`(PATENT)
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`PATENT TRIAL AND APPEAL BOARD
`
`Inter Panes Review of U.S. Patent No. 8,309.943
`Inter Par/es Review of U.S. Patent No. 7.435,982
`Inter Panes Review of U.S. Patent No. 7,786,455
`huerPartes Review ofU.S. PatentNo. 8,525,138
`Inter Panes Review of U.S. Patent No. 8.969,841
`Inter Panes Review of U.S. Patent No. 9,048.000
`
`Smith ci aL; Issued: Nov. 13. 2012
`Smith; Issued: Oct. 14, 2008
`Smith; Issued: Aug. 31, 2010
`Smith c/a?.; Issued: Sep. 3,2013
`Smith; Issued: Mar. 3. 2015
`Smith; Issued: June 2, 2015
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`P.O. Box 1450
`Alexandria. VA 223 13-1450
`
`Dear Sir/Madam:
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
`
`above captioned Inter Panes Reviews and transact alt business in the U.S. Patent and Trademark
`
`Office connected herewith:
`
`All practitioners at Customer Number 23483.
`
`Address all communications to:
`
`WILMER CUTLER PICKERING HALE AND DORR LLP
`60 State Street
`Boston, MA 02109
`(617) 526-6000
`
`Address all e-mails and telephone calls to lead and back-up counsel (each associated with
`
`the above Customer Number), listed below:
`
`
`
`Patent Nos.: 8,309,943; 7,435,982; 7,786,455;
`8,525,138; 8,969,841; and 9,048,000
`
`Docket No.: 0107945-00235
`
`Donald R. Steinberg (Lead Counsel, PlO Reg. No. 37,241)
`Don.Steinberg).wilrnerhale.com
`Direct: 617-526-6453
`
`WILMER CUTLER PICKERING HALE AND DORR LLP
`60 State Street
`Boston, MA 02109
`
`David L. Cavanaugh (Backup Counsel, PlO Reg. No. 36,476)
`David.Cavanaugh(iiwilmerhalc.com
`Direct: 202-663-6025
`
`Michael H. Smith (Backup Counsel, PTO Reg. No. 71,190)
`Michaell-l.Smith(thwilmerhale.com
`Direct: 202-663-6055
`
`WILMER CUTLER PICKERING HALE AND DORR LLP
`1875 Pennsylvania Aye, NW
`Washington, DC 20006
`
`For: ASML Netherlands
`
`Name:
`
`Title:
`
`iThn oan Hoe
`t4è]ksLcj4- an,( CkL[27’ CoLt sc e
`
`Dated:
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`2 flooa’hcn 2015
`
`7