IPR2016-01378
`U.S. Patent No. 6,197,696
`
`UNITED STATES PATENT AND TRADEMARK OFFICE
`___________________________________
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`___________________________________
`TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. and
`GLOBALFOUNDRIES U.S. INC.,
`Petitioners,
`v.
`GODO KAISHA IP BRIDGE 1,
`Patent Owner.
`___________________________________
`Case No. IPR2016-013781
`Patent Number 6,197,696
`Before JUSTIN T. ARBES, MICHAEL J. FITZPATRICK, and
`JENNIFER MEYER CHAGNON, Administrative Patent Judges.
`
`PATENT OWNER’S UPDATED LIST OF EXHIBITS
`
`
`
`
`
`
`1 GlobalFoundries U.S. Inc., who filed Petition IPR2017-00923, has been joined as
`
`a petitioner in this proceeding.
`
`
`
`
`U.S. Patent No. 6,197,696
`
`UNITED STATES PATENT AND TRADEMARK OFFICE
`___________________________________
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`___________________________________
`TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. and
`GLOBALFOUNDRIES U.S. INC.,
`Petitioners,
`v.
`GODO KAISHA IP BRIDGE 1,
`Patent Owner.
`___________________________________
`Case No. IPR2016-013781
`Patent Number 6,197,696
`Before JUSTIN T. ARBES, MICHAEL J. FITZPATRICK, and
`JENNIFER MEYER CHAGNON, Administrative Patent Judges.
`
`PATENT OWNER’S UPDATED LIST OF EXHIBITS
`
`
`
`
`
`
`1 GlobalFoundries U.S. Inc., who filed Petition IPR2017-00923, has been joined as
`
`a petitioner in this proceeding.
`
`
`
`
`
`IPR2016-01378
`U.S. Patent No. 6,197,696
`In accordance with 37 C.F.R. § 42.63(e), Patent Owner Godo Kaisha IP
`
`Bridge 1 (“Patent Owner”) hereby submits a current listing of Patent Owner’s
`
`exhibits.
`
`
`
`Exhibit
`
`List of Exhibits
`
`Description
`
`Previously
`Filed
`x
`
`x
`
`x
`
`x
`
`x
`
`x
`
`x
`x
`x
`
`x
`
`x
`
`x
`
`x
`
`x
`
`EX2004
`
`EX2001 N. Sclater & J. Markus, McGraw-Hill Electronics
`Dictionary (6th ed. 1997) (excerpted)
`EX2002 R. F. Graf, Modern Dictionary of Electronics (6th ed.
`1984) (excerpted)
`EX2003 R. F. Graf, Modern Dictionary of Electronics (7th ed.
`1999) (excerpted)
`S. M. Kaplan, Wiley Electrical and Electronics
`Engineering Dictionary (2004) (excerpted)
`EX2005 October 7, 2016 Preliminary Constructions, Godo
`Kaisha IP Bridge 1 v. Broadcom Ltd., et al., (E.D. Tex
`2:16-CV-134-JRG-RSP)
`EX2006 Hans Domininghaus, Plastics for Engineers: Materials,
`Properties, Applications (1993) (excerpted)
`EX2007 U. S. Patent No. 6,147,009 to Grill et al.
`EX2008 Declaration of Seung Woo Hur
`EX2009 Declaration of Alexander Glew, Ph.D. In Support of
`Patent Owner’s Response Under 37 C.F. R. § 42.120
`EX2010 Deposition of Bruce Smith in Taiwan Semiconductor
`Manufacturing Co., v. Godo Kaisha IP Bridge
`1(P.T.A.B. IPR2016-01376) taken on March 23, 2017
`EX2011 Redline Comparing Grill (EX1005) with Grill’s
`Provisional (EX1017) Application
`Japanese Patent Application 10-079371 to Aoi as
`Submitted in European Patent Application No. 99 105
`946.0 with accompanying translation
`EX2013 Declaration of Takeo Ohashi, Ph.D. In Support of
`Patent Owner’s Response Under 37 C.F. R. § 42.120
`Influence of reactor wall conditions on etch processes
`in inductively coupled fluorocarbon plasmas by M.
