throbber
United States Patent [191
`Kikuda et a1.
`
`US005357478A
`[11] Patent Number:
`[45] Date of Patent:
`
`5,357,478
`Oct. 18, 1994
`
`[54]
`
`SEMICONDUCTOR INTEGRATED CIRCUIT
`DEVICE INCLUDING A PLURALITY OF
`CELL ARRAY BLOCKS
`Shigeru Kikuda; Shigeru Mori;
`[75] Inventors:
`Yoshikazu Morooka; I-Iiroshi
`Miyamoto; Makoto Suwa; Mitsuya
`Kinoshita, all of Hyogo, Japan
`Mitsubishi DenkiKabushiki Kaisha,
`Tokyo, Japan
`[21] Appl. No.:
`767,332
`Sep. 30, 1991
`[22] Filed:
`[30]
`Foreign Application Priority Data
`Oct. 5, 1990 [JP]
`Japan ................................ .. 2-268809
`
`[73] Assignee:
`
`.. ..G11C 8/00
`[51] Int.Cl.5
`[52] US. 01. ............................... .. ass/230.03; 365/51;
`365/63
`[58] Field of Search ..................... .. 365/23003, 63, 51
`[56]
`References Cited
`U.S. PATENT DOCUMENTS
`
`4,660,174 4/1987 Takemae et a1. .
`4,837,747 6/ 1989
`.... .. 365/63
`5,040,152 8/1991 Voss et al. ..
`365/230.03
`5,208,782 5/1993 Sakuta 6:21.
`365/230 03
`5,210,723 5/1993 Bates et a1.
`5,222,047 6/ 1993 Matsuda et a1. .............. .. 365/230.03
`
`FOREIGN PATENT DOCUMENTS
`
`2152752A 8/1985 United Kingdom .
`2184311A 6/1987 United Kingdom .
`
`OTHER PUBLICATIONS
`1987 IEEE International Solid-State Circuits Confer~
`ence, Digest of Technical Papers, Feb. 1987, “A 70ns
`4Mb DRAM in a 300mil DIP using 4-Layer Poly”,
`Mochizuki et a1.
`Abstract of “Nikkei Macro Device”, special edition,
`No. 1, May 1987, pp. 117-130, 63.7MM2 4M DRAM
`with Proportionally Reduced Stacked Cells.
`Primary Examiner-Eugene R. LaRoche
`Assistant Examiner—Christopher R. Glembocki
`Attorney, Agent, or Finn-Lowe, Price, LeBlanc &
`Becker
`ABSTRACT
`[57]
`A plurality of sub chips are formed on a chip. An input
`/ output buffer region is arranged around the plurality of
`sub chips. Each sub chip includes a sub chip control
`circuit region and a plurality of memory cell array
`blocks. Each memory cell array block includes a mem
`ory cell array region, a row decoder and control circuit
`region, a sense ampli?er region and an input/ output
`.
`latch regwn
`
`8 Claims, 8 Drawing Sheets
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`Page 1 of 15
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`SAMSUNG EXHIBIT 1094
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`

`

`US. Patent
`
`0a. 18, 1994
`
`Sheet 1 of 8
`
`5,357,478
`
`FIG». 1
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`Page 2 of 15
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`SAMSUNG EXHIBIT 1094
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`

`

`US. Patent
`
`Oct. 18, 1994
`
`Sheet 2 of 8
`
`5,357,478
`
`F I G. 2
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`Page 3 of 15
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`SAMSUNG EXHIBIT 1094
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`

`

`US. Patent
`
`Oct. 18, 1994
`
`Sheet 3 of 8
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`5,357,478
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`SAMSUNG EXHIBIT 1094
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`US. Patent
`
`Oct. 18, 1994
`
`Sheet 5 of 8
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`5,357,478
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`SAMSUNG EXHIBIT 1094
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`

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`US. Patent
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`Oct. 18, 1994
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`Sheet 6 of 8
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`5,357,478
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`US. Patent
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`Oct. 18, 1994
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`Sheet 7 of 8
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`5,357,478
`
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`Page 8 of 15
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`US. Patent
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`Oct. 18, 1994
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`Page 9 of 15
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`SAMSUNG EXHIBIT 1094
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`

