Translation of JP2003-317675 A
`
`(19) Japan Patent
`Office (JP)
`
`(12) Japanese Patent
`Publication (A)
`
`(51) Int.Cl.7
`H01J 65/06
`
`ID Symbol
`
`FI
`H0J 65/06
`
`(11) Japan Patent
`Publication Number
`JP2003-317675
`(43) Date of Publication:
`November 7, 2003
`Theme Code (Reference)
`
`(22) Date of Filing: April 26, 2002
`
`(21) Application No.: JP2002-125712
`
`Request for Examination: Unrequested
`Number of Claims: 8 OL (6 pages in total)
`(71) Applicant: 000102212
`USHIO INC.
`19th
`Asahi-Tokai
`Floor,
`Building,
`2-6-1 Otemachi,
`Chiyoda-ku, Tokyo
`(72) Inventor: Mitsuru Ikeuchi
`c/o USHIO INC.
`1194, Sazuchi, Bessho-cho,
`Himeji, Hyogo
`(74) Agent: 100106862
`Tsutomu Isohata
`Patent Attorney
`(54) [Title of the Invention] LIGHT RADIATION APPARATUS
`
`(57) [Abstract]
`[Object] To achieve a continuous high-power point light source of ultraviolet light
`and visible light regardless of the electrodes’ lifetime.
`[Solving Means] A light radiation apparatus is provided in which: electromagnetic
`radiation with a wavelength of 0.1 mm-10 mm is temporarily diverged and then
`converged; plasma is generated from a gas that is present near a convergent
`point of such electromagnetic radiation so as to cause light to be emitted; and
`the emitted light is collected using reflecting mirrors.
`
`1
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`ASML 1105
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`

`
`Translation of JP2003-317675 A
`
`[Claims]
`1.
`A light radiation apparatus wherein: electromagnetic radiation with a
`wavelength of 0.1 mm-10 mm is temporarily diverged and then converged;
`plasma is generated from a gas that is present near a convergent point of the
`electromagnetic radiation so as to cause light to be emitted; and the emitted light
`is collected using a reflecting mirror.
`2.
`The light radiation apparatus according to claim 1, wherein the gas for
`light emission comprises a noble gas as its main constituent.
`3.
`The light radiation apparatus according to claim 1 or 2, wherein the gas
`for light emission is supplied so as to provide a flow thereof around a focal
`position of converging electromagnetic radiation.
`4.
`The light radiation apparatus according to claim 1 or 2, wherein the gas
`for light emission is sealed in an airtight container through which converging
`electromagnetic radiation and radiation pass.
`5.
`The light radiation apparatus according to claim 4, wherein the gas for
`light emission contains any of: a metal selected from among mercury, zinc and
`indium; metallic halide; and sulfur.
`6.
`The light radiation apparatus according to any of claims 1 to 5, wherein
`an electromagnetic radiation absorber is provided on a side opposite to an
`electromagnetic-radiation introduction side with respect to a convergent position
`of electromagnetic radiation.
`7.
`The light radiation apparatus according to any of claims 1 to 5, wherein
`an electromagnetic radiation reflector is provided on a side opposite to an
`electromagnetic-radiation introduction side with respect to a convergent position
`of electromagnetic radiation.
`8.
`The light radiation apparatus according to any of claims 1 to 7, wherein a
`startup auxiliary-antenna is provided around an area in which electromagnetic
`radiation is converged and in which a gas discharge is performed near a focal
`position of the electromagnetic radiation.
`
`[Detailed Description of the Invention]
`[0001]
`[Technical Field to which the Invention Belongs]
`The present invention relates to a point radiation source of visible radiation
`and ultraviolet radiation, and particularly relates to a high-power point radiation
`source of ultraviolet radiation.
`
`2
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`Translation of JP2003-317675 A
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`[0002]
`[Prior Art]
`In the field of electronics industry involving semiconductors and liquid
`crystals, ultraviolet exposure is performed so as to carry out an exposure to
`transfer a minute circuit pattern to a semiconductor substrate or liquid crystal
`substrate, and an ultraviolet light source having a point light source is used as a
`light source apparatus for such exposure. In recent years, there have been
`increasing market demands for increased exposure area size and for increased
`throughput of production lines. Under present circumstances, a mercury lamp
`utilizing light emission from mercury vapor is used as a large-area exposure
`ultraviolet light source. Such mercury lamp is a discharge lamp in which a pair
`of high-melting-point metal electrodes is arranged in a quartz glass bulb, and in
`which not less than several mg to several tens of mg/cc of mercury and, as a
`buffer gas, a noble gas such as argon, are sealed in such bulb. However, such
`lamp includes electrodes, and thus, the power limit is considered to be 10 kW.
