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` Case IPR2016-01264 for
`U.S. Patent No. 6,538,324
`
`
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`By: Michael J. Fink (mfink@gbpatent.com)
`Greenblum & Bernstein, P.L.C.
`1950 Roland Clarke Place
`Reston, Virginia 20191
`Tel: (703) 716-1191
`Fax: (703) 716-1180
`
`
`
`UNITED STATES PATENT AND TRADEMARK OFFICE
`____________
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`____________
`
`TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED,
`and GLOBALFOUNDRIES U.S. INC.,
`Petitioners,
`
`v.
`
`GODO KAISHA IP BRIDGE 1,
`Patent Owner.
`____________
`
`Case No. IPR2016-012641
`U.S. Patent No. 6,538,324
`____________
`
`PATENT OWNER’S CURRENT EXHIBIT LIST
`(As of July 17, 2017)
`
`
`
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`
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`1 GlobalFoundries U.S. Inc.’s motion for joinder in Case IPR2017-00920 was
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`granted.
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` Case IPR2016-01264 for
`U.S. Patent No. 6,538,324
`
`
`PATENT OWNER’S CURRENT EXHIBIT LIST
`(As of July 17, 2017)
`
`Exhibit
`No.
`
`Description
`
`Newly
`Submitted
`
`2001
`
`2002
`
`2003
`
`2004
`
`Chang, C.C., Chen, J.S. and Hsu, W.S., “Failure
`Mechanism of Amorphous and Crystalline Ta-N
`Films in the Cu/Ta N/Ta/SiO2 Structure.” Journal
`of The Electrochemical Society, 151(11), pp.G746-
`G750 (2004).
`
`U.S. Patent Application No. 08/995,108,
`Amendment “A” Under 37 C.F.R. §1.111, dated
`February 1, 2000.
`
`“Amorphous.” Merriam-Webster.com. Accessed
`September 30, 2016. http://www.merriam-
`webster.com/dictionary/amorphous.
`
`“Nitride.” Merriam-Webster.com. Accessed
`September 30, 2016. http://www.merriam-
`webster.com/dictionary/nitride.
`
`2005
`
`Expunged
`
`2006
`
`Expunged
`
`2007
`
`Expunged
`
`2008
`
`2009
`
`2010
`
`Guralnik, D. B., ed. “Amorphous.” Def. 4.
`Webster’s New World Dictionary of the American
`Language. Modern desk ed. Prentice Hall Press,
`1979. Print.
`
`Grant, J., ed. “Nitride.” Hackh’s Chemical
`Dictionary. 4th ed. McGraw-Hill, 1969. Print.
`
`Sienko, M.J., Plane, R.A. Chemistry. 2d ed. New
`York, McGraw-Hill, 1961, pp. 193-195. Print.
`
`
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`1
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`Exhibit
`No.
`
`Description
`
` Case IPR2016-01264 for
`U.S. Patent No. 6,538,324
`
`
`Newly
`Submitted
`
`2011
`
`Declaration of Harlan Rusty Harris, Ph.D.
`
`2012
`
`MPEP, 2111.03 Transitional Phrases [R-08.2012].
`
`2013
`
`Claim Construction Memorandum And Order,
`November 9, 2016, pp. 31-32 (Godo Kaisha IP
`Bridge 1 v. Broadcom Limited et al., USDC EDTEX
`2:16-cv-00134-JRG-RSP).
`
`2014
`
`JP H08-139092A.
`
`2015
`
`English translation of JP H08-139092A.
`
`2016
`
`JP H08-250596A.
`
`2017
`
`English translation of JP H08-250596A.
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`2018
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`JP H08-274098A.
`
`2019
`
`English translation of JP H08-274098A.
`
`2020
`
`JP H09-64044A.
`
`2021
`
`English translation of JP H09-64044A.
`
`2022
`
`JP H09-293690A.
`
`2023
`
`English translation of JP H09-293690A.
`
`2024
`
`JP H10-125627A.
`
`2025
`
`English translation of JP H10-125627A.
`
`2026
`
`JP H10-256256A.
`
`2027
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`English translation of JP H10-256256A.
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`2028
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`JP H10-330938A.
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`2
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`Exhibit
`No.
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`Description
`
`2029
`
`English translation of JP H10-330938A.
`
`2030
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`JP H11-67686A.
`
`2031
`
`English translation of JP H11-67686A.
`
` Case IPR2016-01264 for
`U.S. Patent No. 6,538,324
`
`
`Newly
`Submitted
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`2032
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`2033
`
`D. Denning, et al., “An Inlaid CVD Cu Based
`Integration for Sub 0.25mum Technology.” 1998
`Symposium on VLSI Technology Digest of
`Technical Papers, 1998, pp. 22-23.
