Page 1 of 189
`
`Samsung Exhibit 10(cid:19)(cid:23)
`Samsung Electronics Co., Ltd. v. Daniel L. Flamm
`
`

`
`UNITED STATES PATENT AND TRADEMARK Omar:
`
`Page 1 of 1
`
`APPLICATION NUMBER
`
`09/151,163
`
`FILING DATE
`
`O9/IO/1998
`
`DR. DANIEL J. FLAMM
`476 GREEN VIEW DRIVE
`WALNUT CREEK, CA 94596
`
`COMMISSIONER FOR PATENTS
`Umreo Srxrzs PATENT AND TRADEMARK OFFICE
`Msnlumon, D.C. 2023!
`wwwusptogov
`ATl'Y. DOCKET NO.ITI'I'LE
`
`FIRST NAMED APPLICANT
`
`DANIEL L. FLAMM
`
`16655-000810
`
`CONFIRMATION NO. 7361
`
`I111IlllllllllllllllllllllllllIllllllllllllllllllllllllllllllfllllllllllllll
`'ocooooooooe14o153'
`
`Date Mailed: 06/01/2001
`
`NO11CE REGARDING POWER OF ATTORNEY
`
`This is in response to the Power of Attorney filed 05/17/2001.
`
`The Power of Attorney in this application is accepted. Correspondence in this application will be mailed to the
`above address as provided by 37 CFR 1.33.
`
`IIrrIrNull!»IrIuntilIIIIrInIIIrturnrtrIrInuitMvnuunun!ItIIrrnrIMIIINIIIInuurrrnnrlnnrnrunrrrnllnllInnunenmuMA-uwwvnnuMIIMIMrnnlnuIIrNInuwnrnrrnrNlonrnrmrunnurunulllrmnwlmwwuunnmnmmm
`
`Customer Service Center
`Initial Patent Examination Division (703) 308-1202
`
`OFFICE COPY
`
`Page 2 of 189
`
`

`
`Day:
`
`.Flamm
`
`Green View Drive
`
`Walnut Creek, CA 94596-5459
`
`Tra mittal Letter
`/
`
`l
`
`43
`
`2
`
`\"J\ \\L0
`
`Date: May 21, 2001
`
`(925) 947-1909
`
`I hereby certify that this is being deposited with the
`United States Postal Service as first class mail in an
`
`envelope addressed to:
`
`Assistant Commissioner for Patents
`
`Washington, D.C. 2023]
`
`Daniel L. Flamm
`
`BOX ISSUE FEE
`ASSISTANT COMMISSIONER FOR PATENTS
`
`Washington, D.C. 20231
`
`Sir:
`
`Transmitted herewith are the following:
`
`A’ 9 K
`
`1)
`2)
`
`Revocation Under 37 C.F.R. /1.36
`Fee balance of $15.00.
`
`Daniel L. Flam‘
`
`Page 3 of 189
`
`

`
`0 Ieesa. 0O:>z+<—:.»u:
`-
`was
`_E‘.9‘ "l{m|’)<t?"it‘;SliE§CRETARY or COMMERCE FOR INTELLECTUAL PROPERTY AND
`~ " D1REcToR or THE UNITED STATES. PATENT AND TRADEMARK OFFICE
`WAsHINGToN. D.C. 2023 1
`
`R E C E I V E D
`TOWNSEND & TOWNSEND CREW LLP
`TWO EMBARCADERO CENTER 8"’ FLOOR
`SAN FRANCISCO CA 94111
`
`_
`
`Mail Date: April 04, 2001
`Serial Number: 09/151163 ,.
`Applicant: FLAMM
`
`O ,.
`
`NOTICE TO PAY BALANCE OF ISSHUE FEE
`
`Your issue fee payment filed on 01/02/01 has been received. However, new patent fees went into effect on
`October 1, 2000. The final rule entitled “Revision of Patent Fees for Fiscal Year 2001” was published in
`the Federal Register/Vol. 65, No. 156/Friday, August 11, 2000 [49l93—49l99] and in the U.S. Patent and
`Trademark Ofiice Oflicial Gazette, August 29, 2000 [1237 0G 131-138]. As stated in the final rule, “Any
`fee amount that is paid on or alter the efiective date of the fee increase will be subject to the new fees then
`in eflect." The Notice of Allowance and Issue Fee Due (Form PTOL-85) that was mailed to you prior to
`October 1, 2000, stated an issue fee amount that was in efiect prior to October 1, 2000. However,
`inasmuch as your issue fee was paid on or alter October 1, 2000, the new issue fee amount was due.
`
`" "
`
`'
`
`In accordance with 37 CFR 1317, you are given a time period of THREE (3) MONTHS from the mailing
`date of this notice during which to pay the BALANCE DUE indicated below. This three-month time
`period may not be extended.
`If your p_atent issues before the expiration of the three-month period and
`if you do not pay the balance due before the expiration of the three-month period, your patent will
`lapse at the termination of the three-month period.
`
`TYPE OF ISSUE
`
`FEE PAID
`
`Column A
`ISSUE FEE IN EFFECT
`
`Column B
`ISSUE FEE
`
`BALANCE DUE
`
`AS OF OCT. 1, 2000
`large entity I small entity
`
`PAID
`
`[Col. A minus Col. B]
`
`UTILITY
`
`$1,240.00/$620.00
`
`DESIGN:
`
`-7
`
`$440.00 / $220.00
`
`ll’/LANTI I
`
`$600.00 / $300.00
`
`$
`
`$
`
`$
`
`605.00___
`
`$_1s.0o_
`
`OfficjofPatentaublication
`
`Tel: 703-305-8263
`
`You MUST return a copy of this Notice with your payment.
`1
`CERTIFICATE OF MAILING
`I hereby certify that this notice and the required additional fee are being deposited
`with sufficient postage for first class mail in an envelope addressed to Box .‘
`Washington, D.C. 20231 on the date indicated below.
`_
`j
`Printed Name: flgg / G / Z .
`/Z-/¢/fl/74
`Signature: ""
`‘D...../“gt an aow
`
`'
`
`.-
`
`1 e United States Postal S
`
`R
`
`13111111102
`Adjustment date: 05/25/2001
`o1/o3/2001 ccnnua
`00000153 09151153
`01 rc:e31
`-605-00 0P
`
`
`
`
`
`
`
`05/25/2001SLUIIIIG20000000109151153
`
`Page 4 of 189
`
`

