JOSEPH L. CECCHI
`
`Dean, School of Engineering
`Professor of Chemical and Biological Engineering
`University of New Mexico
`Albuquerque, NM
`cecchi@unm.edu
`1-505- 239-0176
`EDUCATION
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`Harvard University, Cambridge, MA
`
`
`1972
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`PhD
`Field: Physics
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`
`
`
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`University of New Mexico, Albuquerque, NM
`
`
`2011
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`MBA
`Field: Business
`
`
`
`
`
`Harvard University, Cambridge, MA
`
`
`
`1969
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`MA
`Field: Physics
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`
`
`
`
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`Knox College, Galesburg, IL
`
`
`1968
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`BA
`Field: Physics
`Magna cum Laude
`
`
`ACADEMIC APPOINTMENTS
`ADMINISTRATIVE
`2014-present Dean, School of Engineering
`University of New Mexico
`
`2011-present Senior Advisor to the Provost for National Laboratory Relations
`University of New Mexico
`
`2011-2012
`Provost
`
`Masdar Institute of Science and Technology
`
`Masdar City, Abu Dhabi, United Arab Emirates
`2004-2011
`Chair, Board of Directors
`
`STC.UNM (formerly The Science and Technology Corporation @ UNM)
`2001-2009
`Dean, School of Engineering
`
`University of New Mexico
`2000-2001
`Interim Dean, School of Engineering
`
`University of New Mexico
`
`1994-2000
`Chair, Department of Chemical and Nuclear Engineering
`
`
`University of New Mexico
`1991-1994
`Director, New Jersey SEMATECH Center of Excellence for Plasma Etching,
`New Jersey University Consortium
`1987-1994
`Director, Graduate Program in Plasma Science and Technology
`
`
`School of Engineering, Princeton University
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`Head, Plasma Processing Group, Plasma Physics Laboratory
`1987-1994
`Princeton University
`
`
`Head, Materials Physics Group, Plasma Physics Laboratory
`1979-1987
`Princeton University
`
`
` TEACHING AND RESEARCH
`2014-present Professor of Chemical and Biological Engineering
`
`
`University of New Mexico
`1994-2014
`Professor of Chemical and Nuclear Engineering
`
`
`University of New Mexico
`2011-2012
`Professor of Engineering
`
`Masdar Institute of Science and Technology
`
`
`Masdar City, Abu Dhabi, United Arab Emirates
`1988-1994
`Lecturer with Rank of Professor, Department of Chemical Engineering
`
`Princeton University
`1986-1988
`Lecturer, Department of Chemical Engineering
`
`
`Princeton University
`1984-1994
`Principal Research Physicist, Plasma Physics Laboratory
`
`Princeton University
`1978-1984
`Research Physicist, Plasma Physics Laboratory
`
`
`Princeton University
`1972-1978
`Staff Physicist, Plasma Physics Laboratory
`
`
`Princeton University
`1969-1972
`Research Assistant to Professor Norman F. Ramsey
`
`
`Department of Physics, Harvard University
`1969-1972
`Teaching Fellow, Department of Physics
`
`
`Harvard University
`1967-1968
`Research Associate, Physics Division
`
`
`Argonne National Laboratory
`HONORS AND AWARDS
`2011
`STC.UNM Lobo VentureLab Incubator Facility renamed the Joseph L.
`Cecchi VentureLab
`2010
`New Mexico Business Weekly, Who’s Who in Technology
`Fellow of the American Vacuum Society (AVS)
`2009
`Who’s Who in Engineering Higher Education (WWEHE)
`2005
`Who’s Who in Science and Engineering
`2000
`1992, 1994
`Semiconductor Research Corporation Inventor Award
`188
`IBM Faculty Development Award
`National Science Foundation Pre-doctoral Fellow
`1968-1972
`1970
`Sigma Xi
`1968
`Phi Beta Kappa
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`CURRICULUM VITAE
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`PRINCETON UNIVERSITY
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`JOSEPH L. CECCHI
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`COURSES TAUGHT AND DEVELOPED
`• ChE 346 Chemical Engineering Laboratory
`• ChE 417 Plasmas for Chemical Processing of Materials (newly developed)
`• ChE 422 Semiconductor Processing Technology
`• ChE 441 Chemical Reactor Engineering
`• ChE 444 Special Topics in Chemical Engineering and Technology
`• ChE 454 Senior Thesis
`• ChE 551 Topics in Plasma Science and Technology (newly developed)
` UNIVERSITY OF NEW MEXICO
`• ChNE 461 Chemical Reactor Engineering
`• ChNE 486/586 Statistical Design of Experiments for Semiconductor
`Manufacturing (newly developed)
`• ChNE 515 Special Topics
`• ChNE 599 Masters Thesis
`• ChNE 699 Dissertation
`• ME 461 High Performance Engines (newly developed)
