Model EQ-99X
`LDLS™
`Laser-Driven Light Source
`
`
`
`
`
`Operation and Maintenance Manual
`Revision 1 January 2014
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`
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`Part Number DOC-6521
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`Energetiq Ex. 2059, page 1 - IPR2015-01375
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`Copyright © 2014 Energetiq Technology Inc. All rights reserved.
`
`Energetiq products are covered by US and foreign patents. All technical information, including
`drawings, schematics and specifications contained in this manual are the property of Energetiq
`and shall not be reproduced in whole or in part without the written consent of Energetiq. The
`content of this manual is subject to change without notice.
`
`Energetiq Technology Inc.
`7 Constitution Way, Woburn, MA 01801 USA
`Tel. +1 (781) 939-0763
`Fax +1 (781) 939-0769
`E-mail: service@energetiq.com
`http://www.energetiq.com
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`Declaration of Conformity
`
`
`We, the manufacturers
`
`
`Energetiq Technology Inc.
`7 Constitution Way
`Woburn, Massachusetts 01801 USA
`
`hereby declare that the product family
`
`
`LDLS™ Laser-Driven Light Source
`Model EQ-9X Series High Brightness Broadband Light Source
`
`is in conformity with the requirements of the following standards
`
`
`
`
`EN 61010-1:2010 Safety Requirements for Electrical Equipment for Measurement, Control and
`(3rd Edition) Laboratory Use: Part 1 – General Requirements
`CISPR 11:2009 Industrial, scientific and medical equipment - Radio-frequency disturbance
` +A1:2010 characteristics - Limits and methods of measurement
`
`IEC61000-4-2:2001
`Electrostatic Discharge Immunity
`IEC61000-4-3:2010
`Radiated Electromagnetic Field Immunity
`IEC61000-4-4:2012
`Electrical Fast Transient Burst Immunity
`IEC61000-4-6:2008
`Radio Frequency Common Mode Immunity
`IEC61000-4-8:2009
`Power Frequency Magnetic Field Immunity
`EN61326-1:2006
`Electrical equipment for measurement, control and laboratory use.
`EMC requirements. General requirements
`Safety of laser products - Part 1: Equipment classification and
`requirements
`
`EN60825-1 (2007)
`
`
`in accordance with the provisions of
`
`2006/95/EC EU Low Voltage Directive
`2004/108/EC EU Electromagnetic Compatability Directive.
`
`
`Signed,
`
`
`
` 28 January 2014
`
`Paul Blackborow, CEO Date
`
`at Woburn, Massachusetts USA
`
`CE Authorized Person in the Community:
`Paul Laidler, Business Director (Machinery)
`TÜV SÜD Product Service
`Belasis Business Centre
`Coxwold Way
`Billingham TS23 4EA, UK
`Tel. +44 (0) 1642 345637
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`Table of Contents
`Chapter 1.................................................................................................................................1
`General Information....................................................................................................1
`Safety............................................................................................................................................... 1
`Chapter 2.................................................................................................................................8
`Description ....................................................................................................................8
`General........................................................................................................................................... 8
`System Description .................................................................................................................... 11
`Power Supply Controller........................................................................................................... 12
`Lamp House................................................................................................................................ 13
`Chapter 3.............................................................................................................................. 16
`Installation................................................................................................................... 16
`Unpacking.................................................................................................................................... 16
`Connections................................................................................................................................. 16
`Installation Procedure................................................................................................................ 22
`Chapter 4.............................................................................................................................. 24
`Operation.................................................................................................................... 24
`Starting.......................................................................................................................................... 24
`Stopping ....................................................................................................................................... 24
`Chapter 5.............................................................................................................................. 26
`Maintenance.............................................................................................................................. 26
`EQ-99 SMA Fiber Cleaning Process ................................................................................ 26
`Troubleshooting ...................................................................................................................... 30
`Lamp Replacement .................................................................................................................... 32
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`Chapter 1
`GENERAL INFORMATION
`Safety
`WARNING
`
`This unit emits ultraviolet (UV) radiation that is
`harmful to humans. Avoid exposure to the
`direct or reflected output beam. Make certain
`that the appropriate output beam shields and
`optics are in place prior to energizing the unit.
