,'1
`
`: TTC~Palo Alto
`
`FAX NO.
`
`650 326 2422
`
`Aug. 31 1999 04:14PM P1
`
`Atty Docket No. 16655-000311
`
`PTOFAXNO.:
`
`(703) 3084426
`
`'
`ATTENTION:
`
`Examiner L. Scheiner
`Group Art Unit 1648
`
`OFFICIAL COMMUNICATION
`
`FOR THE PERSONAL ATTENTION OF
`
`EXAMINER L. SCHEINER
`
`CERTIFICATION OF FACSIMILE TRANS:MISSION
`
`I hereby certify that the following Amendment Transmittal and Amendment, in re Application of
`DanielL. Flamm, Serial No. 08/866,040, filed May 30, 1997, for PROCESS DEPENDING ON
`PLASMA DISCHARGES SUSTAINED BY INDUCTIVE COUPLING is being facsimile
`transmitted to the Patent and Trademark Office on the date shown below.
`
`Number of pages being transmitted, including this page: 6
`
`Dated: August 31, 1999 ~~ ·
`
`Diane Eigre
`
`·
`
`PLEASE CONFIRMRECEIPT OF THIS PAPER BY
`RETURN FACSIMILE AT (650) 326-2400
`
`TOWNSEND and TOWNSEND and CREW LLP
`Two Embarcadero Center; 8th Floor
`San Francisco, CA 94111-3834
`Telephone~ (650) 326.:2400
`Fax: (650) 326-2422
`
`PA1a.13Q"'
`
`Page 1 of 1
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`I I
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`Ex.1002 p.1
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`

`
`FROt
`
`TTC-+Palo Alto
`
`FAX NO.
`
`650 326 2422
`
`Aug. 31 1999 04:16PM P2
`
`TOWNSEND ana TOWNSEND and CREW LLP
`Two Embarcadero Center, 8d' Floor
`San Francisco, California 941. 11· 3834
`(650) 326-2400
`
`Amendment Transmittal
`
`1Jttomey Docket No.
`f\
`H
`
`16655·000311
`
`ln rc application of: Oanicil L. J:lamm RECE\VED
`AUG 3 1 1999
`GROutJ 1800
`Filed: May 3~, 1997
`Group Art Umt: 1648
`For: PRoc.~tss~nEPENDING ON~LASMA DISCHARGES
`SUSTAIN EO BYtNDUCTIVE CO'(JPLING
`
`Application No.: 08/866,040
`
`f'
`
`I hereby certllY rh:tt this ~pondence is being sen! by facsimile trunsmission to:
`
`Ellaminer r. Scheiner
`Facsimile No.: (703) 308-4426
`I
`
`
`
`, ot_··· -, .L.~JG;.I,· ~·p=:!· ~-3......,(,__, /_i_/....;:.7 __ _
`
`THE ASSIST ANT COMMISSIONER FOR PATENTS
`Wasbingtoa, D.C 10231
`
`.-
`Sir:
`Transmitted herewith is an amendment in the above-identified application.
`
`Enclosed is a petition to extend time to respond.
`[ )
`Small entity status of this application under 37 CFR 1.9 and 1.27 has been established by a verified statement previously submitted.
`[X)
`A verified statement to establish small entity status under 37 C'FR 1.9 and 1.27 is enclosed.
`[ ]
`[ X ]
`Postcard
`If any extension of time is needed, then this response should be considered a pctjtion therefor.
`The filing fee has b~ calculated as shown below:
`
`(C".ol. I)
`
`(Col. 2)
`
`(Col. 3)
`
`SMALL ENTTIY
`
`OTHER THAN
`SMALL ENTin'
`
`PRESENT
`EXTR.I\
`
`RATE
`
`ADDIT.
`FEF.
`
`OR
`
`RATE
`
`ADD IT.
`FEE
`
`'·
`
`o,.s9.oo=
`o,.. $39.00=
`+$130.00=
`
`T01"A.L.
`ADO IT.
`FEE
`
`$0.00
`
`$0.00
`
`so.oo
`
`o;$18.00=
`
`ll $78.00 =
`
`+$260.00=
`
`OR
`
`TOTAL
`
`lfthe entry in Col. I is less than the entry in Col. 2, write "0" in Col. 3.
`If the "Iiighcst.Number Previously Paid For" IN THIS SPACE is less than 20, write "20" in this space .
`Jf the "Highest Number Previously Paid For" IN THIS SPACE is less than 3, then write "3" in this space. The "Highest Number
`Previously Paid For" (Total or Independent) is the highest number found from the equivalent box in Col. 1 of a prior amendment or
`the number of claims ori~nally filed.
`
`No fee is due.
`( X]
`Please charge Deposit Account No. 20·1430 as follows:
`( )
`Claims fee
`S_-:-:-... $~0 ..... 0..,.0 ___ _
`Any additional fees associated with this paper or during the pendency of this application.
`[X)
`'"'
`extra copies of this sheet are enclosed.
`;
`
`2
`
`.. •••
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`PA111<131h1
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`Page 1-ofl
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`Ex.1002 p.2
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`