`

`1
`
`SEMICONDUCTOR INTEGRATED CIRCUIT
`DEVICE INCLUDING A PLURALITY OF CELL
`ARRAY BLOCKS
`
`BACKGROUND OF THE INVENTION
`l. Field of the Invention
`The present invention relates generally to semicon
`ductor integrated circuit devices, and more particu
`larly, to semiconductor integrated circuit devices in
`cluding a plurality of dispersedly arranged cell array
`blocks.
`2. Description of the Related Art
`FIG. 7 is a diagram showing a layout on a conven
`tional semiconductor memory chip. An input/output
`buffer region 7 is formed on the peripheral portion of a
`semiconductor chip 1 and a chip control circuit region
`8 is formed on the central portion of semiconductor
`chip 1. Four memory cell array blocks 9 are formed on
`20
`semiconductor chip 1.
`Input/output buffer region 7 includes a bonding pad
`for inputting an externally applied signal and outputting
`a signal to the outside of the chip, a buffer for input/out
`put signals including an address signal, some of periph
`eral circuits and signal interconnection therebetween.
`A chip control circuit region 8 includes a control
`circuit for controlling each circuit in chip 1 and an
`address signal generation circuit such as a predecoder.
`Each memory cell array block 9 includes a memory
`cell array having a capacity one-fourth of the storage
`capacity of the entire chip, a decoder, a sense ampli?er,
`an input/output latch and some of control circuits for
`driving these circuits.
`FIG. 8 is a functional block diagram showing the
`detailed arrangement of the semiconductor memory of 35
`FIG. 7. Chip 1 includes bonding pads (hereinafter re
`ferred to as pads) P1-P7, an input/ output buffer circuit
`70, a chip control circuit 80 and four memory cell array
`blocks 90. Pads P1-P7 and input/output buffer circuit
`70 are formed in input/ output buffer region 7 of FIG. 7.
`Chip control circuit 80 is formed in chip control circuit
`region 8 of FIG. 7. Each memory cell array block 90
`corresponds to each memory cell array block 9 of FIG.
`7.
`
`25
`
`5,357,478
`2
`strobe signal m and the write enable signal WE. Ad
`dress buffer and predecoder 810 predecodes address
`signals A0-An and applies the predecoded signals to
`memory cell array blocks 90 and block select circuit
`809. Block select circuit 809 selects one of the four
`memory cell array blocks 90 and activates the same.
`Data input/output buffer and selector 808 applies data
`read from the selected memory cell array block 90 to
`data out buffer 801 in a reading operation. Data input
`/output buffer and selector 808 also applies data applied
`from data in buffer 802 to the selected memory cell
`array block 90 in a writing operation.
`Each memory cell array block 90 includes a memory
`cell array 901, a memory cell array block generator 902,
`a column decoder 903, a row decoder 904, an input/out
`put latch 905 and a sense ampli?er 906.
`Memory cell array block clock generator 902 con
`trols each circuit in memory cell array block 90. C01
`umn decoder 903 and row decoder 904 designate an
`address of a memory cell in memory cell array 901 in
`response to a predecoded signal. In a reading operation,
`data read from memory cell array 901 is ampli?ed by
`sense ampli?er 906 and applied to data input/output
`buffer and selector 808 through input/ output latch 905.
`In a writing operation, the data applied from data input
`/output buffer and selector 808 is written in memory
`cell array 901 through input/ output latch 905.
