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`3(6) 003-3176/75 (P2003-—31'7675A>
`
`{5}
`
`(61
`
`U217}
`
`
`

`
`Translation of JP2003—317675 A
`
`(19) Japan Patent
`Office (JP)
`
`(12) Japanese Patent
`Publication (A)
`
`(51) |nt.C|.7
`H01J 65/06
`
`ID Symbol
`
`Fl
`HOJ 65/06
`
`(11) Japan Patent
`Publication Number
`JPZOOB317675
`
`(43) Date of Publication:
`November 7, 2003
`
`Theme Code (Reference)
`
`Request for Examination: Unrequested
`
`Number of Claims: 8 0L (6 pages in total)
`
`(71)App|icant: 000102212
`USHIO INC.
`
`Floor,
`19"‘
`2-6-1
`Building,
`Chiyoda-ku, Tokyo
`
`Asahi—Tokai
`Otemachi,
`
`(72) inventor: Mitsuru lkeuchi
`c/o USHIO INC.
`
`
`
`(21)App|ication No.: JP2002—125712
`
`(22) Date of Filing: April 26, 2002
`
`
`
`1194, Sazuchi, Bessho—cho,
`Himeji, Hyogo
`
`(74) Agent: 100106862
`Tsutomu lsohata
`
`
`
`Patent Attorney
`
`(54) [Title of the Invention] LIGHT RADIATION APPARATUS
`
`(57) [Abstract]
`
`[Object] To achieve a continuous high-power point light source of ultraviolet light
`and visible light regardless of the electrodes’ lifetime.
`
`[Solving Means] A light radiation apparatus is provided in which: electromagnetic
`
`radiation with a wavelength of 0.1 mm-10 mm is temporarily diverged and then
`
`converged; plasma is generated from a gas that is present near a convergent
`
`point of such electromagnetic radiation so as to cause light to be emitted; and
`
`the emitted light is collected using reflecting mirrors.
`
`

`
`Translation of JP2003—317675 A
`
`[Claims]
`
`1.
`
`A light radiation apparatus wherein: electromagnetic radiation with a
`
`wavelength of 0.1 mm-10 mm is temporarily diverged and then converged;
`
`plasma is generated from a gas that is present near a convergent point of the
`
`electromagnetic radiation so as to cause light to be emitted; and the emitted light
`
`is collected using a reflecting mirror.
`
`2.
`
`The light radiation apparatus according to claim 1, wherein the gas for
`
`light emission comprises a noble gas as its main constituent.
`
`The light radiation‘ apparatus according to claim 1 or 2, wherein the gas
`3.
`for light emission is supplied so as to provide a flow thereof around a focal
`
`position of converging electromagnetic radiation.
`
`4.
`
`The light radiation apparatus according to claim 1 or 2, wherein the gas
`
`for light emission is sealed in an airtight container through which converging
`
`electromagnetic radiation andradiation pass.
`
`5.
`
`The light radiation apparatus according to claim 4, wherein the gas for
`
`light emission contains any of: a metal selected from among mercury, zinc and
`
`indium; metallic halide; and sulfur.
`
`6.
`
`The light radiation apparatus according to any of claims 1 to 5, wherein
`
`an electromagnetic radiation absorber is provided on a side opposite to an
`
`electromagnetic—radiation introduction side with respectto a convergent position
`of electromagnetic radiation.
`-
`
`7.
`
`The light radiation apparatus according to any of claims 1 to 5, wherein
`
`an electromagnetic radiation reflector is provided on a side opposite to an
`
`electromagnetic-radiation introduction side with respect to a convergent position
`
`of electromagnetic radiation.
`
`8.
`
`The light radiation apparatus according to any of claims 1 to 7, wherein a
`
`startup auxi|iary—antenna is provided around an area in which electromagnetic
`radiation is converged and in which a gas discharge is performed near a focal
`position of the electromagnetic radiation.
`
`[Detailed Description ofgthe invention]
`
`[0001]
`
`[Technical Field to which the invention Belongs]
`
`The present invention relates to a point radiation source of visible radiation
`
`and ultraviolet radiation, and particularly relates to a high—power point radiation
`' source of ultraviolet ‘radiation.
`
`