`
`,AUG. 31. 1999- 3:08PM-
`
`TTC PALO ALTO
`
`NO. 3400
`
`p. 3
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`1 hereby certify that ~his corres~ndence is being
`sent via fa~simile to:
`
`AUG 3 1 1999
`
`GROUt-' 1800
`:,
`,~.
`IN TiiE lJN1TEP A-ArES PATENT AND TRAJEMARK OffiCE
`
`In re application of:
`
`Daniel L. Flamm
`
`Application No.: 08/866,040
`
`Filed: May 30, 1997
`
`E~aminer: Scheiner, L.
`
`)
`)
`)
`)
`) Art Unit: 1648
`)
`) AMENDMENT UNDER 37 CFR § 1.116
`)
`)
`)
`)
`)
`)
`
`For: PROCESS DEPENDING ON
`PLASMA DISCHARGES
`SUSTAINED BY INDUCTIVE
`COUPLING
`
`__________________________ )
`
`Assistant Commissioner for Patents
`Washington, D.C. 20231
`
`Dear Sirs:
`
`In response to th~, Final Office Action mailed June 22, 1999, please amend the
`
`above-cited application as follows.
`
`/
`/
`INTHECLAIMS:
`Please amend claim 1, add claim 33, and cancel claims £as follows. For the
`,,
`convenience of the Examiner, all claims subject to examination are shown, even if not being
`
`amended.
`
`Ex.1002 p.3
`
`

`
`AUG. 31. 1999 3:08PM
`
`TTC PALO ALTO
`
`NO. 3400
`
`P. 4
`
`/
`I
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`(Twice Amended) A process for fab ... :.::.ating a product using a plasma
`
`1.
`source, said process comprising the steps of subjecting a substrate to entities, at least one of
`·said entities emanating from a gaseous discharge excited by a high frequency field from an
`inductlve coupling structure in which a phase portion and an anti-phase portion of capacitive
`
`currents coupled from the inductive coupling structure are selectively balanced;
`wherein said inductive coupling structure is adjusted using a wave adjustment
`
`circuit, said wave adjustment circuit adjusting the phase portion and the anti-phase portion of
`
`the capacitively coupled currents.
`
`The process of cla~ 1 wherein the wave adjustment circuit
`2.
`/~ frequency of an rfpower suppf.
`I I
`t
`The process of ¢laim 1 wherein lhe gh frequency field is adjusted using
`' J
`ly. l
`
`transmission line,
`
`I
`The procfoss 9f claim 1 wherein said process is
`
`J
`
`6. ·
`
`The pr~cess of claim 5 wherein the chamber is provided for a pro
`
`selected from etching,. depo~ition, sputtering, or implantation.
`
`~ancelled)
`
`/.J.
`1- d ..
`provides a wave multiple selected from a one·sixteenth wave, a one-eighth· wave, a quarter(cid:173)
`
`(New) The process of claim 1 wherein said inductive coupling structure
`
`wave, a half-wave, a three-quarter wave, and
`
`REMARKS
`Applicant would like to thank Examiner Scheiner for the time for reviewing the
`
`present application.
`
`Ex.1002 p.4
`
`

`
`AUG. 31. 1999- 3:09PM
`
`TTC PALO ALTO
`
`NO. 3400
`
`P. 5
`
`CI:ilins 1-6 and 33 are now pending in this appittation, where claims 7-32 have
`
`I
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`been cancelled and claim 33 has been added.
`Claims 7-32 were indicated as being directed to an invention that is independent
`or distinct from the invention originally claimed. Accordingly, Applicant has also cancelled
`
`claims 7-32 y;ithout prejudice for renewal in a continuation and/or related application.
`
`Claims 1•6 were rejected under 35 U.S.C. §112, first paragraph, as containing
`subject matter which was not described in the specification in such a way as to reasonably
`convey to one skilled in the relevant art that the inventor, at the time the application was filed,
`had possession of the claimed invention. In particular, the Examiner indicated that the
`
`"inductive coupling structure" terms appeared to be new matter. Applicant has carefully
`
`.. reviewed the present specification and would like to point out that support for the inductive
`
`coupling structure is found throughout the specification, and more particularly at page 9 lines
`
`17-20. Further support forthe inductive coupling structure can be found in the inductive
`
`applicator, which has been described in, for example, Fig~ 1 and related description. The
`
`Examiner has also noted that the terms "phase portion and anti-phase portion" app~ared to be
`
`new matter. These terms are described throughout the specification in relation to voltages,
`
`since electrical current is fundamentally related to voltage by an impedance. More
`particularly, support can be found at, for example, Vcon at Fig. 5B, which illustrates a phase
`and anti-phase relationship of a waveform. Accordingly, claims 1-6 are patentable under 35
`U.S.C. §112, first paragraph.
`
`Applicant has also amended claim 1 with the term "plasma" for clarification
`purposes, as suggested by the Examiner. This amendment is not intended to unduly limit such
`
`claim in any manner. Punhermore, Applicant has added claim 33 also for clarification
`purposes, a:s suggested by the Examiner. Support can be found for claim 33 throughout the
`
`specification and more particularly at page 14lines 16-30. Accordingly, all pending claims are
`
`believed allowable in view of the cited references.
`
`··CONQLlJSION
`
`Therefore, in view of the re.marks above, Applicant respectfully requests that
`
`the rejection be removed, that claims 1-6 and 33 be allowed, and the case passed to issue. The
`
`issuance of a formal Notice of Allowance at an early date is respectfully requested.
`
`Ex.1002 p.5
`
`

`
`AUG. 31. 1999 3:09PM
`
`TTC PALO ALTO
`
`NO. 3400
`
`P. 6
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`. I
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`If the Examiner believes a telephone conferenc~ would expedite prosecution of
`
`this application, please telephone the undersigned at (650) 326-2400.
`Respectfully submitted,
`
`icha.rd T. Ogawa
`Reg. No, 37,692
`
`TOWNSEND and TOWNSEND and CREW LLP
`Two Embarcadero Center, 8th Floor
`San Francisco, California 94111-3834
`(650) 326~2400
`Fax (650) 326~2422
`.. RTO:d~
`
`3012246vl
`
`Ex.1002 p.6