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`BEFORE THE PATENT TRIAL AND APPEAL BOARD
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`LAM RESEARCH CORP.,
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`Petitioner
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`V.
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`DANIEL L. FLAMM,
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`Patent Owner
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`U.S. Patent No. RE40,264 E
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`Issued: April 29, 2008
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`Named Inventor: Daniel L. Flarnm
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`Title: MULTI-TEMPERATURE PROCESSING
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`POWER OF ATTORNEY
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`Mail Stop: PATENT BOARD
`Patent Trial and Appeal Board
`US. Patent & Trademark Office
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`PO. Box 1450
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`Alexandria, VA 22313-1450
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`
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`Pursuant to 37 C.F.R. 42.10(b); Petitioner Lam Research Corp. hereby
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`appoints the practitioners associated with lrell & Manella‘s Customer No. 29000 as
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`its attorneys to transact all business in the United States Patent and Trademark
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`Office for the Inter Partes Review of U.S. Patent No. RE40,264 E. Lam Research
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`Corp. further appoints Michael R. Fleming as the lead counsel and Samuel K. Lu
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`as back up counsel, as Well as Morgan Chu (pro hac vice to be requested upon
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`authorization) and Talin Gordnia (pro hac vice to be requested upon authorization).
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`
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`
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`Michael R. Fleming (Reg. No. 67,933) Samuel K. Lu (Reg. No. 40,707)
`lrell & Manella LLP
`lrell & Manella LLP
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`1800 Avenue of the Stars, Suite 900
`Los Angeles, California 90067
`Tel: (310)277-1010
`Fax: (310) 203~7199
`mf1eming@ire1l.com
`
`1800 Avenue of the Stars, Suite 900
`Los Angeles, California 90067
`Tel: (310) 277-1010
`Fax: (310)203-7199
`slu@irel1.com
`
`Morgan Chu (pro hoc vice to be
`requested)
`lrell & Manella LLP
`
`1800 Avenue of the Stars, Suite 900
`Los Angeles, California 90067
`Tel: (310)277-1010
`Fax: (310)203-7199
`mchue@irell.com
`
`Talin Gordnia (pro hac vice to be
`requested)
`lrell & Manella LLP
`
`1800 Avenue of the Stars, Suite 900
`Los Angeles, California 90067
`
`1.
`
`
`
`Fax: (310) 203-7199
`
`tordnia v ireE1.cm
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`" ~ww~~Mw%
`%‘}‘el: (310) 277.19%
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`The individual signing beiow has §1€ authority to execute this document on
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`behaif of Lam Research Corp.
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`Dazed: August12,2{}15
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`L
`3)/1
`Eric B. ano sky
`Vice President, Intcilectuai Property
`Lam Research Corporation