`with the United States Postal Service, with sufficient
`postage, as first class mail in an envelope addressed to:
`Assistant Commissioner for Patents
`Washington, DC. 20231
`on March 31, 2000
`Date of Deposit
`
`Paul E. Rauch, Ph.D.
`Name of applicant, assignee or
`esentative
`
`Signature
`March 3|, 2000
`Date of Signature
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`Our Case No. 10200112
`
`
`
`In re Application of:
`
`Nulty et al.
`
`_
`_
`__
`Filing Date: Filed herewith
`
`For METHOD FOR ELIMINATING
`LATERAL SPACER EROSION ON
`ENCLOSED CONTACT
`TOPOGRAPHIES DURING RF
`SPUTTER CLEANING
`
`Examiner
`
`Group Art Unit No.
`
`w./x./\/»/\/\z\J-/\/»I
`
`PRELIMINARY AMENDMENT
`
`Assistant Commissioner for Patents
`
`Washington, D.C. 20231
`
`Dear Sir:
`
`Prior to examinationon the merits, please amend the above-identified application
`as follows:
`
`INTEL 1014
`
`
`
`TITLE
`IN
`/
`Please replace the title with the following: --STRUCTURE HAVING REDUCED
`
`THE
`
`‘ LATERAL SPACER EROSION--.
`
`Please amend the claims as follows:
`
`IN THE CLAIMS
`
`Please cancel Claims 1-24, without prejudice to their further prosecution in a
`
`Divisional and/or Continuation application.
`
`Claims 25-26. line 2 of each, please change "is" to ——comprises——.
`
`Please add the following new claims:
`
`
`a co
`
`uctive layer disposed over a substrate;
`
`comprising:
`
`a first i sulating layer on the conductive layer;
`
`a contac region in said first insulating layer;
`
`first insulating layer; and
`
`(d)
`
`(e)
`
`at least on insulating spacer in the contact region adjacent to the
`
`an etch stop rn terial over said first insulating layer and adjacent to
`
`the insulating spacer, the etch stop
`
`
`
`terial being distinct from the insulating spacer.
`
`substantially recta gular profile i
`
`Th structure Of 27, wherein the insulating spacer has a
`
`the contact region.
`
`28.
`
`
`
`The str cture of Claim 27, wherein the insulating spacer has a surface
`29.
`B
`gion without overlying etch stop material.
`p rtion in the contact
`
`
`30.
`The structu e of Claim 29, wherein the insulating spacer surface portion
`without overlying etch stop
`ateijal comprises an insulating spacer surface portion most
`distant from said substrate.
`
`
`\
`
`portion in the contact region wit
`
`,The structure of 28, wherein the insulating spacer has a surface
`
`toverlying etch stop material.
`
`31.
`
`
`
`The structure of Claim 27, further comprising a second insulating layer on
`
`t e etch st
`
`layer and over the conductive layer.
`
`33.
`
`e structure of Claim 32, further comprising a second conductive
`
`A structure, comprising the steps of:
`
`a first electrically conductive material formed in andlor on a surface
`
`
`
`
`
`and second electrically conductive
`
`gions;
`
`(e)
`
`(f)
`
`a blanket layer ov the etch stop layer; and
`an opening through a 'rst part of the etch stop layer to the first
`
`electrically conductive region.
`
`the electrically insulative spacer has a
`'
`3%\ The structure of Cla_i_m 34. w
`ubstantiallyrectangular cross-sectional shap ‘ a plane that is substantially
`perpendicular
`
`Kl:
`
`The ' ructure of Claim 34, wherein the electrically insulating spacer has a
`36.
`V)?‘
`surface portion witho toverlying etch stop material.
`
`37.
`
`The struct e of Claim 36, wherein the electrically insulating spacer
`
`surface portion without ov lying etch stop material comprises a surface portion most
`
`distant from said substrate.
`
`
`
`38.
`
`The structure of Cl
`
`‘m 34, further comprising a second insulating layer on
`
`the etch stop layer and over the co ductive layer.
`
`
`
`
`
`
`
`o~“”‘I
`
`9.
`($3
`mate ial in the c
`
`e structure of Claim 38, further comprising a second conductive
`tact region.
`..
`
`
`
`Applicants submit the application is now in condition for examination on the
`
`merits. Early notice of such action is earnestly solicited.
`
`REMARKS
`
`Respectfully submitted.
`
`
`
`aul E. Rauch, Ph.D.
`Registration No. 38,591
`Attorney for Applicant
`
`BRINKS HOFER GlLSON & LIONE
`P.O. BOX 10395
`CHICAGO, ILLINOIS 60610
`(312) 3214200 '
`
`F:\Home\Prauch\10200 Cypressl 10200 12 — Preliminary Amendment
Accessing this document will incur an additional charge of $.
After purchase, you can access this document again without charge.
Accept $ Charge
Still Working On It
This document is taking longer than usual to download. This can happen if we need to contact the court directly to obtain the document and their servers are running slowly.
Give it another minute or two to complete, and then try the refresh button.
A few More Minutes ... Still Working
It can take up to 5 minutes for us to download a document if the court servers are running slowly.
Thank you for your continued patience.
This document could not be displayed.
We could not find this document within its docket. Please go back to the docket page and check the link. If that does not work, go back to the docket and refresh it to pull the newest information.
Your account does not support viewing this document.
You need a Paid Account to view this document. Click here to change your account type.
Your account does not support viewing this document.
Set your membership
status to view this document.
With a Docket Alarm membership, you'll
get a whole lot more, including:
- Up-to-date information for this case.
- Email alerts whenever there is an update.
- Full text search for other cases.
- Get email alerts whenever a new case matches your search.
One Moment Please
The filing “” is large (MB) and is being downloaded.
Please refresh this page in a few minutes to see if the filing has been downloaded. The filing will also be emailed to you when the download completes.
Your document is on its way!
If you do not receive the document in five minutes, contact support at support@docketalarm.com.
Sealed Document
We are unable to display this document, it may be under a court ordered seal.
If you have proper credentials to access the file, you may proceed directly to the court's system using your government issued username and password.
Access Government Site