`
`I hereby certify that this correspondence is being deposited with the United
`States Postal Service as first class mail in an envelope addressed to:
`
`Assistant Commissioner for Patents
`
`Washington, D.C. 20231
`
`On
`
`I
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`In re application of:
`
`Examiner:
`
`L. Scheiner
`
`Daniel L. Flamm
`
`Art Unit:
`
`1641
`
`Application No.2 09/151,163
`
`REVOCATION AND SUBSTITUTION OF
`POWER OF ATTORNEY UNDER 37 CFR
`
`Filed: September 10, 1998
`
`1.36
`
`For: PROCESS DEPENDING ON
`PLASMA DISCHARGES SUSTAINED
`
`BY INDUCTIVE COUPLING
`
`Assistant Commissioner for Patents
`
`Washington, D.C. 20231
`
`Sir:
`
`Pursuant to 37 CFR/ 1.36, Daniel L. Flarnrn revokes all previous powers of
`
`attorney and hereby designates himself to prosecute this application and transact all business in
`
`the Patent and Trademark Office connected therewith.
`
`Please direct all future correspondence regarding the subject application to
`
`Daniel L. Flamm
`476 Green View Drive
`
`Walnut Creek, CA 945 96
`
`Tel: (925) 947-1909
`Fax: (925) 937-2754
`
`Date: 3/) 200/
`
`By:
`Print Namezflah ,‘¢/
`
`‘
`
`/‘F/fipqyyg
`
`Page 5 of 189
`
`

`
`~
`
`I I hereby certify that this correspondence is being deposited with
`‘-the United States Postal Service as first class mail in an envelope
`} addressed to:
`‘f ~ AssistantCommissionerforPatents,
`
`9*
`TRADEW‘
`
`TOWNSEND nd WNSEN and CREWLLP
`
`Q,
`
`2531)
`
`PATENT
`.
`Attorney Docket No.. 016655-000810US
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`In re application of:
`
`1 Daniel L. Flamm et al.
`
`if Application No.: 09/151,163
`
`Examiner:
`
`Art Unit:
`
`WITHDRAWAL OF
`
`ATTORNEY OR AGENT
`37 CFR
`1.36
`
`"
`
`Assistant Commissioner for Patents
`
`3 Washington, D.C. 20231
`
`Pursuant to 37 CFR § 1.36, Townsend and Townsend and Crew LLP, attorneys for applicant
`
`hereby withdraws from representation relative to the above-identified patent. Please direct all
`
`future correspondence regarding the subject patent to applicant at:
`
`Dr. Daniel J. Flamm
`476 Green View Drive
`
`Walnut Creek, California 94596
`
`By:
`
`it
`
`William J. Bohler
`
`Reg. No. 31,487
`
`7 TOWNSEND and TOWNSEND and CREW LLP
`
`Two Embarcadero Center, 8th Floor
`San Francisco, CA 94111-3834
`1 Tel (415) 576-0200
`1 Fax (415) 576-0300
`; PA 3135615 vl
`
`Page 6 of 189
`
`

`
`.__(
`
`E‘/'
`'
`K’ \ UNITED STATES DEPARTMENT OF COMMERCE
`, Patent and ‘Trademark Ofl"I:e
`,
`X
`/ Address:
`OF PATBQTS AND TRAIIMAFIKS
`Vlleshingmn. no. 20231
`
`fin ’
`
`[I9/151,163
`
`U9/1|]/98
`
`FLAMM
`
`D
`
`16655-0008151!
`
`7542/0119
`020350
`TCINNSEND AND mwusersm AND CREW
`Two EMBARCADERD CENTER
`EIGHTH FLOOR 3
`SQN FRANCISCO CA 94111-3834
`'
`.
`It-49
`DATE IAILED:
`
`SL';HEINER,L
`
`'3 1 / 1 9/ ‘J 1
`
`Res arise to Rule 312
`ommunlcatlon
`
`under 37 CFR 1.312(b) is granted. The paper has been
`Cl The petition filed on
`forwarded to the examiner for consideration on the merits.
`
`Director.
`Patent Examining Group
`
`§/The amendment filed on _} under 37 CFR 1.312 has been considered, and has been:
`entered.
`
`Cl entered as directed to matters 01 tom not affecting the scope of the invention (Order 3311).
`
`Cl disapproved. See explanation below.
`
`Cl entered in part. See explanation below.
`
`./?.</35/ZWz6<Pv
`
`Publishing Division
`
`Page 7 of 189
`
`

