Tokyo Electron Limited
`IPR Petition for
`U.S. Patent No. RE40,264
`
`EXHIBIT 1021 Page 1
`
`

`

`Words that are believed to be registered trademarks have been
`checked with authoritative sources. No investigation has been made
`of common-law trademark rights in any word, because such inves-
`tigation is impracticable. Words that are known to have current
`registrations are shown with an initial capital and are also iden-
`tified as trademarks. The inclusion of any word in~this Dictionary
`is not, however. an expression of the publishers’ opinion as "to
`whether or not it is subject to proprietary rights. Indeed. no defi-
`nition in this Dictionary is to be regarded as afl’ecting the validity
`of any trademark.
`
`© 1969, 1970, 1971, 1973, 1975, 1976, 1978 by Houghton Mifilin Company
`All correspondence and inquiries should be directed to
`Dictionary Division, Houghton Mifflin Company
`One Beacon Street. Boston, Massachusetts 02107
`
`All rights reserved under Bern and Pan-American Copyright Conventions
`
`\
`
`ISBN: 0-395—20360-0 (new college edition; thumb-indexed)
`0.395.203597 (new college edition; plain edges)
`.
`0-395—24575-3 (high-school edition)
`:
`
`-
`
`Library of Congress Catalog Card Number 76—86995
`
`Manufactured in the United, States of America
`
`Computer-composed by Inforonics. Inc.
`in Maynard, Massachusetts
`
`EXHIBIT 1021 Page 2
`
`EXHIBIT 1021 Page 2
`Page 1
`
`

`

`footfall
`
`forb
`
`‘512
`
`.
`
`a stairway. —follow in one's footsteps. To carry on the work
`loot-fall (ftfit’fol’) n. 1. A footstep. 2. The sound made by a
`or tradition of a predecessor.
`footstep or footsteps.
`‘
`7
`foot fault. Tennis. A fault against the server called for failure to
`foot-stone (ftiit'stc‘in’) n. A marking stone placed at the foot of
`a grave.
`keep both feet‘hehind the base line.
`foot-stool (fd'ot’stiiil’) n. A low stool for supporting or resting
`foot-gear (foot’gtr’) n.. Sturdy footwear.“as shoes or boots.
`one‘s feet.
`.
`_'
`“
`‘
`foot- ill .(fdbt'hil’) n. A low hill near the base of a mountain or
`mountain range.
`‘
`.
`foot-way (fdht’wa’) n. A walk or path for pedestrians.
`foot-weir (frfiit’war’) n. Anything worn on the feet,‘-such as
`foothold '(fdfit'héld’) rt 1. A place affording support for the
`foot in climbing or standing. 2. A firm or secure position en-
`shoes or slippers.
`-.
`foot-work (fait'wurk') n. 1. The manner in which the feet are
`tary ase.
`-
`employed, as in boxing. fencing, or tennis. 2. Work done on
`abling one to proceed with confidence; especially, a secure mili-
`foot; legwork.
`foot-ing (fdbt'ing) n. 1 . A secure placement of the feet in stand-
`footgworh (flitt’worn’. -w6rn’) adj.
`1. Footsore. 2. Having
`ing or movmg. 2. A place on which one can'stand or move
`been worn down by feet, as a path or carpet.
`_
`securely. 3. A surface or the condition of a surface with respect
`foo yang (fo‘o' why).
`In Chinese cooking; an omelet'made
`to the ease with which one may walk or run on it: poorfooting
`with green peppers. bean sprouts. and onion.
`[Cantonese foo
`on the track. 4. Architecture. The supporting base or ground-
`yang tan, corresponding to Mandarin Chinesefu’ yung’ tan' :fir’
`work of a structure, as for a monument or wall." 5. A basis;
`foundation: a business begun on a good footing. OLA basis for
`tween the omelet and the
`rge showy flower).]