`• ChNE 499/515 Sustainable Energy (newly developed)
`• ChNE 213 Laboratory Electronics
`• ChNE 419L Senior Chemical Engineering Laboratory
`• BME 558 Methods of Analysis in Biomedical Engineering
`UNDERGRADUATE RESEARCH SUPERVISED
`PRINCETON UNIVERSITY (CHEMICAL ENGINEERING)
`Michael R. Grillo (B.S., 1993), An Historical Account of the Search for the Structure of
`Fullerenes
` Craig H. Boyce (B.S., 1994), Mechanisms for Anisotropic Reactive Ion Etching of
`Photoresist via O2, N2/O2, and SO2/O2 Plasmas
` UNIVERSITY OF NEW MEXICO (CHEMICAL ENGINEERING)
`Frank B. Lopez, (1995), Design of Experiments for Optimization Study of Oxide Etch
` James J. Chambers, (1995), Optimization of a Plasma Etch Process Utilizing Statistical
`Design and Analysis of Experiments with Response Surface Methodology
` Jennifer Drez, (1996,) Modeling the Growth of a CFx Polymer on Silicon Wafers
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` David L. Temer, (1996), A Correlation Between CFx In the Plasma Environment To Index of
` Zachary J. Walster, (1996), Polymer Deposition for Selective Oxide Etching Using HFC-134a
`Tara Martinez, (1997), The Characterization of Si Wafers Using A Scanning Electron
`Microscope
` Stacy Dunivan, (1997), Statistically Designed Experiment to Determine Defect Generation
` Jason Bradley, (1998), Optimization of Chemical Mechanical Planarization
` Karla Waters, (1998), Parameter Space for Oxide Etching Using the Lucas Labs Cluster Tool
`GRADUATE RESEARCH SUPERVISED
`PRINCETON UNIVERSITY (CHEMICAL ENGINEERING UNLESS OTHERWISE
`NOTED)
`Shashank Chatervedi (PhD, 1989), Energy Flows in a Quasi-Isobaric Fusion-Fission Hybrid
`Reactor
` James Cross (MS, 1990), Introductory Survey of Modeling Strategies for Process Plasmas
` Dwani Vyas (MS, 1991), Global Modeling of the Electron Cyclotron Resonance Reactor
` Mark Bannister (Astrophysical Sciences, PhD, 1992), A Surface Wave Sustained Plasma
` C.W. Cheah (PhD, 1993), Plasma Diagnostics for the Characterization of Etching and
`Deposition Reactors
` Chris Zuiker (Astrophysical Sciences, PhD, 1993), Laser-Induced Fluorescence
`Measurements in an Electron Cyclotron Resonance Plasma Etch Reactor
` Y-C Huang (PhD, 1994), Characterization of Surface Reaction During SF6 Etching of Silicon
`in an Electron Cyclotron Resonance (ECR) Plasma Reactor
` Rob Goheen (MS, 1995), In-Situ Analysis of A Plasma Deposited Polymer Film in a CF3H
`Discharge Using Reflection Infrared Spectroscopy
` Rob Jarecki (PhD, 1996), Low Temperature Sulfur Hexafluoride Plasma Etching of
`Silicon/Silicon Dioxide in an Electron Cyclotron Resonance Reactor
`
`Source of Supersonic Nozzle Beams of Metastable Argon Atoms (the “Surfajet”)
`
`of a Lithographic Process
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` Mark Sowa (PhD, 1998), Mechanism for the Selective Etch of Silicon Dioxide in a High-
`Density, Low-Pressure, Inductively Coupled Fluorocarbon Plasma
` Served on an additional 5 PhD dissertation committees
` UNIVERSITY OF NEW MEXICO (CHEMICAL ENGINEERING UNLESS OTHERWISE
`NOTED)
`Vinay Pohray (MS, 1997), Role of Polymer Growth and Ion Bombardment of Selective Oxide
`Tech Chemistry in an Inductively Coupled Plasma Reactor
` Craig Brown (MS, 1998), Plasma Polymerized Fluorocarbon (CHF3) Thin Films
`Polysilicon Microstructures
` David Stein (PhD, 1998), Mechanistic, Kinetic, and Processing Aspects of Tungsten Chemical
`Mechanical Polishing
` Michael Littau (MS, 1998), Wavelength Modulated Infrared Diode Laser Absorption
` Iyano Inoue (MS, 1999), Applications of Infrared Diode Laser Absorption Spectroscopy to
`Spectroscopy
` Prabhakar Gopoladasu (MS, 2000), Response Surface Modeling of the Composition of
`AlAsSb Alloys Grown by Molecular Beam Epitaxy
` Yong Xiang Guo (MS, 2001), Modeling of a Fluorocarbon-based Process for Selective
` Amy Moy (MS, 2001), Polishing Pad Degradation and Wear Due to Tungsten and Oxide
` Todd Bauer (PhD, 2001), Fluorocarbon Radical Density Measurements in an Inductively
`Coupled Plasma Reactor
` Stacy Stone (Manufacturing Engineering, ME, 2002)), Feasibility of Printing 185 nm Nested
` Xiaomei Wu (PhD, 2003), Study of Rotational Temperature and Loss Mechanisms of
`Fluorocarbon Radicals in an Inductively Coupled Plasma Reactor
`
`
`Measurements of Dissociation Kinetics and Calibration of Actinometric Optical Emission
`
`Etching of Interlevel Dielectrics
`
`CMP
`
`Contact Holes at 320 nm Pitch with a 0.60 NA 248 nm KrF Lithography Source
`
`CURRICULUM VITAE
`
`Optimization and Characterization for the Elimination of Post Release Adhesion in
`
`Spectroscopy of Fluorocarbon Species in a Low-Pressure, High-Density Plasma Reactor
