`
`10 Watt EUV Source
`
`Product Description
`
`Researchers into the emerging technology of EUV iithography
`
`need a source of EUV photons for a variety of applications. Existing
`
`sources of light are often too low in power, unreliable in operation,
`
`large, costiy and complex. Soft x—rays (SXR) for water—window mi-
`
`croscopy are not readily available today outside synchrotron facili-
`ties.
`
`The EQ—10M is a compact, easy—to—use, reliable and cost-
`
`effective EUV and SXR light source system, based on Energetiq’s
`
`Cost—effective and compact
`
`unique Electrodeless Z—pinch“ technology using either Xenon or
`
`— Low cost per EUV & SXR watt
`
`Nitrogen gas.
`
`— Small footprint
`
`Applications
`
`°
`
`'
`
`EUV Metrology
`
`EUV Resist Development
`
`' Defect Inspection
`
`'
`
`EUV & Soft X-Ray Microscopy
`
`
`
`The Energetiq EQ—1OM is integrated into a single 19” rack
`
`format to minimize the system footprint. The system includes the
`
`electrodeless Z—pinch source assembly, vacuum and gas sub-
`
`systems, power delivery subsystem and control electronics. The
`
`EQ-10M is capable of delivering up to ‘l0 watts of in—band EUV into
`
`2pi steradians and will run continuousiy at pulse repetition rates of
`
`up to 1kHz or in bursts of up to ‘lkHz pulses if required.
`
`To accommodate the differing requirements of the various
`
`applications, the source operating conditions are user-adjustable.
`
`The light output can be optimized for peak power or for peak
`
`brightness as required by the user. Plasma size is typically below
`
`1mm in diameter under typical operating conditions.
`
`A simple and flexible optical interface is provided to the user on
`
`the side of the system enclosure to connect to the application
`
`equipment. Custom interfaces are available to meet specific
`
`customer requirements.
`
`The user interface operates by a color touch screen display,
`
`and incorporates menus allowing manual and automatic operation.
`
`The EQ-10M is easy to install, requiring only electrical power, a
`
`chilled water supply, clean dry compressed air and a supply of
`
`Ilootrodolou Z-Pinch source a
`View of visible light
`
`1
`
`'
`
`_
`
`Xenon or Nitrogen.
`
`ASML 1306
`
`
`
`ENERGETIQ
`
`Features & Benefits
`
`' Unique electrodeless design
`— Low debris / low consumable cost
`
`'
`
`Up to 10W EUV into 2pi using Xenon
`
`— Sufficient power for a wide variety
`of applications
`
`2—4nm Soft X—Rays produced using
`Nitrogen
`
`— Enables tabletop SXR microscope
`applications
`
`Small plasma size
`
`— <1mm diameter for high brightness
`
`°
`
`'
`
`‘
`
`
`
`About Energetiq .
`
`.
`
`.
`
`is a developer and
`Inc.
`Energetiq Technology,
`manufacturer of advanced short wavelength light
`
`products for use in high technology applications.
`The Energetiq team combines its deep understand-
`
`ing of high power plasma physics needed for short
`wavelength
`light
`generation with
`its
`long
`experience in building rugged, industrial and scien-
`tific products. The result is that users can expect
`
`the highest levels of performance combined with
`the highest reliability.
`
`
`
`Electrodeless Z-Pinch" Technology
`
`Z-pinch plasmas have been
`
`shown in literature to be effective
`
`Energetiq’s unique technology is
`
`also based on a Z-pinch plasma,
`
`
`
`at producing EUV and SXR light.
`
`but it avoids electrodes entirely by
`
`However, all the implementations
`
`inductively coupling the current
`
`to-date have involved conducting
`
`into the plasma. The plasma in
`
`high discharge currents into the
`
`the Energetiq source is magneti-
`
`plasma using electrodes. These
`
`cally confined away from the
`
`electrodes, which are typically in
`
`source walls, minimizing the heat
`
`contact with high temperature
`
`load and reducing debris.
`
`plasma, can melt and produce
`
`significant debris.
`
`
`
`Specifications
`
`EUV §g§gifications
`
`'
`
`EUV Power Output
`
`Up to 10 Watts into 2pi
`steradians in-band
`
`(13.5nm, 2% bandwidth)
`
`
`
`'
`
`'
`
`SXR Power Output
`(Preliminary Data)
`
`Up to 1016 Photons/Second
`into 2pi steradians (2.88nm)
`
`Pulse Repetition Rate
`
`Variable, up to 1kHz
`
`Physical Sgecifications
`
`'
`
`System Dimensions
`
`' Weight
`
`Utility Reguirements
`
`°
`
`Electrical
`
`' Water
`
`600mm (W)
`900mm (D)
`1100mm (H)
`
`250 kg
`
`208V 3—phase 30A
`
`8 liters/minute
`
`
`
`Ordering Information
`
`Contact Energetiq for a detailed quotation for your application.
`
`ENERGETIQ
`
`Elwrgetiq Technology, Inc.
`7 Constitution Way
`Woburn, MA 01001
`Phone: 781.939.0763
`Fax: 781.939.0769
`www.¢\vu»v qt-tiqi um
`
`Specifications are subject to change
`without notice.
`
`DS 004-8/05
`©2005 Energetiq Technology, Inc.
`All rights reserved.