`
`3...: FEE TRANSMITTAL
`Box ISSUE FEE
`Assistant commissioner for Pat-_..s
`Washington, D.c. 20231
`
`MAILING INSTRUCTIONS: This form should be used for transmitting the ISSUE FEE. Blocks 1
`
`Note: The certificate of mailing below can only be used lor domestic
`through 4 should be completed where appropriate. All furthercorrespondence including the issue Fee mailings 0' the Issue Fee Transmmai. This Cernncam cannot be used
`Receipt, the Patent, advance orders and notification of maintenance fees will be mailed to the current
`,0, any mne, accompanying nape,s_ Eacn adnmnna, pane,‘ such as an
`correspondence address as indicated unless corrected below or directed otherwise in Block 1. by (a)
`assignment or lormal drawing, must have its own certificate of mailing.
`"specifying a new correspondence address; and/or (b) indicating a separate “FEE ADDRESS" for
`_
`_
`_
`_V
`maintenance fee notifications.
`~
`Cemfwate 07 M3""19
`CURRENT CORRESPONDENCE ADDRESS (Note: Legibly mark-up with any corrections or use Block 1)
`I hereby certify that this Issue Fee Transmittal is being deposited with
`I
`the United States Postal Service with sufficient postage for first class
`mail in an envelope addressed to the Box Issue Fee address above on
`the date indicated below.
`
`First Named
`Applicant
`TITLE OF
`lNVENTION
`
`'
`
`SMALL ENTITY
`
`FEE DUE
`
`DATE DUE
`
`1. Change of correspondence address or indication of “ Fee Address‘ (37 CFR 1.363).
`Use of PTO form(s) and Customer-Number are recommended. but not required.
`
`Xchange of correspondence address (or Change of Correspondence Address form
`P1-0,33/122) anaCned_
`
`X‘Fee Address" indication (or “Fee Address’ indication lorrn PTO/SB/47) attached.
`
`2. For printing on the patentlront page, list
`(1) the names of up to 3 registered patent
`attorneys or agents OR, altemalively, (2)
`‘he Flame 07 3 Sifigle firm (h3Vl|"Q 35 3
`member a registered attomey or agent)
`and the names of up to 2 registered patent
`attorneys orage_nts. If no name is listed. no
`name will be printed.
`
`4a. The following fees are enclosed (make check payable to Commissioner
`3- /\33|GNEE NAME AND RESIDENCE DATA TO BE PR|NTED ON THE PATENT (Dfinf 0'' lYlDt3)
`. or parents and Trademarks):
`PLEASE NOTE: Unless an assignee is-identified below, no assignee data will appear on the patent.
`Inclusion of '
`nee data is only approplate when an assignment has been previously submitted to K Issue Fee
`_
`the PTO or is being submitted under separate cover. Completion of this form is NOT a subsilitue for
`_
`filing an assignmem
`:4 Advance Order - it of Copies
`
`,
`/ 1!)
`(B) RESIDENCE: (CITY 3. STATE on C0 NTRY)
`4 T’ 0 7‘)V I '1
`500/;V
`C/‘Q. C /< A
`(will not be printed on the patent)
`Please check the appropriate assignee category indicated bel
`__
`LJ corporation or other private group entity U government
`Cl individual
`
`4b. The following fees or deficiency in these fees should be charged to:
`nEPoSn ACCOUNT NUMBEH
`(ENCLOSE AN EXTRA copy OF THIS FORM)
`I‘
`I
`~
`*_J Issue Fee
`Ll Advance Order - it of Copies
`OF_ PATENTS AND TRADEMARKS IS requested to apply the Issue Fee to the application identified above.
`
`"9331. 7/
`NOTE; e Issue Fee will not be acepted fro anyone other than the applicant; a register d attorney
`or agent; or the assignee or other party in interest as shown by the records of the Patent and
`Trademark Office.
`‘
`
`Burden Hour Statement: This form is estimated to take 0.2 hours to complete. Time will vary
`depending on the needs of the individual case. Any comments on the amount of time required
`to complete this form should be sent to the Chief information Officer. Patent and Trademark
`Office, Washington, D.C. 20231. DO NOT SEND FEES OR COMPLETED FORMS TO THIS
`ADDRESS. SEND FEES AND THIS FORM TO: Box Issue Fee, Assistant Commissioner for
`Patents, Washington D.C. 20231
`
`Under the Paperwork Reduction Act of 1995, nopersons are required to respond to a collection
`of information unless it displays a valid OMB control number.
`
`PTOL-85B (REV.10-96) Approved for use through 06/30/99. OMB 0651-0033
`
`Patent arid Trademark Office; u.s. DEPARTMENT OF CONlMER'
`
`T‘%3tA.i-.ir3%.:’l-3? THRS FOR§‘u§ WlT§*l FEE
`
`Page 8 of 189
`
`

