
`its parent applications. The Petition does not present the same or substantially the
`
`same prior art or arguments previously presented during the prosecution of the '264
`
`patent or its parent applications.
`
`Petitioner requests cancellation of challenged claims 27-30, 33, 35-39, 42,
`
`43, 45, 46, 49, 51-54, 66, 67, and 69 under the following statutory grounds:
`
`References(s)
`Ground 35 U.S.C.
`1
`§ 103(a) Tegal in view of Matsumura
`and Narita
`
`2
`
`§ 103(a) Tegal in view of Matsumura,
`
`Claims
`27, 28, 30, 33, 35-39,
`42, 43, 45, 46, 49, 51-
`54, 66, 67, and 69
`29
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`Narita, and Ooshio
`
`Section VII demonstrates, for each of the statutory grounds, that there is a
`
`reasonable likelihood that the Petitioner will prevail. See 35 U.S.C. § 314(a).
`
`Additional explanation and support for each ground is set forth in the expert
`
`declaration of Joseph L. Cecchi, Ph.D. Ex. 1006.
`
`IV. THE '264 PATENT
`The '264 patent is a reissue of U.S. Patent No. 6,231,776 ("the '776 patent"),
`
`which issued from an application filed on Sept. 10, 1998, which itself is a
`
`continuation-in-part of another application filed on Dec. 4, 1995 and claims
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`priority to a provisional application filed Sept. 11, 1997. Ex. 1001-1. No matter
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`which of these dates Flamm may rely on as the priority date of the '264 patent, the
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`references relied upon in this Petition are prior art to the '264 patent because they
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`predate Dec. 4, 1995, the earliest possible priority date recited by the '264 patent.
`
`A. Representative Claim 37
`The crux of the alleged invention of the '264 patent is the straightforward
`
`and well-known method of placing a substrate on a substrate holder in a chamber
`
`and processing the substrate at different temperatures. Ex. 1006 ¶ 41. For
`
`example, claim 37 recites a method comprising the steps of (a) "placing a substrate
`
`having a film thereon on a substrate holder within a chamber of a plasma discharge
`
`apparatus;" (b) "performing a first film treatment of a first portion of the film at a
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` Petition 2
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`selected first substrate temperature;" (c) "with the substrate temperature control
`
`circuit, changing from the selected first substrate temperature to a selected second
`
`substrate temperature;" and (d) "performing a second film treatment of a second
`
`portion of the film at the selected second substrate temperature." Ex. 1001, 22:59-
`
`23:13. Notably, claim 37, unlike certain other claims of the '264 patent, does not
`
`recite etching; it instead recites "a first film treatment" and "a second film
`
`treatment." Id. at 23:6-7, 23:13-14.
`
`Claim 37 further defines "the substrate temperature control circuit" of step
`
`(c). The claim requires "the substrate temperature control circuit" to be "operable
`
`to change the substrate temperature from the selected first substrate temperature to
`
`the selected second substrate temperature within a preselected time period to
`
`process the film." Ex. 1001, 23:17-21. The claim also requires that the plasma
`
`discharge apparatus comprises (1) "a substrate temperature control system
`
`comprising a substrate temperature sensor and a substrate temperature control
`
`circuit operable to adjust the substrate temperature to a predetermined substrate
`
`temperature value with a first heat transfer process" and (2) "a substrate holder
`
`temperature control system comprising a substrate holder temperature sensor and a
`
`substrate holder temperature control circuit operable to adjust the substrate holder
`
`temperature to a predetermined substrate holder temperature value with a second
`
`heat transfer process." Id. at 22:62-23:5. But the "substrate temperature control
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`circuit" is the only one of these elements that is used for any of the method steps of
`
`claim 37; it is used for step (c). The "substrate holder temperature control system"
`
`and its underlying components are not used in any of the method steps of claim 37;
`
`Ex. 1006 ¶ 42.
`
`B.
`
`The '264 Patent Disclosure
`1. Multi-Temperature Etching
`The '264 patent discloses, a "multi-stage etching processes . . . using
`
`differing temperatures." Ex. 1001, 2:10-12. Etching may take place at a "first
`
`temperature" and then at a "second temperature." Id. at 2:53-56; Ex. 1006 ¶ 43.
`
`Substrate Holder and Heat Transfer Device
`
`2.
