`
`By: Michael J. Fink (mfink@gbpatent.com)
`Greenblum & Bernstein, P.L.C.
`1950 Roland Clarke Place
`Reston, Virginia 20191
`Tel: (703) 716-1191
`Fax: (703) 716-1180
`
`
`
`UNITED STATES PATENT AND TRADEMARK OFFICE
`
`____________
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`
`____________
`
`TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED,
`Petitioner,
`
`v.
`
`GODO KAISHA IP BRIDGE 1,
`Patent Owner.
`____________
`
`Case IPR2016-01264
`U.S. Patent No. 6,538,324
`____________
`
`DECLARATION OF RUMIKO WHITEHEAD
`
`
`
`Mail Stop PATENT BOARD, PTAB
`Commissioner for Patents
`P.O. Box 1450
`Alexandria, VA 22313-1450
`
`
`
`
`
`Case IPR2016-01264
`for U.S. Patent No. 6,538,324
`
`
`I, Rumiko Whitehead, declare as follows:
`
`1.
`
`2.
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`I am a paralegal at the law firm of Greenblum & Bernstein, P.L.C.
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`I provide this Declaration in connection with the above-identified
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`Inter Partes Review proceeding.
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`3.
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`Exhibit 2001 is a true copy of Chang, C.C., Chen, J.S. and Hsu, W.S.,
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`“Failure Mechanism of Amorphous and Crystalline Ta-N Films in the Cu/Ta
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`N/Ta/SiO2 Structure.” Journal of The Electrochemical Society, 151(11), pp.G746-
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`G750 (2004). I added an exhibit label and pagination labels.
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`4.
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`Exhibit 2003 is a true copy of a dictionary definition of “amorphous”
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`from Merriam-Webster.com., which I downloaded from http://www.merriam-
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`webster.com/ dictionary/amorphous on September 30, 2016. I highlighted the
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`word “amorphous.” I added an exhibit label and pagination labels.
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`5.
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`Exhibit 2004 is a true copy of a dictionary definition of “nitride” from
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`Merriam-Webster.com which I downloaded from http://www.merriam-
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`webster.com/ dictionary/nitride on September 30, 2016. I highlighted the word
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`“nitride.” I added an exhibit label and pagination labels
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`6.
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`Exhibit 2008 is a true copy of excerpts from a dictionary, Guralnik, D.
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`B., ed., Webster’s New World Dictionary of the American Language, Prentice Hall
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`Press (1979). I scanned the title page, copyright page, and page 16 of the
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`dictionary, and then added an exhibit label and pagination labels. I also
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`1
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`Case IPR2016-01264
`for U.S. Patent No. 6,538,324
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`highlighted the word “amorphous”. The copyright page indicates that the
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`copyright years of the dictionary are 1976 and 1979.
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`7.
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`Exhibit 2009 is a true copy of excerpts from a dictionary, Grant, J.,
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`ed., Hackh’s Chemical Dictionary, 4th ed., McGraw-Hill (1969). I scanned the
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`title page, copyright page, and page 457 of the dictionary, and then added an
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`exhibit label and pagination labels. I also highlighted the definition of “nitride”.
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`The copyright page indicates that the copyright year of the dictionary is 1969.
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`8.
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`Exhibit 2010 is a copy of Sienko, M.J., Plane, R.A. Chemistry. 2d ed.
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`New York, McGraw-Hill, 1961, pp. 193-195. Print. I scanned the cover, title page,
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`copyright page, and pages 192-195, and then added an exhibit label and pagination
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`labels. The copyright page indicates that the copyright year of the dictionary is
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`1961.
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`9.
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`Exhibit 2012 is a true copy of an excerpt from the USPTO Manual of
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`Patent Examining Procedure (MPEP), Section 2111 Claim Interpretation; Broadest
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`Reasonable Interpretation [R-07.2015], Subsection 2111.03 Transitional Phrases
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`[R-08.2012], which I downloaded from https://www.uspto.gov/web/offices/pac/mp
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`ep/index.html. I added an exhibit label and pagination labels.
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`10. Exhibit 2013 is a true copy of the Claim Construction Memorandum
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`And Order, November 9, 2016, pp. 31-32 (Godo Kaisha IP Bridge 1 v. Broadcom
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`2
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`Case IPR2016-01264
`for U.S. Patent No. 6,538,324
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`Limited et al., USDC EDTEX 2:16-cv-00134-JRG-RSP). I added an exhibit label
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`and pagination labels.
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`11. Exhibit 2014 is a true copy of JP H08-139092A downloaded from the
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`European Patent Office’s Espacenet Patent Search website. I added an exhibit
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`label and pagination labels.
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`12. Exhibit 2015 is a verified English translation of JP H08-139092A. I
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`added an exhibit label and pagination labels.
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`13. Exhibit 2016 is a true copy of JP H08-250596A downloaded from the
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`European Patent Office’s Espacenet Patent Search website. I added an exhibit
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`label and pagination labels.
