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`UNITED STATES PATENT AND TRADEMARK OFFICE
`____________
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`____________
`
`SAMSUNG ELECTRONICS CO., LTD.,
`Petitioner,
`
`v.
`
`DSS TECHNOLOGY MANAGEMENT, INC.,
`Patent Owner.
`____________
`
`Case IPR2016-00782
`Patent 6,784,552 B2
`____________
`
`Record of Oral Hearing
`Held: June 20, 2017
`____________
`
`
`
`
`Before: BRYAN F. MOORE, BRIAN J. McNAMARA, and
`MINN CHUNG, Administrative Patent Judges.
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`Case IPR2016-00782
`Patent 6,784,552 B2
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`APPEARANCES:
`
`ON BEHALF OF THE PETITIONER:
`JARED BOBROW, ESQ.
`ROBERT S. MAGEE, ESQ.
`Weil, Gotshal & Manges LLP
`201 Redwood Shores Parkway
`Redwood Shores, California 94065-1135
`
`ON BEHALF OF PATENT OWNER:
`JAMES C. GUMINA, ESQ.
`McDonnell Boehnen Hulbert & Berghoff LLP
`300 South Wacker Drive
`Chicago, Illinois 60606-6709
`
`
`
`The above-entitled matter came on for hearing on Tuesday,
`
`June 20, 2017, commencing at 1:30 p.m., at the U.S. Patent and
`Trademark Office, 600 Dulany Street, Alexandria, Virginia.
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`Case IPR2016-00782
`Patent 6,784,552 B2
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`
`P R O C E E D I N G S
`- - - - -
`JUDGE McNAMARA: Good afternoon, everyone.
`This is the oral hearing in case IPR2016-00782. I am Judge
`McNamara, with me is Judge Moore. Judge Chung is
`participating remotely, so I would ask everyone to make sure that
`they put any demonstratives or anything they use, limit that to
`what's already been filed so he can look at it, and to speak into the
`microphone so that Judge Chung can hear everything.
`Beginning with the Petitioner, can I have the parties
`introduce themselves.
`MR. BOBROW: Yes, good afternoon. My name is
`Jared Bobrow, counsel for the Petitioner, Samsung Electronics.
`With me at counsel table is Robert Magee, also counsel. And
`James Shin from Samsung is also here as well. Thank you.
`JUDGE McNAMARA: Thank you. Patent Owner?
`MR. GUMINA: Good afternoon, Your Honor. My
`name is Jim Gumina, I am counsel for DSS and I will be arguing
`today.
`
`JUDGE McNAMARA: Great. Well, welcome to the
`Patent Trial and Appeal Board. Each party will have 30 minutes
`total of argument time. The Petitioner will go first, since the
`burden of proof is on the Petitioner. The Patent Owner can then
`argue its opposition to the Petitioner's case, and the Petitioner will
`then get one more shot with any time it reserves for rebuttal.
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`Case IPR2016-00782
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`So I assume everyone is ready to begin, so let's get
`
`started.
`
`MR. BOBROW: Very good.
`JUDGE McNAMARA: Is there some amount of time
`you would like me to alert you to?
`MR. BOBROW: Yes, if you can alert me when we hit
`the 15-minute mark, I would appreciate it.
`JUDGE McNAMARA: All right. Please proceed.
`MR. BOBROW: Thank you very much, Your Honors.
`After the course of briefing in this case, I think it's fair to say that
`the issues in dispute have really come down to three, and I'm
`referring now to slide 3 in the PowerPoint deck that we filed the
`other day. The first issue relates to the Kuesters reference, that's
`the principal reference in the petition. And the first issue really is
`whether Kuesters discloses the claimed angle, the angle between
`the edge of the sidewall spacer, and the substrate. Issue number
`one.
`
`Issue number two pertains to the argument made by the
`Patent Owner that various embodiments and limitations in the
`specification, as they pertain to material size, process conditions
`and the like, should be read into the -- into the claims.