`An operation of the semiconductor memory will be
`schematically described with reference to FIG. 7. Data,
`address signals and control signals input through the
`pads in input/output buffer region 7 are ampli?ed by
`the input/output buffers in input/output buffer region 7
`and transmitted to chip control circuit region 8 ar
`ranged at the center of chip 1. In chip control circuit
`region 8, an address signal selects one of the four mem
`ory cell array blocks 9. A writing or reading operation
`is performed in the selected memory cell array block 9.
`In a reading operation, data read from the selected
`memory cell array block 9 is transmitted to chip control
`circuit region 8 at the center of chip 1 wherein the data
`is ampli?ed. The ampli?ed data is transmitted to input~
`/ output buffer region 7 and output to the outside of the
`chip through the output buffer and the pad.
`Thus, a control signal or an address signal generated
`in chip control circuit region 8 arranged at the center of
`chip 1 drive memory cell array blocks 9 arranged exter
`nally to chip control circuit region 8. As a result, a
`length of the interconnection between chip control
`circuit region 8 and each memory cell array block 9 is
`approximately half the longer side of chip 1, causing
`signal delay due to the interconnection.
`In order to prevent such signal delay, the size of a
`transistor for driving signals is increased, thereby en
`hancing current drivability.
`The number of signals generated in chip control cir
`cuit region 8 is several times the number of signals input
`or output from or to the outside of the chip. Thus, cir
`cuits for generating a part of the signals for driving the
`memory cell array is located in each memory cell array
`block 9. As a result, the number of signals transmitted
`from chip control circuit region 8 to each memory cell
`array block 9 is reduced to decrease the load of the
`circuits for generating the signals for driving the mem
`ory cell array, thereby achieving a high-speed operation
`and reduction in power consumption.
`However, chip control circuit region 8 arranged at
`the central portion of chip 1 increases a length of a
`
`65
`
`Input/output buffer circuit 70 includes a data out‘
`45
`buffer 801 in the ?nal stage, and a data in buffer 802,
`address buffers 803 and 804, a row address strobe buffer
`805, a column address strobe buffer 806 and a write
`enable buffer 807 all of which are in the ?rst stage.
`Data out buffer 801 outputs data Dout applied from
`chip control circuit 80 to pad P1. Data in buffer 801
`inputs external data Din applied through pad P2 to chip
`control circuit 80. Address buffers 803 and 804 input
`external address signals A0-An applied through pads
`P3 and P4 to chip control circuit 80. Row address buffer
`805, column address strobe buffer 806 and write enable
`?er 807 input external row address strobe signal
`RAS, column address strobe signal CA8 and write en
`able signal W—E applied through pads P5, P6 and P7,
`respectively, to chip control circuit 80.
`Chip control circuit 80 includes a data input/output
`buffer and selector 808, a block select circuit 809, an
`address buffer and predecoder 810 and a clock genera
`tor 811.
`Clock-generator 811 controls data input/output
`buffer and selector 808, block select circuit 809 and
`address buffer and predecoder 810 in response to the
`row address strobe signal RAS, the column address
`
`55
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`

