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`BEFORE THE PATENT TRIAL AND APPEAL BOARD
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`LAM RESEARCH CORP.,
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`Petitioner
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`v.
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`DANIEL L. FLAMM,
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`Patent Owner
`___________
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`Case IPR2015-01768
`Patent RE40,264 E
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`PETITIONER'S UPDATED EXHIBIT LIST
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`Mail Stop: PATENT BOARD
`Patent Trial and Appeal Board
`U.S. Patent & Trademark Office
`P.O. Box 1450
`Alexandria, VA 22313-1450
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`10067196
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` Case IPR2015-01768
` U.S. Patent No. RE40,264
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`PETITIONER'S UPDATED EXHIBIT LIST
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`EXHIBIT LIST
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`Description
`U.S. Patent No. RE40,264 (the ‘264 patent)
`European Patent Application Number 90304724.9 (Tegal)
`U.S. Patent No. 5,151,871 (Matsumura)
`U.S. Patent No. 4,913,790 (Narita)
`U.S. Patent No. 4,680,086 (Thomas)
`U.S. Patent No. 5,219,485 (‘485 Wang)
`D. S. Fischl, G. W. Rodrigues, and D. W. Hess, Etching of
`Tungsten and Tungsten Silicide Films by Chlorine Atoms
`published in August 1998 by The Journal of Electrochemical
`Society in Vol. 135, No. 8 (Fischl)
`U.S. Patent No. 4,992,391 (‘391 Wang)
`U.S. Patent No. 5,174,856 (Hwang)
`Declaration of Joseph L. Cecchi, Ph.D.
`American Heritage Dictionary, Third Edition, 1993
`Merriam-Webster’s Collegiate Dictionary, Tenth Edition, 1993
`U.S. Patent No. 4,645,218 (Ooshio)
`Curriculum Vitae of Joseph L. Cecchi, Ph.D.
`Daniel L. Flamm and G. Kenneth Herb, “Plasma Etching
`Technology – An Overview” in Plasma Etching, An
`Introduction, Dennis M. Manos and Daniel L. Flamm, eds.
`(Academic Press, San Diego, 1988)
`Declaration of Morgan Chu In Support of LAM’s Unopposed
`Motion for Pro Hac Vice Admission
`Declaration of Talin Gordnia In Support of LAM’s Unopposed
`Motion for Pro Hac Vice Admission
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`Exhibit
`1001
`1002
`1003
`1004
`1005
`1006
`1007
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`1008
`1009
`1010
`1011
`1012
`1013
`1014
`1015
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`1016
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`1017
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`10067196
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`Case IPR2015-01768
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` U.S. Patent No. RE40,264
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`Exhibit
`1018
`1019
`1020
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`Description
`Declaration of Joseph L. Cecchi, Ph.D. in support of Reply
`Petitioner's Demonstrative Exhibits for Oral Hearing (Slides)
`Petitioner's Demonstrative Exhibits for Oral Hearing (Graphics)
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`Dated: October 6, 2016
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`Respectfully submitted,
`By: /Michael Fleming/
` Michael Fleming
`Michael Fleming (Reg. No. 67,933)
`Samuel K. Lu (Reg. No. 40,707)
`Kamran Vakili (Reg. No. 64,825)
`Morgan Chu (pro hac vice)
`Talin Gordnia (pro hac vice)
`IRELL & MANELLA LLP
`1800 Avenue of the Stars, Suite 900
`Los Angeles, California 90067-4276
`Tel.: (310) 277-1010 | Fax: (310) 203-7199
`mfleming@irell.com; slu@irell.com;
`mchu@irell.com; tgordnia@irell.com
`Attorneys for Petitioner Lam Research Corp.
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`10067196
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`Case IPR2015-01768
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` U.S. Patent No. RE40,264
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`CERTIFICATE OF SERVICE
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`I hereby certify, pursuant to 37 C.F.R. sections 42.6 and 42.105, that copies
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`of the foregoing document, and Exhibits 1019 and 1020, are being served, pursuant
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`to the parties' service agreement, via electronic mail (e-mail) upon the following,
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`on the 6th day of October, 2016, the same day as the filing of the above-identified
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`documents in the United States Patent and Trademark Office/Patent Trial and
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`Appeal Board:
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`Christopher Frerking
`174 Rumford Street
`Concord, New Hampshire 03301
`chris@ntknet.com
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`George Summerfield
`STADHEIM & GREAR, LTD.
`400 N. Michigan Avenue, Suite 2200
`Chicago, IL 60611
`Summerfield@StadheimGrear.com
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` /Susan M. Langworthy/
` Susan M. Langworthy
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`10067196