EQEQ--10M10M
`
`Soft XSoft X--RayRay
`& EUV Source
`& EUV Source
`Electrodeless Z-Pinch™
`10 Watt EUV Source
`Product Description
`Researchers into the emerging technology of EUV lithography
`need a source of EUV photons for a variety of applications. Existing
`sources of light are often too low in power, unreliable in operation,
`large, costly and complex. Soft x-rays (SXR) for water-window mi-
`croscopy are not readily available today outside synchrotron facili-
`ties.
`The EQ-10M is a compact, easy-to-use, reliable and cost-
`effective EUV and SXR light source system, based on Energetiq’s
`unique Electrodeless Z-pinch™ technology using either Xenon or
`Nitrogen gas.
`The Energetiq EQ-10M is integrated into a single 19” rack
`format to minimize the system footprint. The system includes the
`electrodeless Z-pinch source assembly, vacuum and gas sub-
`systems, power delivery subsystem and control electronics. The
`EQ-10M is capable of delivering up to 10 watts of in-band EUV into
`2pi steradians and will run continuously at pulse repetition rates of
`up to 1kHz or in bursts of up to 1kHz pulses if required.
`To accommodate the differing requirements of the various
`applications, the source operating conditions are user-adjustable.
`The light output can be optimized for peak power or for peak
`brightness as required by the user. Plasma size is typically below
`1mm in diameter under typical operating conditions.
`A simple and flexible optical interface is provided to the user on
`the side of the system enclosure to connect to the application
`equipment. Custom interfaces are available to meet specific
`customer requirements.
`The user interface operates by a color touch screen display,
`and incorporates menus allowing manual and automatic operation.
`The EQ-10M is easy to install, requiring only electrical power, a
`chilled water supply, clean dry compressed air and a supply of
`Xenon or Nitrogen.
`
`Features & Benefits
`• Unique electrodeless design
`– Low debris / low consumable cost
`• Up to 10W EUV into 2pi using Xenon
`– Sufficient power for a wide variety
`of applications
`
`•
`
`2-4nm Soft X-Rays produced using
`Nitrogen
`– Enables tabletop SXR microscope
`applications
`• Small plasma size
`– <1mm diameter for high brightness
`• Cost–effective and compact
`– Low cost per EUV & SXR watt
`– Small footprint
`
`
`Applications
`• EUV Metrology
`• EUV Resist Development
`• Defect Inspection
`• EUV & Soft X-Ray Microscopy
`
`Electrodeless Z-Pinch Source —
`View of visible light
`
`ASML 1311
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`

`
`Electrodeless Z-Pinch™ Technology
`Z-pinch plasmas have been
`Energetiq’s unique technology is
`shown in literature to be effective
`also based on a Z-pinch plasma,
`at producing EUV and SXR light.
`but it avoids electrodes entirely by
`However, all the implementations
`inductively coupling the current
`to-date have involved conducting
`into the plasma. The plasma in
`high discharge currents into the
`the Energetiq source is magneti-
`plasma using electrodes. These
`cally confined away from the
`electrodes, which are typically in
`source walls, minimizing the heat
`contact with high temperature
`load and reducing debris.
`plasma, can melt and produce
`significant debris.
`
`About Energetiq . . .
`Energetiq Technology, Inc. is a developer and
`manufacturer of advanced short wavelength light
`products for use in high technology applications.
`The Energetiq team combines its deep understand-
`ing of high power plasma physics needed for short
`wavelength
`light generation with
`its
`long
`experience in building rugged, industrial and scien-
`tific products. The result is that users can expect
`the highest levels of performance combined with
`the highest reliability.
`
`Specifications
`
`EUV Specifications
`• EUV Power Output
`
`
`
`
`• SXR Power Output
`(Preliminary Data)
`• Pulse Repetition Rate
`Physical Specifications
`• System Dimensions
`
`
`
`
`• Weight
`Utility Requirements
`• Electrical
`• Water
`
`
`
`
`Up to 10 Watts into 2pi
`steradians in-band
`(13.5nm, 2% bandwidth)
`
`Up to 1016 Photons/Second
`into 2pi steradians (2.88nm)
`
`Variable, up to 1kHz
`
`
`
`600mm (W)
`900mm (D)
`1100mm (H)
`
`
`
`
`
`250 kg
`
`
`
`
`208V 3-phase 30A
`
`8 liters/minute
`
`Ordering Information
`Contact Energetiq for a detailed quotation for your application.
`
`EQ-10M
`
`Specifications are subject to change
`without notice.
`
`DS 004—8/05
`©2005 Energetiq Technology, Inc.
`All rights reserved.
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