`
`Translation of JP2003—317675 A
`
`[0002]
`
`[Prior Art}
`
`in the field of electronics industry involving semiconductors and liquid
`
`_crystals, ultraviolet exposure is performed so as to carry out an exposure to
`transfer a minute circuit pattern to a semiconductor substrate or liquid crystal
`
`substrate, and an ultraviolet light source having a point light source is "used as a
`
`light source apparatus for such exposure.
`
`In recent years, there have been
`
`increasing market demands for increased exposure area size and for increased
`
`throughput of production lines. Under present circumstances, a mercury lamp
`
`utilizing light emission from mercury vapor is used as a large-area exposure
`
`ultraviolet light source. Such mercury lamp is a discharge lamp in which a pair
`
`of high-melting—point metal electrodes is arranged in a quartz glass bulb, and in
`
`which not less than several mg to several tens of mg/cc of mercury and, as a
`
`buffer gas, a noble gas such as argon, are sealed in such bulb. However, such
`lamp includes electrodes, and thus, the power limit is considered to be .10 kW.
`
`This is because an anode electrode from among the above electrodes is heated
`
`and evaporated, leading to a reduction of radiated light due to blackening of the
`
`inside of the bulb and to melting of electrodes, whereby it becomes impossible
`
`for a discharge itself to be maintained.
`
`[0003]
`
`Further, plasma emission through the use of a laser has been considered.
`
`However, such plasma emission involves low |aser~energy conversion efficiency
`
`and has not been put into practical use. Further, a light source of microwave
`
`excitation such as an electrodeless lamp has been discussed but the situation is
`
`such that it is difficult to achieve a point light source using the above light source
`
`of microwave excitation. The reasons for this are that a microwave has a long
`
`wavelength of 1 cm or more and thus cannot be concentrated to around its
`
`wavelength or less and point plasma cannot be produced from microwaves.
`[0004]
`
`A point light source of visible light has also been desired to provide increased
`
`power.
`
`For the purpose of. weathering tests, a xenon lamp is currently being
`
`used for applications involving fibers and solar-cell large-area uniform radiation.
`
`However, such increased power remains at the level of 7 kW. As to high-power
`
`visible light sources,
`
`there is a light emitting source named a “vortex arc”;
`
`however, such light emitting source has disadvantages in that it frequently
`
`requires electrode replacement and involves troublesome maintenance.
`
`

`
`Translation of JP2003—317675 A
`
`[0005]
`
`Recently, regarding millimeter/submillimeter wave generation apparatuses,
`
`the millimeter/submillimeter wave conversion efficiency with respect to input
`
`power
`
`has
`
`seen
`
`remarkable
`
`improvements.
`
`For
`
`example,
`
`millimeter/submillimeter wave generation apparatus named “gyrotron”
`
`a
`
`is
`
`attracting attention as an apparatus whose conversion efficiency with respect to
`
`input power reaches 50%. An example of a gyrotron is shown in, for example,
`
`Oyo Buturi, Vol. 70, No. 3, 2001, pp. 322-326. The above reference describes
`
`the basic configuration and operation principle thereof.
`
`As opposed to
`
`microwaves, millimeter/submillimeter waves do not require a waveguide and can
`
`propagate electric power through the air. The inventor has reached the present
`
`invention as a
`
`result of
`
`intensive studies on the application of such
`
`millimeter/submillimeter wave generation apparatus to a point radiation source.
`
`[0006]
`
`[Problem to be Solved by the invention]
`
`In order to achieve the above-mentioned large—area exposure, it is desired to
`
`have an ultraviolet light source which has power of 15 kW or more and which is
`
`adapted to provide a point light source size of approximately 10 mm.
`
`Further, it
`
`is desired to have a high-power visible light source with power of 20 kW or more
`
`for light-resistance test applications.
`
`In view of this, an object of the present
`
`invention is to achieve a point
`
`light source that
`
`is capable of performing
`
`continuous high-power optical radiation regardless of the electrodes’ lifetime.
`
`[0007]
`
`[Means for Solving the Problem]
`
`In order to attain the above object,
`
`the invention according to claim 1
`
`provides a light radiation apparatus wherein: electromagnetic radiation with a
`
`wavelength of 0.1 mm—10 mm is temporarily diverged and then converged;
`
`plasma is generated from a gas that is present near a convergent point of the
`
`electromagnetic radiation so as to cause light to be emitted; and the emitted light
`is collected using a reflecting mirror.
`
`[0008]
`
`The invention according to claim 2 provides the light radiation apparatus
`
`according to claim 1, wherein the gas for light emission comprises a noble gas
`as its main constituent.
`
`[0009]
`
`The invention according to claim 3 provides the light radiation apparatus
`
`-10-
`
`

