Sony Corp. v. Raytheon Co.
`IPR2016-00209
`
`Raytheon2024-0001
`
`

`
`Table l. Micro Actuators (fully or partly lC—processed)
`
`size
`
`60~l20uNI
`(diameter)
`1001110
`(diameter)
`100uT||
`(diameter)
`5xl00xl00
`
`driving
`priciple
`.electrostatic
`
`.electrostatic
`
`electrostatic
`
`.electrostatic
`
`electrostatic
`
`.electrostatic
`
`electrostatic
`
`.
`
`.
`
`.electrostatic
`
`movement,
`application
`rotation
`
`__
`
`rotation
`
`rotation
`
`l01flI
`(L.L.)
`
`support
`
`F sliding
`
`sliding
`___
`rotation
`
`elastic
`
`elastic
`
`elastic
`
`elastic
`
`elastic
`
`_V
`
`material
`
`input
`
`ref.
`
`& authors
`
`[4]V. C. Tai, et al.
`
`[l2]M.Mehregany.
`et al.
`[l2]M.Mehregany.
`et al.
`[13]VLC.Tang. et al.
`
`[14]T.iiirano, et al.
`
`speed.
`response
`500rpm
`
`force,
`torque
`‘a few pNm
`
`l5000rpm
`
`loplln
`
`poly-Si
`
`poly—Si
`
`60-AODV
`
`50~3ti0V
`
`300rpm
`
`~lnNm
`
`poiyesi
`
`Z6~l05V
`
`l0~l00kilz
`(resonance)
`
`~3kilz
`(resonance) 1
`N. A.
`
`J
`
`N.A.
`
`'
`1
`
`2tzN
`
`poly-Si
`
`40Vu:
`+l()Vnc
`
`poly-Si
`
`N.A.
`
`liommiig
`
`5u N
`
`poly—imide
`metal
`metal.
`SiaN4
`po1y—si
`
`Y
`
`l0V
`
`200V
`
`SUV
`
`lav
`
`J
`
`7!-Ill
`(L. L.) W
`211'“
`__(wL_.L.)
`on-off
`valve
`sum
`(L. L.)
`‘Hm.
`STM scan
`rotation
`
`8kHz
`(resonance)
`N.A.
`
`elastic
`
`vibration
`
`l0D—300rpm
`
`a
`
`few um
`
`elastic
`
`Hull!
`(L. V.)
`Z311!!!
`(1.. V.)
`mm
`(bending)
`12011“
`(bending)
`'l0HTl|
`(L. V.)
`5mm
`(L. L. )
`
`elastic
`
`elastic
`
`elastic
`
`elastic
`
`elastic
`(L. V.)
`levitation
`(Meissner
`effect)
`
`ZOHz
`
`~5ms
`W
`
`V
`
`(square wave)
`8llz(sinusoidal
`wave)
`
`94liz
`(resonance)
`20mm/s
`
`I
`
`.
`
`.
`
`.
`
`.
`
`N. A.
`
`N.A.
`
`450uN
`
`301) N
`
`[ll!]S.Akamine,
`
`[l5]R.Mahadevan,
`et al.
`[16]T,0hnstein,
`et al.
`i17]N.Takeshima
`et al.
`at al.
`[19]l(. R. Udagakumar,
`et al.
`[20]J.A.lValker.
`_et al.
`[2l]M.J.Zdeblik.
`et al.
`[22]F. C. van de P01.
`et al.
`[23]w_ Riethnuller.
`et al.
`[7]N.Takesliima,
`et al.
`[ll]B.V(agner, et al.
`
`SUV
`
`4V
`(lD0kli2)
`ZmA, 40V
`
`~200mV
`
`13V
`
`l30m\t'
`
`aomw
`
`0.3A
`
`0. 3~0. 9A
`
`[2-i]Y. l(.l(im. et al.
`
`ZnO
`
`PZT
`
`TiNi
`
`Si+
`liquid
`Si
`
`si+Au
`
`poly—imide
`F
`Au, Ndi-‘eB
`
`YBaCu0,
`NdFeB
`
`.piezoelectric
`
`l0.piezoelectric
`
`ll.shape memory
`alloy
`lZ.therIIal
`
`13. thermal
`
`14. thermal
`
`15. thermal
`
`l6.electromagnetic
`
`17. electromagnetic
`
`.