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`Ying-Bing Jiang (PhD, 2005), Plasma-Assisted Atomic Layer Deposition of Conformal Nano
`Cap Layers on Self-Assembled Mesoporous Low-k Dielectrics
` Keith Green (MS, 2006) Polysilicon Gate Etch CD Bias Characterization
` Served on an additional 9 MS/ME and 11 PhD graduate student committees
`SELECTED UNIVERSITY SERVICE (PRESENT-2000)
`• Director, STC.UNM (formerly The Science and Technology Corporation at the University
`of New Mexico (2014 – present)
`• Deputy Chair, Economic Development Forum (2014 – present)
`• Member, Deans’ Council (2014 – present)
`• Member, Faculty Senate Budget Committee (2010-2013)
`• Chair, UNM Strategic Planning Task Force (2006-2007)
`• Chair, Dean of the College of Arts and Sciences Search Committee (2000-2007)
`• Member, Search Committee for the Provost and Executive Vice President for Academic
`Affairs (2005-2006)
`• Member, Business and Industry Cabinet (2000-2008)
`• Member, Economic Development Advisory Council (2000-2008)
`• Member, Research & Economic Development Collaboration Council (2005-2009)
`• Chair, Board of Directors, The Science and Technology Corporation at the University
`of New Mexico, (2004 – 2011)
`• Member, President’s Leadership Roundtable (2004-2006)
`• Member, Faculty Dispute Resolution Advisory Board (2003-2009)
`• Member, UNM Planning Council (2003-2009)
`• Member, Federal Priorities Group (2002-2009)
`• Member, UNM Presidential Search Committee (2002-2003)
`• Member, UNM Rankings Committee (2002-2004)
`• Member, Board of Directors, The Science and Technology Corporation at the
`University of New Mexico, (2001-present), Board Chair, (2004-present)
`• Member, UNM Urban Agenda Task Force (2001-2002)
`• Chair, Dean of the College of Fine Arts Search Committee (2001-2002)
`• Member, UNM Council of Deans (2000-2009)
`• Member, UNM Strategic Planning Task Force, (2000-2001)
`RESEARCH EXPERTISE
`• Micro- and nano-fabrication for semiconductor devices and interconnects
`• Plasma etching and plasma etch tools (Parallel Plate, RIE, ECR, ICP, TCP, Helicon)
`• Plasma diagnostics: RF measurements, optical emission, laser induced fluorescence,
`diode laser absorption spectroscopy, microwave interferometry
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`• Chemical Vapor Deposition (CVD) and Plasma-Enhanced CVD (PECVD)
`• Micro-Electro Mechanical Systems (MEMS)
`• Chemical-Mechanical Planarization (CMP)
`• Atomic Layer Deposition (ALD) and Plasma-Assisted ALD (PA-ALD)
`• Molecular beam electric resonance measurements of rotational magnetic moments and
`hyperfine structure of diatomic molecules
`• Plasma physics, Plasma Transport, Plasma-materials interactions
`• Vacuum ultraviolet spectroscopy
`• Beam foil spectroscopy/vacuum ultraviolet spectroscopy of highly stripped atoms
`Interaction of hydrogen and deuterium with Zr-alloy bulk getter
`• Polarization of atomic hydrogen by optical pumping and spin exchange
`• Plasma-excited supersonic atom sources (Ar, He) for metastable and reactive beam
`generation
`CONTRACT AND GRANT SUPPORT
`
`Southern California Edison, "Equipment Grant for Optical Pumping/Spin Exchange Production
`of Spin-Polarized Hydrogen," $50,000, 10/1/82 - 9/30/83.
`
`Public Service Electric and Gas Company, "Equipment Grant for Optical Pumping/Spin
`Exchange Production of Spin-Polarized Hydrogen," $50,000, 10/1/82 - 9/30/83.
`
`U.S. Department of Energy, "Production of Spin-Polarized Hydrogen by Optical Pumping and
`Spin Exchange," $210,000, 2/1/84 - 9/30/85.
`
`New Jersey Commission on Science and Technology, Innovation Partnership Program,
`"Characterization and Optimization of Microwave Plasma Discharges used for Surface
`Modification Technology," $110,000, 5/1/87 - 4/30/88.
`
`U.S. Department of Energy, "Program in Plasma Science and Technology," $1,120,000, 10/1/87
`– 9/30/94.
`
`IBM, Faculty Development Award, $30,000, 6/1/88 - 5/31/89.
`
`Semiconductor Research Corporation, New Jersey SEMATECH Center of Excellence for
`Plasma Etching, "Electron Cyclotron Resonance Plasma Etch Tool Research and Plasma
`Diagnostic Development," $3,200,000, 10/1/88 - 3/31/94.
`
`New Jersey Commission on Science and Technology, Advanced Technology Center for Surface
`Engineered Materials, "Microfabrication Process Technology," $400,000, 1/1/89 - 6/30/93.
`
`SEMATECH, "Plasma Etch Reactor Development," $80,000, 10/1/92 - 9/30/93.
`
`Equipment donations, AT&T, IBM, and SRI/David Sarnoff Research Center.
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`Semiconductor Research Corporation, "Helicon Plasma Source Development," $200,000, 1/1/94
`- 3/31/95.
`
`Semiconductor Research Corporation, "Diagnostic Development," $145,000, 1/1/94 - 3/31/95.