`

`5,357,478
`4
`3
`FIG. 4 is a functional block diagram showing another
`signal interconnection between control circuits (by the
`example of the detailed arrangement of the semiconduc
`amount approximately as long as the shorter side of chip
`tor memory shown in FIG. 1.
`1).
`FIG. 5 is a diagram showing another example of an
`As described above, the length of the signal intercon
`nection between chip control circuit region 8 and each
`arrangement of a memory cell array block.
`FIG. 6 is a diagram showing a layout on a semicon
`memory cell array block 9 is increased. In addition, a
`ductor memory chip according to another embodiment
`signal interconnection is increased in such a region
`of the present invention.
`including a large number of signal interconnections as
`chip control circuit region 8. Each load capacitance is
`FIG. 7 is a diagram showing a layout on a conven
`tional semiconductor memory chip.
`also increased to increase signal delay due to the inter
`FIG. 8 is a functional block diagram showing the
`connections.
`detailed arrangement of the semiconductor memory of
`Enhancing current drivability of a signal generation
`FIG. 7.
`circuit to reduce such delay results in an increase in a
`chip area and power consumption.
`
`DESCRIPTION OF THE PREFERRED
`EMBODIMENTS
`With reference to FIG. 1 showing one embodiment
`of the present invention, four sub chips 2 are formed on
`a chip 1 and an input/output buffer region 3 is formed
`on the peripheral portion of the chip. Input/ output
`buffer region 3 includes a bonding pad for inputting an
`externally applied signal or outputting a signal to the
`outside of the chip, a buffer in a ?rst stage for input
`signals including an address signal, a buffer in a ?nal
`stage for output signals, some of peripheral circuits and
`signal interconnections therebetween.
`'
`Each sub chip 2 includes a sub chip control circuit
`region 4 and 16 memory cell array blocks 5. Sub chip
`control circuit region 4 is disposed at the center of sub
`chip 2 with eight memory cell array blocks 5 respec
`tively arranged at the opposite sides thereof.
`Each sub chip control circuit 4 includes a control
`circuit for controlling sub chips 2 and such an address
`signal generation circuit corresponding to each sub chip
`2 as a predecoder. Each sub chip 2 has an individual
`circuit arrangement.
`Each memory cell array block 5 includes a memory
`cell array having a storage capacity 1/64 of the total
`storage capacity of chip 1, a decoder, a sense ampli?er,
`an input/output latch and some of control circuits for
`driving these elements.
`FIG. 2 shows one example of an arrangement of a
`memory cell array block 5. Memory cell array block 5
`includes two memory cell array regions 5a, a sense
`ampli?er region 5b, a row decoder and control circuit
`region 50 and an input/output latch region 5d.
`FIG. 3 is a functional block diagram showing one
`example of a detailed arrangement of the semiconductor
`memory shown in FIG. 1. Chip 1 includes pads Pl-P7,
`four sub chips 20 and a chip control circuit 30. Pads
`Pl-P7 and chip control circuit 30 are included in input
`/output buffer region 3 of FIG. 1. Sub chip 20 corre
`sponds to sub chip 2 of FIG. 1.
`Each sub chip 20 includes a sub chip control circuit
`40 and 16 memory cell array blocks 50. Sub chip control
`circuit 40 is included in sub chip control circuit region
`4 of FIG. 1. Each memory cell array block 50 corre
`sponds to each memory cell array block 5 of FIG. 1.
`Chip control circuit 30 includes a data output buffer
`301 in a ?nal stage, and a data in buffer 302, address
`buffers 303 and 304, a row address strobe buffer 305, a
`column address strobe buffer 306 and a write enable
`buffer 307, all of which are in a ?rst stage.
`Data out buffer 301 outputs data Dour applied from
`one of the sub chips 20 to pad P1. Data in buffer 302
`applies external data Din supplied through pad P2 to the
`four sub chips 20. Address buffers 303 and 304 apply
`external address signals A0-A4 supplied through pads
`
`15
`
`25
`
`SUMMARY OF THE INVENTION
`An object of the present invention is to provide a
`semiconductor integrated circuit device operable at a
`high speed and requiring reduced power consumption
`with reduced signal delay caused by interconnections.
`Another object of the present invention is to provide
`a layout allowing signal delay to be reduced and an
`operation speed to be increased while reducing power
`consumption in a semiconductor integrated circuit de
`vice including a plurality of cell array blocks.
`A further object of the present invention is to reduce
`signal delay due to interconnections and power con