`This is because an anode electrode from among the above electrodes is heated
`and evaporated, leading to a reduction of radiated light due to blackening of the
`inside of the bulb and to melting of electrodes, whereby it becomes impossible
`for a discharge itself to be maintained.
`[0003]
`Further, plasma emission through the use of a laser has been considered.
`However, such plasma emission involves low laser-energy conversion efficiency
`and has not been put into practical use. Further, a light source of microwave
`excitation such as an electrodeless lamp has been discussed but the situation is
`such that it is difficult to achieve a point light source using the above light source
`of microwave excitation. The reasons for this are that a microwave has a long
`wavelength of 1 cm or more and thus cannot be concentrated to around its
`wavelength or less and point plasma cannot be produced from microwaves.
`[0004]
`A point light source of visible light has also been desired to provide increased
`power. For the purpose of weathering tests, a xenon lamp is currently being
`used for applications involving fibers and solar-cell large-area uniform radiation.
`However, such increased power remains at the level of 7 kW. As to high-power
`visible light sources, there is a light emitting source named a “vortex arc”;
`however, such light emitting source has disadvantages in that it frequently
`requires electrode replacement and involves troublesome maintenance.
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`[0005]
`Recently, regarding millimeter/submillimeter wave generation apparatuses,
`the millimeter/submillimeter wave conversion efficiency with respect to input
`power
`has
`seen
`remarkable
`improvements.
` For
`example,
`a
`millimeter/submillimeter wave generation apparatus named “gyrotron”
`is
`attracting attention as an apparatus whose conversion efficiency with respect to
`input power reaches 50%. An example of a gyrotron is shown in, for example,
`Oyo Buturi, Vol. 70, No. 3, 2001, pp. 322-326. The above reference describes
`the basic configuration and operation principle thereof. As opposed to
`microwaves, millimeter/submillimeter waves do not require a waveguide and can
`propagate electric power through the air. The inventor has reached the present
`invention as a result of
`intensive studies on
`the application of such
`millimeter/submillimeter wave generation apparatus to a point radiation source.
`[0006]
`[Problem to be Solved by the Invention]
`In order to achieve the above-mentioned large-area exposure, it is desired to
`have an ultraviolet light source which has power of 15 kW or more and which is
`adapted to provide a point light source size of approximately 10 mm. Further, it
`is desired to have a high-power visible light source with power of 20 kW or more
`for light-resistance test applications. In view of this, an object of the present
`invention is to achieve a point light source that is capable of performing
`continuous high-power optical radiation regardless of the electrodes’ lifetime.
`[0007]
`[Means for Solving the Problem]
`In order to attain the above object, the invention according to claim 1
`provides a light radiation apparatus wherein: electromagnetic radiation with a
`wavelength of 0.1 mm-10 mm is temporarily diverged and then converged;
`plasma is generated from a gas that is present near a convergent point of the
`electromagnetic radiation so as to cause light to be emitted; and the emitted light
`is collected using a reflecting mirror.
`[0008]
`The invention according to claim 2 provides the light radiation apparatus
`according to claim 1, wherein the gas for light emission comprises a noble gas
`as its main constituent.
`[0009]
`The invention according to claim 3 provides the light radiation apparatus
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`Translation of JP2003-317675 A
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`according to claim 1 or 2, wherein the gas for light emission is supplied so as to
`provide a flow thereof around a focal position of converging electromagnetic
`radiation.
`[0010]
`The invention according to claim 4 provides the light radiation apparatus
`according to claim 1 or 2, wherein the gas for light emission is sealed in an
`airtight container through which converging electromagnetic radiation and
`radiation pass.
`[0011]
`The invention according to claim 5 provides the light radiation apparatus
`according to claim 4, wherein the gas for light emission contains any of: a metal
`selected from among mercury, zinc and indium; metallic halide; and sulfur.
`[0012]
`The invention according to claim 6 provides the light radiation apparatus
`according to any of claims 1 to 5, wherein an electromagnetic radiation absorber
`is provided on a side opposite to an electromagnetic-radiation introduction side
`with respect to a convergent position of electromagnetic radiation.