`
`SEMATECH, “Diagnostic Support of Equipment Improvement Program,” $400,000, 9/1/94 -
`3/31/96.
`
`Semiconductor Research Corporation, "Helicon Plasma Source Development," $200,000, 4/1/95
`- 3/31/96.
`
`Semiconductor Research Corporation, "Diagnostic Development," $100,000, 4/1/95 - 3/31/96.
`
`Intel, “Donation of Phi 660 Scanning Auger Spectrometer,” $175,000, 12/95.
`
`DARPA (subcontract from Orincon, San Diego, CA), “Prototype Development of Adaptive
`Process Monitoring for Plasma Etch,” $79,698, 1/27/97 – 8/31/97.
`
`Lucent Technologies, Bell Labs, “Donation of Lucas Labs Cluster Etch Tool,” $800,000, 1997.
`
`Semiconductor Research Corporation, “Diagnostic Development for Low-Pressure High-
`Density Etch Tools, $100,000, 8/1/97 – 7/31/98.
`
`Lam Research (Fremont, CA), “Donation of Advanced Plasma Cluster Tool,” $1,700,000, 1998.
`
`DOE/NSF (subcontract from SUNY, Albany, NY), “Fundamental Science of High-Density
`Fluorocarbon Plasmas,” $120,875, 9/15/97 – 9/14/00.
`
`DOE/NSF (subcontract from SUNY, Albany, NY), “Fundamental Science of High-Density
`Fluorocarbon Plasmas,” $94,560, 9/15/00 – 9/14/03.
`
`PUBLICATIONS
`1. Stability and Heating Experiments on the ATC Tokamak, K. Bol, J. L. Cecchi, C. C.
`Daughney, R. A. Ellis, H. P. Eubank, H. P. Furth, R. A. Jacobsen, L. C. Johnson, E.
`Mazzucato, and W. Stodiek, Proceedings of the Sixth European Conference on
`Controlled Fusion and Plasma Physics (Joint Institute for Nuclear Research, Moscow,
`1973) Vol. I, p.18-21.
` 2. Molecular Zeeman Spectra of 6,7Li 79,81Br, J. L. Cecchi and N. F. Ramsey, J. Chem. Phys.
`60, 53-65 (January 1974).
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`3. Neutral-Beam Heating in the Adiabatic Toroidal Compressor, K. Bol, J. L. Cecchi, C. C.
`Daughney, R. A. Ellis, H. P. Eubank, H. P. Furth, R. J. Goldston, H. Hsuan, R. A. Jacobsen,
`E. Mazzucato, R. R. Smith, and T.H. Stix, Phys. Rev. Lett. 32, 661-664 (March 1974).
` 4. Neutral-Beam Heating in the Adiabatic Toroidal Compressor, K. Bol, J. L. Cecchi, C. C.
`Daughney, R. A. Ellis, H. P. Eubank, H. P. Furth, R. J. Goldston, H. Hsuan, E. Mazzucato, R.
`R. Smith, and P. E. Stott, Proceedings of the Fifth International Conference on Plasma
`Physics and Controlled Nuclear Fusion Research (International Atomic Energy Agency,
`Vienna, 1975) Vol. I, p. 77-82.
` 5. Experiments on the Adiabatic Toroidal Compressor, K. Bol, J. L. Cecchi, C. C. Daughney,
`F. DeMarco, R. A. Ellis, H. P. Eubank, H. P. Furth, H. Hsuan, E. Mazzucato, and R. R. Smith,
`Proceedings of the Fifth International Conference on Plasma Physics and Controlled
`Nuclear Fusion Research (International Atomic Energy Agency, Vienna, 1975) Vol. I, p.
`83-97.
` 6. Transport of Injected Impurities in ATC, S. A. Cohen, E. S. Marmar, and J. L. Cecchi,
`Proceedings of the Seventh European Conference on Controlled Fusion and Plasma
`Physics (Centre de Recherches en Physique des Plasmas, Ecole Polytechnique,
`Lausanne, 1975) Vol. I, p. 137.
` 7. System for Rapid Injection of Metal Atoms Into Plasmas, E. S. Marmar, J. L. Cecchi, and
`S. A. Cohen, Rev. Sci. Instrum. 46, 1149-1154 (September 1975).
` 8. Impurity Transport in Quiescent Tokamak Plasma, S. A. Cohen, J. L. Cecchi, and E. S.
`Marmar, Phys. Rev. Lett. 35, 1507-1510 (December 1975).
` 9. Intensity Modulations in the Decay of the 32P1/2o Level in the Sodium-Like Ion, Cu18+,
`D. J. Pegg, P. M. Griffin, B. M. Johnson, K. W. Jones, J. L. Cecchi, and T.H. Kruse, Phys. Rev.
`Lett. 38, 1471-1473 (June 1977).
` 10. Radiative Lifetimes of the Low-Lying Levels of Na-Like Copper, D. J. Pegg, P. M. Griffin,
`B. M. Johnson, K. W. Jones, J. L. Cecchi, and T. H. Kruse, Phys. Rev. A 16, 2008-2010
`(November 1977).
` 11. Sputtering and Surface Damage of TFTR Protective Plate Candidate Materials by
`Energetic D+ Irradiation, M. Kaminsky, K. S. Das, and J. L. Cecchi, Fusion Technology
`(Pergamon Press, Oxford, 1979) Vol. 2, p. 789-794.