`sumption without increasing a chip area.
`The semiconductor ‘integrated circuit device formed
`on a chip according to the present invention includes a
`plurality of sub chips and a ?rst control circuit for con
`trolling the operation of the plurality of sub chips. Each
`of the plurality of sub chips includes a plurality of cell
`array blocks and a second control circuit arranged at
`the center of the plurality of cell array blocks for con
`trolling the operation of the plurality of cell array
`blocks. Each of the plurality of cell array blocks in
`cludes a cell array and a third control circuit for con~
`trolling the operation of the cell array.
`In the semiconductor integrated circuit device, the
`chip is divided into the plurality of sub chips each in
`cluding the second control circuit arranged therein to
`allow each sub chip to divisionally operate. Further
`more, each sub chip is divided into the plurality of cell
`array blocks each including the third control circuit
`arranged therein to allow each cell array block to divi
`sionally operate.
`As a result, such a semiconductor integrated circuit
`device can be obtained as is operable at a high speed and
`requires reduced power consumption with reduced
`signal delay due to interconnections without increasing
`a chip area.
`The foregoing and other objects, features, aspects
`and advantages of the present invention will become
`more apparent from the following detailed description
`of the present invention when taken in conjunction with
`the accompanying drawings.
`BRIEF DESCRIPTION OF THE DRAWINGS
`FIG. 1 is a diagram showing a layout on a semicon
`ductor memory chip according to one embodiment of
`the present invention.
`FIG. 2 is a diagram showing an arrangement of a
`memory cell array block included in the semiconductor
`memory of FIG. 1.
`FIG. 3 is a functional block diagram showing one
`example of the detailed arrangement of the semiconduc
`tor memory shown in FIG. 1.
`
`45
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`5,357,478
`5
`P3 and P4 to the four sub chips 20. Row address strobe
`buffer 305, column address strobe buffer 306 and write
`enable buffer 307 apply external row address strobe
`signal m, column *lddress strobe signal 6E and
`write enable signal WE respectively supplied through
`pads P5, P6 aid P7 to the four sub chips 20. Write
`enable signal WE is also applied to data in buffer 302.
`Sub chip control circuit 40 includes a data input/out
`put buffer and selector 401, a block select circuit 402, an
`address buffer and predecoder 403, a sub chip clock
`generator 404 and a column decoder 405.
`Sub chip clock generator 404 controls address buffer
`and predecoder 403, block select circuit 402 and data
`input/output buffer and selector 401 in response to the
`row address strobe signal m, the column address
`strobe signal GAS and the write enable signal W. Ad
`dress buffer and predecoder 403 predecodes the address
`signals A0—An and applies the predecoded signals to
`column decoder 405 and 16 memory cell array blocks
`50. Address buffer and predecoder 403 controls block
`20
`select circuit 402. Upon the selection of a sub chip 20 by
`address signals A0~An, block select circuit 402 selects
`one of 16 memory cell array blocks 50 and activates the
`same. Data input/output buffer and selector 401 applies
`the data read from the selected memory cell array block
`25
`50 to data output buffer 301 in a reading operation. Data
`input/output buffer and selector 401 applies the data
`applied from data in buffer 302 to the selected memory
`cell array block 50 in a writing operation.
`Each memory cell array block 50 includes a memory
`30
`cell array 501, a memory cell array block clock genera
`tor 502, a row decoder 503, an input/ output latch 504
`and a sense ampli?er 505.
`Memory cell array block clock generator 502 con
`trols row decoder 503, input/output latch 504 and sense
`ampli?er 505. Row decoder 503 and column decoder
`405 in sub chip control circuit 40 designates an address
`of a memory cell in memory cell array 501 in response
`to a predecoded signal. The data read from memory cell
`array 501 is ampli?ed by sense ampli?er 505 and applied
`to data input/output buffer and selector 401 through
`input/ output latch 504 in a reading operation. The data
`applied from data input/output buffer and selector 401
`is written in memory cell array 501 through input/out
`put latch 504 in a writing operation.
`FIG. 4 is a functional block diagram showing another
`example of a detailed arrangement of the semiconductor
`memory shown in FIG. 10 The arrangement shown in
`FIG. 4 is different from that of FIG. 3 in that chip
