_ ,
`,
`Notice of Allowabriliy
`
`Appiicaticm No.
`
`Applicams)
`
`w3g5,523
`examine:
` MEENAKSHI 8. SAHU
`
`8MlTH. DONALD K.
`Ar; uni;
`
`2881
`
`-- The MAILING OXXTE of {his t:ommtmfca(ion appears on tha cawr simef iwitlz the carrespondence address-«
`All claims being allowable, PRCJ8ECUT11ON GN THE MERITS IS (OR REMNN3) CLOSED in this .appll‘cation.
`if not included
`herewith (or p»re»vi<:;usiy niaiied). a Notice cf Allowance (PTOL~86)vor otharapprcapriate ccsmmunicaaztian wiil be -mailed in due course. THIS
`NOTICE OF Ai..l..QW£&Bl;LiTY 33 NOT A GRANT OF PATENT Rlefiffi.
`‘{his application is subject to withdrawai from issue at the initiative
`cf the Office or upcn‘ gasetition by the applicant. See 3?’ CFR 1.1313 and MPEP1308i
`1., K] This cunmiunication is respafasive ta 1?/05/2946.
`
`2. A The ailowad c1aim(s) isxare $81.
`
`3. 1:} Acknowledgment is made of a claim fcrforaign priority under 35 U.8.C. § M9{a}~(d) or (fji
`a) C] All
`ta) [1 Same”
`c}.E3 Ncme
`Of that
`1. C] Gertified copies of the priority dcscumems have been received.
`
`7
`2. E] Certified copies of the priérity documents: have been received in Application No.
`3. {fl Copies cf the certified copies of the priority dacuments have been received in this national stage zappiicaiion from the
`International Bureau (PCT Rule. 1”/‘.2.(a)).
`* Cartifiied copies net received: ,______
`
`Applicant has THREE MONTHS FROM THE “M/\iL!NG DATE" of this communication to file a reply complying with the requirements '
`noted beiow. Failure tr: timely comply wiil Aresultin ABANDON MENT of this application.
`'
`T?-H8 ‘Fl-iREE—MONT.H PERIOE is NOT EXTENDAELE.
`
`4.
`
`A SUE38TlTi.JTi2 OATH OR ’D££CL.ARATl0N musk be $u1:>mltied.i Note the attached EX/~\MlVNEjR’E5 All/lENDMENT«<3‘r NOTICE OF
`INFORMAL PATENT /3\;PPL¥C»54T¥€3N {PTO~152.} whichigives rea$:m(s)
`the oath or zieciaraiian is deficient.
`
`4
`5. 1:] GC3¥‘2.REC‘§'EC) GRAWSNGS ( as "irepiaisemeni she-as“) !T]t3$2. be submitted.
`(a) £3 inciuding -changes require'd‘by the Notice cf Dra2i’ss‘pers>:>n’s Peters: Drawinvg Review { PTO~9¢8) attaczhed
`
`1) [3 hereto or 2) 1:] to i3a;5er Noxmait Bate Wm
`(13) {:1 including changes .requi.re‘d by the ai.tac~hed Exami'ner‘s Amendment I ‘Comment or in the Office action of
`Paper Ncnimail Date
`
`Identifying indicia such as the application number (see 37~C‘Ffl 1.84(c)) should be written an the drawings in the from (not thehack) of
`each $h3%?L Raptacamaent sheafis) shank} be laheiecl as such in the! ¥:eade.r’.a<:x:orciing to 3? CFR Hziid).
`
`£3. [:1 E)£F’Ov‘E3i’T OF andfor INFORMATION aboui the deposit of BiOL£}(l:‘si(3AL MATEiR¥A'_L must be submitted‘ Note the
`attaohecl Examine.r’s‘commemi regarding R*E{3UiREMEN'T FOR THE EEPOSIT OF BIGLOGICAL MATERRAL.
`
`Attacfimenqs;
`1, Xi Notice of Refemnces Cited (P709892)
`
`2* {:1 Notice of Draftperson's Patent Drawing Review (PTO4948)
`'
`3. Q Information Disclosure Statements (PTOISB/O8),
`Paper No./Mail Date 6/12/O§,7g9!O7,?I‘9./Q7 10123107
`4. £3 Examinafis Comment Regarding Requiremam: fur Deposit.
`of Biological Material
`
`5. 1:] Notice of lnformal Patent Appiication
`
`6. [:3 interview Summary (PTO-413),
`Paper No./Mali Date
`.
`7'. E] Examiner‘s Amendment/Comment
`
`8. E Examiner's Siatamant of Reasons for Aliowance
`
`9. E3 {Ether
`
`.
`
`/Jack L a"é’”r"man/
`Primary Exarninezf, Art Unit 288?
`
`4.3.8. Patent am: Tracfiexmatk Cxffxce
`PTOL437 (Rev. 08~0f3)
`
`Wctice at Ailowabiiity
`
`'
`
`Saar: of Paper N»<2,1Mail flare 200808i4A
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`ASML 1305
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`

