`__________
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`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`__________
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`
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`LAM RESEARCH CORP.,
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`Petitioner
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`v.
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`DANIEL L. FLAMM,
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`Patent Owner
`___________
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`U.S. Patent No. 5,711,849
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`Issued: Jan. 27, 1998
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`Named Inventor: Daniel L. Flamm
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`Title: PROCESS OPTIMIZATION IN GAS PHASE DRY ETCHING
`___________
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`
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`POWER OF ATTORNEY
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`
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`Mail Stop: PATENT BOARD
`Patent Trial and Appeal Board
`U.S. Patent & Trademark Office
`P.O. Box 1450
`Alexandria, VA 22313-1450
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`Pursuant to 37 C.F.R. 42.10(b), Petitioner Lam Research Corp. hereby
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`appoints the practitioners associated with Irell & Manella's Customer No. 29000 as
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`its attorneys to transact all business in the United States Patent and Trademark
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`Office for the Inter Partes Review of U.S. Patent No. 5,711,849. Lam Research
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`Corp. further appoints Michael R. Fleming as the lead counsel, Samuel K. Lu and
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`Kamran Vakili as back up counsel, as well as Morgan Chu (pro hac vice to be
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`requested upon authorization) and Talin Gordnia (pro hac vice to be requested
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`upon authorization).
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`LEAD COUNSEL
`Michael R. Fleming (Reg. No. 67,933)
`Irell & Manella LLP
`1800 Avenue of the Stars, Suite 900
`Los Angeles, California 90067
`Tel: (310) 277-1010
`Fax: (310) 203-7199
`mfleming@irell.com
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`
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`BACK UP COUNSEL
`Samuel K. Lu (Reg. No. 40,707)
`Irell & Manella LLP
`1800 Avenue of the Stars, Suite 900
`Los Angeles, California 90067
`Tel: (310) 277-1010
`Fax: (310) 203-7199
`slu@irell.com
`
`Kamran Vakili (Reg. No. 64,825)
`Irell & Manella LLP
`840 Newport Center Drive, Suite 400
`Newport Beach, CA 92660
`Tel: (949) 760-5151
`Fax: (949) 760-5200
`kvakili@irell.com
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`- 1 -
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`BACKUP COUNSEL
`
`Morgan Chu (pro hac vice to be
`requested)
`Irell & Manella LLP
`
`1800 Avenue of the Stars, Suite 900
`
`Los Angeles, California 90067
`Tel: (310)277-1010
`Fax: (310) 203-7199
`mchu@irell.corn
`
`Talin Gordnia (pro hac vice to be
`requested)
`Irell & Manella LLP
`
`1800 Avenue of the Stars, Suite 900
`
`Los Angeles, California 90067
`Tel: (310) 277-1010
`Fax: (310) 203-7199
`tgordnia@irell.co1n
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`The individual signing below has the authority to execute this document on
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`behalf of Lam Research Corp.
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`U/
`Dated: January fl/_i__, 2016
`i
`l\
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`1/-
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`,-"”‘“\_/'//
`
`By:
`Eric B. Janofsky
`Vice President, Intellectual Property
`Lam Research Corporation