`
`Plasma Sources for Thin Film Deposition and Etching, 1st Edition | Maurice Francombe, John Vossen | ISBN 9780125330183
`
`E H H E
`
`Read Books, Plant Trees
`
`Trees Planted:
`
`Home '. United States
`
`V
`
`E Login '.Create Account '.Help '.Order Status
`
`Imprints
`
`Products
`
`Subjects
`
`STORE
`
`Home» Materials Science» Structural Materials»PIasma Sources for Thin Film Deposition and Etching
`
`I] E
`
`Print Book
`Hardcover
`I In Stock
`Estimated Deuvery Time
`
`USD 72.95
`1
`
`Add to Cart
`
`Plasma Sources for Thin Film Deposition and Etching, 1st Edition
`
`Editor(s) :
`_
`Release Date.
`imprint:
`Print Book ISBN:
`Pages:
`Dimensions:
`
`Francombe & Vossen
`13 Aug 1994
`Academic Press
`9730125330183
`328
`229X 152
`
`
`
`Overview
`
`Authors
`
`Table of Contents
`
`Plasma Sources for Thin Film Deposition and Etching, 1st Edition
`
`M.A. Lieberman and R.A. Gottscho, Design of High— Density Plasma Sources for Materials Processing. O.A. Popov,
`Electron Cyclotron Resonance Plasma Sources and Their Use in Plasma-Assisted Chemical Vapor Deposition ofThin
`Films. S.L. Rohde, Unbalanced Magnetron Sputtering. C. Steinbruchel, The Formation ofParticles in Thin-Film Processing
`Plasmas. References. Author Index. Subject Index.
`
`shop wlth confidence
`Free Shipping around the world
`
`- Broad range of products
`
`- 30 days return policy
`- FAQ
`
`Contact Us
`
`1
`‘,\/
`
`Elsevier
`
`Your purchases
`
`Support 8. Services
`
`Elsevier ata Glance
`About the Elsevier Store
`
`Order StatuslDelivery
`Renew Subscription
`
`Shipping Information
`Inspection/Desk Copy Request
`
`Affiliate Program
`Frequently Asked Questions
`
`http://store.elsevier.com/product.jsp?isbn= 9780125330183&_requestid= 161 1063
`
`Stay Connected
`
`Email Newsletters
`Social Media
`
`LAM Exh 1013-131% 1
`
`LAM Exh 1013-pg 1
`
`
`
`8/13/2015
`Elsevier Websites
`Privacy Policy
`
`Plasma Sources for Thin Film Deposition and Etching, 1st Edition | Maurice Francombe, John Vossen | ISBN 9780125330183
`Returns and Refunds
`Help with eBook Access
`Conferences and Exhibitions
`RSS
`VAT Exemption
`Sitemap
`Resources for »
`Terms and Conditions
`
`Copyright© 2015 Elsevier BV. All Rights Reserved.
`Cookies are set by this site. To decline them or learn more, visit our Cookie page.
`Reed Elsevier trademark is owned and protected by Reed Elsevier Properties SA
`(-1 REL I
`
`
`http://store.e|sevier.com/product.jsp?isbn= 9780125330183&_requestid= 161 1063
`
`LAM Exh 1o13—p2,% 2
`
`LAM Exh 1013-pg 2
Accessing this document will incur an additional charge of $.
After purchase, you can access this document again without charge.
Accept $ Charge
Still Working On It
This document is taking longer than usual to download. This can happen if we need to contact the court directly to obtain the document and their servers are running slowly.
Give it another minute or two to complete, and then try the refresh button.
A few More Minutes ... Still Working
It can take up to 5 minutes for us to download a document if the court servers are running slowly.
Thank you for your continued patience.
This document could not be displayed.
We could not find this document within its docket. Please go back to the docket page and check the link. If that does not work, go back to the docket and refresh it to pull the newest information.
Your account does not support viewing this document.
You need a Paid Account to view this document. Click here to change your account type.
Your account does not support viewing this document.
Set your membership
status to view this document.
With a Docket Alarm membership, you'll
get a whole lot more, including:
- Up-to-date information for this case.
- Email alerts whenever there is an update.
- Full text search for other cases.
- Get email alerts whenever a new case matches your search.
One Moment Please
The filing “” is large (MB) and is being downloaded.
Please refresh this page in a few minutes to see if the filing has been downloaded. The filing will also be emailed to you when the download completes.
Your document is on its way!
If you do not receive the document in five minutes, contact support at support@docketalarm.com.
Sealed Document
We are unable to display this document, it may be under a court ordered seal.
If you have proper credentials to access the file, you may proceed directly to the court's system using your government issued username and password.
Access Government Site