`All
`interlocks must be satisfied prior
`to
`operation; failure to do so may
`lead to
`hazardous conditions.
`
`CAUTION
`
`The EQ-99X emits dangerous levels of UV
`radiation. Even short exposures to skin or eyes
`may cause burns. Ensure that only authorized
`personnel are in the vicinity of source during
`operation. Personnel in vicinity of operating
`source should wear protective eyewear, clothing,
`and gloves. Lighted UV warning lights and signs
`posted on doors to lab areas may help prevent
`accidental exposure.
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`WARNING
`
`The EQ-99X controller utilizes an internal Class
`4 IR laser capable of causing severe injury to eyes
`or skin. Do not open or attempt to service this
`unit. Contact Energetiq regarding any problems
`with the unit.
`
`
`
`
`
`General Precautions
`The output beam from the EQ-99X should be blocked when not in use with an electronic
`shutter or other appropriate beam blocking device. Due to the possibility of generating ozone
`when ambient oxygen is exposed to short wavelength light, the beam should always be
`enclosed in an appropriate beam pipe, tube, or enclosed space. We suggest purging any beam
`transport space with dry nitrogen gas.
`
`The EQ-99X source must also be cabled correctly and connected to a socket with a protective
`earth ground prior to operation.
`
`Refer to the Installation section of this manual in Chapter 3 for details of the facilities
`connections.
`
`Other than a bulb replacement, there are no user-serviceable parts inside the EQ-99X. For
`any problems encountered during operation, please contact Energetiq Technology for
`assistance. If there is a component failure, do not attempt to open the Power Supply
`Controller or Lamp House enclosure of the EQ-99X.
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`The EQ-99X utilizes a quartz lamp containing a high-pressure gas fill. Explosion of
`
`the lamp and possible injury from flying fragments can occur if the lamp is
`
`mishandled.
`
`Do not open the enclosure of either the Lamp House enclosure or the Power Supply
`
`Controller. Dangerous invisible infrared laser beams and hazardous voltages exist
`inside the units. Opening the chassis both voids the warranty and exposes the user to
`dangerous radiation and hazardous voltages.
`
`
`
`CAUTION
`
`Use of controls or adjustments or performance of procedures
`other than those specified herein may result in hazardous
`radiation exposure.
`
`
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`Laser Information
`The EQ-99X uses a patented (U.S. Patent #7435982, 7786455, 7989786, others pending) laser
`drive system to excite a plasma that radiates in the UV as well as the visible bands. A class 4
`laser is located in the Power Supply Controller enclosure. Laser energy is delivered via an
`armored fiber to the Lamp House enclosure and connected with an SMA-type connector.
`Safety interlocks shut down the laser power if the SMA connector is removed from the Lamp
`House enclosure. The optical configuration of the Lamp House ensures that the direct laser
`beam can not exit the unit. The EQ-99X laser product is designated as Class 1 during all
`normal operation.
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`The parameters of the non-accessible internal laser are given below in Table 1.
`
`Wavelength
`
`Emission Type
`
`974 nm
`
`CW
`
`Laser Power for classification
`
`<8.7 mW via 12mm measurement
`aperture at a distance of 300mm
`
`Beam Diameter
`
`~29 mm at aperture
`
`Divergence
`
`>100 mRad
`
`Transverse Beam Mode
`
`Diffuse
`
`Table 1: Embedded Laser Parameters
`
`
`No regular service is required for the EQ-99X. Any service to the system must be performed
`only by factory authorized and trained technicians. To avoid injury, under no circumstances
`should the user open or modify the Lamp House or Power Supply Controller enclosure.
`
`The unit must not be operated if the covers are removed or it is defective in any way. Contact
`Energetiq if any problems with the equipment are suspected.
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`Labels and Safety Notification
`The following safety labels appear on the product. Figure 1 shows the location of each label
`on the EQ-99X system.
`
`
`
`UV Hazard warning label – indicates hazardous levels of UV
`light are present.
`
`
`
`Manufacturer’s identification label – gives the manufacturer’s
`name and address, and the model, serial number, and date of
`manufacture of the equipment.
