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`BEFORE THE PATENT TRIAL AND APPEAL BOARD
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`LAM RESEARCH CORP,
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`Petitioner
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`1 V.
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`DANIEL L. FLAMM,
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`Patent Owner
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`U.S. Patent No. 6,017,221
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`Issued: Jan. 25, 2000
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`Named Inventor: Daniel L. Flamrn
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`Title: PROCESS DEPENDING ON PLASMA
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`DISCHARGES SUSTAINED BY INDUCTIVE COUPLING
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`POWER OF ATTORNEY
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`Mail Stop: PATENT BOARD
`Patent Trial and Appeal Board
`U.S. Patent & Trademark Office
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`P.O. Box 1450
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`Alexandria, VA 22313-1450
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`
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`Pursuant to 37 CiF.R. 42.10(b):, Petitioner Lam Research Corp. hereby
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`appoints the practitioners associated with lrell & Manella‘s Customer No. 29000 as
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`its attorneys to transact all business in the United States Patent and Trademark
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`Office for the Inter Parifes Review of U.S. Patent No. 6,017,221. Lam Research
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`Corp. further appoints Michael R. Fleming as the lead counsel and Samuel K. Lu
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`as back up counsel, as well as Morgan Chu (pro hac vice to be requested upon
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`authorization) and Talin Gordnia (pro hac vice to be requested upon authorization)’
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`
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`
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`Michael R. Fleming (Reg. No. 67,933)
`lrell & Manella LLP
`1800 Avenue of the Stars, Suite 900
`Los Angeles, California 90067
`Tel: (310) 277-1010
`Fax: (310)203-7199
`m1‘1eming@irell.com
`
`Samuel K. Lu (Reg. No. 40,707)
`lrell & Manella LLP
`1800 Avenue of the Stars, Suite 900
`Los Angeles, California 90067
`Tel: (310)277-1010
`Fax: (310) 203-7199
`slu@irell.com
`
`Morgan Chu (pro hac vice to be
`requested)
`lrell & Manella LLP
`
`1800 Avenue of the Stars, Suite 900
`
`Los Angeles, California 90067
`Tel: (310)277-1010
`Fax: (310)203-7199
`mchue@irell.com
`
`Talin Gordnia (pro /7610 vice to be
`requested)
`lrell & Manella LLP
`
`1800 Avenue of the Stars, Suite 900
`Los Angeles, California 90067
`
`
`
`
`
` {Fe}: (310) 277~101(}
`I Fax: (310) 2034199
`"
`_Lgg_0rdnia@ire1I.com
`J
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`The individual signing belew has the authority to execute this document on
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`behaif cf Lam Research Corp.
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` Dated: August 12, 2015
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`33"
`
`Eric Bdanofsky ..
`Vice President, Intellectual Preperty
`Lam Research Corporation