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`Published/Created
`Description
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`ISBN
`LC classification
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`1. Fundamentals of semiconductor processing technologies
`LCCN
`94037113
`Type of material
`Book
`Personal name
`El-Kareh, Badih.
`Main title
`Fundamentals of semiconductor processing technologies / by Badih El-Kareh ; graphics and layout,
`Richard J. Bombard.
`Boston : Kluwer Academic Publishers, c1995.
`xii, 599 p. : ill. ; 25 cm.
`Publisher description http://www.loc.gov/catdir/enhancements/fy0821/94037113-d.html
`Table of contents only http://www.loc.gov/catdir/enhancements/fy0821/94037113-t.html
`0792395344 (acid-free paper)
`TK7871.85 .E45 1995
`Fundamentals of semiconductor processing technologies.
`Semiconductors--Design and construction.
`Manufacturing processes.
`Cover title: Fundamentals of semiconductor processing technologies.
`Includes bibliographical references and index.
`621.3815/2
`TK7871.85 .E45 1995
`Copy 1
`Jefferson or Adams Building Reading Rooms
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`Notes
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`Dewey class no.
`CALL NUMBER
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`Request in
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`CALL NUMBER
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`TK7871.85 .E45 1995 FT MEADE
`Copy 2
`Jefferson or Adams Building Reading Rooms - STORED OFFSITE
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