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`UNITED STATES PATENT AND TRADEMARK OFFICE
`
`UNITED STATES DEPARTMENT OF COMMERCE
`United States Patent and Trademark Office
`Address: COMMISSIONER FOR PATENTS
`P.O. Box 1450
`Alexandria, Virginia 22313-1450
`www.uspto.goV
`
`APPLICATION NO.
`
`F ING DATE
`
`FIRST NAMED INVENTOR
`
`ATTORNEY DOCKET NO.
`
`CONFIRMATION NO.
`
`14/448,258
`
`07/31/2014
`
`Donald K. Smith
`
`EGQ—005CP3C2
`
`8145
`
`PROSKAUER ROSE up
`ONE INTERNATIONAL PLACE
`MCCORMACK JASONL
`BOSTON, MA 02110
`
`ART UNIT
`
`PAPER NUMBER
`
`2881
`
`NOTIFICATION DATE
`
`DELIVERY MODE
`
`12/15/2014
`
`ELECTRONIC
`
`Please find below and/or attached an Office communication concerning this application or proceeding.
`
`The time period for reply, if any, is set in the attached communication.
`
`Notice of the Office communication was sent electronically on aboVe—indicated "Notification Date" to the
`following e—mail address(es):
`
`D0cketingPatentB0st0n @pr0skauer.c0m
`oandrews @pr0skauer.c0m
`
`PTOL—90A (Rev. 04/07)
`
`i
`
`ASML 1008
`
`

`
`Application No.
`14/448,258
`
`App|icant(s)
`SMITH, DONALD K.
`
`0ffiCe ACtiOn Summary
`
`AIA (First Inventor to File)
`Art Unit
`Examiner
`iltgtus
`2881
`JASON MCCORMACK
`-- The MAILING DA TE of this communication appears on the cover sheet with the correspondence address --
`Period for Reply
`
`A SHORTENED STATUTORY PERIOD FOR REPLY IS SET TO EXPIRE § MONTHS FROM THE MAILING DATE OF
`THIS COMMUNICATION.
`Extensions of time may be available under the provisions of 37 CFR1.136(a).
`after SIX (6) MONTHS from the mailing date of this communication.
`If NO period for reply is specified above, the maximum statutory period will apply and will expire SIX (6) MONTHS from the mailing date of this communication.
`—
`— Failure to reply within the set or extended period for reply will, by statute, cause the application to become ABANDONED (35 U.S.C. § 133).
`Any reply received by the Office later than three months after the mailing date of this communication, even if timely filed, may reduce any
`earned patent term adjustment. See 37 CFR 1 .704(b).
`
`In no event, however, may a reply be timely filed
`
`Status
`
`1)|Z| Responsive to communication(s) filed on 9/30/2014.
`El A declaration(s)/affidavit(s) under 37 CFR 1.130(b) was/were filed on
`
`2b)IXI This action is non—final.
`2a)I:I This action is FINAL.
`3)I:I An election was made by the applicant in response to a restriction requirement set forth during the interview on
`; the restriction requirement and election have been incorporated into this action.
`
`4)|:I Since this application is in condition for allowance except for formal matters, prosecution as to the merits is
`
`closed in accordance with the practice under Exparte Quayle, 1935 C.D. 11, 453 O.G. 213.
`
`Disposition of Claims*
`
`5)|X| Claim(s) 1 is/are pending in the application.
`5a) Of the above claim(s) j is/are withdrawn from consideration.
`
`6)|:I Claim(s) j is/are allowed.
`7)|Z| Claim(s)1-:21is/are rejected.
`8)|:I Claim(s) j is/are objected to.
`
`are subject to restriction and/or election requirement.
`)
`* If any claims have been determined allowable, you may be eligible to benefit from the Patent Prosecution Highway program at a
`
`participating intellectual property office for the corresponding application. For more information, please see
`
`
`h/indexfis or send an inquiry to PPl-ifeedbackf,<‘Bus§tc.Gov.
`
`://www.us:>to. ow atents/init events/
`
`htt
`
`Application Papers
`
`10)|:l The specification is objected to by the Examiner.