`
`'Han§afionofJP2003817675A
`
`according to claim 1 or 2, wherein the gas for light emission is supplied so as to
`
`provide a flow thereofaround a focal position of converging electromagnetic
`radiation.
`
`[0010]
`
`The invention according to claim 4 provides the light radiation apparatus‘
`
`according to claim 1 or 2, wherein the gas for light emission is sealed in an
`
`airtight container through which converging electromagnetic radiation and
`
`radiation pass.
`
`[0011]
`
`‘
`
`The invention according to claim 5 provides the light radiation apparatus
`
`according to claim 4, wherein the gas for light emission contains any of: a metal
`
`selected from among mercury, zinc and indium; metallic halide; and sulfur.
`
`[0012]
`
`The invention according to claim 6 provides the light radiation apparatus
`
`according to any of claims 1 to 5, wherein an electromagnetic radiation absorber
`
`is provided on a side opposite to an electromagnetic-radiation introduction ‘side
`
`with respect to a convergent position of electromagnetic radiation.
`
`[0013]
`
`V
`
`The invention according to claim 7 provides the light radiation apparatus
`
`according to any of claims 1 to 5, wherein an electromagnetic radiation reflector
`
`is provided on a side opposite to an electromagnetic-radiation introduction side
`
`with respect to a convergent position of electromagnetic radiation.
`
`‘[0014]
`The invention according to claim 8 provides the light radiationlapparatus
`’ according to any of claims 1 to 7, wherein a startup auxiliary-antenna is provided
`
`around an area in which electromagnetic radiation is converged and in which a
`
`gas discharge is performed near a focal position of the electromagnetic
`radiation.
`1
`
`[0015]
`
`[Effects]
`
`According
`
`to
`
`the
`
`configuration
`
`of
`
`the
`
`present
`
`invention,
`
`millimeter/submillimeter waves which achieve a conversion efficiency of 50% or
`
`more with respect
`
`to an input power are temporarily diverged and then
`
`converged; plasma is generated from the millimeter/submillimeter waves at a
`
`focal position of such millimeter/submillimeter waves so as to cause light to be
`emitted, resulting in a point radiation source. Reflecting mirrors are provided so
`
`-11-
`
`

`
`Translation of JP2003—317675 A
`
`as to concentrate light from plasma on a small window part, whereby incident
`
`electromagnetic radiation can be prevented from leaking due to scattering.
`
`[0016]
`
`When a gas for light emission comprises a noble gas as its main constituent,
`
`it becomes easy to make a startup because the noble gas enables light emission
`
`to be started with low incident electromagnetic radiation energy.
`
`[0017]
`
`.
`
`Further, when a gas for light emission comprises not only a noble gas but
`
`also another radiation species, radiation having a wavelength suitable for the
`
`application concerned can be obtained. Gas is contained in an airtight
`
`container, thereby being capable of causing light emission at high pressure,
`leading to increased radiation power.
`
`[0018]
`
`Providing a flow of gas makes it easy to generate plasma from such gas
`
`compared with the case in which plasma is generated from the surrounding air,
`
`and thus a limited light emitting area can be provided.
`
`Further, because no
`
`container is used, there is no restraint on the temperature of the surroundings of
`
`the light emitting part.
`
`[0019]
`
`An electromagnetic radiation absorber is provided on a side opposite to an
`
`electromagnetic-radiation introduction side with respect to a convergent position
`
`of electromagnetic radiation, whereby electromagnetic radiation can be
`
`prevented from leaking to the outside of a radiation apparatus until light emission
`is started.
`V
`
`[0020]
`
`An electromagnetic radiation reflector is provided on a side opposite to an
`electromagnetic-radiation introduction side with respect to a convergent position
`
`of electromagnetic radiation, whereby electromagnetic radiation is returned to
`
`the input side, standing waves are formed, and the electric field intensity at the
`
`focal position is increased, which makes it easier for plasma to be generated,
`
`leading to light emission.
`
`[0021]
`
`Startup auxiliary-means is provided, whereby a wide discharge~start power
`
`range can be achieved.
`
`[0022]
`
`[Embodiments of the invention]
`
`-12-
`
`