`And last, it relates to a combination, an obvious
`combination set forth in grounds 3 and 4, there is a -- an error in
`bullet number 3 there. This pertains to claims 1 through 7, it
`doesn't pertain to 8 through 12. So it's only 1 through 7. And as
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`Case IPR2016-00782
`Patent 6,784,552 B2
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`it pertains to that, the argument made by the Patent Owner was
`that somehow Heath did not teach, along with Kuesters, the
`invention.
`In summary, with respect to the first issue, it's very clear
`in Kuesters that the claimed angle is disclosed. It's set forth in an
`SEM image, and a person of ordinary skill in the art has presented
`the only evidence, the only evidence of what that image discloses,
`and Dr. Fair, a chaired professor at Duke University, evaluated it
`and set forth that it indeed disclosed to a person of ordinary skill
`an angle greater than 85 degrees.
`On the second, Petitioner's arguments are simply
`unfounded. They seek to read in limitations from the
`specification which is improper. Particularly here, there has been
`no disavow, there is no disclaimer, and the specification indeed
`supports the view that these claims are indeed open-ended.
`And then last, with respect to Heath, the argument that
`the Patent Owner makes is a strawman, in the sense they attack
`Heath as it pertains to a sidewall spacer, and yet Petitioner's
`combination doesn't rely upon Heath for the sidewall spacer, it
`relies on Kuesters.
`So, those will be the focus of the argument that I make
`today. And so if we might turn to -- we can just jump straight
`ahead to slide 11, and slide 11, as it pertains to the first issue,
`Kuesters' disclosure of the claimed angle. You can see in slide 11
`the SEM image that adheres in Kuesters. This is figure 4a, and
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`Case IPR2016-00782
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`you can see in figure 4a that this is an SEM image which indeed
`is a scaled image.
`If you look at the lower left corner of the image, you
`can see the designation 0.5 microns, and then there's a bar, clearly
`indicating that the authors intended for this image to be used in a
`scaled fashion. The question, of course, for anticipation, is what
`does Kuesters disclose to a person of ordinary skill. There is no
`dispute that Kuesters discloses a contact region, that it discloses a
`polysilicon or conductive gate, that it discloses indeed a sidewall
`spacer, or a next stop over, at least a portion of the sidewall
`spacer. The only challenge made by Patent Owner has to do with
`the angle between the sidewall spacer and the substrate.
`And here, in terms of what this discloses to a person of
`ordinary skill, we have only as part of evidence in the record, put
`aside attorney argument, the only evidence that we have in the
`record is from Dr. Richard Fair, a professor at Duke University,
`who read the reference, read the figure, identified the elements
`that are set forth in the SEM image, reviewed the image to
`determine the boundaries between the different materials, where
`does the polysilicon begin and end, where does the sidewall begin
`and end, where is the substrate, where is the nitride material?
`Based upon his skill and experience and applying the
`skill and experience of a person of ordinary skill, he was able to
`identify and locate all of those areas, and determine that indeed --
`JUDGE CHUNG: Counsel?
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`Case IPR2016-00782
`Patent 6,784,552 B2
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`
`MR. BOBROW: Yes?
`JUDGE CHUNG: Can you hear me? Hi, this is Judge
`
`Chung.
`
`MR. BOBROW: Yes?
`JUDGE CHUNG: So, I have a question about what the
`SEM image shows. As you say, it takes some explanation, you
`know, to read what the SEM image, you know, shows to one of
`ordinary skill. The same image, figure 4a of Kuesters, is also
`shown in the petition, pages 20 and 21. And there, on page 21 of
`petition, Petitioner talks about what's shown in the front plane and
`the back plane of the image, or of the structure that's shown in
`figure 4a. And you say that the front plane of the SEM image
`shows the poly gate, insulating top oxide and oxide sidewall
`spacer, and the back plane of the image shows a nitride layer,
`which is I guess is the etch stop, and the thin oxide nitride oxide
`layer, but -- so, but you're saying that the front plane of the image
`shows a nitride etch stop adjacent to the sidewall spacer.
