`
`BEFORE THE PA TENT TRIAL AND APPEAL BOARD
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`INTEL CORPORATION, GLOBALFOUNDRJES U.S. INC.,
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`AND MICRON TECHNOLOGY, INC.,
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`Petitioners,
`
`v.
`
`DANIEL L. FLAMM,
`
`Patent Owner.
`
`PTAB Case No. To Be Assigned
`
`Patent No. 5,711,849
`
`POWER OF ATTORNEY
`
`Pursuant to 37 C.F .R. 42.1 O(b ), Petitioners, Intel Corporation,
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`GLOBALFOUNDRIES U.S. Inc., and Micron Technology, Inc. hereby appoint the
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`following lead and back-up counsel to transact all business before the Patent Trial
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`& Appeal Board of the United States Patent and Trademark Office in connection
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`with a Petition for Inter Partes Review of U.S. Patent No. 5,711,849 entitled
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`"PROCESS OPTIMIZATION IN GAS PHASE DRY ETCHING."
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`
`
`Petition for Inter Partes Review of Patent No. 5,711,849
`
`i-=~=== ... .... , ... ·,11i\24ui$~l1'.~\Niif:1'~!:::F!(Y.;,\:)'\ T:!'.(a?i'\°)'ii;;p,;)'/fr~VBil,¢~ll'':;;c()ij$~Jf.;l,'::WM/i!U~;'i:'·Ol!i:iiiji%:
`Robert Stephen Magee
`Jeremy Jason Lang
`Reg. No. 73,604
`Reg. No. 70,227
`WEIL, GOTSHAL & MANGES LLP WEIL, GOTSHAL & MANGES LLP
`201 Redwood Shores Parkway
`201 Redwood Shores Parkway
`Redwood Shores, CA 94065
`Redwood Shores, CA 94065
`650~802-3237 (phone)
`650-802-3985 (phone)
`650-802-3100 (fax)
`650-802-3100 (fax)
`Attorney for Micron Technology, Inc.
`Attorney for Micron Technology, Inc.
`
`Jared Bobrow
`Pro hac vice to be submitted
`WEIL, GOTSHAL & MANGES LLP
`201 Redwood Shores Parkway
`Redwood Shores, CA 94065
`650-802-3034 (phone)
`650-802-3100 (fax)
`Attorney for Micron Technology, Inc.
`
`Chad Campbell
`Pro hac vice to be submitted
`PERKINS COIE LLP
`2901 N. Central Ave, Suite 2000,
`Phoenix, AZ 85012
`602-3 51-8000 (phone)
`602-648-7000 (fax)
`Attorney for Intel Corpora_tion
`
`Jonathan M.cFarland
`Reg. No. 61,109
`PERKINS COIE LLP
`1201 Third Avenue, Suite 4900
`Seattle, WA 98101
`206-359-8000 (phone)
`206-359-9000 (fax)
`Attorney for Intel Corporation
`
`Philip A. Morin
`Registration No. 45,926
`PERKINS COIE LLP
`
`2
`
`
`
`Petition for Inter Partes Review of Patent No. 5,711,849
`
`11988 El Camino Real, Suite 350
`San Diego, CA 92130
`858-720-5700 (phone)
`858-720-5799 (fax)
`Attorney for Intel Corporation
`
`David M. Tennant
`Reg. No. 48,362
`WHITE & CASE LLP
`701 Thirteenth Street, NW
`Washington, DC 20005-3807
`202-626-3600 (phone)
`202-639-9355 (fax)
`Attorney for GLOBALFOUNDRIES
`U.S. Inc.
`
`Nathan Zhang
`Reg. No. 71,401
`WHITE & CASE LLP
`3000 El Camino Real
`5 Palo Alto Square, 9th Floor,
`Palo Alto, CA 94306
`650-213-0300 (phone)
`650-213-8158 (fax)
`Attorney for GLOBALFOUNDRIES
`US. Inc.
`
`The undersigned is authorized to sign this Power of Attorney on behalf of
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`Petitioner Intel Corporation.
`
`Date: A/N. 2.1, 2o/~
`
`Name: Chris Kyriacou
`
`Title: Managing Counsel, Intel
`Litigation Group
`
`Intel Corporation
`
`3
`
`
`
`Petition for Inter Part es Review of Patent No. 5, 711,849
`
`The undersigned is authorized to sign this Power of Attorney on behalf of
`'
`
`Petitioner GLOBALFOUNDRIES U.S. Inc.
`
`Name: Paula Gani
`Title:
`Acting General Counsel
`
`GLOBALFOUNDRIES U.S. Inc.
`
`The undersigned is authorized to sign this Power of Attorney on behalf of
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`Petitioner Micron Technology, Inc.
`
`Date: Nc1wnkr 29, /_DI b
`
`Name: W. David Westergard
`Title:
`Director of Patent Licensing and
`European Litigation
`Micron Technology, Inc.
`
`4