`
`Translation of JP2003-317675 A
`
`Embodiments of a light radiation apparatus of the present invention will now
`
`be described with reference to the figures,
`
`Fig. 1 shows a first embodiment, in
`
`which: beam-shaped submiilimeter waves with a power of 384 GHz and 10 kW
`
`are introduced from a millimeter/submiilimeter wave generation source 1 into a
`
`metal casing 100; an electromagnetic radiation diverging reflecting-mirror 2
`
`made of high-conductivity metal temporarily diverges such submiilimeter waves;
`
`and an electromagnetic radiation converging reflecting—mirror 3 converges such
`
`submiilimeter waves at a short focal point and at a solid angle (91) of 0.6
`steradian.
`
`[002-3]
`
`A convergent point s is located at the center of a glass container 10 made of,
`
`for example, quartz glass, and argon Ar at approximately 10 kPa and 20 mg/cc
`
`of mercury Hg are sealed in the glass container 10 with a wall thickness of 3.5
`
`mm and an outer diameter of 100 mm. The light source size is approximately
`
`10 mm. Although not shown in the figure, the glass container 10 is forcibly
`
`subjected to air cooling before use.
`[0024]
`'
`
`, The glass container 10 is supported by a glass supporting rod 15.
`
`it should
`
`be noted that, in the figures of the present application, the supporting members
`
`for
`
`supporting members
`
`(e.g.,
`
`the
`
`electromagnetic
`
`radiation
`
`diverging
`
`reflecting—mirror 2) other than the glass container 10 are omitted for the sake of
`convenience.
`
`[0025]
`
`An electromagnetic radiation absorber 11 is provided on the side opposite to
`
`the electromagnetic-radiation introduction side with respect to the convergent
`
`point s of electromagnetic radiation, whereby electromagnetic radiation can be
`
`light
`prevented from leaking to the outside of the radiation apparatus until
`emission is started. The electromagnetic radiation absorber 11 comprises, for
`
`example, carbon black and absorbs submiilimeter waves until the step in which
`
`plasma is generated at the convergent point s. The electromagnetic radiation
`absorber 11 may comprise a cooling mechanism (not shown).
`
`[0026]
`
`Emitted light is reflected by a collector reflecting-mirror 4 and then reaches a
`window part 6 of a casing 5. Such light passes through a window member 7
`
`made of, for example, pure quartz glass and is radiated to the outside of the light
`
`radiation apparatus 100. Besides pure quartz glass, the window member 7
`
`-13-
`
`

`
`Translation of JP2003-317675 As
`
`may also be made of a material in which quartz glass is doped with 20 ppm of
`
`TiO2 with the aim of absorbing millimeter/submillimeter waves. The window
`
`member 7 may also be a water cell.
`
`[0027]
`
`_
`
`Regarding light emission, light emission equal to that of a conventional super
`
`ultra-high pressure mercury lamp and which is strong in a short wave range is
`
`provided.
`
`[0028]
`
`invention in which:
`Fig. 2 shows a second embodiment of the present
`millimeter waves of 170 GHz
`and 30 kW are
`introduced from the
`
`millimeter/submillimeter wave generation source 1 into the metal casing 100; the
`electromagnetic radiation diverging reflecting-mirror 2 made‘ of high-conductivity
`metal
`temporarily diverges such millimeter waves; and the electromagnetic
`radiation converging reflecting—mirror 3 converges such millimeter waves at a
`
`short focal point and at a solid angle (02) of 0.24 steradian. The convergent
`
`point s is located at the center of the glass container 10, and xenon Xe is sealed
`in the glass container 10 at a sealing pressure of approximately 1 MPa.
`
`[0029]
`
`The glass container 10 has a wall thickness of 3 mm and an outer diameter
`
`of 70 mm. An electromagnetic radiation reflector 12 is provided on the side
`
`opposite to the electromagnetic-radiation introduction side with respect to the
`
`convergent point s of electromagnetic radiation, whereby electromagnetic
`
`radiation is returned to the input side, standing waves are formed, and the
`
`electric field intensity at the convergent point s is increased, which makes it
`
`easier for plasma to be generated, leading to light emission.
`[0030]
`
`in this embodiment, where electromagnetic radiation is returned, by the
`
`electromagnetic radiation reflector 12, to the input side, a circulator, etc., (not
`
`shown) is used to change the travelling direction of the electromagnetic radiation
`
`so
`
`that
`
`such
`
`electromagnetic
`
`radiation
`
`is
`
`not
`
`returned
`
`to
`
`the
`
`millimeter/submillimeter wave generation source 1.
`
`[0031]
`
`leading to light
`Once plasma is generated, xenon atoms are excited,
`emission. The light source size that will appear is approximately 8 mm. The
`light wavelength comprises a continuous spectrum that provides coverage from
`an ultraviolet range to a visible range.
`1
`
`-14..
`
`