`
`
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`Explanatory label – states the classification of the laser product.
`Class 1 is the lowest hazard level classification.
`
`
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`
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`Certification label – states that the equipment has been tested
`and verified to meet the standards indicated.
`
`Non-interlocked housing label – notifies of a potential hazard
`when covers are removed.
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`Figure 1: Safety Label Locations
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`Non-interlocked
`Housing Label
`
`
`
`
`
`Manufacturer’s
`Identification label
`
`Non-interlocked
`Housing Label
`
`Manufacturer’s
`Identification label
`
`
`
`Explanatory
`Label
`
`Certification
`Label
`
`Safety Interlocks
`The EQ-99X is equipped with interlocks to prevent operation of the device when any of the
`following conditions are present:
`
`1. Bulb is not properly installed into the Lamp House enclosure
`2. The laser fiber is not properly connected to the Lamp House enclosure
`3. An external interlock is open
`
`External Interlock
`External interlock pins are provided for the customer’s use (see Chapter 3 for connection
`details). Any suitable normally-open contact or solid-state switch can operate the interlock
`circuit.
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`The interlock circuit must be connected to enable the operation of the unit. Should the
`interlock connection open during operation or standby, the source is immediately disabled, and
`all light output from the aperture ceases.
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`Chapter 2
`DESCRIPTION
`
`General
`The EQ-99X is a broad-band lamp system for use in a wide variety of applications. The lamp
`produces high brightness, broad-band light from DUV wavelengths through visible and
`beyond. The output is very stable, and has a long lifetime before any service is required. A
`simple control interface ensures ease of use.
`
`Some of the advantages of the EQ-99X include:
`
`• Very high brightness across complete spectrum
`– 170nm through visible and beyond
`• Eliminates need for multiple lamps (replaces D2/Tungsten/Xenon Arc)
`– Simplified optical system
`• Excellent spatial stability
`– Repeatable measurements
`• Superior short and long term power stability
`– Repeatable measurements
`• Electrodeless operation for long life
`– Reduced consumable costs
`– Minimal recalibration of instrument
`
`
`
`The EQ-99X system consists of a Power Supply Controller unit, Lamp House unit, and
`interconnecting cables. Connection to DC power is required for operation. Connection to
`nitrogen purge gas is optional, but recommended for best performance. See Chapter 3 for
`connection details.
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`Specifications
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`Optical Performance
`• Typical output spectrum: see Figure 2.
`
`
`EQ-99
`D2 Lamp
`
`150
`
`250
`
`350
`
`450
`Wavelength, nm
`
`550
`
`650
`
`750
`
`Figure 2: Typical Output Spectrum
`
`Physical Specifications
`
`100
`
`10
`
`1
`
`0.1
`
`0.01
`
`0.001
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`Radiance, mW/mm2/nm/sr
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`
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`Dimensions (H x W x D)
`• Lamp House: 82 x 86 x 76 mm (3.2 x 3.4 x 3.0 in)
`• Power Supply Controller: 113 x 111 x 299 mm (4.4 x 4.4 x 11.8 in)
`
`
`Weight
`• Lamp House: 0.7 kg (1.5 lbs)
`• Power Supply Controller: 1.4 kg (3.0 lbs)
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`Utility Requirements
`• Electrical: 12VDC, 140W
`• Cooling: natural convection and internal fan, no auxiliary cooling necessary
`• Purge gas (optional): clean dry nitrogen, filtered to 5um 20 psig (0.14 MPa) supply
`pressure
`
`Remote Interface
`
`Digital Inputs
`• Type: Optocoupler LED
`• Logic: Active High
`•
`Input voltage: 5VDC
`•
`Input current: 8mA
`
`
`Digital Outputs
`• Type: Open collector to ground (digital common)
`• Logic: Active Low
`• Voltage: 30VDC max.
`• Sink current: 30mA max.
`
`
`User Power
`• Voltage: 5VDC, referenced to digital common
`• Current: 50mA maximum
`
`Environmental Requirements
`
`Operating
`• Ambient temperature: 15–35°C
`• Relative Humidity: non-condensing, 80% max. for temperatures up to 31°C,
`decreasing linearly to 50% max. at 40°C.