` The '264 patent discloses a temperature control system (Fig. 7), which "can
`
`be used to heat and/or cool the wafer chuck or substrate holder 701." Ex. 1001,
`
`16:3-5. The substrate holder is coupled to a fluid reservoir. Id. at 16:5-8. "[F]luid
`
`can be used to heat or cool the upper surface of the substrate holder." Id. at 14:62-
`
`63. The fluid "traverses through the substrate holder" and "[t]he fluid temperature
`
`selectively transfers energy in the form of heat to the wafer holder to a desirable
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`temperature." Id. at 16:11-16. The fluid is heated with an electric heater and can
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`be cooled with a "heat exchanger." Id. at 16:33-36, 16:20-21; Ex. 1006 ¶ 44.
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`Temperature Sensor
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`3.
`The '264 patent discloses sensing the substrate holder temperature, and
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`recites "[t]he temperature sensing unit can be any suitable unit that is capable of
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`being adapted to the upper surface of the substrate holder." Ex. 1001, 15:51-53;
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`Ex. 1006 ¶ 45.
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`Control System
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`4.
`The '264 patent discloses controlling the temperature of the fluid by using
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`both the measured substrate (or substrate holder) temperature and the desired
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`temperature to determine the amount of power that should be supplied to the heater
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`to heat the fluid. Ex. 1001, 16:33-46; Ex. 1006 ¶ 46.
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`V.
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`PERSON HAVING ORDINARY SKILL IN THE ART
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`A Person Having Ordinary Skill In The Art ("PHOSITA") would generally
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`have had either (i) a Bachelor's degree in engineering, physics, chemistry,
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`materials science, or a similar field, and three or four years of work experience in
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`semiconductor manufacturing or related fields, or (ii) a Master's degree in
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`engineering, physics, chemistry, materials science, or a similar field and two or
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`three years of work experience in semiconductor manufacturing or related
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`fields. Ex. 1006 ¶¶ 27-30.
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`VI. CLAIM CONSTRUCTION
`In an inter partes review, the challenged claims must be given their
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`"broadest reasonable construction" in light of the specification of the patent in
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`which they appear. 37 C.F.R. § 42.100(b). Because of this rule, for the purpose of
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`this inter partes review, Petitioner has employed the broadest reasonable
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`construction of the challenged claims throughout this Petition. The broadest
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`reasonable construction of claim terms, of course, will often be quite different from
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`the construction those terms would receive in district court claim construction
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`proceedings. See Agilent Techs. Inc. v. Affymetrix, Inc., No. C 06-05958 JW, 2008
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`WL 7348188, at *5 (N.D. Cal. June 13, 2008). Pursuant to 37 C.F.R. §
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`42.104(b)(3), the following subsections explain the proper construction of
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`particular claim terms at issue for purposes of this review. Ex. 1006 ¶ 52.
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`"portion of the film," "film portion," and "film portions"
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`A.
`The challenged claims of the '264 patent include limitations that recite
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`etching a "portion" of a film, or variants thereof. The claim terms are "portion of
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`the film" as recited by claims 27, 28, 35-37, and 51, "film portion" as recited by
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`claim 33, and "film portions" as recited by claims 51-54. In all of these claims,
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`"portion" is used according to its plain and ordinary meaning. For example, claim
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`27 recites "a substrate having a film thereon," "etching a first portion of the film,"
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`and "etching a second portion of the film." Ex. 1001, 22:13-21. Consistent with
`
`this usage, a PHOSITA would have understood, at the time of the purported
`
`invention of the '264 patent, that the broadest reasonable construction of the
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`claimed term, "portion" means part of the film. Ex. 1006 ¶ 53.
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`This understanding is consistent with dictionaries of the time. For example,
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`The American Heritage Dictionary defines "portion" as "[a] section or quantity
`
`within a larger thing; a part of a whole." Ex. 1007-3; Ex. 1006 ¶ 54. Additionally,
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`the '264 patent specification does not use the term "portion" with respect to a film
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`and does not express any intent to redefine the term. Id.
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`The doctrine of claim differentiation further supports construing "portion" to
`
`mean a part of the film. For example, independent claim 27 recites "etching a first
`
`portion of the film" and "etching a second portion of the film." Ex. 1001, 22:16-
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`18. Dependent claim 34 adds the limitation "wherein the second portion of the
`
`film comprises a material composition that is different from the material
`
`composition of the first portion of the film." Id. at 22:49-51. Consequently, where
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`the claims simply recite a first portion and a second portion (as in independent
`
`claim 27), these portions can have the same material composition. This is because
`
`dependent claim 34 explicitly provides that the first and second portions must have
`
`different material compositions. See, e.g., Curtiss-Wright Flow Control Corp. v.
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`Velan, Inc., 438 F.3d 1374, 1380 (Fed. Cir. 2006) ("'[C]laim differentiation' refers
`
`to the presumption that an independent claim should not be construed as requiring
`
`a limitation added by a dependent claim.").