`
`Translation of JP2003-317675 A
`
`[0032]
`
`As to the noble gas to be sealed in the glass container 10, helium He, neon
`
`Ne, argon Ar and krypton Kr may be selected, besides xenon. Further, metals,
`
`such as mercury Hg, zinc Zn and indium In, and light emitting species, such as
`
`metallic halide and sulfur 3, may also be added. Thus, radiation having a
`
`wavelength suitable for the application concerned can be obtained.
`
`The
`
`emission spectrum is substantially identical
`
`to the emission spectrum of a
`
`conventional discharge lamp.
`
`[0033]
`
`Fig. 3 shows a configuration of a light
`
`radiation apparatus as a third
`
`embodiment of the present invention.
`
`In this embodiment, an electromagnetic
`
`radiation diverging lens 41 and an electromagnetic radiation converging lens 42
`are respectively used in place of the electromagnetic radiation diverging
`reflecting—mirror 2 and the electromagnetic radiation converging reflecting-mirror
`
`3. The electromagnetic radiation diverging lens 41 is made of silicon nitride or
`
`crystal, etc., which absorbs less electromagnetic radiation and has a high b
`
`refractive index, and the electromagnetic radiation converging lens 42 is made of
`
`crystal, etc.
`
`[0034]
`Millimeter waves of 41 GHz ‘and 20 kW are introduced from the
`
`millimeter/submillimeter wave generation source 1 into the metal casing 100; the
`
`electromagnetic radiation diverging lens 41 temporarily diverges such millimeter
`waves; and the electromagnetic radiation converging lens 42 converges such
`millimeter waves at a short focal point and at a solid angle (63) of 0.2 steradian.
`
`As to the light emitting species that are sealed in the glass container 10, 23
`
`mg/cc of mercury Hg and argon Ar at 10 kPa are employed, substantially the
`
`same as in the first embodiment. The light source size is approximately 10 mm,
`
`and the light emission is equal to that of a conventional ultra-high pressure
`
`mercury lamp and is strong in a short wave range.
`
`[0035]
`
`Fig. 4 shows a configuration of a light radiation apparatus as a fourth
`
`embodiment of the present invention.
`in this embodiment, the electromagnetic
`radiation diverging reflecting—mirror 2, the electromagnetic radiation converging V
`
`reflecting-mirror 3 and the electromagnetic radiation converging lens 42 are
`combined. The difference from the first and second embodiments resides in
`
`the fact that, while the electromagnetic radiation converging reflecting—mirror 3 is
`
`-15..
`
`

`
`Translation of JP2003-317675 A
`
`made of aluminum in the first and second embodiments, the electromagnetic
`
`radiation converging reflecting-mirror 3 is made of gold-plated aluminum in the
`fourth embodiment.
`
`[0036]
`
`Millimeter waves of 41 GHZ and 20 kW are introduced from the
`
`millimeter/submillimeter wave generation source
`
`1;
`
`the
`
`electromagnetic
`
`diverging reflecting-mirror 2 temporarily diverges such millimeter waves; and the
`
`electromagnetic radiation converging lens 42 converges such millimeter waves
`
`at a short focal point. As to the light emitting species that are sealed in the
`
`glass container 10, 23 mg/cc of mercury Hg and argon Ar at 10 kPa are
`
`employed, substantially the same as in the first embodiment. The light source
`
`size is approximately 10 mm, and the light emission is equal
`
`to that of a
`
`conventional ultra-high pressure mercury lamp and is strong in a short wave
`
`range.
`
`[0037]
`
`The window part 6, through which light is -removed,
`
`is provided with a rod
`
`integrator 8.
`
`‘The use of the rod integrator permits the convergence of used
`
`light as well as permitting a shielding for preventing electromagnetic radiation
`
`from leaking to the outside of the light radiation apparatus 100.
`
`[0038]
`
`Fig. 5 shows a high~power
`
`type light
`
`radiation apparatus as a fifth
`
`embodiment of the present invention.
`
`In this embodiment, millimeter waves of
`
`170 GHZ and 100 kW are introduced from the millimeter/submillimeter wave
`
`generation source 1
`
`into the metal casing 100; the electromagnetic radiation
`
`diverging reflecting-mirror 2 made of high-conductivity metal
`
`temporarily
`
`diverges such millimeter waves; and- the electromagnetic radiation converging
`
`reflecting-mirror 3 converges such millimeter waves at a solid angle (05) of 0.24
`steradian.
`
`[0039]
`
`The glass container 10 is not provided, and in its place, a nozzle 20 blows
`
`argon Ar toward the convergent point s at a pressure of 3 atm and at a flow rate
`
`of 20 I/min. The light source size that will appear near the tip end of the nozzle
`
`20 is approximately 10 mm.
`
`The light emission comprises a continuous
`
`spectrum that provides coverage from an ultraviolet range to a visible range.
`
`By employing an arrangement, as shown in Fig. 6,
`
`in which a nozzle for
`
`delivering argon Ar is sandwich