`• Pollution Degree 2 (normally only non-conductive pollution; occasional,
`temporary condensation possible)
`•
`Installation Category II
`•
`Indoor use only
`Transport
`• Temperature: -5–95°C
`• Relative Humidity: non-condensing, 95% max.
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`System Description
`As shown in Figure 3 the EQ-99X system consists of a Power Supply Controller unit, Lamp
`House, laser fiber optic cable, and Lamp House signal cable (not shown). Power and I/O
`interface connections (also not shown) are provided by the user.
`
`The following sections provide descriptions of the system components and controls, and gives
`an overview of their functions. Refer to the “Installation” section of this manual (Chapter 3)
`for more detailed information.
`
`I/O Interface Connector
`(rear panel)
`
`
`
`Power Supply
`Controller
`
`Lamp House
`Signal Connector
`
`12 VDC Input Connector
`(rear panel)
`
`Lamp
`House
`
`Status
`Indicators
`
`Fault Status
`Indicators
`
`
`
`
`
`Optical
`Output Window
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`Figure 3: EQ-99X Lamp System
`
`Armored Laser
`Fiber
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`Power Supply Controller
`The Power Supply Controller contains:
`•
`IR Diode Laser
`• Laser power supply
`• Thermo-electric cooler for laser
`• Permanently attached, armored laser fiber optic cable
`• Control electronics
`• Status indicator LEDs
`•
`Interface connectors
`
`
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`
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`External features (refer to Figure 3):
`
` Status Indicator LEDs
`These five LEDs indicate the system status. The function of these indicators is shown below
`in Table 2.
`
`
`
`LED Label
`POWER ON
`LAMP ON
`LASER ON
`
`CONTROLLER FAULT
`
`Meaning (when lit)
`DC power is connected to the EQ-99X Power Supply Controller
`UV Light is on
`Laser power is ON and laser light is being delivered to the Lamp
`House
`One of the following has occurred in the Power Supply Controller:
`1. External interlock open
`2. Controller internal temperature too high
`3. Laser power not reaching setpoint
`4. Laser Temperature Fault
`5. Failure in Laser Delivery Fiber
`One of the following has occurred in the Lamp House module:
`1. Control Cable not connected properly
`2. Lamphouse internal termperature too high
`3. Laser fiber not correctly connected
`4. Bulb not correctly installed
`5.
`Ignition Failure
`Table 2: Status Indicator LED Functions
`
`LAMP MODULE FAULT
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`Input/Output (I/O) Connector
`Provides access to control and status signals. See Chapter 3 for pin assignments and functions.
`
`This is the only operator interface to the EQ-99X – there are no local controls. Energetiq
`offers the EQ-99-RC Remote Control Module which connects to the Input/Output
`connector and provides a means of local control. Contact Energetiq for additional
`information.
`
`Power Input Connector
`This is a latching input connector for 12 VDC power. Power can be provided using the
`optional PS00018 12VDC power supply. Alternatively, the EQ-99X can be powered directly
`from a customer provided 12VDC power supply. See Chapter 3 for detailed information.
`
`Lamp House Signal Connector (mini D sub – 9-pin)
`Provides various power and control signals to/from the Lamp House module. No other
`connector or cable may be used with the EQ-99X other than the one supplied.
`
`Armored Laser Fiber
`The laser light is delivered from the Power Supply Controller to the Lamp House via a fiber
`optic cable with armored protection. The fiber is permanently attached to the Power Supply
`Controller, and connected to the Lamp House by an SMA-type connector. It is critical that
`this armored fiber be treated with care and inspected for any abnormalities prior to operation.
`Avoid sharp bends, which will permanently damage the fiber. Minimum bend radius is 30mm
`(1.18 in). Avoid crimping or compressing the fiber. See Chapter 3 for more information on
`installation and fiber end face cleaning.