` 12. Tritium Permeation and Wall Loading in the TFTR Vacuum Vessel, J. L. Cecchi, J. Vac.
`Sci. Technol. 16, 58-70 (January/February 1979).
` 13. Spectra From Foil-Excited Molybdenum Ions, B. M. Johnson, K. W. Jones, J. L. Cecchi, and
`T. H. Kruse, IEEE Trans. Nucl. Sci. NS-26, 1317-1319 (February 1979).
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`14. Comparison of Tungsten and Gold Radiation From Beam-Foil Excitation and Tokamak-
`Produced Plasmas, B. M. Johnson, K. W. Jones, J. L. Cecchi, E. Hinnov, and T. H. Kruse,
`Phys. Lett. 70A, 320-322 (March 1979).
` 15. Surface Damage and Sputtering of ATJ Graphite as Candidate Material for TFTR Under
`D+ Bombardment, S. K. Das, M. Kaminsky, R. Tishler, and J. L. Cecchi, J. Nucl. Mater.
`85/86, 225-230 (December 1979).
` 16. The ISX Graphite Limiter Experiment, R. A. Langley, R. J. Colchin, R. C. Isler, M.
`Murakami, J. E. Simpkins, J. L. Cecchi, V. L. Corso, H. F. Dylla, R. A. Ellis, and M. Nishi, J.
`Nucl. Mater. 85-86, 215-219 (December 1979).
` 17. Transient Getter Scheme for the Tokamak Fusion Test Reactor, J. L. Cecchi, S. A. Cohen,
`and J. J. Sredniawski, J. Vac. Sci. Technol. 17, 294-297 (January/February 1980).
` 18. EUV Spectra of MoXIV to MoXXIX , B. M. Johnson, K. W. Jones, J. L. Cecchi, and T. H. Kruse,
`Phys. Lett. 78A, 61-64 (July 1980).
` 19. PDX Divertor Operation, D. K. Owens, V. Arunasalam, C. Barnes, M. G. Bell, K. Bol, S. A.
`Cohen, J. L. Cecchi, C. C. Daughney, S. L. Davis, D. L. Dimock, H. F. Dylla, P. C. Efthimion,
`R. J. Fonck, B. Grek, R. J. Hawryluk, E. Hinnov, H. Hsuan, M. Irie, R. A. Jacobsen, D. W.
`Johnson, H. Maeda, D. K. Mansfield, E. Mazzucato, K. McGuire, D. M. Meade, D. Mueller,
`M. Okabayashi, G. L. Schmidt, J. A. Schmidt, E. H. Silver, J. C. Sinnis, P. Staib, J. D. Strachan,
`S. Suckewer, F. H. Tenney, and M. Ulrickson, J. Nucl. Mater. 93/94, 213-219 (October
`1980).
` 20. Impurity Control in TFTR, J. L. Cecchi, J. Nucl. Mater. 94/95, 28-43 (October 1980).
` 21. Thermal Testing of Coated Materials for Limiters and Protective Plates in the Tokamak
`Fusion Test Reactor, M. Ulrickson and J. L. Cecchi, J. Thin Solid Films 73, 133-138
`(November 1980).
` 22. Tracer Element Injection Into PDX Tokamak for Spectral Line Identification and
`Localized Doppler Temperature Measurements, S. Suckewer, J. L. Cecchi, S. A. Cohen, R.
`J. Fonck, and E. Hinnov, Phys. Lett. 80A, 259-262 (December 1980).
` 23. PDX Experimental Results, D. M. Meade, V. Arunasalam, C. Barnes, M. G. Bell, M. Bitter,
`K. Bol, R. Budny, J. L. Cecchi, S. A. Cohen, C. C. Daughney, S. L. Davis, D. L. Dimock, H. F.
`Dylla, P. C. Efthimion, H. P. Eubank, R. J. Fonck, R. Goldston, B. Grek, R. J. Hawryluk, E.
`Hinnov, H. Hsuan, M. Irie, R. A. Jacobsen, D. W. Johnson, L. C. Johnson, H. W. Kugel, H.
`Maeda, D. K. Mansfield, R. T. McCann, D. C. McCune, K. McGuire, D. R. Mikkelsen, S.
`Milora, D. M. Manos, D. Mueller, M. Okabayashi, D. K. Owens, M. F. Reusch, K. Sato, N.
`R.Sauthoff, G. L. Schmidt, E. H. Silver, J. C. Sinnis, J. D. Strachan, S. Suckewer, H.
`Takahashi, and F. H. Tenney, Proceedings of the Eighth International Conference on
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`Plasma Physics and Controlled Nuclear Fusion Research (International Atomic Energy
`Agency, Vienna, 1981) Vol. I, p. 665-676.
` 24. The Design and Test Results of an In-Torus Zirconium/Aluminum Getter Pump System
`for PDX, J. J. Sredniawski, J. L. Cecchi, and H. F. Dylla, Proceedings of the 9th Symposium
`on Engineering Problems of Fusion C. K. Choi, Editor, (IEEE, NY, 1981) 1601-1604.
` 25. Response of Zr-A1 Getter Material to the Anticipated TFTR In-Torus Environment, B.
