`2
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`UNITED STATES PATENT AND TRADEMARK OFF ICE
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`
`INTEL CORPORATION, GLOBALFOUNDRIES U.S. INC.,
`
`AND MICRON TECHNOLOGY, INC.,
`
`Petitioners,
`
`DANIEL L. FLAMM,
`
`Patent Owner.
`
`PTAB Case No. To Be Assigned
`
`Patent No. 5,711,849
`
`POWER OF ATTORNEY
`
`Pursuant to 37 C.F.R. 42.10(b), Petitioners, Intel Corporation,
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`GLOBALFOUNDRIES US. Inc., and Micron Technology, Inc. hereby appoint the
`following lead and back-up counsel to transact all business before the Patent Trial
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`& Appeal Board of the United States Patent and Trademark Office in connection
`
`with a Petition for Inter Partes Review of U.S. Patent No. 5,711,849 entitled
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`“PROCESS OPTIMIZATION IN GAS PHASE DRY ETCHING.”
`
`
`
`Petition for Inter Partes Review of Patent No. 5,711,849
`
`Jeremy Jason Lang
`Reg. No. 73,604
`WEIL, GOTSHAL & MANGES LLP
`201 Redwood Shores Parkway
`Redwood Shores, CA 94065
`650-802-3237 (phone)
`650-802-3100 (fax)
`Attorneyfor [Micron Technology, Inc.
`
`Robert Stephen Magee
`Reg. No. 70,227
`WEIL, GOTSI-[AL & MANGES LLP
`201 Redwood Shores Parkway
`Redwood Shores, CA 94065
`650-802-3985 (phone)
`650-802-3100 (fax)
`Attorneyfor Micron Tec/analogy, Inc.
`
`Jared Bobrow
`
`Pro hac vice to be submitted
`
`WEIL, GOTSHAL & MANGES LLP
`201 Redwood Shores Parkway
`Redwood Shores, CA 94065
`650-802-3034 (phone)
`65 0-802-3 1 00 (fax)
`Attorneyfor Micron Technology, Inc.
`
`Chad Campbell
`Pro hac vice to be submitted
`
`PERKINS COIE LLP
`
`2901 N. Central Ave, Suite 2000,
`Phoenix, AZ 85012
`602-3 51-8000 (phone)
`602-648-7000 (fax)
`Atromeyfor Intel Corporcttion
`
`Jonathan McFarland
`
`Reg. No. 61,109
`PERKINS COIE LLP
`
`1201 Third Avenue, Suite 4900
`
`Seattle, WA 98101
`206-3 59-8000 (phone)
`206-359-9000 (fax)
`Arrorneyfor Intel Corporation
`
`Philip A. Morin
`Registration No. 45,926
`PERKINS COIE LLP
`
`i:.1‘
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`3:
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`3 14
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`.)
`
`
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`Petition for Inter Parres Review of Patent No. 5,71 1,849
`
`
`
`
`David M. Tennant
`
`Reg. No. 48,362
`WHITE & CASE LLP
`
`I 1988 E1Camino Real, Suite 350
`San Diego, CA 92130
`858-720-5700 (phone)
`858-720-5799 (fax)
`A1'2‘orneyfor Intel Corporarion
`
`
`
`701 Thirteenth Street, NW
`Washington, DC 20005-3807
`
`202-626-3600 (phone)
`
`202-639-9355 (fax)
`Atromeyfor CELOBA LFO UNDRIES
`U..S'. Inc.
`
`
` Nathan Zhang
`
`
`
`
`Reg. No. 71,401
`‘WHITE & CASE LLP
`
`3000 El Camino Real
`5 Palo Alto Square, 9th Fioor,
`
`Palo Alto, CA 94306
`
`650-213-0300 (phone)
`
`650—213-8158 (fax)
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`Attorneyfor GLOBALFO UNDRIES
`
`US. Inc.
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`The undersigned is authorized to Sign this Power of Attorney on behalf of
`
`Petitioner Intel Corporation.
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`Date;
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`/i/M Z7 20/<3
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`
`
`I
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`K
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`Name:
`
`Chris Kyriacou
`
`Title: Managing Counsel, Intel
`Litigation Group
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`Intel Corporation
`
`
`
`Petition for Inter Partes Review of Patent No. 5,71 1,849
`
`The undersigned is authorized to sign this Power of Attorney on behalf of
`
`Fetitioner GLOBALFOUNDRIES US. Inc.
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`Date:
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`'
`'29’!
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`— -
`KIA,
`In
`K‘
`-.
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`Name:
`
`Paula Gani
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`Title:
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`Acting General Counsel.
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`GLOBALFOUNDRIES U.S. Inc.
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`The undersigned is authorized to sign this Power of Attorney on ibehalf of
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`Petitioner Micron Technology, Inc.
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`Date: mmh 2C} ZDHQ
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`Name‘:
`
`"W. David Westergard
`
`Title:
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`Director of Patent Licensing and
`European Litigation
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`Micron Technology, Inc.