`4x300x300
`111113
`8M|||x0. 2mm
`xlmm
`Zlim
`(diameter) __
`Zx30x2000
`um’
`0.5x3x3mm'
`
`0. 5x8x8mm’
`
`sxiooxsoo
`ulna
`5xi10x500
`um’
`1.5x5.8
`X5. Bum“
`0. lx10xl0
`mm’
`
`*L.V.:
`
`linear motion in vertical direction. L.L.:
`
`linear motion in lateral direction.
`
`eccentric rotation
`
`voltage
`
`J
`
`Fig. 1 Operation of a harmonic micromotor [12]
`
`real revolution
`
`Raytheon2024-0002
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`

`
`2.3 Elastically Supported Actuators
`
`2.4 Other Driving Principles
`
`Another way to avoid the effects of friction is with elastic supports.
`Five electrostatic actuators with elastic supports are shown in the
`fourth through the eighth rows. First is an electrostatic resonator by
`Tang, et al. [13]. The resonator is supported by double-fold beams
`and actuated by comb-like structures. The teeth of the comb, attached
`to the moving part, overlap those fixed on the substrate. The force to
`increase the overlapping is generated when voltage is applied
`between the two combs. An alternating voltage of IO V with a 40 V
`DC bias made the suspended part vibrate at resonance. The
`displacement was 10 um and the resonant frequency was 18 kHz
`with 200 um-long supports.
`
`Furuhata, et al.[30] introduced the oxidation machining technique to
`obtain sub-micron operational gaps between moving and driving
`electrodes. The reduced gap enabled them to operate the modified
`comb-drive actuator with lower votages that are commonly available
`in electronic circuits. Hirano, et al.[14] succeeded in obtaining non
`resonant deflections of 7 pm with 10 V. The overall shape and the
`device in operation are shown in Fig. 2.
`
`Mahadevan, et al. [15] reported a linear actuator made by polyimide.
`The mover is a polyimide ladder-like structure sandwiched by two
`driving electrodes. The electrodes are also pattemed in stripes which
`have the sa.me pitch of the mover but are divided into some sections
`with different phase shifts. The mover is supported by four
`polyimide beams. Although the mover is not conductive,
`it is
`attracted in between the electrodes which make up a para|lel-plate-
`capacitor. The actuator is interesting because it utilizes the force
`acting on both surfaces of the mover rather than on the edge.
`
`In the eighth row, an electrostatic valve is shown. A plate with one
`side fixed is driven electrostatically and seals an inlet orifice. The
`closure plate is composed of a metal electrode sandwiched by silicon
`nitride films. The valves are fabricated in a 5 by 5 aray, which results
`in larger flow rate and finer flow control just by closing some of the
`valves. It was possible to close the valve against pressures of up to
`I10 mmHg with 30 V applied to the valve.
`
`Microactuators which utilizes other driving principles such as piezo
`electric[l8,l9], shape memory alloys[20], thermal expansion[7,2l-
`23] and electomagnetic[ll,24] are included in Table l for
`comparison. In tenns of reducing friction, most of them moves
`elastically with two exceptions. Udayakumar,[19] et al. made the
`ultrasonic micromotor which utilizes the standing wave to rotate the
`rotor. Similar trial was made in the linear motion previously by R.M.
`Moroney, et aI.[3l]. Kim, et al.[24] levitated the pennanent-magnet
`mover by the Meissner effect of the superconducting material.
`
`Each actuator in the table has its own advantages and disadvantages.
`The choice and the optimization should be made according to the
`requirements of applications. Generally speaking, the electrostatic
`actuator is more suitable to perform tasks which can be completed
`within a chip (positioning of devices/heads/probes, sensors with
`servo feedback, light deflection, etc.), since it is easily integrated on
`a chip, easily controlled and consumes little power. On the contrary.
`the other types of actuators are more robust, produce large force and
`are suitable to perfonn external tasks (propulsion, manipulation of
`objects, etc.).
`
`3. ARCHITECTURE FOR MEMS
`
`3.1 System with Micro Smart Modules
`
`An example of system architectures oriented to MEMS is shown in
`this chapter. As was mentioned above, one of the advantages of
`MEMS is that many actuators and sensors are supplied with batch
`processing techniques. Another advantage is that both logic circuits
`and sensors can be added into the same system. We can expect to
`have a module which includes sensors, actuators and logic circuits
`and has primary infonnation processing and control. Furthemtore.
