`
`1. Chemical mechanical planarization of microelectronic materials
`
`LCCN
`
`Type of material
`
`Personal name
`
`Main title
`
`96006198
`
`Book
`
`
`
`M.Steigerwald, Joseph
`
`Chemical mechanical
`planarization of microelectronic materials / Joseph M.
`Murarka, Ronald J. Gutmann.
`Steigerwald, Shyam P.
`
`Published/Created
`
`New York : J. Wiley,
`
`c1997.
`
`Description
`
`xiii, 324 p. : ill. ; 24
`
`cm.
`
`ISBN
`
`Links
`
`0471138274 (cloth : alk.
`
`paper)
`
`Contributor biographical
`information
`http://www.loc.gov/catdir/bios/wiley041/96006198.html
`http://www.loc.gov/catdir/description/wiley032/96006198.htmlPublisher description
`
`
`http://www.loc.gov/catdir/toc/onix03/96006198.htmlTable of Contents
`
`CALL NUMBER
`
`TK7871 .S77 1997
`Copy 1
`
`Request in
`
`Jefferson or Adams Building Reading Rooms
`
`CALL NUMBER
`
`TK7871 .S77 1997 FT MEADE
`Copy 2
`
`Request in
`
`Jefferson or Adams Building Reading Rooms - STORED OFFSITE
`
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`
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`
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`
`3/23/2017
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