`
`I hereby certify that this correspondence is being deposited with the United
`States Postal Service as first class mail in an envelope addressed to:
`
`BOX ISSUE FEE, Assistant Co
`Washington, D.C. 2023 l , on
`
`'
`
`inner for
`
`ents, V
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`In re application of: Daniel L. Flamm
`
`Examiner: SCHEINER, L.
`
`Application No.: 09/ 151,163_
`
`Art Unit: 1648
`
`Batch No.1 S80
`
`Filed: September 10, 1998
`
`For: MULTI_TEMPERATURE
`PROCESS
`
`AMENDMENT AFTER ALLOWANCE
`UNDER 37 CFR/1.312(a)
`
`BOX ISSUE FEE
`
`Assistant Commissioner for Patents
`
`Washington, D. C.
`
`20231
`
`Sir:
`
`In response to the Notice of Allowance mailed
`
`September 26, 2000, please amend the above-identified
`
`application as follows:
`
`IN THE SPECIFICATION:
`
`NZ At page 5,
`“means”.
`
`line J9, please delete ——9—— after
`
`Page 9 of 189
`
`

`
`PATENT
`
`x/
`insert -—be-— after
`
`/e
`
`rt ——6l5—- after
`
`in
`
`de ete “edge band” and
`
`«/
`
`ete "fluro—optic"
`
`e
`
`d
`
`/
`
`elete “with the” and
`
`/ l
`
`ete "fluor optic“
`
`e
`
`d
`
`/
`
`d
`
`elete "of chuck" and
`
`At page 26,
`
`i
`
`“limited to two".
`
`/ .
`
`n ert ——and—— after
`
`/.
`
`/
`
`At page 26,
`
`delete “V1” and insert
`
`At page 26,
`
`line
`
`3?,
`
`insert --805 and 807——.
`
`N///
`
`At page 27,
`
`line
`
`insert --805 and 807——.
`
`delete “V1 and V2” and
`
`/
`
`2, please delete “V2 and V2” and
`
`At page 23,
`
`At page 24,
`
`units.‘
`
`\//// At page 24,
`
`insert ——band edge——.
`
`N///At page 24,
`
`line
`
`and insert ——fluoroptic——.
`
`V///
`
`At page 25,
`
`line
`
`d
`
`insert ——with an——.
`
`N///At page 25,
`
`line
`
`and insert ——fluoroptic——.
`
`V///
`
`At page 25,
`
`line
`
`”insertfi-4or'chuck——.
`
`Page 10 of 189
`
`

`
`‘PATENT 7‘
`
`page 27,
`
`line
`
`4, please delete “l and 2” and
`
`insert ——801
`
`and 803——.
`
`At
`
`page 27,
`
`line
`
`5, please delete “TC2 and TC2" and
`
`and TC2-—.
`
`V/////
`
`page 27,
`
`line 10, please insert -—with—— after
`
`/
`
`8,
`
`please insert —-)-- after
`
`/
`
`9, please delete Wof”
`
`and.insert
`
`insert ——TC1
`
`At
`
`“controlled”.
`
`At
`
`“l0O°C”.
`
`-At
`
`-page 28,
`
`——or——.
`
`/At
`
`page 28,
`
`insert ——control——.
`
`At
`
`page 28,
`
`“oxygen”.
`
`\/At
`
`page 29,
`
`insert ——used-—.
`
`At
`
`page 29,
`
`\/
`
`delete “controlled”
`
`and
`
`insert/:—plasma—— after
`/
`
`delete “sued”
`
`and
`
`/
`
`insert —— —— after
`
`/,
`
`delete “C” and insert
`
`/A /
`/
`
`. At
`
`page 29,
`
`please
`
`At
`
`page 30,
`
`6, please delete “DD"” and insert
`
`Page 11 of 189
`
`

`
`PATENT
`
`At
`
`after “and”.
`
`line 8, please insert ——polysilicon——
`
`/
`\//////
`
`At
`
`line 8, please insert --schematically-—
`
`pvafter “are”.
`/ At
`insert ——Fig. 10——.
`
`page 30,
`
`\/////
`
`T
`
`line 8, please delete “the Fig.” and
`
`,
`
`V////
`
`At page 30,
`
`line 11, please delete “at endpoint”
`
`and insert ——beyond the endpoint——.
`
`IN THE DRAWINGS:
`
`Applicant submits new figures 7,8 and 10,
`
`consisting of 3 sheets of drawings. Newly submitted figures
`
`correct some inadvertent errors in the originally submitted
`
`drawings. Amendments to the originally submitted informal
`
`figures have been highlighted in red ink.
`
`With respect to Fig. 7, some editorial changes are
`
`made to replace several abbreviations with plain English and
`
`for consistency with the specification. “Heat xfer when need
`
`cool fluid” is deleted and replaced with ——Heat exchange when
`
`fluid cooling is needed (see, e.g. Specification, p. 25,
`
`lines 10——15).
`
`The legend accompanying 719, “bypass for use
`
`when exit fluid is cool & must be heated before use” is
`
`deleted and replaced with ——Bypass used when exit fluid must
`
`be heated—— (see, e.g. Specification p.25,
`
`lines 31 to p. 26,
`
`line 4). The two legends accompanying 713, “heat transfer
`
`fluid” and “Fluid Reservoir” are deleted and replaced with
`
`the coalesced legend ——Heat Transfer Fluid Reservoir—— to
`
`Page 12 of 189
`
`

