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`BEFORE THE PATENT TRIAL AND APPEAL BOARD
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`MICRON TECHNOLOGY, INC.,
`INTEL CORPORATION, GLOBALFOUNDRIES U.S., INC., and,
`SAMSUNG ELECTRONICS COMPANY, LTD.,
`Petitioners,
`
`v.
`
`DANIEL L. FLAMM,
`
`Patent Owner.
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`PTAB Case No. IPR2017-003921
`Patent No. 5,711,849
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`PETITIONERS’ UPDATED EXHIBIT LIST
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`
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` 1
`
` Samsung Electronics Company, Ltd. was joined as a party to this proceeding via
`Motion for Joinder in IPR2017-01747.
`
`
`
`PTAB Case No. IPR 2017-00392
`Patent No. 5,711,849
`Petitioners’ Updated Exhibit List
`
`Updated Exhibit List
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`
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`Exhibit #
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`Description
`
`1001
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`1002
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`1003
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`1004
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`1005
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`1006
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`1007
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`1008
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`1009
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`1010
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`1011
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`U.S. Patent No. 5,711,849 (“849 Patent”)
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`File History for U.S. Patent No. 5,711,849
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`Declaration of Dr. David Graves (“Graves Decl.”)
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`Curriculum Vitae of Dr. David Graves
`
`Alkire et al., “Transient Behavior during Film Removal in
`Diffusion-Controlled Plasma Etching,” J. Electrochem. Soc.:
`Solid-State Science and Technology, March 1985, pp. 648-656
`(“Alkire”)
`
`Kao et al., “Analysis of Nonuniformities in the Plasma Etching of
`Silicon with CF4/O2,” J. Electrochem. Soc., Vol. 137 No. 3, March
`1990, pp. 954-960 (“Kao”)
`
`Flamm et al., “The Reaction of Fluorine Atoms With Silicon,”
`Journal of Applied Physics, Vol. 52 No. 5, May 1981, pp. 3633-
`3639 (“Flamm”)
`
`K. F. Jensen, “Chemical Engineering in the Processing of
`Electronic and Optical Materials: A Discussion,” Adv. Chem. Eng.,
`16(9): 395-412 (1991).
`
`K. F. Jensen and D. B. Graves, “Modeling and Analysis of Low
`Pressure CVD Reactors,” J. Electrochem. Soc., 130(9): 1950-1957
`(1983).
`
`D. W. Hess and K. F. Jensen, eds., Microelectronics Processing,
`221(7-8): 362, 377-440 (May 5, 1989).
`
`K. F. Jensen, “Micro-Reaction Engineering: Applications of
`Reaction Engineering to Processing of Electronic and Photonic
`Materials,” Chem. Eng. Sci., 42(5): 923-958 (1987).
`
`1012
`
`U.S. Patent No. 4,918,031 (“Flamm 031”)
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`
`
`PTAB Case No. IPR 2017-00392
`Patent No. 5,711,849
`Petitioners’ Updated Exhibit List
`
`U.S. Patent No. 5,304,282 (“Flamm 282”)
`
`U.S. Patent No. 4,815,201 (“Harris 201”)
`
`U.S. Patent No. 5,453,157 (“Jeng 157”)
`
`Declaration of Mariellen F. Calter (“Calter Decl.”)
`
`Dennis M. Manos and Daniel L. Flamm, Plasma Etching: An
`Introduction, Academic Press, 1989.
`
`Steinfeld et al., Chemical Kinetics and Dynamics, Prentice Hall,
`Inc., 1989.
`
`Petition for Inter Partes Review, Lam Research Corp. v. Daniel L.
`Flamm, IPR2016-00466.
`
`S.M. Sze, VLSI Technology, McGraw-Hill Book Company, 1983.
`
`George B. Thomas, Jr., Calculus and Analytic Geometry, 4th Ed.,
`Addison-Wesley Publishing Company, 1968.
`
`Affidavit of Jared Bobrow in Support of Petitioner’s Motion for
`Admission Pro Hac Vice
`
`Affidavit of Chad S. Campbell in Support of Petitioners’ Motion
`for Pro Hac Vice Admission Under 37 C.F.R. §42.1(c)
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`Reply Declaration of Dr. David Graves (“Graves Reply Decl.”)
`
`Micron’s Hearing Demonstratives
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`1013
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`1014
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`1015
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`1016
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`1017
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`1018
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`1019
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`1020
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`1021
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`1022
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`1023
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`1024
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`1025
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`Dated: March 5, 2018
`
`
`WEIL, GOTSHAL & MANGES LLP
`201 Redwood Shores Parkway
`Redwood Shores, CA 94065
`650-802-3237
`
`PERKINS COIE LLP
`1201 Third Avenue, Suite 4900
`Seattle, WA 98101
`206-359-8000
`
`WHITE & CASE LLP
`701 Thirteenth Street, NW
`Washington, DC 20005-3807
`202-626-3600
`
`PTAB Case No. IPR 2017-00392
`Patent No. 5,711,849
`Petitioners’ Updated Exhibit List
`
`
`Respectfully submitted,
`
`
`
`Lead Counsel
`Jeremy Jason Lang, Reg. No. 73,604
`
`Back-up Counsel
`Robert Stephen Magee, Reg. No. 70,227
`Jared Bobrow, Pro Hac Vice
`Chad Campbell, Pro Hac Vice
`Jonathan McFarland, Reg. No. 61,109
`Philip A. Morin, Reg. No. 45,926
`David M. Tennant, Reg. No. 48,362
`Nathan Zhang, Reg. No. 71,401
`
`Attorneys for Petitioners
`
`
`
`
`
`PTAB Case No. IPR 2017-00392
`Patent No. 5,711,849
`Petitioners’ Updated Exhibit List
`CERTIFICATE OF SERVICE
`
`The undersigned hereby certifies that a true copy of the foregoing
`
`
`
`
`UPDATED EXHIBIT LIST has been served in its entirety this 5th day of March,
`
`2018, by electronic mail on Patent Owner via its attorneys of record:
`
`LEAD COUNSEL
`Justin J. Lesko
`justinlesko@patentit.com
`Registration No. 69,643
`Law Offices of Steve G. Lisa, Ltd.
`7689 East Paradise Lane, Suite 2
`Scottsdale, AZ 85260
`(773) 484-3285
`
`Dated: March 5, 2018
`
`
`WEIL, GOTSHAL & MANGES LLP
`201 Redwood Shores Parkway
`Redwood Shores, CA 94065
`650-802-3237
`
`PERKINS COIE LLP
`1201 Third Avenue, Suite 4900
`Seattle, WA 98101
`206-359-8000
`
`WHITE & CASE LLP
`701 Thirteenth Street, NW
`Washington, DC 20005-3807
`202-626-3600
`
`
`
`
`
`BACK-UP COUNSEL
`Rolf O. Stadheim
`stadheim@stadheimgrear.com
`Stadheim & Grear, Ltd.
`7689 East Paradise Lane, Suite 2
`Scottsdale, AZ 85260
`(480) 998-3547
`
`Respectfully submitted,
`
`
`
`Lead Counsel
`Jeremy Jason Lang, Reg. No. 73,604
`
`Back-up Counsel
`Robert Stephen Magee, Reg. No. 70,227
`Jared Bobrow, Pro Hac Vice
`Chad Campbell, Pro Hac Vice
`Jonathan McFarland, Reg. No. 61,109
`Philip A. Morin, Reg. No. 45,926
`David M. Tennant, Reg. No. 48,362
`Nathan Zhang, Reg. No. 71,401
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`Attorneys for Petitioners
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`