`[0013]
`The invention according to claim 7 provides the light radiation apparatus
`according to any of claims 1 to 5, wherein an electromagnetic radiation reflector
`is provided on a side opposite to an electromagnetic-radiation introduction side
`with respect to a convergent position of electromagnetic radiation.
`[0014]
`The invention according to claim 8 provides the light radiation apparatus
`according to any of claims 1 to 7, wherein a startup auxiliary-antenna is provided
`around an area in which electromagnetic radiation is converged and in which a
`gas discharge is performed near a focal position of the electromagnetic
`radiation.
`[0015]
`[Effects]
`invention,
`present
`the
`of
`configuration
`the
`to
`According
`millimeter/submillimeter waves which achieve a conversion efficiency of 50% or
`more with respect to an input power are temporarily diverged and then
`converged; plasma is generated from the millimeter/submillimeter waves at a
`focal position of such millimeter/submillimeter waves so as to cause light to be
`emitted, resulting in a point radiation source. Reflecting mirrors are provided so
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`Translation of JP2003-317675 A
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`as to concentrate light from plasma on a small window part, whereby incident
`electromagnetic radiation can be prevented from leaking due to scattering.
`[0016]
`When a gas for light emission comprises a noble gas as its main constituent,
`it becomes easy to make a startup because the noble gas enables light emission
`to be started with low incident electromagnetic radiation energy.
`[0017]
`Further, when a gas for light emission comprises not only a noble gas but
`also another radiation species, radiation having a wavelength suitable for the
`application concerned can be obtained. Gas is contained in an airtight
`container, thereby being capable of causing light emission at high pressure,
`leading to increased radiation power.
`[0018]
`Providing a flow of gas makes it easy to generate plasma from such gas
`compared with the case in which plasma is generated from the surrounding air,
`and thus a limited light emitting area can be provided. Further, because no
`container is used, there is no restraint on the temperature of the surroundings of
`the light emitting part.
`[0019]
`An electromagnetic radiation absorber is provided on a side opposite to an
`electromagnetic-radiation introduction side with respect to a convergent position
`of electromagnetic radiation, whereby electromagnetic radiation can be
`prevented from leaking to the outside of a radiation apparatus until light emission
`is started.
`[0020]
`An electromagnetic radiation reflector is provided on a side opposite to an
`electromagnetic-radiation introduction side with respect to a convergent position
`of electromagnetic radiation, whereby electromagnetic radiation is returned to
`the input side, standing waves are formed, and the electric field intensity at the
`focal position is increased, which makes it easier for plasma to be generated,
`leading to light emission.
`[0021]
`Startup auxiliary-means is provided, whereby a wide discharge-start power
`range can be achieved.
`[0022]
`[Embodiments of the Invention]
`
`6
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`Translation of JP2003-317675 A
`
`Embodiments of a light radiation apparatus of the present invention will now
`be described with reference to the figures. Fig. 1 shows a first embodiment, in
`which: beam-shaped submillimeter waves with a power of 384 GHz and 10 kW
`are introduced from a millimeter/submillimeter wave generation source 1 into a
`metal casing 100; an electromagnetic radiation diverging reflecting-mirror 2
`made of high-conductivity metal temporarily diverges such submillimeter waves;
`and an electromagnetic radiation converging reflecting-mirror 3 converges such
`submillimeter waves at a short focal point and at a solid angle (θ1) of 0.6
`steradian.
`[0023]
`A convergent point s is located at the center of a glass container 10 made of,
`for example, quartz glass, and argon Ar at approximately 10 kPa and 20 mg/cc
`of mercury Hg are sealed in the glass container 10 with a wall thickness of 3.5
`mm and an outer diameter of 100 mm. The light source size is approximately
`10 mm. Although not shown in the figure, the glass container 10 is forcibly
`subjected to air cooling before use.
`[0024]
`The glass container 10 is supported by a glass supporting rod 15. It should
`be noted that, in the figures of the present application, the supporting members
`for supporting members
`(e.g.,
`the electromagnetic
`radiation diverging
`reflecting-mirror 2) other than the glass container 10 are omitted for the sake of
`convenience.
`[0025]
`An electromagnetic radiation absorber 11 is provided on the side opposite to
`the electromagnetic-radiation introduction side with respect to the convergent
`point s of electromagnetic radiation, whereby electromagnetic radiation can be
`prevented from leaking to the outside of the radiation apparatus until light
`emission is started. The electromagnetic radiation absorber 11 comprises, for
`example, carbon black and absorbs submillimeter waves until the step in which
`plasma is generated at the convergent point s. The electromagnetic radiation
`absorber 11 may comprise a cooling mechanism (not shown).
