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`
`
`
`
`
`
`Ultracompact ±2g Dual-Axis Accelerometer
`ADXL311
`
`FUNCTIONAL BLOCK DIAGRAM
`
`CX
`
`XFILT
`32kΩ
`
`YFILT
`32kΩ
`
`DEMOD
`
`DEMOD
`
`XOUT
`
`SELF TEST
`
`ADXL311
`
`
`
`03582-001
`
`YOUT
`
`CY
`
`Figure 1.
`
`3.0V
`VDD
`
`X SENSOR
`
`CDC
`
`OSCILLATOR
`
`Y SENSOR
`
`COM
`
`
`
`The typical noise floor is 300 µg/√Hz, allowing signals below
`2 mg (0.1° of inclination) to be resolved in tilt sensing appli-
`cations using narrow bandwidths (10 Hz).
`
`The user selects the bandwidth of the accelerometer using
`capacitors CX and CY at the XOUT and YOUT pins. Bandwidths
`of 1 Hz to 3 kHz can be selected to suit the application.
`
`The ADXL311 is available in a 5 mm × 5 mm × 2 mm,
`8-terminal, hermetic LCC package.
`
`
`FEATURES
`High resolution
`Dual-axis accelerometer on a single IC chip
`5 mm × 5 mm × 2 mm LCC package
`Low power <400 µA (typ)
`X-axis and Y-axis aligned to within 0.1° (typ)
`BW adjustment with a single capacitor
`Single-supply operation
`High shock survival
`APPLICATIONS
`Tilt and motion sensing
`Smart hand-held devices
`Computer security
`Input devices
`Pedometers and activity monitors
`Game controllers
`Toys and entertainment products
`
`GENERAL DESCRIPTION
`The ADXL311 is a low power, complete dual-axis accelerometer
`with signal conditioned voltage outputs, all on a single
`monolithic IC. The ADXL311 is built using the same proven
`iMEMS® process used in over 180 million Analog Devices
`accelerometers shipped to date, with demonstrated 1 FIT
`reliability (1 failure per 1 billion device operating hours).
`
`The ADXL311 measures acceleration with a full-scale range of
`±2 g. The ADXL311 can measure both dynamic acceleration
`(e.g., vibration) and static acceleration (e.g., gravity). The
`outputs are analog voltages proportional to acceleration.
`
`
`
`Rev. B
`Information furnished by Analog Devices is believed to be accurate and reliable.
`However, no responsibility is assumed by Analog Devices for its use, nor for any
`infringements of patents or other rights of third parties that may result from its use.
`Specifications subject to change without notice. No license is granted by implication
`or otherwise under any patent or patent rights of Analog Devices. Trademarks and
`registered trademarks are the property of their respective owners.
`
`
`
`
`
`One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A.
`Tel: 781.329.4700
`www.analog.com
`Fax: 781.326.8703
`© 2005 Analog Devices, Inc. All rights reserved.
`
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`
`
`Design Trade-Offs for Selecting Filter Characteristics:
`The Noise/BW Trade-Off.............................................................8
`
`Using the ADXL311 with
`Operating Voltages Other than 3 V ............................................9
`Using the ADXL311 as a Dual-Axis Tilt Sensor .......................9
`Outline Dimensions....................................................................... 10
`Ordering Guide .......................................................................... 10
`
`ADXL311
`
`
`
`TABLE OF CONTENTS
`Specifications..................................................................................... 3
`Absolute Maximum Ratings............................................................ 4
`ESD Caution.................................................................................. 4
`Pin Configuration and Function Descriptions............................. 5
`Typical Performance Characteristics ............................................. 6
`Theory of Operation ........................................................................ 8
`Applications................................................................................... 8
`
`
`REVISION HISTORY
`1/05—Rev. A to Rev. B
`
`Changes to Specifications................................................................ 3
`Change to Pin Configuration.......................................................... 5
`Change to Table 5 ............................................................................. 8
`Changes to Self Test Section............................................................ 8
`Removed RBIAS Selection Section .................................................... 8
`Change to Design Trade-Offs for Selecting Filter Characteristics:
` The Noise/BW Trade-Off Section............................................... 8
`Changes to Using the ADXL311 with
` Operating Voltages Other than 3 V Section .............................. 9
`Updated Outline Dimensions....................................................... 10
`Changes to Ordering Guide .......................................................... 10
`
`
`7/03—Rev. 0 to Rev. A
`
`Change to OUTLINE DIMENSIONS.......................................... 10
`
`
`
`Revision 0: Initial Version
`
`Rev. B | Page 2 of 12
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`
`
`SPECIFICATIONS
`TA = 25°C, VDD = 3 V, acceleration = 0 g, unless otherwise noted.