`many of the modules can be implemented in a small area without
`assembly.
`
`As MEMS, we expect microsystems to perfon-n complicated tasks,
`such as micromanipulators and self-propelled systems. For example,
`when a microsystem handles cells, the system must move to the cells
`by itself and manipulate them. The modules, which have not only
`actuators but also logic circuits and sensors, can fulfill the
`requirement. Many modules can be composed and be distributed by
`taking the advantages of the micromachining. These modules are
`smart enough to perfonn elementary control and complex motions
`with simple input signals. When many modules are arranged on the
`surface of objects, the surface may be able to perform some
`functions.
`
`(a) Over
`Fig. 2 An electrostatic actuator with sub-micron gaps [14].
`all view. A comb—like driver, four positioning and alignment
`mechanisms, and flexible supports are shown.
`(b) Expanded view
`of working teeth with 0.5 pm operational gaps.
`
`16
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`Displacement
`
`E] : Integrated logic circuits
`
`Fig. 4 Diagram of a ciliary system [7].
`
`The system of the organisms offer good models when we want to
`design the architecture of the systems with distributed modules.
`Mechanism in organs of animals. insects and microscopic organisms
`help us to have innovative ideas. The ciliary motion is based on the
`motion of ciliate. The ciliate, one of microscopic organisms, has
`many hairlike protrusions on the surface of its cells. The protrusions
`are called cilia.
`lt accomplishes locomotion by vibrating cilia
`cooperatively. The motion of the ciliate can be applied to convey
`objects. The modules of the ciliary motion system are compromised
`of an actuator (such as a cantilever type actuator) and a self-excited
`vibrations circuit as shown in Fig.3. Adequate interconnection and
`external signals can synchronize frequencies of the vibration. When
`the fixed phase difference between adjacent vibrations is uniformaly
`maintained, each actuator runs cooperatively. Cantilevers propagate a
`wave and carry objects like balls. When a plate is carried, required
`logic circuits are as simple as shift registers. This system is a one—
`dimensional system and is composed of exactly the same modules.
`The motions of actuators in the modules are very simple and can be
`easily realized by microactuators.
`
`3.2 Ciliary Motion System
`
`The ciliary motion system realized by combining cantilevers and logic
`circuits as shown in Fig.4[7]. In the following, only the
`microactuator for ciliary motion module is considered. Benecke and
`Riethmuller have made a composite cantilever based on thermal
`expansion effects with gold and silicon like a bimetallic
`cantilever[l6]. They also proposed a similar transportation system
`based on cantilever actuators[32].
`
`The present actuator[17] consists of a metal micro heaters.
`sandwiched by two layers of polyimide which have different thermal,
`a expansion coefficient. The cantilever curled upward at room
`temperature as shown in Fig. 5 because of the tensile stress building
`up after curing polyimide at elevated temperatures. When the
`cantilever was heated by flowing current in the heater. it moved
`downwards. The dimensions of the cantilever are 500 pm in length,
`110 ttm in width. 2.2 ttm in the thickness of the lower polyimide
`layer with small thermal expansion, and 3.6 pm in the thickness of
`the upper polyimide layer with large thermal expansion. Vertical
`displacements of 130 um and horizontal displacements of 60 um
`were obtained with 40 mA drive curent in the heater. The actuator
`band width (3 dB down in displacement amplitude) was measured to
`be 8 Hz. Eight cantilevers in two units moved cooperatively. Future
`developments to combine logic circuits are envisioned.
`
`C antilever
`
`l
`
`\ Self-excited vibration circuit
`
`Fig. 3 Ciliary motion system [7].
`
`Fig. 5 SEM photograph of polyimide thermal actuators [7]. The size
`is 500 um x 110 pm. Cantilevers curl up at the room temperature
`due to intentionally introduced residual stress.
`
`l7
`
`Raytheon2024-0004
`
`

`
`4. APPLICATIONS
`
`4.2 Fluidics
`
`Figure 6 shows possible applications of microactuators and MEMS.