`11)I:l The drawing(s) filed on
`is/are: a)I:I accepted or b)I:I objected to by the Examiner.
`Applicant may not request that any objection to the drawing(s) be held in abeyance. See 37 CFR 1.85(a).
`
`Replacement drawing sheet(s) including the correction is required if the drawing(s) is objected to. See 37 CFR 1.121 (d).
`
`Priority under 35 U.S.C. § 119
`
`12)I:I Acknowledgment is made of a claim for foreign priority under 35 U.S.C. § 119(a)-(d) or (f).
`Certified copies:
`
`a)|:l All
`
`b)|:| Some** c)|:l None of the:
`
`1.I:I Certified copies of the priority documents have been received.
`2.I:| Certified copies of the priority documents have been received in Application No. j.
`3.|:| Copies of the certified copies of the priority documents have been received in this National Stage
`
`application from the International Bureau (PCT Rule 17.2(a)).
`** See the attached detailed Office action for a list of the certified copies not received.
`
`Attachment(s)
`
`1) E Notice of References Cited (PTO-892)
`
`2) E Information Disclosure Statement(s) (PTO/SB/08a and/or PTO/SB/08b)
`Paper No(s)/Mail Date 10/21/2014 7/31/2014.
`U.S. Patent and Trademark Office
`PTOL—326 (Rev. 11-13)
`
`Office Action Summary
`
`
`
`3) D jme,-View summary (PTQ.413)
`Paper No(s)/Mail Date.
`4) CI Owe" :-
`
`Page 1
`
`Part of Paper No./Mail Date 20141209
`
`

`
`Application/Control Number: 14/448,258
`
`Page 2
`
`Art Unit: 2881
`
`1.
`
`The present application is being examined under the pre-AIA first to invent
`
`provisions.
`
`DETAILED ACTION
`
`Specification
`
`2.
`
`The title of the invention is not descriptive. A new title is required that is clearly
`
`indicative of the invention to which the claims are directed.
`
`The following title is suggested: Laser-Driven Plasma—Based Light Source Having
`
`Optics for Forming an Elongated Plasma.
`
`Claim Rejections - 35 USC § 102
`
`3.
`
`The following is a quotation of the appropriate paragraphs of pre-AIA 35 U.S.C.
`
`102 that form the basis for the rejections under this section made in this Office action:
`
`A person shall be entitled to a patent unless —
`
`(b) the invention was patented or described in a printed publication in this or a foreign country
`or in public use or on sale in this country, more than one year prior to the date of application
`for patent in the United States.
`
`4.
`
`Claims 1, 8, 15, and 21 are rejected under pre-AIA 35 U.S.C. 102(b) as being
`
`anticipated by Hertz et al. U.S. PGPUB No. 2002/0044629.
`
`Regarding claim 1, Hertz discloses a plasma-based light source “a plasma P
`
`emitting the desired X-ray and EUV radiation” [0033], comprising: a pressurized
`
`chamber (3) “it is necessary to provide a suitable gas atmosphere in the low-pressure
`
`chamber” [0005] configured to contain an ionized gas (Wester U.S. PGPUB No.
`
`2004/0016894 describes how, as a plasma radiates light, as described in Hertz,
`
`“Plasma 104 radiates light as the ionized gas molecules transition from the higher
`
`

`
`Application/Control Number: 14/448,258
`
`Page 3
`
`Art Unit: 2881
`
`energy states back to the lower energy ground state. When Xenon is used to generate
`
`plasma 104, the plasma emits light having strong line emissions with wavelengths
`
`between 13 to 14 nm” [0006], it is therefore clear that the plasma (P) of Hertz, formed
`
`using xenon [0034], necessarily becomes an ionized gas as the plasma radiates light); a
`
`laser for providing a beam of laser energy to the ionized gas within the chamber to
`
`maintain a plasma “The energy beam is preferably a beam of electromagnetic radiation,
`
`such as laser radiation, which interacts with the jet and heats it to a plasma-forming
`
`temperature” [0024], the beam configured to maintain the plasma in an elongated forma
`
`having a plasma length that is greater than that of a plasma diameter “an elongated
`
`laser focus might be formed over a certain length of the jet, for example by means of
`
`one or more cylinder lenses (not shown) in combination with one or more spherical
`
`lenses, resulting in an elongated EUV emitting plasma” [0042] (the Oxford English
`
`Dictionary defines “elongate” as “long in relation to width” thereby establishing that an
`
`“elongated” plasma is defined by having a length greater than its width); and a tool
`
`optically coupled to the chamber for collecting light generated by the plasma “A method
`
`and an apparatus is designed to produce X-ray or EUV radiation for use in lithography,
`
`microscopy, materials science, or medical diagnostics” [Abstract].