`So my question is, you know, whether and how figure
`4a shows nitride etch stop on the front plane, you know, near the
`sidewall spacer.
`MR. BOBROW: So, I think for purposes of the claim,
`and if we look at, for example, at claim 1, it merely says that you
`have an etch stop material, and I'm on slide 4 now, it says, "an
`etch stop material over said first insulating layer." And so in
`terms of going back to your question then, in terms of the very
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`Case IPR2016-00782
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`front, the very front of that contact, which Dr. Fair testified was
`sort of taken through the middle of the contact region, the slice
`through the middle, it doesn't appear that there is any nitride over
`the oxide sidewall spacer there. Where it is over the sidewall
`spacer is further in the back, as you sort of recede into the page,
`and you get further to the back of it, that's where the nitride etch
`stop remains over the sidewall spacer.
`At the front part, where it's largely that whitish -- more
`whitish color, as it were, it doesn't appear, according to Dr. Fair,
`that it -- that the nitride etch stop is present in that portion of the
`sidewall spacer.
`JUDGE CHUNG: I see. I understand. Thank you.
`Thank you for the explanation.
`MR. BOBROW: Okay, thank you.
`So, if we go back to this image and further elaborate on
`it, there hasn't been any dispute about what Dr. Fair did vis-a-vis
`identifying these various structures that are shown in the image,
`or that those structures are there. What Dr. Fair did was he
`looked at the structures, identified where they are, identified their
`boundaries, determined that the image was of a quality that
`permitted measurement and analysis, and then he did a
`measurement.
`He measured the angle between the substrate and the
`edge of that left sidewall spacer, and measured that, using a
`protractor, which he says is the standard way to do it in the field,
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`Case IPR2016-00782
`Patent 6,784,552 B2
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`and he came up with an angle of between 86 and 87 degrees.
`That's what's set forth in appendix A of his declaration. Then
`what he did was, to help illustrate the measurement that he did, he
`then made some annotations on the figure to help identify the
`particular structures, and they were colored and he drew in some
`lines to help illustrate the angle that he was measuring.
`Indeed, in doing so, he clearly did a pretty accurate job,
`because in the angled drawing here, his annotated version, the
`angle measures out to 87 degrees, and when he measured from
`the original SEM image, it was 86 to 87 degrees. So he measured
`from the image, he determined where the boundaries were, using
`the skill of an ordinary artisan, and determined what the angle is
`and did the measurement.
`Now, it's important here to make a couple of points.
`Point number one is that this is a scaled image, suitable for
`measurement. Clearly there wouldn't be scaling in there if
`someone didn't think that this was going to be appropriate to take
`measurements. Second, SEMs are used in the industry in the way
`that Dr. Fair used them here. SEMs are used to evaluate, to
`analyze semiconductor devices, processes are performed, and
`after those processes are performed, SEMs are used to evaluate
`whether the process was successful or not, whether the structures
`were formed in the way that was intended. And that's what Dr.
`Fair is merely doing here, looking at the SEM to see what the
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`Case IPR2016-00782
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`angle is between the -- between the sidewall edge and the
`substrate.
`And indeed, we cited in our brief the Nobelpharma case
`where the Federal Court of Appeals upheld a jury determination
`where the jury relied upon an SEM to determine the size of
`features, the number of features, that sort of thing. So this isn't
`something new, this isn't some unique or odd use of an SEM, this
`is the way SEMs are used in the semiconductor industry. They
`are used, of course, by persons of ordinary skill.
`JUDGE CHUNG: Counsel?
`MR. BOBROW: Yes?
`JUDGE CHUNG: So, I understand that the one of
`ordinary skill in the art, in the industry, you know, may use the
`SEM images to evaluate the structure of semiconductor devices,
`so the question I have is that, I mean, you -- Petitioner argues that
`the technique that Dr. Fair used is, you know, something that is
`kind of standard in the industry. So I was wondering whether the
`SEM image that's shown in figure 4a provides sufficient
`resolution and sufficient detail to reasonably determine, you
`know, that the angle which is for a specific structure, you know,
`to teach the limitation that's claimed -- recited in the claim.