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`A_p;)ii'catiohiCcntrai‘ Numbar: 1’ii3'95,523
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`Page 2
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`Art Unit; 12881
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`DETA1LEi‘3 ACT’¥C)N
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`'i_. Preliminary amendment filed on November 6, 2006 and adciiiicmoi‘ new ciaims
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`75 to 81 is noted.
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`Aliawabie Subject Matter
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`2. Claims; 1, 30, 37, 67, 74, 7’5 and ‘F8 are aiiczsweci.
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`3. The following is an examiherks staiement of reasgns for alleiwanéez
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`Prior art fails to oiisciose a lighi source or iight bulb or {:3 methcd of producing
`
`light, comprising: a chamber; an ignition source for iohizing a gas within the
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`chamber; and at least one laser for providing energy to the ionized gas within the
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`chamhar to pmciuce a high brightness light,
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`V High tirighiriess iight sourcea have severai applications particulariy in the fieicis of
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`lithagraphy and wafer inspection. In the instant appiicaiion, ihe ignition source is
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`a eaihode and ariocie which generate: an eleciricai discharge and provide ionized
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`gas or piasma. lliixrirzg €)§)€i‘8'fi{)l”¥,
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`the cathode and anode can get very hat and
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`can wear out and ‘emit pariicles that contaminate the light seurce and reduce the
`
`efficiency ‘of the light sciurce. To overcomeiihiaa laser which iorovides energy to
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`sustain the pizasma or ionized gas is included. The temperature in the plasma
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`rises due to heating by the iaser beam and these high temperraturezs lead to
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`

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`Apgiicaition/Central Number; 11l395,523
`
`V
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`Page 3
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`Ari Unit: 2881
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`increamd radiation at the shatter w;aveiength3 such as in the ultraviolet.
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`Prior art by Hoshino at al. (US 12-805/0167618 A1) disclose a light source which
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`has a laser that generates a plaéma by facusing the laser beam onto a target
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`mate-riai that injected dciwnward through a muzzle. in the instant applicatian the
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`plasma is ;3{OCli.lCeC§ by an e»le€:tric:al dischargé but maintained by a laser and
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`dues not have the debris problem cm‘ laser produced plasma (LPP) sourcss.
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`Pricir art by Sate (JP 61 393358 A) discioses 3 light Qoursze where a laser beam
`
`excites gas (for emitting UV and FUV iigiit) that is seaiad in a bulb tube’ but fails
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`to fliissciose an ignition ‘source that genezates the gaiasma and a ia$e.r beam to
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`maintain the plasma .33 in the instant appiication, which results in 3 more
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`powerful iight source.
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`A9-piication 1 *3/695,348 (U8 2007/0228300 A1) has been checked far double
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`patenting iasues.
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`4. Claims 2 to 29, 31 to 36, 38 to 66, 68 in 73, 76 £077 and 7'9 to 81 are allowed
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`by virtue of ’t;he.ir dependencies on claims 1,30, 3?‘, 6?, 7'5 and 778.
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`

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`Appiicatiun/Central Number: ’I1lf395,523
`Ari Unit: 2881
`
`Page 4
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`Cenclusfiitm
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`Any comments considered necessary by applicant must be submitted no
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`iater than the payment cf the issue‘ fee and, ‘to avoid processing deiays, should
`
`prefevrabty acmmgyany the issue fee. Sucnsubmissions an-ouid be cieariy iabeied
`
`“Comments on Statement of Reasons for Allowance.”
`
`Any inquiry concerning {his communication or earner communications fnam
`
`the examinar zzhouid be directed to MEEENAKSHJ 8. SAHU whose teiephone
`numberis (571)270~31Gi. The examiner can nermally be reached on Monday ~
`
`Fn'day>8AM ~ 5PM es‘;
`
`If attempts to reach the examiner by teiephane are: unsuccessful, the
`
`examinafs supervnisor, Rczb-er: H. Kim can be reached on 57"i~«272-2293. The faxi
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`phone number for the organizaticn where this apnpiication or proceeding is
`
`ass.igneci_ is 571~273~8300.
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`

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`Appiicatsonxcontrcst Number: w395,52a
`Art Unit: 288’!
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`-
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`Page 5
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`informéitien ‘regarding the status ofian-application may be obtained from
`
`the Patent Appiioation information Retrieval (PAIR) system. Status information
`
`for published applications may be obtained fmm either Private PAIR or Public
`
`P/\iR. Status infc:>:*matic3n for unpubi~ishe<:i applications is availabie iihrough
`
`Private PAIR oniy. For more inicsrmaiion aboui the PAM system, see htt;:>:I/pair~
`
`direct.u.spio‘,gQv. Shouici yam have questiom an access to me Private PAIR
`
`aystem, ccintact the Electroriic Eusiness Carrier ($80) at 866~217—9197 (ton-
`
`iree). if you wouici ‘iike assistamcei from a USPTO Customer Service
`
`Representative 0r ,as3»::.ess to the automated infarmatéan system, can 800~786~
`
`9399. ON USA DR QANADA) or 571-272—“i 000.
`
`/Jack 1». aermanl
`.
`Primary Examiner, Art Unit 2881
`
`/Meenakshi 8 Sam!
`
`EX3lTii{18i‘,/~\I'f Unit 2881