`
`EX2012
`
`EX2014
`
`1
`
`
`
`IPR2016-01378
`U.S. Patent No. 6,197,696
`
`EX2016
`
`EX2020
`
`Schaepkens, et al., J. Vac. Sci. Tech. A 16(4), Jul/Aug
`1998
`EX2015 Handbook of VLSI Microlithography, Second Edition,
`Principles, Technology, and Applications, edited by
`John N. Helbert, Noyes Publications, William Andrew
`Publishing, LLC, 2001
`Silicon VLSI Technology Fundamentals, Practice and
`Modeling, by James D. Plummer, et al., Prentice Hall,
`2000
`EX2017 Microlithography: Science and Technology, by James
`R. Sheats and Bruce W. Smith, Marcel Dekker, Inc.,
`1998
`EX2018 Microlithography: Science and Technology, 2nd ed., by
`James R. Sheats and Bruce W. Smith, CRC Press, 2007
`EX2019 Microlithography: Science and Technology, 2nd ed., by
`James R. Sheats and Bruce W. Smith, CRC Press, 2007
`Silicon Processing for The VLSI Era Vol. 2 Process
`Integration by Stanley Wolf and R.N. Tauber, Lattice
`Press, 1986
`EX2021 Kenkyusha’s New Japanese-English Dictionary, 4th ed.,
`35th Impression, published by Kenkyusha Ltd., 1997
`EX2022 Declaration of Jordan M. Rossen In Support of Patent
`Owner’s Response Under 37 C.F. R. § 42.120
`EX2023 Declaration of Susann Brailey and Exhibit A regarding
`Influence of reactor wall conditions on etch processes
`in inductively coupled fluorocarbon plasmas by M.
`Schaepkens, et al., J. Vac. Sci. Tech. A 16(4), Jul/Aug
`1998
`EX2024 Affidavit of Pamela Stansbury regarding Influence of
`reactor wall conditions on etch processes in inductively
`coupled fluorocarbon plasmas by M. Schaepkens, et al.,
`J. Vac. Sci. Tech. A 16(4), Jul/Aug 1998
`Influence of reactor wall conditions on etch processes
`in inductively coupled fluorocarbon plasmas by M.
`Schaepkens, et al., J. Vac. Sci. Tech. A 16(4), Jul/Aug
`1998
`EX2026 Library of Congress Certification of Handbook of VLSI
`Microlithography, Second Edition, Principles,
`Technology, and Applications, edited by John N.
`
`EX2025
`
`
`
`-2-
`
`x
`
`x
`
`x
`
`x
`
`x
`
`x
`
`x
`
`x
`
`Served
`only.
`
`Served
`only.
`
`Served
`only.
`
`Served
`only.
`
`
`
`IPR2016-01378
`U.S. Patent No. 6,197,696
`
`EX2030
`
`Helbert, Noyes Publications, William Andrew
`Publishing, LLC, 2001 (excerpted)
`EX2027 Library of Congress Certification of Handbook of VLSI
`Microlithography, Principles, Technology, and
`Applications, edited by William B. Glendinning and
`John N. Helbert, Noyes Publications, William Andrew
`Publishing, LLC, 1991 (excerpted)
`EX2028 Library of Congress Certification of Silicon VLSI
`Technology Fundamentals, Practice and Modeling, by
`James D. Plummer, et al., Prentice Hall, 2000
`(excerpted)
`EX2029 Affidavit of Pamela Stansbury regarding Silicon VLSI
`Technology Fundamentals, Practice and Modeling, by
`James D. Plummer, et al., Prentice Hall, 2000
`Silicon VLSI Technology Fundamentals, Practice and
`Modeling, by James D. Plummer, et al., Prentice Hall,
`2000 (excerpted)
`EX2031 Library of Congress Certification of Microlithography:
`Science and Technology, by James R. Sheats and Bruce
`W. Smith, Marcel Dekker, Inc., 1998 (excerpted)
`EX2032 Library of Congress Certification of Microlithography:
`Science and Technology, 2nd ed., by Kazuaki Suzuki and
`Bruce W. Smith, CRC Press, 2007 (Chapter 12)
`(excerpted) (Smith Deposition Exhibit 3)
`EX2033 Library of Congress Certification of Microlithography:
`Science and Technology, 2nd ed., by Kazuaki Suzuki and
`Bruce W. Smith, CRC Press, 2007 (Chapter 11)
`(excerpted) (Smith Deposition Exhibit 9)
`EX2034 Affidavit of Pamela Stansbury regarding Silicon
`Processing for The VLSI Era Vol. 1 Process Technology
`by Stanley Wolf and R.N. Tauber, Lattice Press, 1986
`Silicon Processing for The VLSI Era Vol. 1 Process
`Technology by Stanley Wolf and R.N. Tauber, Lattice
`Press, 1986 (excerpted)
`EX2036 U.S. Pat. No. 5,322,749
`
`EX2035
`
`EX2037 U.S. Pat. No. 6,181,420
`
`
`
`-3-
`
`x
`
`Served
`only.