`control circuit 30 further includes a sub chip data input
`/output buffer and selector 308, a sub chip select and
`control circuit 309, an address buffer and predecoder (in
`a ?rst stage) 310 and a clock generator 311.
`Clock generator 311 controls sub chip data input/out
`put buffer and selector 308, sub chip select and control
`circuit 309 and address buffer and predecoder 310 in
`response to a row address strobe signal RAS, a column
`address strobe signal m and a write enable signal WE
`respectively applied from row address strobe buffer
`305, column address strobe buffer 306 and write enable
`buffer 307. Address buffer and predecoder 310 prede
`codes address signals A0-An applied from address buff
`ers 303 and 304 and applies the predecoded signals to
`four sub chips 20. Address buffer and predecoder 310
`also controls sub chip select and control circuit 309. Sub
`65
`chip select and control circuit 309 selects one of the four
`sub chips 20 and activates the same. Sub chip data input
`/0utput buffer and selector 308 applies the data applied
`
`6
`from the selected sub chip 20 to data out buffer 301 in a
`reading operation. Sub chip data input/output buffer
`and selector 308 applies the data applied from data in
`buffer 302 to the selected sub chip 20 in a writing opera
`tion.
`Sub chip control circuit 40 includes an array block
`data input/output buffer and selector 411, an array
`block select and control circuit 412, an address buffer
`and predecoder (in a second stage) 413 and a column
`decoder 405.
`Array block select and control circuit 412 controls
`array block data input/output buffer and selector 411
`and address buffer and predecoder 413. Address buffer
`and predecoder 413 further predecodes the predecoded
`signals applied from address buffer and predecoder 310
`and applies the signal to column decoder 405 and 16
`memory cell array blocks 50. Array block select and
`, control circuit 412 selects one of the 16 memory cell
`array blocks 50 and activates the same. Array block
`data input/output buffer and selector 411 applies the
`data read from the selected memory cell array block 50
`to sub chip data input/output buffer and selector 308 in
`a reading operation. Array block data input/output
`buffer and selector 410 applies the data applied from sub
`chip data input/output buffer and selector 308 to the
`selected memory cell array block 50 in a writing opera
`tion.
`The arrangement of each memory cell array block 50
`is the same as that of memory cell array block 50 shown
`in FIG. 3.
`An operation of the semiconductor memory will be
`described in the following with reference to FIG. 1.
`Data, an address signals and control signals input
`through a bonding pad in input/output buffer region 3
`are ampli?ed by an input buffer in a ?rst stage of input
`/output buffer region 3 and then transmitted to the sub
`chip control circuit 4 disposed at the center of the sub
`chip 2 selected by an address signal. In the sub chip
`control circuit region 4, the address signal selects one of
`the memory cell array blocks 5. A writing or reading
`operation is executed in the selected memory cell array
`block 5.
`In a reading operation, the data read from the se
`lected memory cell array block 5 is transmitted to the
`sub chip control circuit region 4 disposed at the center
`of the sub chip. The data is ampli?ed by the sub chip
`control circuit region 4 and the ampli?ed data is output
`to the outside of the chip through the data output buffer
`and the bonding pad in input/output buffer region 3.
`Thus, the control signals and the address signals gen
`erated in sub chip control circuit region 4 disposed at
`the center of each sub chip 2 drive a plurality of mem
`ory cell array blocks 5 arranged at the opposite sides of
`chip control circuit region 4. In this case, an intercon
`nection length between each sub chip control circuit
`region 4 and each memory cell array block 5 is approxi
`mately half the shorter side of the chip 1. Signal delay
`due to interconnections can be therefore considerably
`suppressed.
`In addition, the number of signals output from the
`predecoder is limited to the number necessary in each
`sub chip 1. Therefore, the load of each circuit in sub
`chip control circuit region 2, as well as the number of
`required circuits, is reduced. As a result, the total area
`of a region for the control circuit is not made larger
`than that of a conventional semiconductor memory.
`However, the number of signals generated in each
`sub chip control circuit region 4 is still several times the
`
`45
`
`50
`
`55
`
`Page 12 of 15
`
`SAMSUNG EXHIBIT 1094
`
`

