`
`1. Introduction to microlithography : theory, materials, and processing
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`LCCN
`
`Type of material
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`Main title
`
`83005968
`
`Book
`
`microlithography : theory, materials, and processing / L.F. Thompson, Introduction to
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`editor,
`C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored
`
`the ACS Division of Organic Coatings and Plastics Chemistry at the 185th by
`-Meeting of the American Chemical Society, Seattle, Washington, March 20
`
`1983.25,
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`
`
`Published/Created
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`
`
`1983.Washington, D.C. : The Society,
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`Description
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`ISBN
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`CALL NUMBER
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`ix, 363 p. : ill. ; 24 cm.
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`0841207755
`
`TR940 .I57 1983
`Copy 1
`
`Request in
`
`Jefferson or Adams Building Reading Rooms
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`CALL NUMBER
`
`TR940 .I57 1983 FT MEADE
`Copy 2
`
`Request in
`
`Jefferson or Adams Building Reading Rooms - STORED OFFSITE
`
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`
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`
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`3/23/2017
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`Page 1 of 1
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