`
`Regarding claim 8, Hertz discloses a plasma-based light source “a plasma P
`
`emitting the desired X-ray and EUV radiation” [0033], comprising: a pressurized
`
`chamber (3) “it is necessary to provide a suitable gas atmosphere in the low-pressure
`
`chamber” [0005] configured to contain an ionized gas (Wester U.S. PGPUB No.
`
`

`
`Application/Control Number: 14/448,258
`
`Page 4
`
`Art Unit: 2881
`
`2004/0016894 describes how, as a plasma radiates light, as described in Hertz,
`
`“Plasma 104 radiates light as the ionized gas molecules transition from the higher
`
`energy states back to the lower energy ground state. When Xenon is used to generate
`
`plasma 104, the plasma emits light having strong line emissions with wavelengths
`
`between 13 to 14 nm” [0006], it is therefore clear that the plasma (P) of Hertz, formed
`
`using xenon [OO34], necessarily becomes an ionized gas as the plasma radiates light); a
`
`laser for generating a beam of laser energy “The energy beam is preferably a beam of
`
`electromagnetic radiation, such as laser radiation, which interacts with the jet and heats
`
`it to a plasma-forming temperature” [0024]; an optical system coupled to the laser
`
`configured to maintain a plasma in an elongated form having a plasma length that is
`
`greater than that of a plasma diameter “an elongated laser focus might be formed over
`
`a certain length of the jet, for example by means of one or more cylinder lenses (not
`
`shown) in combination with one or more spherical lenses, resulting in an elongated EUV
`
`emitting plasma” [0042] (the Oxford English Dictionary defines “elongate” as “long in
`
`relation to width” thereby establishing that an “elongated” plasma is defined by having a
`
`length greater than its width); and a tool optically coupled to the chamber for collecting
`
`light generated by the plasma “A method and an apparatus is designed to produce X-
`
`ray or EUV radiation for use in lithography, microscopy, materials science, or medical
`
`diagnostics” [Abstract].
`
`Regarding claim 15, Hertz discloses a method for producing light “a plasma P
`
`emitting the desired X-ray and EUV radiation” [0033], comprising: ionizing a gas
`
`

`
`Application/Control Number: 14/448,258
`
`Page 5
`
`Art Unit: 2881
`
`(Wester U.S. PGPUB No. 2004/0016894 describes how, as a plasma radiates light, as
`
`described in Hertz, “Plasma 104 radiates light as the ionized gas molecules transition
`
`from the higher energy states back to the lower energy ground state. When Xenon is
`
`used to generate plasma 104, the plasma emits light having strong line emissions with
`
`wavelengths between 13 to 14 nm” [0006], it is therefore clear that the plasma (P) of
`
`Hertz, formed using xenon [OO34], necessarily becomes an ionized gas as the plasma
`
`radiates light) within a pressurized chamber (3) “it is necessary to provide a suitable gas
`
`atmosphere in the low-pressure chamber” [0005]; and providing a beam of laser energy
`
`to the ionized gas within the chamber to maintain a plasma within the chamber “The
`
`energy beam is preferably a beam of electromagnetic radiation, such as laser radiation,
`
`which interacts with the jet and heats it to a plasma-forming temperature” [0024],
`
`wherein the laser beam is configured to maintain the plasma in an elongated form
`
`having a plasma length that is greater than that of a plasma diameter “an elongated
`
`laser focus might be formed over a certain length of the jet, for example by means of
`
`one or more cylinder lenses (not shown) in combination with one or more spherical
`
`lenses, resulting in an elongated EUV emitting plasma” [0042] (the Oxford English
`
`Dictionary defines “elongate” as “long in relation to width” thereby establishing that an
`
`“elongated” plasma is defined by having a length greater than its width).