`
`. P%ge5
`
`.
`
`.
`
`.
`
`.
`
`improve readability.
`
`“2—way solenoid valve accompanying 717”
`
`is deleted and replaced with the legend ——2—way control
`
`valve—— (see, e.g. Specification,
`
`p. 25,
`
`line 31 through
`
`p. 26,
`
`line 2). It is noted that the Specification teaches
`
`control valves 721 and 717 for diverting fluid flow and does
`
`not mention solenoid valves (it is well known in the art that
`
`a solenoid valve is an example of a control valve). While
`
`the applicant believes that those skilled in the art would
`
`understand the invention in full with the original legends,
`
`these changes are made for consistency and to avoid any
`
`possible confusion on the part of the reader.
`
`‘With respect to Fig. 8,
`
`in the new drawings,
`
`the
`
`abbreviated phrase “Liquid @
`
`temp” in each of the two legends
`
`is deleted and replaced with --Fluid at temperature——. This
`
`is done both to improve readability by replacing “@ temp”
`with correct English and to bring the legend into formal
`
`consistency with the language of the specification (see
`
`Specification p. 26,
`
`line 29 through p. 27 line 6).
`
`With respect to Fig. 10,
`
`three typographical errors
`
`in labels which appear by the lower curve (e.g.
`
`temperature
`
`versus time) have been corrected as follows:
`
`“B” along the lower curve is deleted and
`
`replaced with ——BB——;
`
`the letter “C” by the top of the first
`
`temperature step on this curve is deleted and replaced
`
`with ——B--;
`
`Page 13 of 189
`
`

`
`PATENT
`
`the rightmost “H” letter over this curve is
`
`deleted and replaced with --J--.
`
`The legend DD over the top curve in Fig. 10
`
`is deleted since it is not referenced.
`
`Also, axes labeled in conformance with the“
`
`Specification and the captions in Fig. 10 (see
`
`Specification p. 29,
`
`lines 21-23, 26) have been placed
`
`by the left and bottom of the top curve to improve
`
`readability and clarity.
`
`A label --Time--
`
`(see
`
`Specification,
`
`lines 18,26) has been added under the
`
`axis of the lower curve for the same reason.
`
`It is respectfully pointed out that the corrections
`
`are entirely consistent with the upper curve in Fig. 10 and
`
`they conform to the legends in Fig. 10 and to the
`
`specification.
`
`As concerns correcting “C” on the lower
`
`curve to --B--, please note that the legend at the bottom of
`
`_ Fig. 10 designates “B” as that time when the “C12 plasma is,
`ignited” (corresponding to the onset of light emission at.
`
`point “B” on the upper curve). Similarly,
`
`the specification
`
`(p.29,
`
`lines 19-21)
`
`teaches that “tungsten silicide is etched
`
`at this temperature until this layer is breached at random
`
`locations on the wafer” (the “layer is breached” at point “C”
`
`as specified in the caption in Fig. 10: “C. Wsix begins to
`
`clear.”). The reference to typographical error “C” in the
`
`specification (page 29,
`
`line 19) was corrected (e.g.
`
`IN THE
`
`SPECIFICATION, above). This typographical error is obvious
`
`from the language on p.29,
`
`lines 22-24
`
`in the Specification
`
`which references the change in “the slope of intensity of an
`
`Page 14 of 189
`
`

`
`Page 7
`
`PATENT
`
`optical light emission” at point C (shown
`
`on the upper".
`
`curve)after the “higher steady state value” (referenced on
`
`line 19 of p. 29).
`
`As concerns correcting “B” on the lower curve to
`
`-—BB——, please observe that in the specification (see p. 29,
`
`line 18),
`
`reference is made to “BB” as being “at the end of
`
`the breakthrough step” when “the control program increases"
`
`to “a higher steady state value at time C”.
`
`The reference
`
`label “BB” was absent in the informal drawing Fig. 10 since
`
`it was marked as “B” by typographical error.
`
`As concerns the typographical error “H” over the
`
`top right hand side of the lower curve it is obvious that the
`
`symbol “H” is already used (there is a center label “H”)and
`
`that the right hand “H” would be out of alphabetical order.
`
`Moreover, “J” which is referenced in the caption was absent
`
`in the informal drawing.
`
`In fact the caption at the bottom of
`
`Fig. 10 makes it plain that “H” designates coordinates when
`
`“Plasma extinguished and O2 feed gas flow is started” (also in
`
`the Specification, p. 30,
`
`lines 14-17) and that step “J” is
`
`when “O2 plasma is extinguished.” The caption in Fig. 10 also-
`
`designates the order of these steps as H.
`
`I, J.
`
`While Applicant believes that those skilled in the
`
`art would readily understand the invention and would
`
`recognize the error in Fig. 10,
`
`these corrections and the
`
`.addition of axes are made to avoid any possible confusion on»
`the part of the reader.
`
`Page 15 of 189
`
`