`
`In sum, under the broadest reasonable construction of the claimed term,
`
`"portion of the film" means part of the film, "film portion" means part of the film,
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`and "film portions" means parts of the film. Ex. 1006 ¶ 55.
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`"preselected time interval" and "preselected time period"
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`B.
`The challenged claims of the '264 patent include limitations that recite
`
`making a temperature change within a preselected time period, or variants thereof.
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`The claim terms are "preselected time interval" as recited by claim 27 and
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`"preselected time period" as recited by claims 37 and 51. The claims use these
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`terms consistent with their plain and ordinary meanings. Nothing in the claims
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`suggests otherwise and none of these terms appear in the '264 patent specification.
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`Ex. 1006 ¶ 56. The dictionaries of the time define "preselect" as "to choose in
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`advance usu(ally) on the basis of a particular criterion." Id.; Ex. 1008-3.
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`In sum, a PHOSITA would have understood, at the time of the purported
`
`invention of the '264 patent, that the broadest reasonable construction of these
`
`claimed terms are the following: "preselected time interval" means a time interval
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`that has been selected in advance and "preselected time period" means a time
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`period that has been selected in advance. Ex. 1006 ¶ 57.
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`"etching … the portions of the film comprises radiation"
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`C.
`Claim 35 recites "etching at least one of the portions of the film comprises
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`radiation." Ex.1001, 22:52-53. The only mention of "radiation" in the '264 patent
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`specification is: "The heating elements can be any suitable device for supplying
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`heat energy to the fluid. The heat can be supplied by single or in combination using
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`radiation, conduction, and convention." Id. at 15:19-22; Ex. 1006 ¶ 58.
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`Moreover, during the prosecution of the '264 patent, the Applicant wrote the
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`following regarding then pending new claims 60 and 78, which recited the
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`limitation "wherein etching at least one portion of the film comprises radiation":
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`Applicant respectfully wishes to point out that original claims 7 and 8
`(also in provisional application No. 60/058,650) disclose first and
`second etchings which comprise radiation. Additionally, Col. 15,
`lines 16-19 teaches that "heat can be supplied by single or in
`combination using radiation, conduction and convection." Further, the
`specification of the Ser. No. 08/567,224 priority document teaches
`plasma processing and etching in which "there are proportionately
`greater amounts of heating and cooling by radiation at higher
`temperatures, since radiative energy
`transfer depends on
`the
`temperatures of surfaces which 'view' each other raised to the fourth
`power, whereas conductive and convective heat transfer often depend
`linearly on localized temperature differences." The use of an infrared
`heating unit (e.g. infrared radiation) is also mentioned in lines 19-20
`of Col. 15 of the instant specification. Accordingly, Applicant
`respectfully believes this antecedent language supports radiation.
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`Ex. 1010-18, see also Ex. 1010-7. The Applicant admitted that "etching at least
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`one of the portions of the film comprises radiation" means etching that comprises
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`heating and/or cooling by radiation. Ex. 1006 ¶ 59.
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`In sum, under the broadest reasonable construction of the claimed term,
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`"etching at least one of the portions of the film comprises radiation" means etching
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`at least one of the portions of the film comprises heating and/or cooling with
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`radiation. Ex. 1006 ¶ 60.
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`VII. THERE IS A REASONABLE LIKELIHOOD THAT AT LEAST ONE
`CLAIM OF THE '264 PATENT IS UNPATENTABLE
`
`Claims 27-30, 33, 35-39, 42, 43, 45, 46, 49, 51-54, 66, 67, and 69 of the '264
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`patent are unpatentable on the following grounds. Pursuant to 37 C.F.R. §
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`42.104(b)(4), Petitioner provides in the following claim charts a detailed
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`comparison of the claimed subject matter and the prior art specifying where each
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`element of the challenged claims is found in the prior art.
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`A. Ground 1: Claims 27, 28, 30, 33, 35-39, 42, 43, 45, 46, 49, 51-54,
`66, 67, and 69 are Rendered Obvious by Tegal in View of
`Matsumura and Narita under 35 U.S.C. § 103(a)
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`Tegal teaches the process of etching a first portion of a film (oxide) at a
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`selected first temperature (80°C) and etching a second portion of a film (oxide) at a
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`selected second temperature (40°C). Tegal, Matsumura, and Narita teach a
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`chamber, a substrate holder, and a heat transfer device that is electronically
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`controlled and sets the substrate holder to first and second temperatures. The etch
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`process taught by Tegal can be performed in this chamber. Ex. 1006 ¶ 62.
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`1.
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`Tegal in View of M
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