`Table 1.
`Parameter
`SENSOR INPUT
`Measurement Range
`Nonlinearity
`Aligment Error1
`Aligment Error
`Cross-Axis Sensitivity2
`SENSITIVITY
`Sensitivity at XFILT, YFILT
`Sensitivity Tolerance (part to part)
`Sensitivity Change due to Temperature3
`0 g BIAS LEVEL
`0 g Voltage XFILT, YFILT
`0 g Offset vs. Temperature
`NOISE PERFORMANCE
`Noise Density
`FREQUENCY RESPONSE
`−3 dB Bandwidth
`Sensor Resonant Frequency
`FILTER
`RFILT Tolerance
`Minimum Capacitance
`SELF TEST
`XFILT, YFILT
`POWER SUPPLY
`Operating Voltage Range
`Quiescent Supply Current
`Turn-On Time4
`TEMPERATURE RANGE
`Operating Range
`
`1 Alignment error is specified as the angle between the true and indicated axis of sensitivity.
`2 Cross axis sensitivity is the algebraic sum of the alignment and the inherent sensitivity errors.
`3 Defined as the change from ambient to maximum temperature, or ambient to minimum temperature.
`4 CFILT in µF.
`
`
`Conditions
`Each axis
`
`Best fit straight line
`
`X sensor to Y sensor
`
`Each axis
`VDD = 3 V
`
`∆ from 25°C
`Each axis
`VDD = 3 V
`∆ from 25°C
`
`@ 25°C
`
`@ Pin XFILT and Pin YFILT
`
`
`32 kΩ nominal
`@ Pin XFILT and Pin YFILT
`
`Self Test 0 to Self Test 1
`
`
`
`
`
`
`
`Min
`
`
`
`
`
`
`
`
`
`
`
`1.2
`
`
`
`
`
`
`
`
`1000
`
`
`
`2.4
`
`
`
`0
`
`ADXL311
`
`Unit
`
`g
`% of FS
`Degrees
`Degrees
`%
`
`mV/g
`%
`%/°C
`
`V
`mg/°C
`
`µg/√Hz rms
`
`kHz
`kHz
`
`%
`pF
`
`mV
`
`V
`mA
`ms
`
`°C
`
`Typ
`
`±2
`0.2
`±1
`±0.1
`±2
`
`174
`±15
`±0.02
`
`1.5
`±1.0
`
`300
`
`3
`5.5
`
`±15
`
`
`50
`
`
`0.4
`160 × CFILT + 4
`
`
`
`Max
`
`
`
`
`
`
`
`
`
`
`
`1.8
`
`
`
`
`
`
`
`
`
`
`
`
`5.25
`1.0
`
`
`70
`
`Rev. B | Page 3 of 12
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`
`ADXL311
`
`
`
`ABSOLUTE MAXIMUM RATINGS
`Table 2.
`Parameter
`Acceleration
`(Any Axis, Unpowered)
`Acceleration
`(Any Axis, Powered, VDD = 3 V)
`VDD
`All Other Pins
`Output Short-Circuit Duration,
`(Any Pin to Common)
`Operating Temperature Range –55°C to +125°C
`Storage Temperature
`–65°C to +150°C
`
`
`Rating
`3,500 g, 0.5 ms
`
`3,500 g, 0.5 ms
`
`–0.3 V to + 6 V
`–0.3 V to VDD + 0.3 V
`Indefinite
`
`
`
`Stresses above those listed under Absolute Maximum Ratings
`may cause permanent damage to the device. This is a stress
`rating only; functional operation of the device at these or any
`other conditions above those indicated in the operational
`section of this specification is not implied. Exposure to absolute
`maximum rating conditions for extended periods may affect
`device reliability.