`
`Regarding claim 21, Hertz discloses that “an elongated laser focus might be
`
`formed over a certain length of the jet, for example by means of one or more cylinder
`
`lenses (not shown) in combination with one or more spherical lenses, resulting in an
`
`

`
`Application/Control Number: 14/448,258
`
`Page 6
`
`Art Unit: 2881
`
`elongated EUV emitting plasma” [0042]. An optical system must be present to focus the
`
`laser to appropriately form the elongated plasma.
`
`Claim Rejections - 35 USC § 103
`
`5.
`
`The following is a quotation of pre-AIA 35 U.S.C. 103(a) which forms the basis
`
`for all obviousness rejections set forth in this Office action:
`
`(a) A patent may not be obtained though the invention is not identically disclosed or described
`as set forth in section 102 of this title, if the differences between the subject matter sought to
`be patented and the prior art are such that the subject matter as a whole would have been
`obvious at the time the invention was made to a person having ordinary skill in the art to which
`said subject matter pertains. Patentability shall not be negatived by the manner in which the
`invention was made.
`
`6.
`
`Claims 2, 3, 4, 9, 10, 11, 16, 17, and 18 are rejected under pre-AIA 35 U.S.C.
`
`103(a) as being unpatentable over Hertz et al. U.S. PGPUB No. 2002/0044629 in view
`
`of Ahmad et al. U.S. PGPUB No. 2003/0068012.
`
`Regarding claim 2, Hertz discloses the claimed invention except that while Hertz
`
`discloses that “an elongated laser focus might be formed over a certain length of the jet,
`
`for example by means of one or more cylinder lenses (not shown) in combination with
`
`one or more spherical lenses, resulting in an elongated EUV emitting plasma” [0042],
`
`there is no explicit disclosure of a plasma having the specifically claimed relationship
`
`between length and diameter.
`
`Ahmad discloses an apparatus for generating extreme ultraviolet light from a
`
`plasma where "both laser-induced plasmas and gas discharge plasmas are suited for
`
`generating EUV radiation” [0007] and forms “forms a plasma column 71 of high density
`
`

`
`Application/Control Number: 14/448,258
`
`Page 7
`
`Art Unit: 2881
`
`(with a length from 1 mm to 50 mm and a diameter from 0.2 to 4 mm)” [0044]. A length
`
`of 10 mm, 20 mm, or 40 mm (which is within the disclosed length dimension of the
`
`plasma) would be 10, 20, or 40 times, respectively, larger than a diameter of 1 mm
`
`(which is within the disclosed diameter dimension of the plasma).
`
`It would have been obvious to one possessing ordinary skill in the art at the time
`
`of the invention to have combined Hertz and Ahmad, forming an elongated plasma
`
`having a specific ratio of length to diameter, in order to form a plasma having
`
`particularly desired dimensions based on the available size/shape of the chamber
`
`thereby confining a plasma to a region furthest from various components of the
`
`chamber, thereby preventing contamination of the chamber by debris formed from the
`
`plasma.
`
`Regarding claim 3, Hertz discloses the claimed invention except that while Hertz
`
`discloses that “an elongated laser focus might be formed over a certain length of the jet,
`
`for example by means of one or more cylinder lenses (not shown) in combination with
`
`one or more spherical lenses, resulting in an elongated EUV emitting plasma” [0042],
`
`there is no explicit disclosure of a plasma having the specifically claimed relationship
`
`between length and diameter.
`
`Ahmad discloses an apparatus for generating extreme ultraviolet light from a
`
`plasma where "both laser-induced plasmas and gas discharge plasmas are suited for
`
`generating EUV radiation” [0007] and forms “forms a plasma column 71 of high density
`
`(with a length from 1 mm to 50 mm and a diameter from 0.2 to 4 mm)” [0044]. A length
`
`

`
`Application/Control Number: 14/448,258
`
`Page 8
`
`Art Unit: 2881
`
`of 10 mm, 20 mm, or 40 mm (which is within the disclosed length dimension of the
`
`plasma) would be 10, 20, or 40 times, respectively, larger than a diameter of 1 mm
`
`(which is within the disclosed diameter dimension of the plasma).
