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`- "Address: »CGMM‘lSSiE]NERf0F’PATEN‘|'S‘AND TRADEMARKS
`Washington. D.C. 20231
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`FILING DATE
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`This is a communicationirom the examiner in charge of your application.
`COMMISSIONER OF PATENTS AND TRADEMARKS -
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`DATE MAILED:
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`III 4 / 1 7 /
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`E Tiiisappiication has been examined D Responsive to communication flied on
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`D This action is made tlnal. I‘.
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`month(s). -4 daysvfrom the date of this letter.
`3, 3
`A shortened statutory period tor response to this action is set to expire
`Failure to respond within the period ior response will cause the application to become abandoned. 35 U.S.C. 133
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`Mr! I THE FOLLOWING ATTACHMENTS) ARE PART OF THIS AC'11ON:
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`1. W Notice of Fieierenoes Cited by Examiner. PTO-892.
`3. D Notice of Art Cited by Applicant, PTO~1449.
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`5. CI Information on How to Effect Drawing Changes, PTO-1474..
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`2. W Notice of Draitsman‘s Patent Drawing Review. PTO-948.
`4. D Notloe oi lnionnal Patent-Application. PTO—152.
`6. U
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`Partli
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`SUIIIMAIIY Oi’-‘ACTION A
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`1. Claims
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`1 "' / 2-
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`2
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`are pendlngin the application.
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`are withdrawn irom consideration.
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`Of the above. claims.
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`have been cancelled.
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`2. El Claims
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`3. D Claims
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`1
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`are allowed.
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`4. W Claims ’
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`[ -‘ A 2 _
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`V
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`5. i:i‘Clalms
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`6-. U Claims
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`are rejected.
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`are oblected to.
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`A
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`are subject to restriction or election requirement.
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`7. [E This application has been filed with iniormal drawings under 37 C.F.Fi. 1.85 which are acceptable ior examination purposes.
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`8. D Formal drawings are required in response to this Office action.
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`. Under 37 C.F.R. 1.84 these drawings
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`9. CI The corrected or substitute drawings have been received on
`are El acceptable: Ci not acceptable (see explanation or Notice of Draitsman's Patent Drawing Fteview. PTO-948).
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`mg The proposed additional or substitute sheet(s) of drawings, tiled on
`examiner; El disapproved by the examiner (see explanation).
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`. has (have) been Dapproved by the
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`11. CI The proposed dravving correction, tiled
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`.'has been D approved; CI disapproved (see explanation).
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`12. U Acknowledgement is made of the claim for priority under 35 U.S.C. 119. The certiiled copy has Cl been received ..D not been received
`El been filed in parent application. serial no.
`-: filed on
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`13. I] Since this application apppears to be in condition for allowance except for formal matters. prosecution as to the merits is closed in
`accordance with the practice under Ex pane Quayle. 1935 C.D. 11; 453 O.G. 213.-
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`14. CI Other
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`INTEL1117‘
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`

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`Serial Number:
`Art Unit: 2503
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`08/561,951
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`Part III
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`DETAILED ACTION
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`Drawings
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`.This application has been filed with informal drawings which
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`are acceptable for examination purposes only.
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`Formal drawings
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`will be required when the application is allowed.
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`Field of Search
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`the Patent and
`This office action has been created under
`Trademark Office Semiconductor Technology Quality Assurance Pilot
`Program.
`It incorporates the examination quality standards set as
`a
`result of
`customer
`focus
`sessions with the
`semiconductor
`industry.
`The listing of the field of search to follow is one of
`these standards.
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`U.S. Class and subclass:
`257\382, 383, 387, 388
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`Other Documentation:
`foreign art of above subclasses
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`
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`Electronic data base(s): -
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`4/ll/96
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`4/11/96
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`Claim Rejections - 35 USC § 102
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`The following is a quotation of the appropriate paragraphs
`of 35 U.S.C. § 102 that form the basis for the rejections under
`this section made in this Office action:
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`A person shall be entitled to a patent unless --
`(a)
`the invention was known or used by others in this
`country, or patented or described in a printed publication
`in this or a foreign country, before the invention thereof
`by the applicant for a patent.
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`

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`Serial Number: O8/561,951
`Art Unit: 2503
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`-3-
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`the invention was patented or described in a printed
`(b)
`publication in this or a foreign country or in public use or
`on sale in this country, more than one year prior to the
`date of application for patent in the United States.
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`Claims l—l2 are rejected under 35 U.S.C.
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`§ 102(a) as being
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`anticipated by Kinoshita.
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`Kinoshita discloses a semiconductor device comprising:
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`a
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`silicon substrate (40), a diffusion region (46)
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`formed within
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`said substrate,
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`a polysilicon gate electrode (26)
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`formed on a top
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`surface of said substrate wherein said gate is adjacent to but
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`not
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`in contact with said diffusion region, an insulating layer
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`(38)
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`such as silicon oxide or silicon nitride formed over said
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`gate and said diffusion region wherein a contact hole (32)
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`is
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`formed in said insulating layer over said diffusion region, and a
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`conducting plug formed of tungsten fills said contact hole. Note
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`Kinoshita figure 5. Therefore, Kinoshita meets and anticipates
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`the claims.
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`Claims 1-12 are rejected under 35 U.S.C. § l02(b) as being
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`anticipated by Nishigoori.
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`Nishigoori discloses a semiconductor device comprising:
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`a
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`silicon substrate (1),
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`a diffusion region (7)
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`formed within said
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`substrate and adjacent a top surface of said substrate,
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`a
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`polysilicon gate electrode (4)
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`formed on said top surface of said
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`substrate wherein said gate is adjacent to and not
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`in contact
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`with said diffusion region, an insulating layer (8) deposited
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`over said substrate and covering at least a portion of said gate
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`

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`Serial Number: O8/561,951
`Art Unit: 2503
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`-4-
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`and said diffusion region wherein said insulating layer has a
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`contact hole (12) over said diffusion region, and a contact plug
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`(9)
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`formed of tungsten filling said Contact hole. Note
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`Nishigoori figure 3c. Therefore, Nishigoori meets and
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`anticipates the claims.
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`Conclusion
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`The prior art made of record and not relied upon is
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`considered pertinent to applicant's disclosure.
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`The references to Watanabe, Sato and Nishiyama are cited to
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`show semiconductor device structures similar to that of the
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`present invention.
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`Any inquiry concerning this communication or earlier
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`communications from the examiner should be directed to Valencia
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`Martin Wallace whose telephone number is (703) 308-4119.
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`The
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`examiner can normally be reached on Monday - Thursday from 8:00
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`a.m.
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`to 5:00 p.m.
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`If attempts to reach the examiner by telephone are
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`unsuccessful,
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`the examiner's supervisor, Sara Crane, can be
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`reached on (703) 308-4894.
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`The fax phone number for this Group
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`is (703) 308—7723.
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`

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`Serial Number: O8/561,951
`Art Unit: 2503
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`-5-
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`Any inquiry of a general nature or relating to the status of
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`this application or proceeding should be directed to the Group
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`receptionist whose telephone number is (703) 308-0956.
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`'L.9”V~r\A/0/'
`Wallace
`April 14, 1996
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` L LL,’ 46¢/ha
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