`
`
`Table 3. Package Characteristics
`Package Type
`θJC
`θJA
`8-Lead LCC
`120°C/W
`20°C/W
`
`
`Device Weight
`<1.0 g
`
`
`
`
`ESD CAUTION
`ESD (electrostatic discharge) sensitive device. Electrostatic charges as high as 4000 V readily accumulate on
`the human body and test equipment and can discharge without detection. Although this product features
`proprietary ESD protection circuitry, permanent damage may occur on devices subjected to high energy
`electrostatic discharges. Therefore, proper ESD precautions are recommended to avoid performance
`degradation or loss of functionality.
`
`
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`
`
`
`
`PIN CONFIGURATION AND FUNCTION DESCRIPTIONS
`
`ADXL311
`
`ST
`NC
`COM
`
`1 2 3
`
`VDD
`
`8
`
`4
`
`567
`
`XOUT
`YOUT
`NC
`
`NC
`
`NC = NO CONNECT
`ADXL311
`BOTTOM VIEW
`
`03582-010
`
`
`Figure 2. 8-Lead LCC Pin Configuration
`
`Table 4. Pin Function Descriptions
`Pin No.
`Mnemonic
`1
`ST
`2, 4, 5
`NC
`3
`COM
`6
`YOUT
`7
`XOUT
`8
`VDD
`
`
`
`
`Description
`Self Test
`Do Not Connect
`Common
`Y Channel Output
`X Channel Output
`2.4 V to 5.25 V
`
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`
`ADXL311
`
`
`
`TYPICAL PERFORMANCE CHARACTERISTICS
`
`
`
`03582-005
`
`0.167
`
`0.171
`
`0.175
`
`0.179
`
`0.183
`
`0.187
`
`0.191
`
`V/g
`
`30
`
`25
`
`20
`
`15
`
`10
`
`5 0
`
`0.163
`
`PERCENT OF PARTS
`
`
`
`03582-002
`
`1.37
`
`1.41
`
`1.45
`
`1.49
`VOLTS
`
`1.53
`
`1.57
`
`1.61
`
`Figure 3. X-Axis 0 g BIAS Output Distribution
`
`Figure 6. Y-Axis Sensitivity Distribution at YOUT
`
`110
`
`108
`
`106
`
`104
`
`102
`
`100
`
`98
`
`96
`
`94
`
`92
`
`SENSITIVITY (%)
`
`16
`
`14
`
`12
`
`10
`
`8 6 4 2 0
`
`1.33
`
`14
`
`12
`
`10
`
`8 6 4 2 0
`
`PERCENT OF PARTS
`
`PERCENT OF PARTS
`
`
`
`03582-006
`
`80
`
`20
`
`40
`TEMPERATURE (°C)
`
`60
`
`Figure 7. Normalized Sensitivity vs. Temperature
`
`
`
`03582-007
`
`200
`
`250
`
`350
`300
`400
`NOISE DENSITY (µ/g Hz)
`
`450
`
`500
`
`550
`
`90
`
`0
`
`30
`
`25
`
`20
`
`15
`
`10
`
`5 0
`
`150
`
`PERCENT OF PARTS
`
`
`
`03582-003
`
`1.33
`
`1.37
`
`1.41
`
`1.45
`
`1.49
`VOLTS
`
`1.53
`
`1.57
`
`1.61
`
`Figure 4. Y-Axis 0 g BIAS Output Distribution
`
`
`
`03582-004
`
`0.167
`
`0.171
`
`0.175
`V/g
`
`0.179
`
`0.183
`
`0.187
`
`30
`
`25
`
`20
`
`15
`
`10
`
`5 0
`
`0.163
`
`PERCENT OF PARTS
`
`Figure 5. X-Axis Output Sensitivity Distribution at XOUT
`
`Figure 8. Noise Density Distribution
`
`Rev. B | Page 6 of 12
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`
`
`ADXL311
`
`VDD
`
`XOUT
`
`CFILT = 0.01µF
`
`3
`
`2
`
`1
`
`0
`
`V
`
`
`
`03582-009
`
`0
`
`0.4
`
`0.8
`TIME (ms)
`
`1.2
`
`1.4
`
`
`
`03582-008
`
`80
`
`20
`
`40
`TEMPERATURE (°C)
`
`60
`
`Figure 9. Typical Supply Current vs. Temperature
`
`Figure 10. Typical Turn-On Time
`
`
`
`0.50
`
`0.45
`
`0.40
`
`0.35
`
`0.30
`
`0.25
`
`0.20
`
`0.15
`
`0.10
`
`0.05
`
`0
`
`0
`
`CURRENT (mA)
`
`
`
`
`
`
`
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`
`
`Setting the Bandwidth Using CX and CY
`The ADXL311 has provisions for band limiting the XOUT and