`Dr. Fair doesn't really mention -- you know, I guess if
`the image is really fuzzy, and it doesn't show sufficient detail, can
`he guess that it might be difficult to measure angles or some
`detailed structure. So my question is, is it your position that
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`figure 4a shows sufficient detail and sufficient resolution to allow
`one of ordinary skill in the art to make angle measurements?
`MR. BOBROW: Yes, Judge Chung, the answer is yes
`to that. And that is set forth in Dr. Fair's reply declaration. When
`the Patent Owner suggested that there may be some issues with
`the image itself, either because of the angle from which the image
`was taken, or because of their apparent inability to find the edge
`of the sidewall spacer, Dr. Fair responded to those arguments and
`testified in his declaration that number one, this is a good quality,
`high quality, resolution image. And number two, that it's the kind
`of image that those of ordinary skill in the art use, and that he was
`able to find the edge, what he calls in his declaration the leading
`edge, of the sidewall spacer with sufficient resolution to measure
`the angle.
`And so he commented upon that in his opening
`declaration, where he testified that he was able to indeed find the
`front edge, and then when the questions were raised about the
`sufficiency of the image, he answered those in a declaration.
`I do think it's important in responding to your question,
`Judge Chung, that what the Patent Owner has done is not advance
`any evidence to support their position. Their position rests
`entirely on attorney argument and assertion that there's something
`wrong with the image, that the image was taken at an angle off of
`perpendicular or what have you, but there's no evidence that
`there's anything deficient about the image, only argument.
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`Case IPR2016-00782
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`What I think we can see from the Patent Owner, and
`now I'm looking at slide 14, is that with respect to what the Patent
`Owner did, and turning then to slide 15, we can really see this in
`even greater detail, the Patent Owner did not rely upon a person
`of ordinary skill in the art to do the measurement. They instead
`used their attorneys to do the measurement, and their attorneys
`measured a different angle than the angle that Dr. Fair measured,
`and they positioned their line in a different location than the
`location that Dr. Fair positioned his line.
`Dr. Fair is a person of ordinary skill. He found where
`the boundary was. What the Patent Owner has done is simply
`have their attorneys put the line in a different spot, but their
`attorneys are not of ordinary skill, and there's no expert or other
`evidence to support their positioning of the line.
`Indeed, what Dr. Fair said, when he looked at this, in
`the reply, what he said in his reply declaration is that the Patent
`Owner's attorneys used a thick line, that line was drawn over the
`edge of the sidewall spacer, and it went through, not at the edge,
`not tangent to the sidewall spacer, but went through and into the
`interior of the sidewall spacer. That was Dr. Fair's testimony.
`And that's set forth in paragraphs 49 to 52 of the reply
`declaration.
`And you can actually see it here on slide 17 in the
`blown-up version, you can see on the left the annotated version
`that Dr. Fair made, and you can see just how much further into
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`Case IPR2016-00782
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`the sidewall spacer the Patent Owner's attorneys have drawn the
`line in order to end up with a smaller angle.
`So there's no support for that. There's no evidence in
`support of that. It's just attorney argument. But as Dr. Fair
`alluded to, it is an improper measurement because it cuts into the
`region of the sidewall spacer, and it's not tangent to the sidewall
`spacer. And that's where the problem measurement is made.
`Briefly, because I can see that I've already gone through
`the 15 minutes, briefly, let me just touch on the two additional
`issues. The first issue is, as shown on slide 18, that the Patent
`Owner wishes to read into the claim in order to avoid anticipation
`or obviousness a number of limitations that simply do not appear
`there. They are taken from the specification, they are not in the
`claims, and it is simply black letter law at this point that that is
`improper, importing limitations into a claim is improper, and
`importing method claims into an apparatus claim is improper.
`This is particularly so where the specification -- and this
`is all set forth in column -- in slide 21, the specification makes
`clear that all of those limitations are merely exemplary, they're
`illustrative, and the patent specifically says that they do not need
`to be employed to practice the invention.