`Promising applications in the near future are in optics, magnetic and
`optical heads, fluidics, handling cells and macro molecules. and
`microscopy with microprobes such as STMs (scanning tunneling
`microscopes) and AFMs (atomic force microscopes)[18]. These
`applications have a common feature that only very light objects such
`as mirrors, heads, valves, cells and microprobes are manipulated and
`that little physical interaction with the external environment is
`necessary. One reason is that present microactuators are
`still
`primitive and large forces cannot be transmitted to the external world.
`The other reason is difficulty in packaging. In the following, a few
`examples are explained.
`
`4.1 Optics
`
`Petersen, et al.[l8] demonstrated deflecting light beams by small
`cantilevers driven by electrostatic force in 1977. The dimensions of
`the cantilever were 100 pm in length, 25 pm in width and 0.5 pm in
`thickness. Recently, an optical-fiber switch[34], its aligner[35] and
`an adjustable miniature Fabry-Perot interferometer[36] were
`reported. Sawada, et al[37] developed a new integrated optical
`microencoder. They integrated a U-shaped laser diode with etched
`mirrors, microlenses and a photodiode. The size was 0.5 X 0.5 mm2
`square. They claimed a theoretical resolution of 0.01 pm with a 1
`um-pitch grating. Because of its size and the fabrication process, it is
`possible to integrate the encoder with microactuators, that will result
`in a micro positioner with very high accuracy.
`
`Good review articles [38,39] were already published on micro fluidic
`systems. Here only the application to the ink jet printer is dealt.
`Using silicon micromachining and bonding techniques, Shibata, et
`al.[40] fabricated micro nozzles and attached a micro heater to each
`channel. When the pulse current flows in the heater, the ink turns
`into the supercritical state locally around the heater and shoots a
`droplet out from the nozzle. Although there is nothing to move. the
`heater acts as a microactuator. The printer utilizes the principle, called
`a bubble jet printer, has been commercialized and proved to be
`successful.
`
`4.3 Micro Magnetic Head
`
`Micro sliders for read-out can be fabricated by IC-compatible
`processes. Let us examine the micro system in which the slider is
`attached to micro flextures and driven by microactuators [41,42].
`The purposes of the motion are to compensate tracking errors and to
`avoid crashing. Although large movement such as seeking has to be
`done by macro structures and actuators, these functions can be
`miniaturized because of the lighter load. Since the range of
`movement is limited, the flexible support eliminates friction.
`Response frequency should be in the order of IO kHz.
`If the micro
`slider is small enough, improved electrostatic actuators will be
`applicable. Assembly and adjustment are minimized by the pre-
`assembly capability of micromachining. Small signals associated
`with the miniaturized head should be amplified by the pre—a.rnplifier
`located on the same chip. A displacement sensor to detect the gap
`
`micro valve
`smart valve
`micro pump
`w/sensor
`gas/liquid chro-
`matography
`fluidic amplifier
`fluidic elements
`
`micro optics
`
`fiber handling
`optical alignment
`scanning
`modulation
`interferometer
`optical head
`vari-focal mirror
`opto mechanical IC
`
`STMs
`AFMs
`SXMs
`near field
`microscopy
`tenneling
`probe anay
`
`bio/medical
`
`cell handling
`cell fusion
`biomolecular
`handling
`smart pills
`micro surgery
`drug delivery
`blood analysis
`
`micro electro mechanical systems
`
`magnetic head
`printer head
`laser scanner
`micro mechanical
`memory
`STM disk storage
`
`VLSI process
`
`manipulator
`ln vacuum
`micro positioner
`mass flow
`controller
`
`micro robots
`micro teleoperator
`flexible multi-DOF
`manipulator
`mobile sensor
`
`Fig. 6 Possible applications of micro electro mechanical systems
`
`18
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`

`
`between the slider and the disk should also be located as close to the
`slider as possible. The flexture is flexible in driving directions and
`rigid in undesired directions. The compliance of the tlcxture should
`be designed as independently as possible in each direction; it is soft
`in the moving direction and stiff in other directions.
`
`4.4 Electrostatic Handling of Biological Objects
`
`The typical dimensions of biological objects are around 1-10 ttm for
`cells and nano meters in thickness by microns in length for macro
`molecules. The electric field distribution obtained by microfabricated
`electrodes can be controlled in the same order of the objects and is
`suitable for manipulating them[43.44]. Since the objects are
`suspended in conductive fluids, the applied voltages are high
`frequency (more than MH7.) alternating voltages. As is the case of the
`bubble jet printer, the structure does not move but produces finely
`determined field around it to actuate the object.
