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`01079-45-00246 (PATENT)
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`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
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`PATENT TRIAL AND APPEAL BOARD
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`Inter‘ Panes Review of U.S. Patent No. 8,309,943
`[mer Parres Review ofU.S. Patent No. 7,435,982
`infer Partes Review o1’U.S. Patent No. 7,786,455
`InIerPar1e.s‘ Review of U.S. Patent No. 8,525,138
`infer Pcm‘e.s' Review o1‘U.S. Patent No. 8,969,841
`Inter Parley Review ofU.S. Patent No. 9,048,000
`Inter Pc.rr!e.s' Review ofU.S. Patent No. 9,185,786
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`Smith et (11,; Issued: Nov. 13, 2012
`Smith; Issued: Oct. 14, 2008
`Smith; Issued: Aug. 31, 2010
`Smith er 51].; Issued: Sep. 3, 2013
`Smith; Issued: Mar. 3, 2015
`Smith; Issued: June 2, 2015
`Smith; Issued: Nov. 10, 2015
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`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
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`P.O. Box 1450
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`Alexandria, VA 22313-1450
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`Dear Sir/Madam:
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`POWER OF ATTORNEY
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`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
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`above captioned Inter Parte._s' Reviews and transact all business in the U .S. Patent and Trademark
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`Office connected herewith:
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`All practitioners at Customer Number 23483.
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`Address all communications to:
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`WILMER CUTLER PICKERING HALE, AND DORR LLP
`60 State Street
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`Boston, MA 02109
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`(617) 526-6000
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`Address all e—mails and telephone calls to lead and back-up counsel (each associated with
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`the above Customer Number), listed below:
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`
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`Patent Nos.: 8,309,943; 7,435,982; 7,786,455;
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`8,525,138; 8,969,841; 9,048,000; and 9,185,786
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`Docket No.: 0107945-00235;
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`0107945—00237; 0107945-00246
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`
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`Donald R. Steinberg, (Lead Counsel, PTO Reg. No. 37,241)
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`Don.Steinbe1' I@wilme1'l1alc.com
`Direct: 617-526-6453
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`WILMER CUTLER PICKERING HALE AND DORR LLP
`60 State Street
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`Boston, MA 02109
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`David L. Cavanaugh (Backup Counsel, PTO Reg. No. 36,476)
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`David.Cavanau<rli@wi1merhale.com
`Direct: 202-663-6025
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`Michael H. Smith (Backup Counsel, PTO Reg. No. 71,190)
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`MichaelH.Sniith@wilmerhalecom
`Direct: 202-663-6055
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`WILMER CUTLER PICKERING HALE AND DORR LLP
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`1875 Pennsylvania Ave, NW
`Washington, DC 20006
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`For:
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`ASML U.S., Inc.
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`Name:
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`Title:
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`Dated: _2 -19/__-A