`So there is no basis whatever to limit the claims with
`these additional limitations, and the Court in construing this very
`patent in connection with the Intel IPR rejected the Patent
`Owner's effort to read a process limitation into the angle
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`Case IPR2016-00782
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`limitation in connection with that IPR. And that's set forth on
`slide 22.
`The last point I would like to make has to do with the
`combination that pertains to grounds 3 and 4, Kuesters and Heath.
`And this goes to the argument that the DSS, the Patent Owner's
`attorneys made to say, in effect, Heath says that it is optional to
`have a sidewall spacer, and therefore Kuesters plus Heath does
`not teach the invention because the invention includes a sidewall
`spacer. That is what I understand their argument to be. That is
`attacking a strawman, because the Petitioner expressly relies upon
`Kuesters for the sidewall spacer, not Heath. It relies upon
`Kuesters. And so whether Kuesters does or doesn't disclose a
`sidewall is neither here nor there. The Petitioner relies on Heath
`for the teaching that you don't need to have an oxide liner over
`your sidewall spacer, that that can be done away with. That's the
`reason that Heath was cited in the petition.
`And so to say that it doesn't have a sidewall doesn't
`matter, but I would also point out in addition, and this is set forth
`on slide 26, that -- and the Patent Owner acknowledges, Heath
`does disclose an embodiment that has a sidewall spacer. And
`that's set forth in the top bullet on slide 26. There is an
`embodiment, it has a sidewall spacer, and it remains part of the
`structure.
`What Heath says is that whether you want to have a
`spacer and how thick it is is a question of performance. That's a
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`Case IPR2016-00782
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`question of device performance. You'll have a thicker one under
`certain conditions, a thinner one under others, you may decide to
`eliminate it all together. It's going to depend on performance.
`That's not teaching away from a sidewall spacer, that's
`saying use a sidewall spacer when it's appropriate to do it, and
`here's an embodiment that uses it and here's another embodiment
`that doesn't.
`Your Honors, unless you have further questions, that's
`all I have at this point.
`JUDGE CHUNG: I have one more question, counsel.
`Regarding claim 3, for I guess ground 1, which is based on
`anticipation by Kuesters, in the claim you combine Kuesters with
`Heath to teach that the etch stop material as recited in claim 3 is
`silicon dioxide. And that's fine, I understand that, but the
`question I have is that the claim 1 from which claim 3 depends
`recites -- requires that the etch stop material needs to be different
`from the insulating spacer, and in the anticipation ground, you
`rely on disclosure in Kuesters that the insulating spacer is made
`of oxide.
`So, the question I have is with respect to claim 3, do
`you need to show that the insulating spacer now has to be
`different from the silicon dioxide you rely on in Haveman?
`MR. BOBROW: So, for purposes of claim 3, the
`combination as you alluded to, Judge Chung, is Kuesters plus
`Haveman, and the -- what was set forth in the declaration of the
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`Case IPR2016-00782
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`petition is that you would indeed swap out the silicon dioxide
`sidewall spacer for a silicon oxynitride sidewall spacer. And
`that's in Haveman, table 6 -- excuse me, it's in a table in Haveman
`in column 6 of the Haveman patent.
`And there, you might recall that Haveman discloses
`using a thermally grown oxide as the sidewall, which is a
`common way to do it, but then says that you could use CVD
`oxide, silicon nitride or silicon oxynitride as the spacer material.
`And then, Haveman also says that in the preferred way of doing
`it, his preferred way, you could use silicon nitride on top of the
`thermal oxide as the etch stop, but also says that you could use
`thermal oxide or CVD oxide as the etch stop when you do that.
`So the combination would be to then use a silicon oxynitride
`sidewall spacer with, for example, a CVD oxide etch stop. So
`that would be the combination.
`JUDGE CHUNG: Okay, I understand. I understand.
`Yeah, thank you.
`MR. BOBROW: Thank you.
`JUDGE McNAMARA: Counsel, you have about eight
`and a half minutes left on rebuttal.
`MR. BOBROW: Thank you.