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`14. Exhibit 2017 is a verified English translation of JP H08-250596A. I
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`added an exhibit label and pagination labels.
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`15. Exhibit 2018 is a true copy of JP H08-274098A downloaded from the
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`European Patent Office’s Espacenet Patent Search website. I added an exhibit label
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`and pagination labels.
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`16. Exhibit 2019 is a verified English translation of JP H08-274098A. I
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`added an exhibit label and pagination labels.
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`17. Exhibit 2020 is a true copy of JP H09-64044A downloaded from the
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`European Patent Office’s Espacenet Patent Search website. I added an exhibit
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`label and pagination labels.
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`3
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`18. Exhibit 2021 is a verified English translation of JP H09-64044A. I
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`
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`Case IPR2016-01264
`for U.S. Patent No. 6,538,324
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`added an exhibit label and pagination labels.
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`19. Exhibit 2022 is a true copy of JP H09-293690A downloaded from the
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`European Patent Office’s Espacenet Patent Search website. I added an exhibit
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`label and pagination labels.
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`20. Exhibit 2023 is a verified English translation of JP H09-293690A. I
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`added an exhibit label and pagination labels.
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`21. Exhibit 2024 is a true copy of JP H10-125627A downloaded from the
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`European Patent Office’s Espacenet Patent Search website. I added an exhibit
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`label and pagination labels.
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`22. Exhibit 2025 is a verified English translation of JP H10-125627A. I
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`added an exhibit label and pagination labels.
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`23. Exhibit 2026 is a true copy of JP H10-256256A downloaded from the
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`European Patent Office’s Espacenet Patent Search website. I added an exhibit
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`label and pagination labels.
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`24. Exhibit 2027 is a verified English translation of JP H10-256256A. I
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`added an exhibit label and pagination labels.
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`25. Exhibit 2028 is a true copy of JP H10-330938A downloaded from the
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`European Patent Office’s Espacenet Patent Search website. I added an exhibit
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`label and pagination labels.
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`4
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`26. Exhibit 2029 is a verified English translation of JP H10-330938A. I
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`
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`Case IPR2016-01264
`for U.S. Patent No. 6,538,324
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`added an exhibit label and pagination labels.
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`27. Exhibit 2030 is a true copy of JP H11-67686A downloaded from the
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`European Patent Office’s Espacenet Patent Search website. I added an exhibit
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`label and pagination labels.
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`28. Exhibit 2031 is a verified English translation of JP H11-67686A. I
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`added an exhibit label and pagination labels.
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`29. Exhibit 2032 is a true copy of D. Denning, et al., “An Inlaid CVD Cu
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`Based Integration for Sub 0.25mum Technology.” 1998 Symposium on VLSI
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`Technology Digest of Technical Papers, 1998, pp. 22-23. I added an exhibit label
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`and pagination labels.
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`30. Exhibit 2033 is a true copy of K. Kwon et al., “Characteristics of Ta
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`As An Underlayer for Cu Interconnects.” Advanced Metallization and Interconnect
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`Systems for ULSI Applications in 1997, 1998, pp. 711-716. I added an exhibit
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`label and pagination labels.
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`31. Exhibit 2034 is a true copy of N. Awaya, “Semiconductor World.”
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`Feb. 1998, pp. 91-96 (“Awaya”). I added an exhibit label and pagination labels.
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`32. Exhibit 2035 is a verified English translation of Awaya. I added an
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`exhibit label and pagination labels.
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`33. Exhibit 2036 is a true copy of excerpts from a dictionary, Grant, J.,
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`5
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`
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`Case IPR2016-01264
`for U.S. Patent No. 6,538,324
`
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`ed., Hackh’s Chemical Dictionary, 4th ed., McGraw-Hill (1969). I scanned the
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`title page, copyright page, and page 623 of the dictionary, and then added an
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`exhibit label and pagination labels. I also highlighted the definition of “solid
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`solution.” The copyright page indicates that the copyright year of the dictionary is
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`1969.
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`34. Exhibit 2042 is a true copy of Min, K. H. et al., “Comparative study
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`of tantalum and tantalum nitrides (Ta2N and TaN) as a diffusion barrier for Cu
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`metallization.” Journal of Vacuum Science & Technology B: Microelectronics and
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`Nanometer Structures Processing, Measurement, and Phenomena, 14(5), pp. 3263-
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`3269 (1996). I added an exhibit label and pagination labels.
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` I
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` declare that all statements made herein of my knowledge are true, and that
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`all statements made on information and belief are believed to be true, and that
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`these statements were made with the knowledge that willful false statements and
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`the like so made are punishable by fine or imprisonment, or both, under Section
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`1001 of Title 18 of the United States Code.
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`
`
`
`
`
` March 7, 2017
`Date
`
`
`
`
`
`
`
`By:
`
`/Rumiko Whitehead /
`Rumiko Whitehead
`
`
`
`6
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`