`
`Paper No. __
`
`
`UNITED STATES PATENT AND TRADEMARK OFFICE
`______________________
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`______________________
`
`
`Samsung Electronics, Co., Ltd., Samsung Electronics America, Inc., and Samsung
`Semiconductor, Inc.
`Petitioners,
`
`v.
`
`Raytheon Company
`Patent Owner.
`
`Patent No. 5,591,678
`Issued: January 7, 1997
`Filed: June 7, 1995
`Inventors: Joseph J. Bendik, Gerard T. Malloy, Ronald M. Finnila
`Title: PROCESS OF MANUFACTURING A MICROELECTRIC DEVICE
`USING A REMOVABLE SUPPORT SUBSTRATE AND ETCH-STOP
`______________________
`
`
`
`Inter Partes Review No. ______
`
`
`
`POWER OF ATTORNEY FOR PETITIONERS
`Samsung Electronics, Co., Ltd., Samsung Electronics America, Inc., and Samsung
`Semiconductor, Inc.
`
`
`
`
`
`Petition re: US. Patent No. 5,591,678
`
`In accordance with 37 C.F.R. § 42.10(b), Samsung Electronics, Co., Ltd.,
`
`Samsung Electronics America,
`
`Inc.,
`
`and Samsung Semiconductor,
`
`Inc.
`
`(collectively, “Samsung”) hereby appoint:
`
`Lead Counsel
`
`Heath Briggs
`
`Reg. No. 54,919
`GREENBERG TRAURIG, LLP
`
`1200 17th Street, Suite 2400
`
`Denver, CO 80202
`
`BriggsH@gtlaw.com
`
`Backup Lead Counsel
`
`Patrick J. McCarthy
`
`Reg. No. 62,762
`
`GREENBERG TRAURIG, LLP
`
`2101 L Street, N.W., Suite 1000
`
`Washington, DC 20037
`
`McCarthyP@gtlaw.com
`
`RaytheonGTIPR@gtlaw.com
`
`RaytheonGTIPR@gtlaw.com
`
`Phone: (303) 572-6500
`
`Phone: (202) 331-3100
`
`
`
`Fax: (303) 572-6540
`
`
` Fax: (202 331-3101
`
`as its representatives to act on its behalf in any petition(s) for inter partes review
`
`relative to the above—identified patent, with full power to appoint an associate
`
`agent, and to transact all business in the United States Patent and Trademark
`
`Office in connection therewith.
`
`I have authority to sign this document on behalf of Petitioners, Samsung:
`
`Signature:
`
`.
`
`Name:
`
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