`
`It would have been obvious to one possessing ordinary skill in the art at the time
`
`of the invention to have combined Hertz and Ahmad, forming an elongated plasma
`
`having a specific ratio of length to diameter, in order to form a plasma having
`
`particularly desired dimensions based on the available size/shape of the chamber
`
`thereby confining a plasma to a region furthest from various components of the
`
`chamber, thereby preventing contamination of the chamber by debris formed from the
`
`plasma.
`
`Regarding claim 4, Hertz discloses the claimed invention except that while Hertz
`
`discloses that “an elongated laser focus might be formed over a certain length of the jet,
`
`for example by means of one or more cylinder lenses (not shown) in combination with
`
`one or more spherical lenses, resulting in an elongated EUV emitting plasma” [0042],
`
`there is no explicit disclosure of a plasma having the specifically claimed relationship
`
`between length and diameter.
`
`Ahmad discloses an apparatus for generating extreme ultraviolet light from a
`
`plasma where "both laser-induced plasmas and gas discharge plasmas are suited for
`
`generating EUV radiation” [0007] and forms “forms a plasma column 71 of high density
`
`(with a length from 1 mm to 50 mm and a diameter from 0.2 to 4 mm)” [0044]. A length
`
`of 10 mm, 20 mm, or 40 mm (which is within the disclosed length dimension of the
`
`

`
`Application/Control Number: 14/448,258
`
`Page 9
`
`Art Unit: 2881
`
`plasma) would be 10, 20, or 40 times, respectively, larger than a diameter of 1 mm
`
`(which is within the disclosed diameter dimension of the plasma).
`
`It would have been obvious to one possessing ordinary skill in the art at the time
`
`of the invention to have combined Hertz and Ahmad, forming an elongated plasma
`
`having a specific ratio of length to diameter, in order to form a plasma having
`
`particularly desired dimensions based on the available size/shape of the chamber
`
`thereby confining a plasma to a region furthest from various components of the
`
`chamber, thereby preventing contamination of the chamber by debris formed from the
`
`plasma.
`
`Regarding claim 9, Hertz discloses the claimed invention except that while Hertz
`
`discloses that “an elongated laser focus might be formed over a certain length of the jet,
`
`for example by means of one or more cylinder lenses (not shown) in combination with
`
`one or more spherical lenses, resulting in an elongated EUV emitting plasma” [0042],
`
`there is no explicit disclosure of a plasma having the specifically claimed relationship
`
`between length and diameter.
`
`Ahmad discloses an apparatus for generating extreme ultraviolet light from a
`
`plasma where "both laser-induced plasmas and gas discharge plasmas are suited for
`
`generating EUV radiation” [0007] and forms “forms a plasma column 71 of high density
`
`(with a length from 1 mm to 50 mm and a diameter from 0.2 to 4 mm)” [0044]. A length
`
`of 10 mm, 20 mm, or 40 mm (which is within the disclosed length dimension of the
`
`

`
`Application/Control Number: 14/448,258
`
`Page 10
`
`Art Unit: 2881
`
`plasma) would be 10, 20, or 40 times, respectively, larger than a diameter of 1 mm
`
`(which is within the disclosed diameter dimension of the plasma).
`
`It would have been obvious to one possessing ordinary skill in the art at the time
`
`of the invention to have combined Hertz and Ahmad, forming an elongated plasma
`
`having a specific ratio of length to diameter, in order to form a plasma having
`
`particularly desired dimensions based on the available size/shape of the chamber
`
`thereby confining a plasma to a region furthest from various components of the
`
`chamber, thereby preventing contamination of the chamber by debris formed from the
`
`plasma.
`
`Regarding claim 10, Hertz discloses the claimed invention except that while
`
`Hertz discloses that “an elongated laser focus might be formed over a certain length of
`
`the jet, for example by means of one or more cylinder lenses (not shown) in
`
`combination with one or more spherical lenses, resulting in an elongated EUV emitting
`
`plasma” [0042], there is no explicit disclosure of a plasma having the specifically
`
`claimed relationship between length and diameter.