`
`Lamp House
`The Lamp House assembly contains:
`• Lamp
`•
`Igniter
`•
`IR pumping optics
`• Output window
`• Laser ON indicator
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`•
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`Interface connectors
`
`
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`
`
`Purge Gas
`Port
`
`Signal Connector
`(to Controller)
`
`Laser ON
`Indicator
`
`Lamp
`Window
`
`Bulb mounting
`flange
`
`Laser Input
`(SMA-type)
`
`Figure 4: Lamp House Assembly
`
`
`
`
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`External features (refer to Figure 4):
`
`Lamp Window
`The lamp window at the optical output provides protection from the high pressure bulb inside
`the Lamp House. An internally-threaded SM1 adapter is provided for easy connection of
`optical hardware.
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`Nitrogen Purge Inlet
`This is the inlet fitting for nitrogen purge gas. Purge gas is optional but is recommended for
`best performance. With no purge, ozone will form from atmospheric oxygen and attenuate
`the light output in the 220 – 280nm band. In addition, atmospheric oxygen and water vapor
`will attenuate the output below 200nm.
`
`There is no return fitting for the purge nitrogen. The purge flow normally escapes within the
`Lamp House enclosure, and then to atmosphere.
`
`Laser Input
`This is the inlet connector for the armored fiber from the Power Supply Controller. It
`contains a set of interlock pins that disable the laser when the SMA connector is not properly
`in place.
`
`Laser On Indicator
`This LED is illuminated when the laser is ON.
`
`J4 Signal Connector (mini D sub – 9-pin)
`Provides various power and control signals to/from the Power Supply Controller. No other
`connector or cable may be used with the EQ-99X other than the one supplied.
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`Chapter 3
`INSTALLATION
`
`Unpacking
`Upon arrival, start by inspecting all parts of the system for completeness and any damage
`incurred in shipping. The EQ-99X shipping box should contain:
`
`1) EQ-99X Power Supply Controller unit
`1) EQ-99X Lamp House unit
`1) Black interconnecting cable from Lamp House to Power Supply Controller (9
`pin mini D-sub).
`
`OPTIONAL
`1) EQ-99-RC Remote Control Module with interlock connector
`1) I/O cable with 15 pin D- connector at each end
`1) 12 VDC Power Supply (universal input voltage)
`
`
`Use care when unpacking to avoid damaging the armored fiber optic cable.
`
`If any part is missing or appears damaged, contact Energetiq immediately. Do not attempt to
`substitute any parts. There are no user-serviceable parts inside the EQ-99X Lamp House or
`Power Supply Controller unit.
`
`Connections
`Installation of the EQ-99X consists of connecting electrical and gas supplies, and connecting
`the Lamp House module to the user’s equipment.
`
`Electrical Power
`The EQ-99X requires 12VDC at 11.7A minimum (140W rating). Power consumption is
`approximately 100W during normal operation.
`
`Power can be provided using the optional PS00018 12VDC power supply. Alternatively,
`power can be provided directly via a customer provided 12VDC power supply. The connector
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`on the EQ-99X is a latching connector. Once fully inserted, the connector will not release
`unless the body of the connector is pulled first. This protects from accidental removal of
`power if the power cable is pulled. Connect to a 12VDC source as follows:
`
`Connector
`
`Kycon KPPX-4P
`
`
`
`Pins 3 & 4
`
`+12VDC
`
`Pins 1 & 2
`
` 12VDC return
`
`
`
`Purge Gas
`Purge gas is optional but is recommended for best performance. With no purge, ozone will
`form from atmospheric oxygen and attenuate the light output in the 220 – 280nm band. In
`addition, atmospheric oxygen and water vapor will attenuate the output below 200nm.
`
`If required, connect a source of nitrogen purge gas to the port on the Lamp House. The
`fitting is a push-to-connect type, sized for 4 mm tubing.
`
`Clean and dry nitrogen from either a dewar or research-grade N2 bottle is recommended. Do
`not use any other purge gas. Grade 6 or better gas purity is recommended to maintain
`cleanliness of the optics, and gas should be filtered to <5um. Supply pressure should be 20
`psig (0.14 MPa). With a 20 psig inlet pressure, the EQ-99X will consume approximately 1 slm
`of flow.