`
`PATENT
`
`All listed changes to be made in the specification
`
`are grammatical, spelling or simple typographical error
`
`corrections, excepting the following:
`
`1) At page 5,
`
`line 8, reference to item 19 is
`
`“deleted because there is no item 19 shown in Fig. l.
`
`2) “6l5" is inserted in the reference to Fig.
`
`6
`
`“temperature sensing units” to avoid any confusion by a
`
`reader. However Applicant believes those skilled in the art
`
`would easily understand the reference without this addition.
`
`3) Valves are referenced_by numbers in Fig.
`
`8
`
`rather than as “V1” and “V2”. Therefore the appropriate
`
`reference numbers “805” and “807" are inserted into the
`
`specification in place of “V1” and “V2”. The reservoirs in
`
`Fig.
`
`8 are referenced as 801 and 801 rather than as “l” and
`
`“2”.
`
`The specification is changed accordingly.
`
`4) A word “plasma” was inserted on page 28,
`
`line 27
`
`‘to add clarity., Applicant believes that this is a_mere
`
`-
`
`formality and that those skilled in the art would understand
`
`that a plasma is implied.
`
`5) A reference to Fig. 10 “C” at page 29,
`
`line 19
`
`was corrected to “B” as explained in connection with the
`
`above changes “IN THE DRAWINGS.”
`
`6) The word “polysilicon” is inserted at page 30,
`
`line 8 since it was omitted typographically. Applicant
`
`believes that those skilled in the art would understand a
`
`Page 16 of 189
`
`

`
`Ege9
`
`’
`
`PATENT
`
`“reference to polysilicon nonetheless since polysilicon is_
`indicated elsewhere in the Specification (i.e. p. 30,
`line 1)
`
`as well as in Fig. 8.
`
`7)
`
`“DD” is changed to “D” at page 30,
`
`line 6 to
`
`bring it into conformance with the legend above the top curve
`
`of Fig.
`
`lO. This also conforms to the lower curve of Fig. 10
`
`where it is shown that temperature is reduced beginning at
`
`point D. The legend DD is deleted from above the top curve in
`
`Fig. 10 since it is not referenced. Applicant believes those
`
`skilled in the art will understand the curves and legend in
`the informal drawing of Fig. 10 and would recognize the
`
`typographical error in the Specification.
`
`8) The word “schematically” is inserted at page_30,
`
`line 8 to clarify the nature of the drawing.‘ Applicant”
`
`believes the explanation of the drawing will be understood by
`
`those skilled in the art without this added clarification.
`
`9) At page 30,
`
`line 8 “the Fig.” is changed to
`
`“Fig. 10” to add clarity. Applicant believes this is merely
`
`a formality.
`
`10) At page 30,
`
`line ll “at endpoint” is changed to
`
`“beyond the endpoint" to bring this statement into
`
`conformance with the illustration in Fig. 10. Some etching
`
`may continue beyond the endpoint E until the plasma is
`
`extinguished at “H.”
`
`It is well known and understood by
`
`vthose skilled in the art that etching continues beyond an
`endpoint until a plasma is extinguished.
`
`Page 17 of 189
`
`

`
`PATENT
`
`REMARKS
`
`Entry of this amendment is respectfully urged since
`
`it merely cures certain formal defects and does not
`
`touch the
`
`merits.
`
`If the Examiner believes a telephone conference
`
`would expedite prosecution of this application, please
`
`telephone the undersigned at
`
`(925) 947——l909.
`
`Respectfully submitted,
`
`54%
`
`Daniel L. Flamm
`
`Applicant
`
`»Daniel L. Flamm“
`476 Green View Drive
`
`Walnut Creek, California 94596——5459
`
`Tel:(925)
`
`947——1909 / Fax:(925)
`
`937——2754
`
`Page 18 of 189
`
`

`
`rebycertifythatthiscorrespondenceisbeing
`
`,
`
`‘
`
`deposited with the United States Postal Sen/ice as
`first class mail in an envelope addressed to:
`Box Issue Fee
`Assistant Commissioner of Pat
`
`is and Tr
`
`emaiits
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`PATENT
`
`In re application of:
`
`Daniel L. Flamm
`
`Serial No.2 09/151,163
`
`Filed: September 10, 1998
`
`For: MULTITEMPERATURE PROCESSING
`
`Assistant Commissioner of Patents
`
`Washington, DC. 20231
`
`Sir:
`
`~i»a\a\a\/\y\;\_/\/
`
`Examiner: Examiner: L. Scheiner
`
`Art Unit: 1648
`
`Batch No.2 S80
`
`LETTER TO OFFICIAL
`DRAFTSPERSON
`
`Pursuant to the Notice of Allowability dated September 29, 2000, applicant
`submits fifteen sheets of formal drawings to be made of record in the above—identified case.
`
`Exercising an abundance of caution, Applicant encloses two alternative sets of
`formal drawings for Figs. 7, 8, and 10, consisting three sheets each. A First Set, which conforms
`to the existing Allowance from Examiner Scheiner. contains typographical errors identically
`present in the original informal drawings. These errors are corrected in the Second Set of formal
`drawings for Figs. 7, 8 and 10, and these three corrected drawings are provisionally enclosed.
`Please note that the second set has not yet been reviewed by Examiner Scheiner; hence the first
`set with typographical errors is formally submitted to be of record at this time. Applicant
`respectfully hopes that Examiner Scheiner will find that the Second Set is allowable and can be
`admitted in place of the first set.
`
`Applicant is concurrently submitting an AMENDMENT AFTER ALLOWANCE
`UNDER 37 CFR § 1.312(a)
`to Examiner Scheiner in which Applicant respectfully requests that
`these corrections be allowed. The Applicant wishes to apologize for any inconvenience.
`Applicant attempted to contact and fax this material to Examiner Scheiner for consideration in
`advance of the due date, however Examiner Scheiner and colleagues were understandably on
`holiday vacation and will not return until after the due date of December 26.
`
`Res ectfully submitted,
`
`:
`
`Daniel L. Flamm
`
`476 Green View Drive
`Walnut Creek, California 94596-5459
`(925) 947-1909
`
`Page 19 of 189
`
`

