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`10 Watt EUV Source
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`Product Description
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`Researchers into the emerging technology of EUV lithography
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`need a source of EUV photons for a variety of applications. Existing
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`sources of light are often too low in power, unreliable in operation,
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`large, costly and complex. Soft x—rays (SXR) for water—window mi-
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`croscopy are not readily available today outside synchrotron facili-
`ties.
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`The EQ—1 OM is a compact, easy—to—use, reliable and cost-
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`effective EUV and SXR light source system, based on Energetiq’s
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`Cost—effective and compact
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`unique Electrodeless Z-pinch" technology using either Xenon or
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`— Low cost per EUV & SXR watt
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`Nitrogen gas.
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`- Small footprint
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`Applications
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`’
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`'
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`EUV Metrology
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`EUV Resist Development
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`' Defect Inspection
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`'
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`EUV & Soft X—Ray Microscopy
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`
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`The Energetiq EQ-10M is integrated into a single 19” rack
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`format to minimize the system footprint. The system includes the
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`electrodeless Z—pinch source assembly, vacuum and gas sub-
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`systems, power delivery subsystem and controt electronics. The
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`EQ—10M is capable of delivering up to 10 watts of in-band EUV into
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`2pi steradians and will run continuously at pulse repetition rates of
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`up to 1kHz or in bursts of up to 1kHz pulses if required.
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`To accommodate the differing requirements of the various
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`applications, the source operating conditions are user—adjustable.
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`The light output can be optimized for peak power or for peak
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`brightness as required by the user. Plasma size is typically below
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`1mm in diameter under typical operating conditions.
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`A simple and flexible optical interface is provided to the user on
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`the side of the system enclosure to connect to the application
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`equipment. Custom interfaces are available to meet specific
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`customer requirements.
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`The user interface operates by a color touch screen display,
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`and incorporates menus allowing manual and automatic operation.
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`The EQ—10lVl is easy to install, requiring only electrical power, a
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`chilled water supply, clean dry compressed air and a supply of
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`Electrodeless Z-Pinch Source -
`Xenon or Nitrogen.
`View of visible light
`4‘
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`ASML 1406
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`
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`ENERGETIQ
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`Features 8. Benefits
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`' Unique electrodeless design
`— Low debris / low consumable cost
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`‘
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`Up to 10W EUV into 2pi using Xenon
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`— Sufficient power for a wide variety
`of applications
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`2—4nm Soft X—Rays produced using
`Nitrogen
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`— Enables tabletop SXR microscope
`applications
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`Small plasma size
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`— <1 mm diameter for high brightness
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`'
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`°
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`°
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`
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`Electrodeless Z-Pinch" Technology
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`Z-pinch plasmas have been
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`Energetiq’s unique technology is
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`shown in literature to be effective
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`also based on a Z-pinch plasma,
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`
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`About Energetiq .
`
`.
`
`.
`
`is a developer and
`Inc.
`Energetiq Technology,
`manufacturer of advanced short wavelength light
`
`
`
`products for use in high technology applications.
`The Energetiq team combines its deep understand-
`
`ing of high power plasma physics needed for short
`wavelength
`light
`generation with
`its
`long
`experience in building rugged, industrial and scien-
`tific products. The result is that users can expect
`the highest levels of performance combined with
`the highest reliability.
`
`I
`
`. EEEREG?-Tlu.
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`at producing EUV and SXR light.
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`but it avoids electrodes entirely by
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`However, all the implementations
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`inductively coupling the current
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`to-date have involved conducting
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`into the plasma. The plasma in
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`high discharge currents into the
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`the Energetiq source is magneti-
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`plasma using electrodes. These
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`Cally confined away from the
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`electrodes, which are typically in
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`source walls, minimizing the heat
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`contact with high temperature
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`load and reducing debris.
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`plasma, can melt and produce
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`significant debris.
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`
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`Specifications
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`EUV §Qecification§
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`'
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`EUV Power Output
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`Up to 10 Watts into 2pi
`steradians in-band
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`(13.5nm, 2% bandwidth)
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`'
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`'
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`SXR Power Output
`(Preliminary Data)
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`Up to 1016 Photons/Second
`into 2pi steradians (2.88nm)
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`Pulse Repetition Rate
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`Variable, up to 1kHz
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`Physical Specifications
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`'
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`System Dimensions
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`' Weight
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`Utility Reguirement,s__
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`°
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`Electrical
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`' Water
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`600mm (W)
`900mm (D)
`1100mm (H)
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`250 kg
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`208V 3-phase 30A
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`8 liters/minute
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`Ordering Information
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`Contact Energetiq for a detailed quotation for your application.
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`ENERGETIQ
`
`Evlergotiq Technology, Inc.
`‘I Constitution Way
`Woburn, MA 01801
`Phone: 731.939.0763
`Fax: 7131 .!)39.()769
`www.tmergotiq.t;mn
`
`Specifications are subject to change
`without notice.
`
`DS 004-—--8/05
`lu:i2()05 Energetiq Technology, Inc.
`All rights reserved.