`Ferrario, M. Borghi, J. L. Cecchi, and J. J. Sredniawski, Proceedings of the Eleventh
`Symposium on Fusion Technology (Pergamon Press, New York, 1981) Vol. 1, p. 375-
`383.
` 26. TFTR Impurity Control Prototype Tests, J. L. Cecchi, H. F. Dylla, R. J. Fonck, R. J. Knize, H.
`W. Kugel, M. Okabayashi, D. K. Owens, M. Ulrickson, and J. J. Sredniawski, Proceedings
`of IAEA Technical Committee Meeting on Divertors and Impurity Control, edited by M.
`Keilhacker and U. Daybelge (Max-Planck-Institut fur Plasmaphysik, Garching, 1981) p.
`97.
` 27. Compatibility of the Zr-Al Alloy With a Tokamak Plasma Environment, R. J. Knize, J. L.
`Cecchi, and H. F. Dylla, J. Nucl. Mater. 103/104, 539-543 (1981).
` 28. Surface Analysis of TFTR Vacuum Vessel Samples Subjected to the Post-Weld Heat
`Treatment, R. L. Moore, S. A. Cohen, J. L. Cecchi, and H. F. Dylla, J. Vac. Sci. Technol. 18,
`1072 (April 1981).
` 29. Anomalies in the Beam-Foil Measurements for ∆n=0 Transitions in Highly Ionized
`Members of the Li, Na, and Cu Sequences, B. M. Johnson, D. C. Gregory, K. W. Jones, D. J.
`Pegg, P. M. Griffin, T. H. Kruse, J. L. Cecchi, and J. O. Ekberg, IEEE Trans. Nucl. Sci. NS-28,
`1159-1161 (April 1981).
` 30. The Effect of Hydrogen Glow Discharge Conditioning on Zr/Al Getter Pumps, H. F. Dylla,
`J. L. Cecchi, and M. Ulrickson, J. Vac. Sci. Technol. 18, 1111-1113 (April 1981).
` 31. Design of TFTR Movable Limiter Blades for Ohmic and Neutral Beam Heated Plasmas,
`D. W. Doll, M. Ulrickson, J. L. Cecchi, J. C. Citrolo, D. Weissenburger, and J.Bialek,
`Proceedings of the 9th Symposium on Engineering Problems in Fusion Research, C.
`Choi, editor, (IEEE, N.Y. 1981) p. 1654-1657.
` 32. Tokamak Limiter Design, J. L. Cecchi, Proceedings of the 9th Symposium on Engineering
`Problems in Fusion Research, C. K. Choi, editor, (IEEE, N.Y. 1981) p 1378-1382.
` 33. Measurement of H2, D2 Solubilities in Zr-Al, R. J. Knize, J. L. Cecchi, and H. F. Dylla, J. Vac.
`Sci. Technol. 20, 1135-1137 (April 1982).
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`34. Changes in Tokamak Plasma Properties During Impurity Injection, S. A. Cohen, J.L.
`Cecchi, C. C. Daughney, S. L. Davis, D. L. Dimock, P. C. Efthimion, M. Finkenthal, R. J.
`Fonck, E. Hinnov, R. A. Hulse, D. W. Johnson, D. M. Manos, D. H. McNeill, S. S. Medley, E.
`B. Meservey, D. Mueller, J. F. Schivell, E. H. Silver, S. Suckewer, J. R. Timberlake and S.
`von Goeler, J. Vac. Sci. Technol. 20, 1226-1229 (April 1982).
` 35. Beam-Foil Spectra for 15-160 Mev Zr-Al Wavelenths from 6-60 nm, T. H. Kruse, J.L.
`Cecchi, B. M. Johnson, D. C. Gregory and K. W. Jones, Phys. Lett. A, 90A, 284-287 (July
`1982).
` 36. Reduction of Recycling by Pumping at the PDX Limiter, J. L. Cecchi, R. J. Knize, H. F. Dylla,
`R. J. Fonck and D. K. Owens, J. Nucl. Mater. 111/112, 305-310 (October 1982).
` 37. Diffusion of Hydrogen and Deuterium in Zr-Al, R.J. Knize and J. L. Cecchi, J. Nucl. Mater.
`111/112, 645-647 (October 1982).
` 38. Impurity Levels and Power Loading in the PDX Tokamak with High Power Neutral
`Beam Injection, R. J. Fonck, M. G. Bell, K. Bol, K. Brau, R. Budny, J. L. Cecchi, S. A. Cohen,
`S. L. Davis, H. F. Dylla, R. J. Goldston, B. Grek, R. J. Hawryluk, J. Hirschberg, D. W. Johnson,
`R. A. Hulse, R. Kaita, S. M. Kaye, D. K. Owens, R.J. Knize, H. W. Kugel, D. M. Manos, D. K.
`Mansfield, K. McGuire, D. Mueller, K. Oasa, M. Okabayashi, G. L. Schmidt, S. Sesnic, S.
`Suckewer, H. Takahashi, F. H. Tenney, P.Thomas, M. Ulrickson, and R. V. Yelle, J. Nucl.
`Mater. 111/112, 343-354 (November/December 1982).
` 39. Pressure Dependence of Zr-Al Pumping Speed for H2, J. L. Cecchi and R. J. Knize, J. Vac.