`yung’. hibiscus + tan', eggaarom the fancied resemblance be-
`social or business transactions with others; a standing: "These
`fop (flip) n. A vain, affected man who is preoccupied with his
`gentlemen all associate on a footing of perfect social equality"
`clothes and manners; a dandy.
`[Middle English fop, fhppe, a
`(Melville). 7. a. The totaling up “of a column of figures. b. The
`fool, perhaps akin to fobb‘en, to cheat, FOIL] '
`sum written at thefoot of a column of figures.
`'
`foot-.lnm-bort (fiiit’litn’bort) n. Abbr. IL Physics. A unit of
`fop-por-y éfdp’o-ré) n;, pl. yies. The dress or manner of'a fop.
`lummance equal to l/ir candela‘per 'square foot.
`fop-pish ( op’ish) adj. 0f, pertaining to, or characteristic of a
`foot-lo (fo'ot’l)
`intr.v. Jed, ding. 4.3. Informal.
`1. To fool
`fop; dandified. -fop’plsh-Iv adv: -fop’p'ish-nese n.
`around or waste time; tiifle.‘Used- with around or about: "not
`for (for; unstressed for) prep. 1. Directed or sent to: a, letterfor
`me. 2. Directed toward; specializuig in: an eye for pretty girls.
`used tofootllng around at the lower levels.” (Kim Philby). 2. To
`3. As a result of; out of: cryingforjoy. 4. To the extent of: The
`talk nonsense.
`‘—"n. Informal. Foolishness; nonsense; twaddle.
`[Probably a variant ofdialectal footer, probably from French
`road is pavedfor one mile. . 5. Through the length of: sit stillfor
`foutre, to copulate with, from Old French, from Latin futuere.
`an hour. 6. In order to go to: leave for Montana. 7. With an
`See hhau- in Appendix!)
`aim or View to: We swim for flat. 8. In order to have or find:
`look for a bargain. 9. In order to serve in or as: train' for the
`foot-loss (fd‘ot'li‘s) nth. _1. Without feet. 2. Without a firm
`ministry.» '10. In the amount of: a bill for three dollars,
`_11'. At
`support or basis. 3. Informal. Without thought, dexterity. or
`skill; clumsy; inept. —toot’leu-ness ll.
`the price of: buy ovdog for ten dollars. 12. In response to; as
`requital of: "Eye for eye" (Exodus 21:24). 13. Considering the
`foot-lights (fcfit’lits’) pl.n. 1. Lights placed in a row along the
`front of a stage floor: 2. The theater as a profesm'on; the stage.
`nature or usual character of: very warm for -May. 14. Ap-
`propriate or suitable to: a timefor dying. 15. At (an anticinted
`foot-ling (fo'bt'liiig) ad]. ‘Inforrnal.
`1. Foolish;
`trifling;
`insig-
`nificant. 2. Stupid; in t.
`[Present participle of FOOTLEL]
`time): an appointment for three o'clock. 16. Notwithstanding;
`despite: For all her experience, she is inefiicient. 1?. Intended to '
`foot-logic“ (ffit’lok’or n. A small trunk for storing personal
`be used as: Books arefor reading. 18. With a desire or longing
`belongings and small items of equipment; especially, one kept
`by a soldier at the foot of his bunk.
`toward: The puppy whirnpered for his supper. 19. So as to ob—
`tain: work- for a salary. 20. On behalf of: a dinner for the
`foot-loose (foot’lo‘os’) ad]. Having no attachments or ties; free
`to do as one pleases.
`‘
`,
`.
`ambassador. 21 . In place of: use artificialflowersfor real ones.
`22. In its effect on: Fresh air is good for you.‘ 23. In favor,‘
`foot-man (fdbt’mon) n., pl.
`-mon (-mln). 1.A male servant
`defense, or support of: vote for the candidate of one's choice.
`employed in the house to wait at table, attend the door, and run
`various errands.
`2. Archaic. A foot soldier;
`infantryman.
`24. Accompanying; paired with: one rotten ap lefor every good
`3. Archaic. A pedestrian.
`.