`
`.
`Daniel L. Flamm
`476 Green View Drive
`Walnut Creek, CA 94596-5459
`(925) 947-1909
`
`Transmittal Letter
`1 5/ H23
`V
`__
`
`09
`
`4/
`”
`
`Date: December 24, 2000
`
`I hereby certify that this is being deposited with the
`United States Postal Service as first class mail in an
`
`envelope addressed to:
`
`BOX ISSUE FEE
`Assistant Commissioner for Patents
`
`Washington, D.C. 20231
`
`Date:
`
`1000
`
`Daniel L. Flamm
`
`BOX ISSUE FEE
`ASSISTANT COMMISSIONER FOR PATENTS
`
`Washington, D.C. 2023]
`
`Sir:
`
`Transmitted herewith are the following documents:
`
`Amendment After Allowance Under 37 C.F.R. §1.312(a)
`Letter to Examiner Scheiner and Official Draftsperson
`Copy of letter to Official Draftsperson;
`Original and corrected copies of Figs. 7.8.9
`
`MATCHTSE RETURN
`
`5%”
`
`Daniel L. Flamm
`
`Q/fio
`
`Page 20 of 189
`
`

`
`In re application of:
`
`Daniel L. Flamm
`
`Serial No.: 09/151,163
`
`Filed: September 10, 1998
`
`For: MULTI—TEMPERATURE PROCESSING
`
`Assistant Commissioner of Patents
`
`Washington, D.C. 20231
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`% \
`
`gag/g/\_/g/g/\_/xgé
`
`Examiner: Examiner: L. Scheiner
`'
`
`Art Unit: 1648
`
`Batch No.2 S80
`
`LETTER TO EXAMINER AND OFFICIAL
`DRAFTSPERSON
`
`Date: December 23, 2000
`
`Dear Examiner Scheiner and DRAFTSPERSON:
`
`In preparing the formal drawings and reviewing various materials prior to
`submission for Issue, I found some typographical errors in the Specification and several of the
`Informal Drawings.
`I attempted to Contact Examiner Scheiner to expedite processing of the
`enclosed AMENDMENT AFTER ALLOWANCE UNDER 37 CFR/l.312(a) ,
`to thereby minimize any
`inconvenience. However I learned that many staff, including those in Examiner Scheiner’s unit
`are on leave for the holidays.
`
`Using an abundance of caution, I am submitting Formal Drawings which
`correspond to the Informal Drawings which were in the Application before Examiner Scheiner.
`However, I am also submitting three Formal Drawings with the corrections submitted in the
`enclosed AMENDMENT AFTER ALLOWANCE UNDER 37 CFR/1.312(a).
`It
`is my hope that Examiner
`Scheiner may approve the Amendment and that the corrected formalities will be able to be
`admitted in the published patent.
`
`tfully submitted.
`
`X
`
`Daniel L. Flamm
`
`476 Green View Drive
`Walnut Creek, California 94596-5459
`Tel: (925) 947-1909
`Fax: (925) 937-2754
`
`Page 21 of 189
`
`

`
`535.
`
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`
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`
`Page 22 of 189
`
`

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`m9TIFARD
`
`Page 23 of 189
`
`

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`DRAFTSHAR ’
`
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`
`Page 24 of 189
`
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`Page 25 of 189
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`Page 26 of 189
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`Page 27 of 189
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`Page 30 of 189
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`Page 32 of 189
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`Q§:AF7si~mz2
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`Page 33 of 189
`
`

`
`i RAFTSfi‘-.»‘«,H§
`
`Fluid at
`temperature T1
`
`Fluid at
`temperature T2
`
`Page 34 of 189
`
`

`
`.. i
`ORAFTSMHH 2
`T
`.
`
`1
`
`J
`
`' '
`
`Photoresist
`
`Tungsten Silicide
`
`Polysilicon
`Sill‘con dioxide
`
`Silicon Wafer
`
`A
`
`Page 35 of 189
`
`