`Sci. Technol. A1, 1276-1278 (April/June 1983).
` 40. Enhanced Selective Hydrogen Desorption from Metals, R. J. Knize and J. L. Cecchi, J. Vac.
`Sci. Technol. A1, 1273-1275 (April/June 1983).
` 41. Theory of Bulk Gettering, R. J. Knize and J. L. Cecchi, J. App. Phy. 54, 3183-3189 (June
`1983).
` 42. Modeling the Coupling of Magnetodynamics and Elastomechanics in Structural
`Analysis, J. Bialek, D. Weissenberger, M. Ulrickson and J. L. Cecchi, Proceedings of the
`Tenth Symposium on Fusion Engineering, 51-5 (1984).
` 43. Phenomenology of Bulk Gettering, R. J. Knize and J. L. Cecchi, Fus. Technol. 6, 503-510
`(September 1984).
` 44. Gettering in Fusion Devices, J. L. Cecchi and R. J. Knize, J. Vac. Sci. Technol., A2, 1214-
`1221 (April 1984).
` 45. Spin Exchange Optical Pumping to Produce Large Amounts of Polarized Nuclei, W.
`Happer, E. Miron, R. Knize, and J. Cecchi, Proceedings of Polarized Proton Ion Sources
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`Vancouver, Canada, May 1983, AIP Conference Proceedings No 117, (American
`Institute of Physics, 1984) 114-121.
` 46. Initial Limiter and Getter Operation on TFTR, J. L. Cecchi, et al., J. Nucl. Mater. 128/129,
`1-9 (1984).
` 47. Tritium Inventory and Permeation in TFTR, M. I. Baskes, K. L. Wilson, D. K. Brice, B. L.
`Doyle, W. R. Wampler, D. B. Heifetz, H. F. Dylla, and J. L. Cecchi, J. Nucl. Mater. 128/129,
`629 (1984).
` 48. TFTR Initial Operations, K. M. Young, M. G. Bell, W. R. Blanchard, N. L. Bretz, J. L. Cecchi,
`J. Coonrod, S. L. Davis, H. F. Dylla, P. C. Efthimion, R. J. Fonck, R. J. Goldston, D. J. Grove,
`R. J. Hawryluk, H. W. Hendel, K. W. Hill, J. Isaacson, L. C. Johnson, R. Kaita, R. B. Krawchuk,
`R. Little, M. P. McCarthy, D. C. McCune, K. McGuire, D. M. Meade, S. S. Medley, D.
`Mikkelson, D. Mueller, E. Nieschmidt, D. K. Owens, A. T. Ramsey, A. L. Roquemore, L. E.
`Samuelson, N.R. Sauthoff, J. F. Schivell, J. A. Schmidt, S. Sesnic, J. Sinnis, J. D. Strachan, G.
`D. Tait, G. Taylor, F. H. Tenney, and M. Ulrickson, Plasma Physics and Controlled Fusion
`26, 11 (January 1984).
` 49. Measurement of the Hydrogenic Recombination Coefficient for the TFTR Vacuum
`Vessel, H. F. Dylla, J. L. Cecchi, R. J. Knize, J. Nucl. Mater., 121, 243-248 (March 1984).
` 50. Thermal Loads on the Ignitor Limiter for Elongated Plasmas, J. L. Cecchi and B. Coppi, J.
`Nucl. Mater., 121, 449-452 (March 1984).
` 51. Recent Results from TFTR, R. J. Hawryluk, M. G. Bell, M. Bitter, W. R. Blanchard, N. Bretz
`C. Bush, J. L. Cecchi, et al., Proceedings of Fourth International Symposium on Heating
`in Toroidal Plasmas, Rome, Italy, (March 1984) edited by H. Knoepfel and E. Sindoni,
`Vol. II, pp. 1012-1031.
` 52. Power Handling and Particle Control in TFTR, R. J. Hawryluk, J. L. Cecchi, H. F. Dylla, R.
`J. Knize, R. Little, D. K. Owens, and M. Ulrickson, Proceedings of the Fourth International
`Symposium on Heating in Toroidal Plasmas, Rome, Italy, (March 1984) edited by H.
`Knoepfel and E. Sindoni, Vol. II, p. 1374.
` 53. Diffusion of Hydrogen and Deuterium in ZrVFe, R. J. Knize, J. L. Stanton, and J. L. Cecchi,
`J. Nucl. Mater., 122/123, 1553-1557 (April 1984).
` 54. Initial Confinement Studies of Ohmically Heated Plasmas in the Tokamak Fusion Test
`Reactor, P. C. Efthimion, M. G. Bell, W. R. Blanchard, N. L. Bretz, J. L. Cecchi, et al., Phys.
`Rev. Letters, 52, 1492-1495 (April 1984).
` 55. Optical Pumping Production of Spin Polarized Hydrogen, R. J. Knize, W. Happer, and J.
`L. Cecchi, Proceedings of the Workshop on Polarized Targets in Storage Rings Argonne,
`Il, (May 1984).
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`56. Neutral Beam Heating in TFTR-Projections and Initial Results, H. P. Eubank, J. Bell, M.
`G. Bell, M. Bitter, W. R. Blanchard, F. Boody, D. Boyd, N. Bretz, C. Bush, J. L. Cecchi, et al.