`[0026]
`Emitted light is reflected by a collector reflecting-mirror 4 and then reaches a
`window part 6 of a casing 5. Such light passes through a window member 7
`made of, for example, pure quartz glass and is radiated to the outside of the light
`radiation apparatus 100. Besides pure quartz glass, the window member 7
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`Translation of JP2003-317675 A
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`may also be made of a material in which quartz glass is doped with 20 ppm of
`TiO2 with the aim of absorbing millimeter/submillimeter waves. The window
`member 7 may also be a water cell.
`[0027]
`Regarding light emission, light emission equal to that of a conventional super
`ultra-high pressure mercury lamp and which is strong in a short wave range is
`provided.
`[0028]
`Fig. 2 shows a second embodiment of the present invention in which:
`millimeter waves of 170 GHz and 30 kW are
`introduced
`from
`the
`millimeter/submillimeter wave generation source 1 into the metal casing 100; the
`electromagnetic radiation diverging reflecting-mirror 2 made of high-conductivity
`metal temporarily diverges such millimeter waves; and the electromagnetic
`radiation converging reflecting-mirror 3 converges such millimeter waves at a
`short focal point and at a solid angle (θ2) of 0.24 steradian. The convergent
`point s is located at the center of the glass container 10, and xenon Xe is sealed
`in the glass container 10 at a sealing pressure of approximately 1 MPa.
`[0029]
`The glass container 10 has a wall thickness of 3 mm and an outer diameter
`of 70 mm. An electromagnetic radiation reflector 12 is provided on the side
`opposite to the electromagnetic-radiation introduction side with respect to the
`convergent point s of electromagnetic radiation, whereby electromagnetic
`radiation is returned to the input side, standing waves are formed, and the
`electric field intensity at the convergent point s is increased, which makes it
`easier for plasma to be generated, leading to light emission.
`[0030]
`In this embodiment, where electromagnetic radiation is returned, by the
`electromagnetic radiation reflector 12, to the input side, a circulator, etc., (not
`shown) is used to change the travelling direction of the electromagnetic radiation
`so
`that
`such electromagnetic
`radiation
`is not
`returned
`to
`the
`millimeter/submillimeter wave generation source 1.
`[0031]
`Once plasma is generated, xenon atoms are excited, leading to light
`emission. The light source size that will appear is approximately 8 mm. The
`light wavelength comprises a continuous spectrum that provides coverage from
`an ultraviolet range to a visible range.
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`Translation of JP2003-317675 A
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`[0032]
`As to the noble gas to be sealed in the glass container 10, helium He, neon
`Ne, argon Ar and krypton Kr may be selected, besides xenon. Further, metals,
`such as mercury Hg, zinc Zn and indium In, and light emitting species, such as
`metallic halide and sulfur S, may also be added. Thus, radiation having a
`wavelength suitable for the application concerned can be obtained. The
`emission spectrum is substantially identical to the emission spectrum of a
`conventional discharge lamp.
`[0033]
`Fig. 3 shows a configuration of a light radiation apparatus as a third
`embodiment of the present invention. In this embodiment, an electromagnetic
`radiation diverging lens 41 and an electromagnetic radiation converging lens 42
`are respectively used in place of the electromagnetic radiation diverging
`reflecting-mirror 2 and the electromagnetic radiation converging reflecting-mirror
`3. The electromagnetic radiation diverging lens 41 is made of silicon nitride or
`crystal, etc., which absorbs less electromagnetic radiation and has a high
`refractive index, and the electromagnetic radiation converging lens 42 is made of
`crystal, etc.
`[0034]
`the
`from
`introduced
`Millimeter waves of 41 GHz and 20 kW are
`millimeter/submillimeter wave generation source 1 into the metal casing 100; the
`electromagnetic radiation diverging lens 41 temporarily diverges such millimeter
`waves; and the electromagnetic radiation converging lens 42 converges such
`millimeter waves at a short focal point and at a solid angle (θ3) of 0.2 steradian.
`As to the light emitting species that are sealed in the glass container 10, 23
`mg/cc of mercury Hg and argon Ar at 10 kPa are employed, substantially the
`same as in the first embodiment. The light source size is approximately 10 mm,
`and the light emission is equal to that of a conventional ultra-high pressure
`mercury lamp and is strong in a short wave range.