`
`’*"-‘°"'.*"“.'3:*°’§i::‘.{‘a.“.FlG.
`63’
`f‘5=Is_ss— suscuxss
`oaAFrs:~m:4.§
`
`‘
`
`B Temp reduced atD
`
`Intensityat520nm
`
`520 nm
`
`Resist ashed in 02
`(different wavelength)
`
`Constant Temperature
`
`120
`
`160
`
`Time
`
`A. SF5 native oxide "breakthrough"
`B. Clg plasma is ignited
`C. WSix begins to clear (endpoint)
`D. Polysilicon is exposed
`E. Polysilicon cleared to oxide
`
`H. Plasma extinguished and O2 feed
`gas flow is started
`l. 02 plasma is started
`J 02 plasma is extinguished.
`
`Fig. 10
`
`Page 36 of 189
`
`

`
`DocCode - SCORE
`
`SCORE Placeholder Sheet for IFW Content
`
`Application Number: 09151163
`
`Document Date: 01/02/2001
`
`The presence of this form in the IFW record indicates that the following document type was received in paper
`and is scanned and stored in the SCORE database.
`
`0 Drawings
`
`Images of the original documents are scanned in gray scale or color and stored in SCORE. Bi-tonal images are
`also stored in IFW. Defects visible in both IFW and SCORE are indicative of defects in the original paper
`documents.
`
`To access the documents in the SCORE database, refer to instructions developed by SIRA.
`
`At the time of document entry (noted above):
`
`0 Examiners may access SCORE content via the eDAN interface.
`0 Other USPTO employees can bookmark the current SCORE URL (http://es/ScoreAccessWeb/).
`
`0 External customers may access SCORE content via the Public and Private PAIR interfaces.
`
`Form Revision Date: December 8, 2006
`
`Page 37 of 189
`
`

`
`Daniel L. Flamm
`476 Green View Drive
`
`Walnut Creek, CA_ 94596-5459
`(925) 947-1909
`
`mrnmrmim §,,_;_,f;!°7[’§£ /45
`
`13$
`
`_ Date: December 24 2000
`
`-
`
`_
`
`I hereby certify that this is being deposited with the
`United States Postal Service as first class mail in an
`
`envelope addressed to:
`
`BOX ISSUE FEE
`Assistant Commissioner for Patents
`
`Washington, D.C. 20231
`
`Date:
`
`1 V) 10&0
`
`BOX ISSUE FEE
`ASSISTANT COMMISSIONER FOR PATENTS
`
`Washington, D.C. 20231
`
`Sir:
`
`Transmitted herewith are the following documents:
`1)
`Issue Fee Transmittal (Part B);
`2)
`Letter to Official Draftsperson
`3)
`Formal Drawings (15 sheets);
`4)
`Amended Formal Drawings (Provisional) (3 sheets);
`5)
`Letter to Examiner and Official Draftsperson
`
`Please find enclosed a check for the issue fee in the amount of $605.00.
`
`[X]
`
`Issue Fee
`
`$
`
`605.00
`
`Daniel L. Flamm
`
`Page 38 of 189
`
`

`
`UNDER SECRETARY or COMMERCE FOR INTELLECTUAL PROPERTY AND
`DIRECTOR or THE UNITED STATES PATENT AND TRADEMARK OFFICE
`WASHINGTON, D.C. 20231
`
`TOWNSEND & TOWNSEND CREW LLP
`TWO EMBARCADERO CENTER 8TH FLOOR
`SAN FRANCISCO CA 94111
`
`Mail Date: April 04, 2001
`Serial Number: 09/151163
`Applicant: FLAMM
`
`NOTICE TO PAY BALANCE OF ISSUE FEE
`
`Your issue fee payment filed on 01/02/01 has been received. However, new patent fees went into efi°ect on
`October 1, 2000. The final rule entitled “Revision of Patent Fees for Fiscal Year 2001” was published in
`the Federal RegisterNol. 65, No. 156/Friday, August 11, 2000 [49l93—49199] and in the U.S. Patent and
`Trademark Ofiice Official Gazette, August 29, 2000 [1237 0G 131-138]. As stated in the final rule, “Any
`fee amount that is paid on or after the etfective date of the fee increase will be subject to the new fees then
`in effect.” The Notice of Allowance and Issue Fee Due (Form PTOL-85) that was mailed to you prior to
`October 1, 2000, stated an issue fee amount that was in efiect prior to October 1, 2000. However,
`inasmuch as your issue fee was paid on or after October 1, 2000, the new issue fee amount was due.
`
`In accordance with 37 CFR 1.317, you are given a time period of THREE (3) MONTHS from the mailing
`date of this notice during which to pay the BALANCE DUE indicated below. This three-month time
`period may n_0t be extended.
`If your patent issues before the expiration of the three-month period and
`if you do not pay the balance due before the expiration of the three-month period, your patent will
`lapse at the termination of the three-month period.
`
`TYPE OF ISSUE
`FEE PAID
`
`Column A
`ISSUE FEE IN EFFECT
`AS OF OCT. 1, 2000
`large entity I small entity
`
`Column B
`ISSUE FEE
`PAID
`
`BALANCE DUE
`[CoI. A minus Col. B]
`
`UTILITY
`
`$1,240.00 / $620.00
`
`$_605.00_
`
`$_15.oo__
`
`DESIGN
`
`$440.00 / $220.00
`
`$
`
`PLANT
`
`_
`
`$600.00 / $300.00
`
`Tel: 703-305-8263
`
`You MUST return a copy of this Notice with your p