`Proc. Tenth International Conference on Plasma Physics and Controlled Nuclear Fusion
`Research IAEA-CN-44/A-V-3, 27 pp. London, UK, 12-19 (September 1984).
` 57. Confinement Studies of Ohmically-Heated Plasmas in TFTR, P. C. Efthimion, N. L. Bretz,
`M. G. Bell, M. Bitter, W. R. Blanchard, F. P. Boody, D. Boyd, C. E. Bush, J. L. Cecchi, et al.
`Tenth International Conference on Plasma Physics and Controlled Nuclear Fusion
`Research London, UK, September 1984, Paper IAEA-CN-44/A-I-2 1 (September 1984).
` 58. Adiabatic Toroidal Compression and Free-Expansion Experiments in TFTR, G. D. Tait, J.
`Bell, M. G. Bell, M. Bitter, W. R. Blanchard, F. P. Boody, D. Boyd, N. L. Bretz, C. E. Bush, J.
`L. Cecchi, et al., Tenth International Conference on Plasma Physics and Controlled
`Nuclear Fusion Research, London, UK, September 1984, Paper IAEA-CN-44/A-III-1
`(September 1984).
` 59. Technique for In Vacuo Inerting of ZrAl Alloy Bulk Getters, J. L. Cecchi, P. H. LaMarche,
`H. F. Dylla, and R. J. Knize, J. Vac. Sci. Technol. A3, 487 (1985).
` 60. Performance of the TFTR Moveable Limiter Tiles, M. Ulrickson, J. L. Cecchi, B. Doyle, H.
`F. Dylla, S. S. Medley, D. K. Owens, and P. Trester, J. Nucl. Mater., 133/134, 253 (1985).
` 61. Initial Results Utilizing Optical Pumping with a Laser to Produce Spin-Polarized
`Hydrogen, R.J. Knize and J.L. Cecchi, Phys Lett., 113A, 255 (1985).
` 62. Lifetimes and Oscillator Strengths for the Resonance Transitions in Cu-like Iodine, I
`XXV, B.M. Johnson, K.W. Jones, D.C. Gregory, J.O. Ekberg, L. Engstrom, T.H. Kruse, and
`J.L. Cecchi, Physica Scripta, 32, 210 (1985).
` 63. Confinement Studies of Neutral Beam Heated Discharges in TFTR, M. Murakami, V.
`Arunasalam, J.D. Bell, W.G. Bell, M. Bitter, W.R. Blanchard, F. Boody, N. Bretz, R. Budny,
`C.E. Bush, J.D. Callen, J.L. Cecchi, et al., Plasma Physics and Controlled Fusion, 28, 17
`(September 1986).
` 64. TFTR Confinement Results, M.G. Bell, V. Arunasalam, M. Bitter, W.R. Blanchard, F.
`Boody, N. Bretz, R. Budny, C.E. Bush, J.D. Callen, J.L. Cecchi, et al., Plasma Physics and
`Controlled Fusion, 28, 1329-1340 (September 1986).
` 65. Time Resolved Optical Pumping Studies of Hydrogen Discharges, R.J. Knize and J.L.
`Cecchi, Phys. Rev. A, 33 3595 (May 1986).
` 66. Dissociative Pumping of the Alkanes Using Nonevaporable Getters, L.C. Emerson, R.J.
`Knize, J.L. Cecchi, and O. Auciello, J. Vac. Sci. Technol., A4, 297-299 (May 1986).
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`67. Plasma Materials Interactions in TFTR, H.F. Dylla, M.G. Bell, W.R. Blanchard, F.P. Boody,
`N. Bretz, R. Budny, C.E. Bush, J.L. Cecchi, et al., J. Nucl. Mater. 145/146, 48-60 (February,
`1987).
` 68. Measurement of the Hydrogen Recombination Coefficient for ZrAl, R.J. Knize, L.C.
`Emerson, and J.L. Cecchi, J. Vac. Sci. Technol., A5, 2202-2204 (June 1987).
` 69. Pumping of Hydrocarbons Using Nonevaporable Getters, L.C. Emerson, R.J. Knize, and
`J.L. Cecchi, J. Vac. Sci. Technol., A5, 2584-2586 (July, 1987).
` 70. Plasma Surface Interactions in Compact Ignition Devices, M. Ulrickson, J.L. Cecchi, and
`B. Lipschultz, J. Vac. Sci. Technol., A5, 2257-2262 (June 1987).
` 71. Neutral Beam Injection on the Tokmak Fusion Test Reactor, L.R. Grisham, M.G. Bell,
`W.R. Blanchard, F.P. Boody, N. Bretz, R. Budny, C.E. Bush, J.L. Cecchi, et al., Nucl. Instrum.
`Methods, Phys. Res., Sect. B, b24-25, 741-745 (1987).
` 72. Introduction to Plasma Concepts and Discharge Configurations, J.L. Cecchi, in,
`Handbook of Plasma Processing Technology, S.M. Rossnagel, J.J. Cuomo, and W.D.
`Westwood, eds., (Noyes, Park Ridge, NJ, 1990) pp. 14-69.
` 73. Diagonostics of Low Temperature Plasmas: The Electron Component, D.M. Manos, J.L.
`Cecchi. C.W. Cheah, and H.F. Dylla, Thin Solid Films, 195, 319-336 (1991).
` 74. Operational Characterist