`’
`'
`one. 25. As against; as measured competitivefi' With: poundfor
`foot-mark (fd'ot’mirk’) n. A footprint.
`pound. 26. As being: We mistook her for the waitress.
`'27. In
`order to retain, conserve, or save: "Run for your life! 28. As the
`foot-note (foot‘nat') n. 1 . Abbr. in. A note placed at the‘bottom
`duty‘or task of; up to: It is for the judge to rule. —fcr to.
`of a page of a book 'or manuscript that comments on or cites a
`reference for a designated part of the text. 2. Something said or
`done after the more important work has been completed; an
`Archaic. In order to. —coru‘. Because; since. See Usage no‘tesat
`because. like. mean (verb).
`[Middle Enghsh for, 0 d English
`for (the conjunction develops from Old English phrases such as
`afterthought.
`-——tr.v. footnoted. mating. mom. 1. To furnish
`for than the. ,“for the (reason) that”). See por‘ in'Appendix.*]
`With footnotes. .2: To add further support or evidence for (a
`statement or opinion, for example).
`_
`fora. Indicates:
`fl. Exhaustion; for example, forspont. 2. Com-
`pletely; for example, forgathor.‘
`:[In Old English compounds
`foot-pace (fdbt'pis’) n. 1. A walking pace. 2. A raised platform
`in a room, as for a lecturer; dais.
`‘fl.
`.
`for-"indicates:
`l.‘ 'Incori'ectly or wrongly, as in browser. 2.
`foot-pad (fdfit'pid’) n. Archaic. A highwayman or street robber
`Destruction, as in" foido. 3. Prohibition. as in Mend. Middle
`English for», Old English for-. See por' in, Appendix.‘]
`who goes about on foot.
`[rom- + earlier pad. path. probably
`for. 1. foreign. 2. forestry.
`'
`from Middle Dutch, path (see pm— in Appendix’).]
`foot-
`‘ (fait’pith’, ~pith’) n., pl. ~paths (~phthz’, -pitltz’,
`fo-ra. Alternate plural of forum.
`-ph s’;-p§ths’). A narrow path for persons on foot; especially,
`for-age (ffir’ii. fér’-) n. 1. Food for domestic animals, such as
`one‘along the side of a highway.
`‘
`p
`'
`horses, cows. and sheep; fodder. 2. The act of looking or
`searching for such food. 3. The act of looking or searching for
`foot-pound (ftiit'pound') n. Abbr. lt-Ib A unit of worklequal to
`supplies of any kind. —v. foregod. aging, ages. —intr. 1. To
`the work done by .a force of one pound acting through a dis-
`search for food or provisions. 2. To make a raid. as for food,
`tance of one foot in the direction of the force.
`footwnd-al' (fifit’pound'l) n. A unit of work equal to the
`supplies, or anything needed or desired. —-tr. 1. To wander or
`work done by a force of one'poundal acting through .a distance
`rummage through, especially in search of provrsions. 2. To
`of one foot in'the direction of 'the force.
`raid; to plunder. 3. To provide with fodder; to feed. 4.To
`secure by searching about.
`[Middle English, from Old French
`foot-poufld-uc-ond (foht’pound’SEk'end) ad]. Abbr. fps Of,
`pertaining to, or characteristic of a system of units based on the
`‘ folurlrage, from feurre. fodder. from Germanic. See 125-
`in
`foot, the’pound, and the second as the fundamental units of
`Appendix.’] ~for’ag-er rt
`‘
`_
`length.'weight, _and time.
`forage cap. A military cap with a low, cylindrical crown and a
`foot-print (fiit’printf) n. An outline or indentation left by a
`visor worn with undress uniform; kept.
`,
`.
`'.
`For-poker, Mount (fin’hkar, for’-). A peak rismg to 17,280 feet
`foot on a surface.
`‘
`v
`'
`in Mount McKinley National Park, south-central Alaska.
`foot-rest'(f%t’rést’) rt A low stool, metal bar. or other support
`on which to rest the feet.