`MR. GUMINA: Lots of stuff going on here. Good
`afternoon. I'll re-introduce myself, my name is Jim Gumina, I am
`here on behalf of DSS. I am going today, unless the Court wants
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`Case IPR2016-00782
`Patent 6,784,552 B2
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`to take me someplace else, going to focus my comments on the
`Kuesters reference and Dr. Fair's treatment of that reference.
`Samsung has made two arguments, or basically an
`anticipation argument and an obviousness argument against the
`'552 patent, all of those arguments rely on Kuesters for the
`teaching -- and solely on Kuesters -- for the teaching of the
`requisite angle that is claimed in both claims 1 and claim 8 of the
`'552 patent, and therefore in each of the claims.
`The interesting thing about the Kuesters article is that it
`has absolutely nothing to do with that angle, never teaches it, it
`doesn't discuss it, it doesn't do anything about it. Samsung knows
`this.
`
`So, the only thing they rely on is a picture, an SEM,
`that's attached to the article, okay? And it's a lovely picture, by
`the way, but there's one thing that was never intended to teach,
`and that is this angle. Okay? And indeed, our position is it does
`not, despite what Samsung and Dr. Fair said.
`And indeed, we should think about what Kuesters does
`teach. Kuesters teaches a method of -- a process for making a
`particular semiconductor, it teaches a process where the
`semiconductor is etched with a highly selective etch, and it also
`teaches all the results of having -- of having done that.
`Now, Samsung seems to believe that we have argued
`that highly selective etching should be an element read into the
`claim. We have not done that. Indeed, we are not trying to read
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`Case IPR2016-00782
`Patent 6,784,552 B2
`
`any interpretation -- any elements into this claim. However, the
`specification does inform us about the prior art, in particular it
`informs us about Kuesters, and it specifically tells us that a
`highly -- when you use a highly selective etch, you melt and
`cause a slope with respect to the insulating layer. And so you
`lose your vertical wall with a highly selective etch. And that
`informs us and should send up warning bells about what Kuesters
`actually teaches.
`We have no doubt, of course, that Dr. Fair is an expert
`in this area, he has lots of experience, he's done lots of -- lots of
`things in conjunction with microprocessors and microchips and
`manufacturing of semiconductors, but our position is that with
`respect to the issues in this case that we have raised before this
`Board, that expertise is largely irrelevant and simply unnecessary.
`This case is -- the issues that we brought forth is all
`about measuring an angle in a picture. Now, we certainly take
`the view that the picture is not sufficiently clear that you can even
`define the angle. It is blurry to a point where even one skilled in
`the art, while you may be able to distinguish the various aspects
`of the semiconductor in the picture, this particular angle, because
`of the picture, the leading edge, if you will, as they've called it, of
`the insulating layer, blends into that surface of the insulating
`layer, which goes back into the well.
`So, just looking at the picture, you can tell, and it
`doesn't take one of significant skill in the art to see that it's just
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`Case IPR2016-00782
`Patent 6,784,552 B2
`
`simply not well-defined. But even if it were, let's look at what
`Dr. Fair did with that picture, okay? Samsung now takes the
`position that Dr. Fair measured the SEM, he took an angle
`measurement off of the SEM. Yet that's not what Dr. Fair says.
`What Dr. Fair says in his supplemental declaration, which was
`filed after our brief, this being our first opportunity to respond to
`it, that he drew a tangent line -- first of all he uploaded the SEM
`into PowerPoint. And then he drew a tangent line with
`PowerPoint from silicon -- with the silicon substrate surface and
`another line tangent with the slope of the front edge of the left
`sidewall spacer, where that edge intersects the substrate surface.
`And then he measured the angle between the substrate and the
`line that he drew.
`So, in essence, what Dr. Fair did, he drew a line, he
`measured the angle that he created, and guess what? It fell within
`the scope of the claim. Samsung gave him a target, he hit it.
`Interesting the way he measured the angle as well. He
`used a protractor. No doubt, protractors are used to measure
`angles all the time. No doubt all of us have probably used
`protractors since the fourth grade. So, again, not a particular lot
`of expertise there such that's necessary to measure the angle.