`
`K. Kwon, et al., “Characteristics of Ta As An
`Underlayer for Cu Interconnects.” Advanced
`Metallization and Interconnect Systems for ULSI
`Applications in 1997, 1998, pp. 711-716.
`
`2034
`
`N. Awaya, “Semiconductor World.” Feb. 1998, pp.
`91-96 (“Awaya”).
`
`2035
`
`English translation of Awaya.
`
`2036
`
`2037
`
`Grant, J., ed. “Solid Solution.” Hackh’s Chemical
`Dictionary. 4th ed. McGraw-Hill, 1969. Print.
`
`Declaration of Harlan Rusty Harris, Ph.D. In
`Support Of Patent Owner’s Motion To Amend.
`
`2038
`
`Declaration of Rumiko Whitehead.
`
`2039
`
`U.S. Patent No. 6,346,745 to Nogami et al.
`
`2040
`
`U.S. Patent No. 6,156,647 to Hogan.
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`2041
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`U.S. Patent No. 6,139,699 to Chiang et al.
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`Description
`
` Case IPR2016-01264 for
`U.S. Patent No. 6,538,324
`
`
`Newly
`Submitted
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`x
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`Exhibit
`No.
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`2042
`
`Min, K. H. et al., “Comparative study of tantalum
`and tantalum nitrides (Ta2N and TaN) as a diffusion
`barrier for Cu metallization.” Journal of Vacuum
`Science & Technology B: Microelectronics and
`Nanometer Structures Processing, Measurement,
`and Phenomena, 14(5), pp. 3263-3269 (1996).
`
`2043
`
`2044
`
`2045
`
`Grant, J., ed. “Sosoloid.” Hackh’s Chemical
`Dictionary. 4th ed. McGraw-Hill, 1969. Print.
`
`Transcript of Deposition of Sanjay K. Banerjee,
`Ph.D., conducted June 13, 2017.
`
`Redacted version of Invalidity Expert Report of
`Chris Mack (without attachments), dated January
`30, 2017.
`
`2046
`
`Declaration of Rumiko Whitehead
`
`2047
`
`Unredacted version of Invalidity Expert Report of
`Chris Mack (without attachments), dated January
`30, 2017.
`
`(served but not filed)
`
`2048
`
`Declaration of Christopher M. Bonny
`
`(served but not filed)
`
`2049
`
`Order Granting Joint Motion To Dismiss All Claims
`And Counterclaims With Prejudice, Godo Kaisha IP
`Bridge 1 v. Broadcom Limited et al., USDC EDTEX
`2:16-cv-00134-JRG-RSP, Document 337, July 5,
`2017.
`
`
`Dated: July 17, 2017
`
`
`
`Respectfully submitted by:
`
`
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`4
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` Case IPR2016-01264 for
`U.S. Patent No. 6,538,324
`
`
`
`
`/Michael J. Fink/
`Michael J. Fink
`Registration No. 31,827
`Greenblum & Bernstein, P.L.C.
`1950 Roland Clarke Place
`Reston, Virginia 20191
`Tel: 703-716-1191
`Fax: 703-716-1180
`Email: mfink@gbpatent.com
`
`Attorney for Patent Owner,
`IP Bridge
`
`
`
`5
`
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`
`
`
`Case IPR2016-01264
`for U.S. Patent No. 6,538,324
`
`
`
`CERTIFICATE OF SERVICE
`
`The undersigned hereby certifies that a true copy of the foregoing:
`
`PATENT OWNER’S CURRENT EXHIBIT LIST
`(As of July 17, 2017)
`
`was served by electronic mail on this 17th day of July, 2017, upon Counsel for
`
`Petitioners, as follows:
`
`E. Robert Yoches (bob.yoches@finnegan.com);
`Stephen E. Kabakoff (stephen.kabakoff@finnegan.com);
`Joshua L. Goldberg (joshua.goldberg@finnegan.com);
`TSMC-IPB-PTAB@finnegan.com;
`Christopher P. Carroll (christopher.carroll@whitecase.com); and
`Shamita Etienne-Cummings (setienne@whitecase.com).
`
`
`
`/Michael J. Fink/
`Michael J. Fink
`Registration No. 31,827
`Greenblum & Bernstein, P.L.C.
`1950 Roland Clarke Place
`Reston, Virginia 20191
`Tel: 703-716-1191
`Fax: 703-716-1180
`Email: mfink@gbpatent.com
`
`
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`
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`
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