`
`Ahmad discloses an apparatus for generating extreme ultraviolet light from a
`
`plasma where "both laser-induced plasmas and gas discharge plasmas are suited for
`
`generating EUV radiation” [0007] and forms “forms a plasma column 71 of high density
`
`(with a length from 1 mm to 50 mm and a diameter from 0.2 to 4 mm)” [0044]. A length
`
`of 10 mm, 20 mm, or 40 mm (which is within the disclosed length dimension of the
`
`

`
`Application/Control Number: 14/448,258
`
`Page 11
`
`Art Unit: 2881
`
`plasma) would be 10, 20, or 40 times, respectively, larger than a diameter of 1 mm
`
`(which is within the disclosed diameter dimension of the plasma).
`
`It would have been obvious to one possessing ordinary skill in the art at the time
`
`of the invention to have combined Hertz and Ahmad, forming an elongated plasma
`
`having a specific ratio of length to diameter, in order to form a plasma having
`
`particularly desired dimensions based on the available size/shape of the chamber
`
`thereby confining a plasma to a region furthest from various components of the
`
`chamber, thereby preventing contamination of the chamber by debris formed from the
`
`plasma.
`
`Regarding claim 11, Hertz discloses the claimed invention except that while
`
`Hertz discloses that “an elongated laser focus might be formed over a certain length of
`
`the jet, for example by means of one or more cylinder lenses (not shown) in
`
`combination with one or more spherical lenses, resulting in an elongated EUV emitting
`
`plasma” [0042], there is no explicit disclosure of a plasma having the specifically
`
`claimed relationship between length and diameter.
`
`Ahmad discloses an apparatus for generating extreme ultraviolet light from a
`
`plasma where "both laser-induced plasmas and gas discharge plasmas are suited for
`
`generating EUV radiation” [0007] and forms “forms a plasma column 71 of high density
`
`(with a length from 1 mm to 50 mm and a diameter from 0.2 to 4 mm)” [0044]. A length
`
`of 10 mm, 20 mm, or 40 mm (which is within the disclosed length dimension of the
`
`

`
`Application/Control Number: 14/448,258
`
`Page 12
`
`Art Unit: 2881
`
`plasma) would be 10, 20, or 40 times, respectively, larger than a diameter of 1 mm
`
`(which is within the disclosed diameter dimension of the plasma).
`
`It would have been obvious to one possessing ordinary skill in the art at the time
`
`of the invention to have combined Hertz and Ahmad, forming an elongated plasma
`
`having a specific ratio of length to diameter, in order to form a plasma having
`
`particularly desired dimensions based on the available size/shape of the chamber
`
`thereby confining a plasma to a region furthest from various components of the
`
`chamber, thereby preventing contamination of the chamber by debris formed from the
`
`plasma.
`
`Regarding claim 16, Hertz discloses the claimed invention except that while
`
`Hertz discloses that “an elongated laser focus might be formed over a certain length of
`
`the jet, for example by means of one or more cylinder lenses (not shown) in
`
`combination with one or more spherical lenses, resulting in an elongated EUV emitting
`
`plasma” [0042], there is no explicit disclosure of a plasma having the specifically
`
`claimed relationship between length and diameter.
`
`Ahmad discloses an apparatus for generating extreme ultraviolet light from a
`
`plasma where "both laser-induced plasmas and gas discharge plasmas are suited for
`
`generating EUV radiation” [0007] and forms “forms a plasma column 71 of high density
`
`(with a length from 1 mm to 50 mm and a diameter from 0.2 to 4 mm)” [0044]. A length
`
`of 10 mm, 20 mm, or 40 mm (which is within the disclosed length dimension of the
`
`

`
`Application/Control Number: 14/448,258
`
`Page 13
`
`Art Unit: 2881
`
`plasma) would be 10, 20, or 40 times, respectively, larger than a diameter of 1 mm
`
`(which is within the disclosed diameter dimension of the plasma).