`
`Served
`only.
`
`Served
`only.
`
`Served
`only.
`
`Served
`only.
`
`Served
`only.
`
`Served
`only.
`
`Served
`only.
`
`Served
`only.
`Served
`only.
`
`
`
`IPR2016-01378
`U.S. Patent No. 6,197,696
`
`EX2038 U.S. Pat. No. 6,808,647
`
`EX2039 Declaration of Jordan M. Rossen
`
`EX2040 Transcript of the Deposition of Dr. B. Smith
`(August 2, 2017)
`Patent Owner’s Demonstrative Slides
`
`EX2041
`
`Served
`only.
`Served
`only.
`x
`
`
`
`
`
`
`
`
`
`-4-
`
`
`
`IPR2016-01378
`U.S. Patent No. 6,197,696
`
`Patent Owner hereby certifies that copies of all listed documents above have
`
`been served on counsel for Petitioner.
`
`
`
`
`
`Respectfully submitted by:
`
` /James L. Davis, Jr./
`James L. Davis, Jr. (lead counsel)
`Reg. No. 57,325
`ROPES & GRAY LLP
`1900 University Avenue, 6th
`Floor
`East Palo Alto, CA 94303-2284
`P: 650-617-4794/F: 617-235-9492
`james.l.davis@ropesgray.com
`
`J. Steven Baughman
`Reg. No. 47,414
`Paul, Weiss, Rifkind, Wharton &
`Garrison LLP
`2001 K Street, NW
`Washington, DC 20006-1047
`P: 202-223-7340/F: 202-403-3740
`sbaughman@paulweiss.com
`
`Attorneys For Patent Owner
`
`Dated: September 8, 2017
`
`
`
`Jordan M. Rossen
`Reg. No. 74,064
`ROPES & GRAY LLP
`2099 Pennsylvania Ave., NW
`Washington D.C. 20006-6807
`P: 202-508-4759/F: 617-235-9492
`jordan.rossen@ropesgray.com
`
`
`Andrew N. Thomases
`Reg. No. 40,841
`ROPES & GRAY, LLP
`1900 University Ave., 6th Floor
`East Palo Alto, CA 94303
`(650) 617-4000/F: 617-235-9492
`andrew.thomases@ropesgray.com
`
`
`
`
`
`
`
`
`
`5
`
`
`
`IPR2016-01378
`U.S. Patent No. 6,197,696
`
`CERTIFICATE OF SERVICE
`
`The undersigned hereby certifies that this PATENT OWNER’S
`
`
`
`
`
`UPDATED LIST OF EXHIBITS was served by filing this document
`
`through the Patent Trial and Appeal Board PTAB E2E, as well as providing
`
`a courtesy copy via e-mail to the following attorneys of record for the
`
`Petitioner listed below:
`
`Petitioner TSMC’s Counsel of Record:
`
`Darren M. Jiron, Darren.jiron@finnegan.com
`E. Robert Yoches, bob.yoches@finnegan.com
`J. Preston Long, j.preston.long@finnegan.com
`Joshua L. Goldberg, Joshua.Goldberg@finnegan.com
`
`FINNEGAN, HENDERSON, FARABOW, GARRETT & DUNNER, LLP
`ATTN: Patent Administration, Two Freedom Square, 11955 Freedom Drive,
`Reston, VA 20190-5675
`
`Petitioner GlobalFoundries’s Counsel of Record:
`
`Christopher Carroll, christopher.carroll@whitecase.com
`75 State St, Boston, MA 02109-1814
`Shamita Etienne-Cummings, setienne@whitecase.com
`701 Thirteenth St NW, Washington, DC 20005-3807
`
`WHITE & CASE, LLP
`Dated:
`September 8, 2017
`
`Respectfully submitted,
`
`
`
`
`
`
`By:
`
`/Crena Pacheco/
`Name: Crena Pacheco
`
`
`ROPES & GRAY LLP
`
`
`
`
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