`

`15
`
`20
`
`25
`
`5,357,478
`7
`number of signals input or output from or to the outside
`of the chip. For this reason, a part of the signals for
`driving the memory cell array is arranged in memory
`cell array block 5. In addition, only a selected memory
`cell array operates.
`As a result, the number of signals transmitted from
`each sub chip control circuit region 4 to each memory
`cell array block 5 and the load of the circuit for generat
`ing a signal for driving the memory cell array are both
`reduced. An operation speed is increased and power
`consumption is reduced as a result.
`With a sub chip control circuit region 4 arranged for
`each sub chip 2, a signal interconnection between con
`trol circuits is shorter than that of a conventional semi
`conductor memory. A signal input or output through a
`bonding pad is applied to or from sub chip control cir
`cuit region 4 of each sub chip 2 through only a buffer in
`a ?rst stage or a ?nal stage. The number of signals is
`therefore not increased from that of a conventional
`semiconductor memory. Furthermore, only a control
`circuit in a sub chip 2 selected by an address signal is
`operated, resulting in a reduction of power consump
`tion.
`According to the examples shown in FIGS. 3 and 4,
`column decoder 405 is included in sub chip control
`circuit 40. Accordingly, sense ampli?er region 5b
`shown in FIG. 2 includes sense ampli?er 505 only.
`Column decoder 405 can be provided in each memory
`cell array block 50. In this case, column decoder 405 is
`included in sense ampli?er and column decoder region
`5e as shown in FIG. 5.
`FIG. 6 shows a layout on a semiconductor memory
`chip according to another embodiment of the present
`invention.
`In FIG. 6, eight sub chips 2 are formed on a chip 1
`and an input/output buffer region 3 is formed around
`sub chips 2.
`Input/output buffer region 3 includes a bonding pad
`for inputting an externally applied signal or outputting a
`signal to the outside of the chip, a buffer in a ?rst stage
`for input signals including an address signal, an output
`buffer in a ?nal stage, some of peripheral circuits and
`signal interconnections therebetween.
`Each sub chip 2 includes a sub chip control circuit
`region 4 and eight memory cell array blocks 5. Each sub
`45
`chip control circuit region 4 is located at the center of
`sub chip 2. 8 memory cell array blocks 5 are respec
`tively arranged at the opposite sides of sub chip control
`circuit region 4. Each sub chip control circuit region 4
`includes a control circuit for controlling the sub chip 2
`and such an address signal generation circuit corre
`sponding to the sub chip 2 as a predecoder.
`Each memory cell array block 5 includes a cell array
`having a storage capacity 1/64 of the total storage ca
`pacity of chip 1, a decoder, a sense ampli?er, an input
`/output latch and some of control circuits for driving
`these elements.
`Each sub chip 2 has an individual circuit arrange
`ment. The operation of the semiconductor memory of
`FIG. 6 is the same as that of the semiconductor memory
`60
`shown in FIG. 1.
`Although the present invention has been described
`and illustrated in detail, it is clearly understood that the
`same is by way of illustration and example only and is
`not to be taken by way of limitation, the spirit and scope
`of the present invention being limited only by the terms
`of the appended claims.
`What is claimed is:
`
`8
`1. A semiconductor integrated circuit device formed
`on a chip, comprising:
`a plurality of sub chips, and
`?rst controlling means for controlling an operation of
`said plurality of sub chips,
`each of said plurality of sub chips including:
`a plurality of cell array blocks, and
`second controlling means located at the center of
`said plurality of cell array blocks for controlling
`an operation of said plurality of cell array blocks,
`each of said plurality of cell array blocks including:
`a cell array, and
`third controlling means for controlling an opera
`tion of said cell array;
`wherein said ?rst controlling means includes:
`a pad, and
`?rst buffer means for applying a signal of said pad to
`said plurality of sub chips or applying a signal ap
`plied from said plurality of sub chips to said pad;
`said second controlling means includes:
`second buffer means for applying a signal applied
`from said ?rst controlling means to said plurality of
`cell array blocks or applying a signal applied from
`said plurality of cell array blocks to said ?rst con
`trolling means,
`selecting means responsive to the signal applied from
`said ?rst controlling means for selecting one of said
`plurality of cell array blocks and activating the
`same, and
`?rst signal generating means responsive to the signal
`applied from said ?rst controlling means for gener
`ating a control signal for controlling said second
`buffer means and said selecting means; and
`said third controlling means includes:
`inputting and outputting means for inputting a signal
`applied from a corresponding second controlling
`means to said cell array or applying a signal output
`from said cell array to the corresponding second
`controlling means, and
`second control signal generating means responsive to
`the signal applied from the corresponding second
`controlling means for controlling said inputting
`and outputting means.
`2. The semiconductor integrated circuit device ac
`cording to claim 1, wherein
`said pad includes:
`a ?rst pad for inputting an externally applied data
`signal or outputting a data signal,
`a second pad for receiving an externally applied
`address signal, and
`a third pad for receiving an externally applied con
`trol signal, and
`said ?rst buffer means includes:
`first data input/output buffer for applying the data
`signal of said ?rst pad to said plurality of sub
`chips or applying the data signal applied from
`said plurality of sub chips to said ?rst pad,
`a ?rst address buffer for applying th

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