`
`It would have been obvious to one possessing ordinary skill in the art at the time
`
`of the invention to have combined Hertz and Ahmad, forming an elongated plasma
`
`having a specific ratio of length to diameter, in order to form a plasma having
`
`particularly desired dimensions based on the available size/shape of the chamber
`
`thereby confining a plasma to a region furthest from various components of the
`
`chamber, thereby preventing contamination of the chamber by debris formed from the
`
`plasma.
`
`Regarding claim 17, Hertz discloses the claimed invention except that while
`
`Hertz discloses that “an elongated laser focus might be formed over a certain length of
`
`the jet, for example by means of one or more cylinder lenses (not shown) in
`
`combination with one or more spherical lenses, resulting in an elongated EUV emitting
`
`plasma” [0042], there is no explicit disclosure of a plasma having the specifically
`
`claimed relationship between length and diameter.
`
`Ahmad discloses an apparatus for generating extreme ultraviolet light from a
`
`plasma where "both laser-induced plasmas and gas discharge plasmas are suited for
`
`generating EUV radiation” [0007] and forms “forms a plasma column 71 of high density
`
`(with a length from 1 mm to 50 mm and a diameter from 0.2 to 4 mm)” [0044]. A length
`
`of 10 mm, 20 mm, or 40 mm (which is within the disclosed length dimension of the
`
`

`
`Application/Control Number: 14/448,258
`
`Page 14
`
`Art Unit: 2881
`
`plasma) would be 10, 20, or 40 times, respectively, larger than a diameter of 1 mm
`
`(which is within the disclosed diameter dimension of the plasma).
`
`It would have been obvious to one possessing ordinary skill in the art at the time
`
`of the invention to have combined Hertz and Ahmad, forming an elongated plasma
`
`having a specific ratio of length to diameter, in order to form a plasma having
`
`particularly desired dimensions based on the available size/shape of the chamber
`
`thereby confining a plasma to a region furthest from various components of the
`
`chamber, thereby preventing contamination of the chamber by debris formed from the
`
`plasma.
`
`Regarding claim 18, Hertz discloses the claimed invention except that while
`
`Hertz discloses that “an elongated laser focus might be formed over a certain length of
`
`the jet, for example by means of one or more cylinder lenses (not shown) in
`
`combination with one or more spherical lenses, resulting in an elongated EUV emitting
`
`plasma” [0042], there is no explicit disclosure of a plasma having the specifically
`
`claimed relationship between length and diameter.
`
`Ahmad discloses an apparatus for generating extreme ultraviolet light from a
`
`plasma where "both laser-induced plasmas and gas discharge plasmas are suited for
`
`generating EUV radiation” [0007] and forms “forms a plasma column 71 of high density
`
`(with a length from 1 mm to 50 mm and a diameter from 0.2 to 4 mm)” [0044]. A length
`
`of 10 mm, 20 mm, or 40 mm (which is within the disclosed length dimension of the
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`Application/Control Number: 14/448,258
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`Page 15
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`Art Unit: 2881
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`plasma) would be 10, 20, or 40 times, respectively, larger than a diameter of 1 mm
`
`(which is within the disclosed diameter dimension of the plasma).
`
`It would have been obvious to one possessing ordinary skill in the art at the time
`
`of the invention to have combined Hertz and Ahmad, forming an elongated plasma
`
`having a specific ratio of length to diameter, in order to form a plasma having
`
`particularly desired dimensions based on the available size/shape of the chamber
`
`thereby confining a plasma to a region furthest from various components of the
`
`chamber, thereby preventing contamination of the chamber by debris formed from the
`
`plasma.
`
`7.
`
`Claims 5, 7, 12, 14, and 19 are rejected under pre-AIA 35 U.S.C. 103(a) as being
`
`unpatentable over Hertz et al. U.S. PGPUB No. 2002/0044629 in view of Mizoguchi et
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`al. U.S. PGPUB No. 2004/0238762.
`
`Regarding claim 5, Hertz discloses the claimed invention except that there is no
`
`explicit disclosure that the light generated by the plasma is collected along an axis
`
`defined by the laser beam.