`
`Washizu, et al.[43] developed a cell fusion system using both a
`micro fluidic system and manipulation with the electric field. Figure
`7 (a) shows the system. Two types of cells, A and B, are put in the
`cavities, PA and PB. Each cavity has a piezoelectric pump. The
`pump pushes the cells into a narrow channel. The channel is so
`narrow that the cells must proceed one by one to a cell fusion
`chamber. The cell fusion chamber is shown in Fig.7(b). Cell-A
`comes from the left channel and cell-B from the right one. They meet
`each other at the hole in the wall. Fig.7 shows a cell fusion system
`using a fluid integrated circuit.
`(a) The area encircled by a broken
`line is the cell fusion chamber.
`PA and PB are piezo—electric micro
`pumps. (b)The field constriction area in the cell fusion chamber.
`An electric field is produced through the hole by two electrodes. The
`cells are attracted to the field constriction area around the hole. They
`attach together and make a so-called pearl chain. A high but short
`voltage pulse is applied to the pearl chain from the electrodes in order
`to fuse the cells. The fused cell is, then, pushed away by pumps.
`Based on the same principle. they also made an electric cell conveyer,
`called a cell shift register, and a cell sorter.
`
`Biological molecules such as DNA or proteins can also be handled by-
`the electric field. For example, the DNA molecule whose normal
`shape in the water is like a folded string can be stretched by electric
`fields on the order of 106 V/m. The length of DNA molecules is a
`direct measure of the amount of genetic information in it. Therefore
`one can know the amount by measuring the length of DNA molecules
`stretched by the field and stained by fluorescent dyes. Washizu, et
`al.[44] succeeded in orienting DNA molecules along the field. They
`also align molecules on the microelectrode and cut them at certain
`length by focussed UV light. Because the spot size is on the order of
`1 pm, it is impossible to cut the molecule with the resolution of base
`pairs. In the future, however, an advanced STM tip may directly read
`or modify base pairs in a DNA molecule held straight by the electric
`field. They also succeeded in changing the three dimensional
`conformation of proteins by the field.
`
`4.5 Future Applications
`
`As a long term goal. we want to handle macroscopic objects by
`MEMS and to have self-propelled MEMS. If such microsystcms are
`available, we will be able to construct micro surgery machines
`attachable to a catheter or mobile micro sensors which go into small
`pipes to mend flaws. Many breakthroughs in materials, technologies,
`devices and system design will be necessary to achieve the goal.
`
`5. CONCLUSION
`
`Recent developments an the future of microactuators and MEMS are
`reviewed. The feasibilities have been proven. Yet, we need further
`breakthroughs in fabrication, devices and system design towards the
`practical use of microactuators and MEMS. National or international
`projects on the field can lead the research if both application—oriented
`development and basic studies are pursued. Since the field is multi-
`discipliinary. collaboration among researchers with different
`specialities is essential.
`
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`
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`
`electrodes
`silicone resin
`
`(a)
`
`silicone
`resin
`
`‘V separator
`(used cell
`(b)
`
`Figure 7 A cell fusion system using a fluid integrated circuit.
`(a) The area encircled by a broken line is the cell fusion chamber. PA
`and P3 are piezo—electric micro pumps. (b) The field constriction area
`in the cell fusion chamber.
`
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`

`
`[38] S. Nakagawa, et al.."Integrarc Fluid Control Systems on a Silicon Wafer".
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`Meeting of IEE Japan. paper S.7-3-4(in Japanese).
`[41] M. G. Lim, et al."Design and Fabrication of a Linear Micromotor with
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`Winter Annual Meeting. San Francisco. CA. Dec. (1989) p.p. 10-15.
`[42] K. I(ogure,"Micro-Engineering in File Memory" J. of JSME. vol.92.
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`[43] M. Washizu."Electrostatic Manipulation of Biological Objects in
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`Harashima), Elsevier Science Publ., (1990) P-D. 417-432.
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`Japan. January 30-February 2 (1991) p.p. 259-264.
`
`[12] M. Meheregany, P. Nagarkar. S. D. Senturia, and J. H. Lang,"0peration of
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