`So --
`
`JUDGE McNAMARA: Let me ask you a question, the
`expertise isn't the ability to measure the angle --
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`Case IPR2016-00782
`Patent 6,784,552 B2
`
`
`MR. GUMINA: Correct, and that's where I was going,
`Your Honor. The next question is, did he even measure the right
`thing? He drew -- and we learned this for the first time, by the
`way, in his supplemental declaration. He drew a tangent line
`based on a point at the bottom of the insulating spacer at the
`substrate. He took a point there and drew a tangent line and
`measured the angle of that tangent line.
`There is no basis anywhere in the patent or anywhere
`else that that's the appropriate line to draw. The claim language is
`instructive in this regard. The particular claim language that I'm
`talking about are the wherein clauses at the bottom of claim 1 and
`claim 8. Claim 1 reads, "Wherein a side of the insulating spacer
`has an angle relative to the substrate surface that is either at a
`right angle or at an acute angle of more than 85 degrees."
`Similarly, claim 8 reads, "wherein a side of an electrically
`insulated spacer has an angle relative to the substrate surface that
`is either a right angle or an acute angle of more than 85 degrees."
`Dr. Fair's line does not measure the angle at which the
`side of the insulating spacer is located. What he measured is the
`angle at which the side of the insulating spacer touches the
`substrate.
`JUDGE McNAMARA: So, let me ask you for a
`moment to put up Petitioner's demonstrative 15, and maybe you
`can point to me --
`MR. GUMINA: Page 15?
`
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`Case IPR2016-00782
`Patent 6,784,552 B2
`
`
`JUDGE McNAMARA: The demonstrative 15 in your
`Exhibit 15. If you could put that up, please. I know it's not your
`exhibit.
`
`MR. GUMINA: It's fine.
`JUDGE McNAMARA: I want you to speak to your
`points. Yeah, I think we just talked about the insulating spacer
`and where he measured it from and that sort of thing.
`MR. GUMINA: Right.
`JUDGE McNAMARA: So, to the extent that you can
`articulate it, I would like for you to explain to me on that
`diagram, which I think is similar to the diagram in the petition,
`what angles we're talking about here, and what the insulating
`spacer is relative to the substrate surface.
`MR. GUMINA: Okay. Can I approach the screen?
`JUDGE McNAMARA: That would be fine with me.
`I'm not sure that Judge Chung can see that.
`MR. GUMINA: Can you see it, Judge Chung, or would
`you rather I be at the podium?
`JUDGE CHUNG: Yeah, I am not able to see.
`JUDGE McNAMARA: But if you could just explain it
`as best you can. I understand we have some limitations.
`MR. GUMINA: First let me say that the two lines
`drawn on the right-hand side, the second line with the angle
`measured on it, that was the -- as counsel said, that's a line we
`drew, and that is correct. It was our intent, with showing that, to
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`Case IPR2016-00782
`Patent 6,784,552 B2
`
`show the arbitrariness of Dr. Fair's line, okay? In the sense that
`that line can be drawn almost anywhere when you're measuring
`an angle, okay?
`But the reality is that you have to look at this all in
`context, okay? So, remember why the angle -- the 85 to 90
`degrees is important, okay? The reason it's important is because
`when you have a sloped melt and you go to the sputter edge,
`which is the next step, it erodes that portion of the insulated layer
`at an undue rate and causes -- potentially causes a short circuit,
`okay?
`
`And so what's the important information here is the
`surface, the vertical surface that would be hit by a downwardly --
`straight down sputtering, okay? And so if you look where the 87
`degrees is written on that slide, okay? That arc that they've
`drawn, okay, is basically a cross-section of the insulative layer,
`okay?
`
`And if you look at Dr. Fair's line, which is the furthest
`right line, with the arrow on it, you can see that he's drawn a line
`that covers maybe -- maybe 5 percent of the vertical surface of
`that insulative layer. And therefore, most of that insulative layer
`is still going t

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