`
`Mizoguchi discloses an extreme ultraviolet light source for generating extreme
`
`ultraviolet light from a plasma which is initiated by a laser source “The extreme
`
`ultraviolet light source device generates a plasma by irradiating a target (22) with laser
`
`light from a driving laser device (25), and generates extreme ultraviolet (EUV) light with
`
`a wavelength of several nanometers to several tens of nanometers” [Abstract] where, as
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`Art Unit: 2881
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`illustrated in figure 2, extreme ultraviolet light (13) is collected downstream by at least a
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`debris shield (12) (as well as any downstream components) along an axis substantially
`
`parallel to and including the axis defined by the laser beam.
`
`It would have been obvious to one possessing ordinary skill in the art at the time
`
`of the invention to have combined Hertz and Mizoguchi, collecting emitted radiation
`
`along the same axis as the axis along which the laser radiation is emitted, in order to
`
`utilize a configuration where plasma-emitted radiation is caused immediately to travel in
`
`a desired direction for utilization by downstream components without the need for
`
`additional beam-steering optical components.
`
`Regarding claim 7, Hertz discloses the claimed invention except that there is no
`
`explicit disclosure that the light generated by the plasma is collected along an axis
`
`defined by the laser beam.
`
`Mizoguchi discloses an extreme ultraviolet light source for generating extreme
`
`ultraviolet light from a plasma which is initiated by a laser source “The extreme
`
`ultraviolet light source device generates a plasma by irradiating a target (22) with laser
`
`light from a driving laser device (25), and generates extreme ultraviolet (EUV) light with
`
`a wavelength of several nanometers to several tens of nanometers” [Abstract] where
`
`“The light source is a point light source that has a substantially isotropic angular
`
`distribution, and there are no structures such as electrodes or the like around the light
`
`source” [0017].
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`It would have been obvious to one possessing ordinary skill in the art at the time
`
`of the invention to have combined Hertz and Mizoguchi, generating radiation without the
`
`use of electrodes, in order to achieve different optical output conditions such as
`
`wavelength, brightness, energy, than those which may be achieved by electrode
`
`discharge thereby creating light energy having particularly desired properties based on
`
`the downstream use of the radiation.
`
`Regarding claim 12, Hertz discloses the claimed invention except that there is no
`
`explicit disclosure that the light generated by the plasma is collected along an axis
`
`defined by the laser beam.
`
`Mizoguchi discloses an extreme ultraviolet light source for generating extreme
`
`ultraviolet light from a plasma which is initiated by a laser source “The extreme
`
`ultraviolet light source device generates a plasma by irradiating a target (22) with laser
`
`light from a driving laser device (25), and generates extreme ultraviolet (EUV) light with
`
`a wavelength of several nanometers to several tens of nanometers” [Abstract] where, as
`
`illustrated in figure 2, extreme ultraviolet light (13) is collected downstream by at least a
`
`debris shield (12) (as well as any downstream components) along an axis substantially
`
`parallel to and including the axis defined by the laser beam.
`
`It would have been obvious to one possessing ordinary skill in the art at the time
`
`of the invention to have combined Hertz and Mizoguchi, collecting emitted radiation
`
`along the same axis as the axis along which the laser radiation is emitted, in order to
`
`utilize a configuration where plasma-emitted radiation is caused immediately to travel in
`
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`Art Unit: 2881
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`a desired direction for utilization by downstream components without the need for
`
`additional beam-steering optical components.
`
`Regarding claim 14, Hertz discloses the claimed invention except that there is no
`
`explicit disclosure that the light generated by the plasma is collected along an axis
`
`defined by the laser beam.
`
`Mizoguchi discloses an extreme ultraviolet light source for generating extreme
`
`ultraviolet light from a plasma which is initiated by a laser source “The extreme
`
`ultraviolet light source device generates a plasma by irradiating a target (22) with laser
`
`light from a driving laser device (25), and generates extreme ultraviolet (EUV) light with
`
`a wavelength of several nanometers to several tens of nanometers” [Abstract] where
`
`“The light source is a point light source that has a substantially isotropic angular
`
`distribution, and there are no structures such as electrodes or the like around the light
`
`source” [0017].
`
`It would have been obvious to one possessing ordinary skill in the art at the time
`
`of the invention to have combined Hertz and Mizoguchi, generating radiation without the
`
`use of electrodes, in order to achieve different optical output conditions such as