`[0035]
`Fig. 4 shows a configuration of a light radiation apparatus as a fourth
`embodiment of the present invention. In this embodiment, the electromagnetic
`radiation diverging reflecting-mirror 2, the electromagnetic radiation converging
`reflecting-mirror 3 and the electromagnetic radiation converging lens 42 are
`combined. The difference from the first and second embodiments resides in
`the fact that, while the electromagnetic radiation converging reflecting-mirror 3 is
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`Translation of JP2003-317675 A
`
`made of aluminum in the first and second embodiments, the electromagnetic
`radiation converging reflecting-mirror 3 is made of gold-plated aluminum in the
`fourth embodiment.
`[0036]
`the
`from
`introduced
`Millimeter waves of 41 GHz and 20 kW are
`the electromagnetic
`millimeter/submillimeter wave generation source 1;
`diverging reflecting-mirror 2 temporarily diverges such millimeter waves; and the
`electromagnetic radiation converging lens 42 converges such millimeter waves
`at a short focal point. As to the light emitting species that are sealed in the
`glass container 10, 23 mg/cc of mercury Hg and argon Ar at 10 kPa are
`employed, substantially the same as in the first embodiment. The light source
`size is approximately 10 mm, and the light emission is equal to that of a
`conventional ultra-high pressure mercury lamp and is strong in a short wave
`range.
`[0037]
`The window part 6, through which light is removed, is provided with a rod
`integrator 8. The use of the rod integrator permits the convergence of used
`light as well as permitting a shielding for preventing electromagnetic radiation
`from leaking to the outside of the light radiation apparatus 100.
`[0038]
`Fig. 5 shows a high-power type light radiation apparatus as a fifth
`embodiment of the present invention. In this embodiment, millimeter waves of
`170 GHz and 100 kW are introduced from the millimeter/submillimeter wave
`generation source 1 into the metal casing 100; the electromagnetic radiation
`diverging reflecting-mirror 2 made of high-conductivity metal temporarily
`diverges such millimeter waves; and the electromagnetic radiation converging
`reflecting-mirror 3 converges such millimeter waves at a solid angle (θ5) of 0.24
`steradian.
`[0039]
`The glass container 10 is not provided, and in its place, a nozzle 20 blows
`argon Ar toward the convergent point s at a pressure of 3 atm and at a flow rate
`of 20 l/min. The light source size that will appear near the tip end of the nozzle
`20 is approximately 10 mm. The light emission comprises a continuous
`spectrum that provides coverage from an ultraviolet range to a visible range.
`By employing an arrangement, as shown in Fig. 6, in which a nozzle for
`delivering argon Ar is sandwiched by nozzles for delivering air, the light emitting
`
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`Translation of JP2003-317675 A
`
`area of plasma can be limited to a narrow area.
`[0040]
`Fig. 7 shows a sixth embodiment comprising a startup auxiliary-antenna 30.
`The startup auxiliary-antenna 30, except for a tip end part 30A thereof, is
`covered with an insulator 50. The startup auxiliary-antenna 30 is connected to
`a high voltage part 60. Since plasma is generated from electric power which is
`approximately 20% lower than that in the case of not providing a startup
`auxiliary-antenna, this makes it easy to start a discharge, and thus, the range of
`discharge start power can be expanded toward a lower level of power.
`[0041]
`Submillimeter waves of 384 GHz and 30 kW are introduced from the
`millimeter/submillimeter wave generation source 1; the electromagnetic radiation
`diverging reflecting-mirror 2 temporarily diverges such submillimeter waves; and
`the electromagnetic radiation converging reflecting-mirror 3 converges such
`submillimeter waves at a short focal point. As to the light emitting species that
`are sealed in the glass container 10, xenon Xe at 1 MPa is employed. The light
`source size that will appear is approximately 8 mm. The light wavelength
`comprises a continuous spectrum that provides coverage from an ultraviolet
`range to a visible range.
`[0042]
`Although the above descriptions of the present invention have been made
`using an example in which a gyrotron is used as a millimeter/submillimeter wave
`generation source, in addition to a gyrotron, a klystron, a vircator, etc., may be
`employed.
`[0043]
`[Effects of the Invention]
`According to the configuration of claim 1 of the present invention, it is
`possible to achieve a high-power point light source of UV light and visible light by
`way of the technique of converging millimeter/submillimeter waves and
`generating plasma from the millimeter/submillimeter waves at a focal position of
`such millimeter/submillimeter waves so as to cause light to be emitted, thereby
`obtaining a point radiation source. Reflecting mirrors are provided so as to
`concentrate light from plasma on a small window part, whereby incident
`electromagnetic radiation can be prevented from leaking due to scattering.