`
`There is no return fitting for the purge nitrogen. The purge flow normally escapes within the
`Lamp House enclosure, and then to atmosphere.
`
`Optical Interface
`The lamp window accommodates a light output of 0.47 NA. A pair of pins and a 6-32
`threaded hole are available for mounting. An internally-threaded SM1 adapter is provided for
`connection of optical hardware. See Figure 5 below for mechanical layout of the Lamp
`House.
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`Figure 5: Lamp House mechanical layout
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`mechanical layout
`Supply
`Controller
`Figure 6: Power
`
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`Signal Connections
`The EQ-99X is controlled through the remote I/O connector.
`
`Table 3 gives the pin assignments and functions for this interface. Connect to the user’s
`control system using a suitable cable. Mating connector is a standard high-density 15-pin d-
`sub male (for example, Amp part no. 748364-1 with contacts 1658670-2).
`
`Optionally, connect a model EQ-99-RC remote control module to the I/O connector using
`the supplied cable
`
`User I/O can be powered either by the EQ-99X internal isolated power supply, or an external
`supply.
`
`Figure 7 shows connection schematics for both configurations.
`
`
`
`
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`20
`
`Description
`Commands (Inputs)
`LAMP OPERATE
`
`EXTERNAL INTERLOCK
`
`
`
`Status Indicators (Outputs)
`LAMP ON
`LASER ON
`LAMP MODULE FAULT
`CONTROLLER FAULT
`ISOLATED +5V SUPPLY
`DIGITAL COMMON
`RESERVED
`RESERVED
`
`Pin #
`
`
`Details
`
`
`12
`
`13
`
`OPERATE REQUEST, apply +5V (referenced to digital
`common) to initiate ignition
`EXTERNAL INTERLOCK, apply +5V (referenced to
`digital common) to close interlock and allow operation
`
`
`
`
`Pulled to digital common when ON
`1
`Pulled to digital common when ON
`2
`Pulled to digital common when OK, float on FAULT
`3
`Pulled to digital common when OK, float on FAULT
`4
`50mA maximum, referenced to digital common
`5
`6,7,8,9 Galvanically isolated from system
`10, 11
`Do not connect
`14,15
`Do not connect
`
`Table 3: I/O Connector Pin Assignments
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`Contact or
`solid-state switch
`
`100
`
`5V Power
`Pin 5
`
`Inputs
`Pins 11, 12, 13
`
`499
`
`0.1uF
`
`0.1uF
`
`Isolated
`5VDC supply
`
`+-
`
`Outputs
`Pins 1, 2, 3, 4
`
`Load
`
`5V Return
`Pins 6, 7, 8, 9
`
`Contact or
`solid-state switch
`
`Load
`
`+-
`
`User
`5VDC supply
`
`N/C
`
`N/C
`
`100
`
`5V Power
`Pin 5
`
`Inputs
`Pins 11, 12, 13
`
`499
`
`0.1uF
`
`Outputs
`Pins 1, 2, 3, 4
`
`5V Return
`Pins 6, 7, 8, 9
`
`0.1uF
`
`Isolated
`5VDC supply
`
`+-
`
`
`
`
`Figure 7: Remote Interface Schematic
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`EQ-99X Operation Manual Rev. 1
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`
`Installation Procedure
`1. Mount the Power Supply Controller unit rigidly to either an optical breadboard plate
`or another suitable mounting structure using the supplied tabs on the bottom of the
`chassis. The holes are sized to accept standard ¼-20 optical bench hardware, and
`spaced to be compatible with a standard 1” grid mounting hole pattern. See Figure 6
`for dimensional and mounting details.
`Do not block the inlet or outlet air vents of the Power Supply Controller.
`2. Connect the Lamp House unit output to the user equipment. The beam should always
`be either directly coupled to a fiber optic cable, or enclosed in an appropriate beam
`pipe, tube, or enclosed space and purged with nitrogen. Operating the source without
`any output target or beam transport is not recommended, and may lead to unsafe
`operating conditions. Consult Energetiq for applications information and suggested
`configurations.