`YOUT pins. Capacitors must be added at these pins to implement
`low-pass filtering for antialiasing and noise reduction. The
`equation for the −3 dB bandwidth is
`(
`)YXC
`(
`)
`kΩ32π2/1
`
`
`
`(
`
`,
`
`)
`
`F
`dB3–
`
`=
`
`×
`
`or, more simply,
`
`F dB3–
`
`)X,YC/F5
`µ=
`(
`
`
`
`The tolerance of the internal resistor (RFILT) can vary, typically
`as much as ±15% of its nominal value of 32 kΩ, and the band-
`width varies accordingly. A minimum capacitance of 1000 pF
`for CX and CY is required in all cases.
`Table 5. Filter Capacitor Selection, CX and CY
`Bandwidth
`Capacitor (µF)
`10 Hz
`0.47
`50 Hz
`0.10
`100 Hz
`0.05
`200 Hz
`0.027
`500 Hz
`0.01
`
`
`
`SELF TEST
`The ST pin controls the self-test feature. When this pin is set to
`VDD, an electrostatic force is exerted on the beam of the acceler-
`ometer. The resulting movement of the beam allows the user to
`test if the accelerometer is functional. The typical change in output
`is 290 mg (corresponding to 50 mV). This pin can be left open
`circuit or connected to common in normal use.
`
`DESIGN TRADE-OFFS FOR SELECTING FILTER
`CHARACTERISTICS: THE NOISE/BW TRADE-OFF
`The accelerometer bandwidth selected ultimately determines
`the measurement resolution (smallest detectable acceleration).
`Filtering can lower the noise floor, which improves the resolution
`of the accelerometer. Resolution is dependent on the analog filter
`bandwidth at XOUT and YOUT.
`
`ADXL311
`
`
`
`THEORY OF OPERATION
`The ADXL311 is a complete, dual-axis acceleration measurement
`system on a single monolithic IC. It contains a polysilicon, surface-
`micromachined sensor and signal conditioning circuitry to
`implement an open-loop acceleration measurement architecture.
`The output signals are analog voltage proportional to acceleration.
`The ADXL311 is capable of measuring both positive and negative
`accelerations to at least ±2 g. The accelerometer can measure
`static acceleration forces, such as gravity, allowing it to be used
`as a tilt sensor.
`
`The sensor is a polysilicon, surface-micromachined structure
`built on top of the silicon wafer. Polysilicon springs suspend the
`structure over the surface of the wafer and provide a resistance
`against acceleration forces. Deflection of the structure is measured
`using a differential capacitor that consists of independent fixed
`plates and central plates attached to the moving mass. The fixed
`plates are driven by 180° out-of-phase square waves. Acceleration
`deflects the beam and unbalances the differential capacitor,
`resulting in an output square wave whose amplitude is propor-
`tional to acceleration. Phase-sensitive demodulation techniques
`are then used to rectify the signal and determine the direction
`of the acceleration.
`
`The output of the demodulator is amplified and brought off chip
`through a 32 kΩ resistor. At this point, the user can set the signal
`bandwidth of the device by adding a capacitor. This filtering
`improves measurement resolution and helps prevent aliasing.
