`with the United States Postal Service, with sufficient
`postage, as first class mail in an envelope addressed to:
`Assistant Commissioner for Patents
`Washington, DC. 20231
`on March 31, 2000
`Date of Deposit
`
`Paul E. Rauch, Ph.D.
`Name of applicant, assignee or
`esentative
`
`Signature
`March 3|, 2000
`Date of Signature
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`Our Case No. 10200112
`
`
`
`In re Application of:
`
`Nulty et al.
`
`_
`_
`__
`Filing Date: Filed herewith
`
`For METHOD FOR ELIMINATING
`LATERAL SPACER EROSION ON
`ENCLOSED CONTACT
`TOPOGRAPHIES DURING RF
`SPUTTER CLEANING
`
`Examiner
`
`Group Art Unit No.
`
`w./x./\/»/\/\z\J-/\/»I
`
`PRELIMINARY AMENDMENT
`
`Assistant Commissioner for Patents
`
`Washington, D.C. 20231
`
`Dear Sir:
`
`Prior to examinationon the merits, please amend the above-identified application
`as follows:
`
`INTEL 1110
`
`
`
`TITLE
`IN
`/
`Please replace the title with the following: --STRUCTURE HAVING REDUCED
`
`THE
`
`‘ LATERAL SPACER EROSION--.
`
`Please amend the claims as follows:
`
`IN THE CLAIMS
`
`Please cancel Claims 1-24, without prejudice to their further prosecution in a
`
`Divisional and/or Continuation application.
`
`Claims 25-26. line 2 of each, please change "is" to ——comprises——.
`
`Please add the following new claims:
`
`
`a co
`
`uctive layer disposed over a substrate;
`
`comprising:
`
`a first i sulating layer on the conductive layer;
`
`a contac region in said first insulating layer;
`
`first insulating layer; and
`
`(d)
`
`(e)
`
`at least on insulating spacer in the contact region adjacent to the
`
`an etch stop rn terial over said first insulating layer and adjacent to
`
`the insulating spacer, the etch stop
`
`
`
`terial being distinct from the insulating spacer.
`
`substantially recta gular profile i
`
`Th structure Of 27, wherein the insulating spacer has a
`
`the contact region.
`
`28.
`
`
`
`
`The str cture of Claim 27, wherein the insulating spacer has a surface
`29.
`B
`gion without overlying etch stop material.
`p rtion in the contact
`
`
`30.
`The structu e of Claim 29, wherein the insulating spacer surface portion
`without overlying etch stop
`ateijal comprises an insulating spacer surface portion most
`distant from said substrate.
`
`
`\
`
`portion in the contact region wit
`
`,The structure of 28, wherein the insulating spacer has a surface
`
`toverlying etch stop material.
`
`31.
`
`
`
`The structure of Claim 27, further comprising a second insulating layer on
`
`t e etch st
`
`layer and over the conductive layer.
`
`33.
`
`e structure of Claim 32, further comprising a second conductive
`
`A structure, comprising the steps of:
`
`a first electrically conductive material formed in andlor on a surface
`
`
`
`
`
`
`
`and second electrically conductive
`
`gions;
`
`(e)
`
`(f)
`
`a blanket layer ov the etch stop layer; and
`an opening through a 'rst part of the etch stop layer to the first
`
`
`
`Kl:
`
`electrically conductive region.
`
`the electrically insulative spacer has a
`'
`3%\ The structure of Cla_i_m 34. w
`ubstantiallyrectangular cross-sectional shap ‘ a plane that is substantially
`perpendicular
`
`The ' ructure of Claim 34, wherein the electrically insulating spacer has a
`36.
`V)?‘
`surface portion witho toverlying etch stop material.
`
`37.
`
`The struct e of Claim 36, wherein the electrically insulating spacer
`
`surface portion without ov lying etch stop material comprises a surface portion most
`
`distant from said substrate.
`
`
`
`38.
`
`The structure of Cl
`
`‘m 34, further comprising a second insulating layer on
`
`the etch stop layer and over the co ductive layer.
`
`
`
`
`
`
`
`o~“”‘I
`
`9.
`($3
`mate ial in the c
`
`e structure of Claim 38, further comprising a second conductive
`tact region.
`..
`
`
`
`Applicants submit the application is now in condition for examination on the
`
`merits. Early notice of such action is earnestly solicited.
`
`REMARKS
`
`Respectfully submitted.
`
`
`
`aul E. Rauch, Ph.D.
`Registration No. 38,591
`Attorney for Applicant
`
`BRINKS HOFER GlLSON & LIONE
`P.O. BOX 10395
`CHICAGO, ILLINOIS 60610
`(312) 3214200 '
`
`F:\Home\Prauch\10200 Cypressl 10200 12 — Preliminary Amendment
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