`[0044]
`According to, particularly, the invention of claim 2, where a gas for light
`
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`Translation of JP2003-317675 A
`
`emission comprises a noble gas as its main constituent, it becomes easy to
`make a startup because the noble gas enables light emission to be started with
`low incident electromagnetic radiation energy.
`[0045]
`Further, according to the invention of claim 3, providing a flow of gas makes it
`easy to generate plasma from such gas compared with the case in which plasma
`is generated from the surrounding air, and thus a limited light emitting area can
`be provided. Further, because no container is used, there is no restraint on the
`temperature of the surroundings of a light emitting part.
`[0046]
`According to the invention of claim 4, a gas is contained in an airtight
`container, thereby being capable of causing light emission at high pressure,
`leading to an increased radiation power.
`[0047]
`According to the invention of claim 5, a gas for light emission comprises not
`only a noble gas but also another radiation species, whereby radiation having a
`wavelength suitable for the application concerned can be obtained.
`[0048]
`According to the invention of claim 6, an electromagnetic radiation absorber
`is provided on a side opposite to an electromagnetic-radiation introduction side
`with respect to a convergent position of electromagnetic radiation, whereby
`electromagnetic radiation can be prevented from leaking to the outside of a
`radiation apparatus until light emission is started.
`[0049]
`According to the invention of claim 7, an electromagnetic radiation reflector is
`provided on a side opposite to an electromagnetic-radiation introduction side
`with respect to a convergent position of electromagnetic radiation, whereby
`electromagnetic radiation is returned to the input side, standing waves are
`formed, and the electric field intensity at the focal position is increased, which
`makes it easier for plasma to be generated, leading to light emission.
`[0050]
`According to the invention of claim 8, startup auxiliary-means is provided,
`whereby a wide discharge-start power range can be achieved.
`[Brief Description of the Drawings]
`
`[Fig. 1] Fig. 1 shows a first embodiment of a light radiation apparatus of
`the present invention.
`
`12
`
`
`
`

`
`Translation of JP2003-317675 A
`
`[Fig. 2] Fig. 2 shows a second embodiment of a light radiation apparatus
`
`of the present invention.
`
`[Fig. 3] Fig. 3 shows a third embodiment of a light radiation apparatus of
`the present invention.
`
`[Fig. 4] Fig. 4 shows a fourth embodiment of a light radiation apparatus
`of the present invention.
`
`[Fig. 5] Fig. 5 shows a fifth embodiment of a light radiation apparatus of
`the present invention.
`
`[Fig. 6] Fig. 6 shows an arrangement of a nozzle.
`
`[Fig. 7] Fig. 7 shows a sixth embodiment of a light radiation apparatus of
`the present invention.
`[Descriptions of Reference Numerals]
`1:
`millimeter/submillimeter wave generation source
`2:
`electromagnetic radiation diverging reflecting-mirror
`3:
`electromagnetic radiation converging reflecting-mirror
`4:
`collector reflecting-mirror
`5:
`casing
`6:
`window part
`7:
`window member
`8:
`rod integrator
`10:
`glass container
`11:
`electromagnetic radiation absorber
`12:
`electromagnetic radiation reflector
`15:
`glass supporting rod
`20:
`nozzle
`30:
`startup auxiliary-antenna
`30A:
`antenna tip-end part
`41:
`electromagnetic radiation diverging lens
`42:
`electromagnetic radiation converging lens
`50:
`insulator
`60:
`high voltage part
`100:
`light radiation apparatus
`s:
`convergent point
`
`13
`
`
`
`

`
`STATEMENT OF ACCURACY
`
`1, Hiroki Sato, c/o TMI ASSOCIATES of 23rd Floor, Roppongi Hills Mori Tower, 6-
`
`10-1, Roppongi, Minato—ku, Tokyo 106-6123, Japan, do solemnly and sincerely declare thatl
`
`well understand the Japanese and English languages and that the attached English version is
`
`full, true and faithful translation made by me this 9"‘ day of September 2014 of Japanese
`
`Patent Publication No. JP2003—3 1 7675A.
`
`In testimony whereof, I have hereunto set my name and seal this 9”‘ day of September
`
`2014.
`
`September 9, 2014
`
`
`
`
`
`14
`14
`
`

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