`
`APPLICATIONS
`Power Supply Decoupling
`For most applications, a single 0.1 µF capacitor, CDC, adequately
`decouples the accelerometer from noise on the power supply.
`However, in some cases, particularly where noise is present at
`the 140 kHz internal clock frequency (or any harmonic thereof),
`noise on the supply can cause interference on the ADXL311
`output. If additional decoupling is needed, a 100 Ω (or smaller)
`resistor or ferrite beads can be inserted in the supply line of the
`ADXL311. Additionally, a larger bulk bypass capacitor (in the
`1 µF to 4.7 µF range) can be added in parallel to CDC.
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`Rev. B | Page 8 of 12
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`
`
`The output of the ADXL311 has a typical bandwidth of 3 kHz.
`The user must filter the signal at this point to limit aliasing
`errors. The analog bandwidth must be no more than half the
`A/D sampling frequency to minimize aliasing. The analog
`bandwidth can be further decreased to reduce noise and
`improve resolution.
`
`The ADXL311 noise has the characteristics of white Gaussian
`noise that contribute equally at all frequencies and are described
`in terms of µg/√Hz, i.e., the noise is proportional to the square
`root of the bandwidth of the accelerometer. It is recommended
`that the user limits the bandwidth to the lowest frequency
`needed by the application to maximize the resolution and
`dynamic range of the accelerometer.
`
`RMS
`
`Noise
`
`=
`
`g
`µ
`
`/
`
`Hz
`
`) (
`×
`
`BW
`
`×
`
`)6.1
`
`
`
`With the single-pole roll-off characteristic, the typical noise of
`the ADXL311 is determined by
`(
`300
`At 100 Hz the noise will be
`) (
`(
`)
`300
`×
`Often the peak value of the noise is desired. Peak-to-peak noise
`can only be estimated by statistical methods. Table 6 shows the
`probabilities of exceeding various peak values, given the rms value.
`Table 6. Estimation of Peak-to-Peak Noise
`Peak-to-Peak
`% of Time That Noise Exceeds Nominal
`Value
`Peak-to-Peak Value
`2 × rms
`32
`4 × rms
`4.6
`6 × rms
`0.27
`8 × rms
`0.006
`
`RMS
`
`Noise
`
`=
`
`g
`µ
`
`/
`
`Hz
`
`100
`
`×
`
`6.1
`
`=
`
`
`
` gm8.3
`
`
`
`
`
`The peak-to-peak noise value gives the best estimate of the
`uncertainty in a single measurement. Table 7 gives the typical
`noise output of the ADXL311 for various CX and CY values.
`Table 7. Filter Capacitor Selection, CX and CY
`Bandwidth
`CX, CY
`RMS Noise
`Peak-to-Peak Noise
`(µF)
`(mg)
`Estimate (mg)
`(Hz)
`10
`0.47
`1.2
`7.2
`50
`0.1
`2.7
`16.2
`100
`0.047
`3.8
`22.8
`500
`0.01
`8.5
`51
`
`
`USING THE ADXL311 WITH OPERATING
`VOLTAGES OTHER THAN 3 V
`The ADXL311 is tested and specified at VDD = 3 V; however, it can
`be powered with VDD as low as 2.4 V, or as high as 5.25 V. Some
`performance parameters change as the supply voltage varies.
`
`ADXL311
`
`The ADXL311 output is ratiometric, so the output sensitivity
`(or scale factor) varies proportionally to the supply voltage. At
`VDD = 5 V, the output sensitivity is typically 312 mV/g.
`
`The 0 g bias output is also ratiometric, so the 0 g output is
`nominally equal to VDD/2 at all supply voltages.
`
`The output noise is not ratiometric, but absolute in volts;
`therefore, the noise density decreases as the supply voltage
`increases. This is because the scale factor (mV/g) increases
`while the noise voltage remains constant.
`
`The self-test response is roughly proportional to the square of
`the supply voltage. At VDD = 5 V, the self-test response is
`approximately equivalent to 750 mg (typical).
`
`The supply current increases as the supply voltage increases.
`Typical current consumption at VDD = 5 V is 750 µA.