`fo-ra-mon (fa-ri'i‘mon) n.. pl. «amine (-rim’c-na) or men's. An
`foot-
`(f66t'r5p’) n. Nautical.
`1. A ro e attached to the
`aperture or perforation in a bone or through _a membranous
`_
`lower
`rder of-a sail. 2. A rope, rigged eneath a yard, for
`anatomical structure.
`[New Latin, from. Latin fordmen, an
`opening, from fora'rc. to bore. See char-3 in Appendix.*]
`men to stand on during the reefin’g or furling of sail.
`Man-Ion ma nutn. The large orifice in the base of the skull
`foot-rot (ffiit'rét’) n. A degenerative infection of the feet in
`through whic
`the spinal cord passes and becomes continuous
`certain hoofed animals. especially cattle or sheep. often result-
`ing in loss of the hoof.
`'
`with the medulla oblongata.
`[New Latin, “large orifice”)
`form-min-if-or-hn (for'o-m‘i‘n’c-for-an, far“) n. Also for-am
`foot: (fdots) pl.n._ The sediment that forms during the refining of
`oils and other hquids; dregs.
`_ [A plural of Poor.)
`(fér’o‘m, f5r’-), for-aomin-l-fer (fér’o-mln’o-for, fér’c). Any of the
`unicellular microorganisms of the order Foraminifera. charac—
`foot-sic (fiiit’sé) n. Informal. A flirting game in which "a couple
`touch feet or legs, usually’in secret, as under a table. —plny
`teristically haw'ng a calcareous shell with perforations‘through
`which numerous pseudopodia protrude.
`[New Latin Foramim
`tootsie with. Informal. 1. To carry on a flirtation with. espe-
`ifera : fora'men. opening, summers + -FEIt.] —te-rnm’i-nit’er-
`cially in a covert manner. 2. To court favor with br cooperate
`with deceptively or surreptitiously.
`[From root]
`ous (fo—rdm’conlf’er-os), fo-ram'i-nif'er-el adj.
`'
`'
`for-as-much as (for'oz-much' oz).
`Inasmuch as; since. -
`-
`foot soldier. A soldier who fights on foot; infantryman.
`for-av (for’i'i’) n. 1. A sudden raid or military advance. 2. A
`foot-sore (fdiit’sor', -s6r’) ad]. Having sore or tired feet from
`much walking. ——foot’soro’ness n.
`venture or initial attempt in some field.
`-—v. foreyod, -ayinp.
`foot-stalk (fiiSt’stbk’) n. Biology. A supporting stalk, such as a
`-a'ys. —lntr. To make a raid. —tr. To make a raid against; to
`peduncle or pedicel.
`plunder. . [Middle English forrai.
`from forraien,
`to foray,
`foot-stall (fofit’stol’) n. The pedestal or plinth of a pillar.
`back-formation from forreour,
`raider, plunderer, from Old
`foot-step (fdbtfswp’) n. 1 ; A step with the foot. 2. The distance
`French forn‘er, from Vulgar Latin fodrtirt‘us (unattest'ed), from
`covered by one step: a footstep away. 3. The sound of a foot
`Germanic. See pi- in Appendix.*]
`‘
`
`stepping. 4. A footprint. 5. A step up or down: thefootsteps of forb (forb) n. Any herbaceous plant other "than a grass. espe-
`‘i pat/i pay/at care/i father/b bib/ch church/d deed 5 et Ebe f t“f
`g/h llat h which '
`it/i’ pie tr
`ier ‘ ud lk kick/l lid,
`needle/m mum/n no, sudden/ng thing/o pot/5 tu/gpgw./for/t{i dogs/e55: om/&/to‘:k/& 1.35/1» pop/4 mgr/{Jagucgsh ship, dish]
`\
`
`
`
`footrop’e
`Sailors usingthe footrope
`in the furlirig of a sail
`
`EXHIBIT 1021 Page 3
`
`EXHIBIT 1021 Page 3
`Page 1
`
`