`The Lamp House should be mounted in the orientation shown in 3, with the output
`window on the side and the flat surface of the housing on the bottom. The lamp has
`been factory aligned in this position. Mounting the lamp in a different orientation will
`cause the plasma position inside the bulb to shift slightly and may cause performance
`problems. If using an optical fiber for the light output, this will result in slight
`misalignment and a resulting drop in output power.
`3. Setup the Lamp House unit with appropriate ultraviolet safety measures and laser light
`safety measures in place. It is recommended that any enclosure or aperture-blocking
`hardware utilize switches wired to the EQ-99X external interlock circuit.
`4. Connect the black 9 pin mini D-sub interconnect cable from the Power Supply
`Controller (labeled TO LAMP) to the Lamp House (labeled J4).
`5. The EQ-99X is delivered with the armored laser fiber connected to the lamp house.
`This is done to minimize the possibility of debris or particles contaminating the end of
`the laser fiber. Energetiq strongly recommends leaving the laser fiber connected, unless
`it is necessary to disconnect it for installation or routing of the laser fiber. If the laser
`fiber must be disconnected, apply SMA caps immediately to both ends, and follow
`directions on inspection and cleaning of the laser fiber described in Chapter 5.
`Use care when handling the fiber optic cable to avoid sharp bends, which will
`permanently damage the cable. Minimum bend radius for the cable is 30mm (1.18 in).
`6. If necessary, connect the SMA connector to the Lamp House laser input and tighten.
`The SMA connector should be oriented such that the indicator line on the laser fiber
`is facing upwards (towards the bulb).
`7. If required, connect nitrogen purge gas to the Lamp House. Refer to “Facilities
`Requirements” above.
`8. Connect user’s control system to the I/O interface connector per Table 3 and Figure
`7.
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`9. Alternately, if using the EQ-99-RC Remote Control Module, place it on a clean rigid
`surface. Install the supplied 15-pin cable from the Power Supply Controller to the
`EQ-99-RC.
`10. Connect 12VDC input power source to the Power Supply Controller.
`
`
`The system is now ready to operate.
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`
`Chapter 4
`OPERATION
`
`Starting
`Once the lamp is set up properly, verify that all personnel that will be in contact with the lamp
`system are aware of the potential hazards involved. It is the responsibility of the user to verify
`that the lamp is being used safely.
`
`This example assumes the use of the EQ-99-RC Remote Control Module to provide local
`control. If using a custom control system, substitute the appropriate digital input and output
`lines from Table 3 for the switches and LEDs described below.
`
`1. With the EQ-99-RC Remote Control Module connected properly, review the status
`LEDs on the Power Supply Controller. The POWER ON LED should be lit, and
`neither the CONTROLLER FAULT nor LAMP MODULE FAULT LEDs should
`be lit.
`2. Turn on the OPERATE Switch (place switch in UP position).
`3. Within several seconds the LASER ON LED will light. Laser light is now present in
`the Lamp House.
`4. In approximately 20-150 seconds the igniter will be turned on automatically and the
`plasma will ignite. The LAMP ON LED will be lit. The duration of the warm up time
`(20-150 seconds) will depend on the temperature and previous operating condition of
`the EQ-99X. The EQ-99X will automatically detect when the unit has reached the
`optimum conditions for ignition.
`5. If a bulb fails to ignite, 150 seconds after the OPERATE switch was activated, the
`LASER ON LED will go out, the LAMP FAULT LED will be lit, and LAMP ON
`LED will remain off. This is very unusual. However, if this occurs, turn the
`OPERATE switch to the OFF position (down) and begin at Step 1 again. If this
`occurs multiple times, contact Energetiq service
`Stopping
`To turn the LAMP off, simply turn the OPERATE Switch to the OFF position. If the lamp
`will not be used for some time, the 12VDC supply can be turned off.
`
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`To minimize wear on the ignition components, it is best to avoid frequently starting and
`stopping the lamp. It is recommended to run the lamp continuously rather than turn the lamp
`off and on several times in a day.
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`
`Chapter 5
`Maintenance
`EQ-99 SMA Fiber Cleaning Process
`Fiber Cleaning Basics:
`• The LDLS laser fiber connector is carefully inspected and is