`
`USING THE ADXL311 AS A DUAL-AXIS
`TILT SENSOR
`One of the most popular applications of the ADXL311 is tilt
`measurement. An accelerometer uses the force of gravity as an
`input vector to determine the orientation of an object in space.
`
`An accelerometer is most sensitive to tilt when its sensitive axis
`is perpendicular to the force of gravity, i.e., parallel to the earth’s
`surface. When the accelerometer is oriented parallel to the gravity
`vector, i.e., near its +1 g or –1 g reading, the change in output
`acceleration per degree of tilt is negligible. When the acceler-
`ometer is perpendicular to gravity, its output changes nearly
`17.5 mg per degree of tilt, but at 45° degrees, it changes only
`12.2 mg per degree, and resolution declines.
`Dual-Axis Tilt Sensor: Converting
`Acceleration to Tilt
`When the accelerometer is oriented so both its X-axis and Y-axis
`are parallel to the earth’s surface, it can be used as a two-axis tilt
`sensor with a roll axis and a pitch axis. Once the output signal
`from the accelerometer has been converted to an acceleration
`that varies between –1 g and +1 g, the output tilt in degrees is
`calculated as follows:
`
`Pitch
`
`
` SINA=
`(
`A
`Y 1/
`
`(
`A
`
`
`
`)g
`X 1/
`)g
`
`
`
`Roll
`
`
`
` SINA=
`
`Be sure to account for overranges. It is possible for the
`accelerometers to output a signal greater than ±1 g due to
`vibration, shock, or other accelerations.
`
`
`
`
`
`Rev. B | Page 9 of 12
`
`OBSOLETE
`
`IPR2017-00318
`REPLY TO CONDITIONAL MOTION TO AMEND
`
`VALENCELL INC.
`EXHIBIT 2153 - PAGE 10
`
`
`
`ADXL311
`
`
`
`OUTLINE DIMENSIONS
`
`
`5.00
`SQ
`
`4.50
`SQ
`
`TOP VIEW
`
`1.78
`
`1.27
`
`1.27
`
`7
`
`0.50 DIAMETER
`
`1
`
`1.90
`
`2.50
`
`R 0.38
`
`0.20
`
`1.27
`
`R 0.20
`
`5
`
`0.64
`
`2.50
`
`3
`0.38 DIAMETER
`BOTTOM VIEW
`
`
`
`Figure 11. 8-Terminal Ceramic Leadless Chip Carrier [LCC]
`(E-8)
`Dimensions shown in millimeters
`
`Number of
`Axes
`2
`2
`
`
`Specified Voltage
`3 V
`3 V
`
`
`Temperature
`Range
`0°C to 70°C
`0°C to 70°C
`
`
`Package Description
`8-Lead Ceramic Leadless Chip Carrier
`8-Lead Ceramic Leadless Chip Carrier
`Evaluation Board
`
`Package
`Option
`E-8
`E-8
`
`
`
`
`ORDERING GUIDE
`
`Model
`ADXL311JE
`ADXL311JE–REEL
`ADXL311EB
`
`
`
`Rev. B | Page 10 of 12
`
`OBSOLETE
`
`IPR2017-00318
`REPLY TO CONDITIONAL MOTION TO AMEND
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`VALENCELL INC.
`EXHIBIT 2153 - PAGE 11
`
`
`
`
`
`
`
`NOTES
`
`ADXL311
`
`Rev. B | Page 11 of 12
`
`OBSOLETE
`
`IPR2017-00318
`REPLY TO CONDITIONAL MOTION TO AMEND
`
`VALENCELL INC.
`EXHIBIT 2153 - PAGE 12
`
`
`
`ADXL311
`
`
`
`NOTES
`
`
`
`
`
`
`© 2005 Analog Devices, Inc. All rights reserved. Trademarks and
`registered trademarks are the property of their respective owners.
`
`C03582–0–1/05(B)
`
`Rev. B | Page 12 of 12
`
`
`
`OBSOLETE
`
`IPR2017-00318
`REPLY TO CONDITIONAL MOTION TO AMEND
`
`VALENCELL INC.
`EXHIBIT 2153 - PAGE 13
`
`