Model EQ-77
`LDLS™
`Laser-Driven Light Source
`
`
`
`
`Operation Manual
`
`Revision 2 December 2015
`Part Number DOC-7070
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`Energetiq Ex. 2056, page 1 - IPR2015-01375
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`Copyright © 2015 Energetiq Technology Inc. All rights reserved.
`
`Energetiq products are covered by the following patents: US 7435982, 7786455, 8525138,
`8969841, 9048000; Japan 5410958, 5628253; Korea 10-1507617; UK GB2450045. All technical
`information, including drawings, schematics and specifications contained in this manual are the
`property of Energetiq and shall not be reproduced in whole or in part without the written
`consent of Energetiq. The content of this manual is subject to change without notice.
`
`Energetiq Technology Inc.
`7 Constitution Way, Woburn, MA 01801 USA
`Tel. +1 (781) 939-0763
`
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`Fax +1 (781) 939-0769
`E-mail: support@energetiq.com
`http://www.energetiq.com
`
`
`
`
`Declaration of Conformity
`
`We, the manufacturers
`
`
`Energetiq Technology Inc.
`7 Constitution Way
`Woburn, Massachusetts USA
`
`hereby declare that the product family
`
`
`LDLS™ Laser-Driven Light Source
`Model EQ-77 High Brightness Broadband Light Source
`
`
`is in conformity with the requirements of the following standards
`
`
`EN61010-1 (2010)
`
`CISPR 11:2009
`
`EN61326-1:2013
`
`EN61000-3-2:2014
`
`EN61000-3-3:2013
`
`EN60825-1 (2007)
`
`
`
`
`
`Safety Requirements for Electrical Equipment for Measurement,
`Control and Laboratory Use: Part 1 – General Requirements
`Industrial, scientific and medical equipment - Radio-frequency
`disturbance characteristics - Limits and methods of
`measurement
`Electrical equipment for measurement, control and laboratory
`use. EMC requirements. General requirements
`Electromagnetic compatibility (EMC) - Part 3-2: Limits - Limits
`for harmonic current emissions (equipment input current less
`than or equal to 16 A per phase)
`Electromagnetic compatibility (EMC) - Part 3-3: Limits -
`Limitation of voltage changes, voltage fluctuations and flicker in
`public low-voltage supply systems, for equipment with rated
`current less than or equal to 16 A per phase and not subject to
`conditional connection
`Safety of laser products - Part 1: Equipment classification and
`requirements
`
`
`in accordance with the provisions of
`
`2006/95/EC
`2 004/108/EC
`2011/65/EU
`
`EU Low Voltage Directive
`EU Electromagnetic Compatibility Directive
`EU RoHS2 Directive
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`13 July 2015
`Date
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`Signed,
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`
`
`Paul Blackborow, CEO
`
`at Woburn, Massachusetts USA
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`TABLE OF CONTENTS
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`Chapter 1 ...................................................................................................................................................... 1 
`General Information .................................................................................................... 1 
`Safety ............................................................................................................................................... 1 
`Chapter 2 ...................................................................................................................................................... 7 
`Description .................................................................................................................... 7 
`General ........................................................................................................................................... 7 
`Specifications ................................................................................................................................. 8 
`System Description .................................................................................................................... 10 
`Power Supply Controller ........................................................................................................... 11 
`Lamp House ................................................................................................................................ 13 
`Chapter 3 .................................................................................................................................................... 17 
`Installation................................................................................................................... 17 
`Unpacking .................................................................................................................................... 17 
`Connections ................................................................................................................................. 17 
`Installation Procedure ................................................................................................................ 21 
`Chapter 4 .................................................................................................................................................... 23 
`Operation .................................................................................................................... 23 
`Starting .......................................................................................................................................... 23 
`Stopping ....................................................................................................................................... 23 
`Serial Interface ............................................................................................................................ 24 
`Chapter 5 .................................................................................................................................................... 25 
`Troubleshooting ........................................................................................................ 25 
`Fault Indicator Block Diagram ................................................................................................ 25 
`Appendix A ................................................................................................................................................ 27 
`Engineering Drawings .............................................................................................. 27 
`Appendix B ................................................................................................................................................ 29 
`Revision History ........................................................................................................ 29 
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`Safety
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`C h a p t e r 1
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`GENERAL INFORMATION
`
`WARNING
`
`This unit emits ultraviolet (UV) radiation that is
`harmful to humans. Avoid exposure to the
`direct or reflected output beam. Make certain
`that the appropriate output beam shields and
`optics are in place prior to energizing the unit.
`All
`interlocks must be satisfied prior
`to
`operation; failure to do so may
`lead to
`hazardous conditions.
`
`CAUTION
`
`levels of UV
`The EQ-77 emits dangerous
`radiation. Even short exposures to skin or eyes
`may cause burns. Ensure that only authorized
`personnel are in the vicinity of source during
`operation. Personnel in vicinity of operating
`source should wear protective eyewear, clothing,
`and gloves. Lighted UV warning lights and signs
`posted on doors to lab areas may help prevent
`accidental exposure.
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`WARNING
`
`The EQ-77 utilizes an internal Class 4 IR laser
`capable of causing severe injury to eyes or skin.
`Do not open or attempt to service this unit.
`Contact Energetiq regarding any problems with
`the unit.
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`General Precautions
`The output beam from the EQ-77 should be blocked when not in use with an electronic
`shutter or other appropriate beam blocking device. Due to the possibility of generating ozone
`with some models of EQ-77 when ambient oxygen is exposed to short wavelength light, the
`beam should always be enclosed in an appropriate beam pipe, tube, or enclosed space. We
`suggest purging any beam transport space with dry nitrogen gas.
`
`The EQ-77 source must also be cabled correctly and connected to a power source with a
`protective earth ground prior to operation.
`
`Refer to the Installation section of this manual in Chapter 3 for details of the facilities
`connections.
`
`There are no user-serviceable parts inside the EQ-77. For any problems encountered during
`operation, please contact Energetiq Technology for assistance. If there is a component
`failure, do not attempt to open the Power Supply Controller or Lamp House enclosure
`of the EQ-77.
`
`The EQ-77 utilizes a quartz lamp containing a high-pressure gas fill. Explosion of the
`lamp and possible injury from flying fragments can occur if the lamp is mishandled.
`
`Do not open the enclosure of either the Lamp House or the Power Supply Controller.
`Dangerous invisible infrared laser beams and hazardous voltages exist inside the
`Lamp House. Opening the chassis both voids the warranty and exposes the user to
`dangerous radiation and hazardous voltages.
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`CAUTION
`
`Use of controls or adjustments or performance of procedures
`other than those specified herein may result in hazardous
`radiation exposure.
`
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`Laser Information
`The EQ-77 uses a patented* laser drive system to excite a plasma that radiates in the UV as
`well as the visible bands. A class 4 laser is located in the Lamp House enclosure. The optical
`configuration of the Lamp House ensures that the direct laser beam cannot exit the unit. The
`EQ-77 laser product is designated as Class 1 during all normal operation.
`
`The parameters of the non-accessible internal laser are given below in Table 1.
`
`Wavelength
`Emission Type
`Laser Power for classification
`
`974 nm
`CW
`<36 mW via 7mm measurement
`aperture
`Beam Diameter
`~25 mm at aperture
`Divergence
`>100 mRad
`Transverse Beam Mode
`Diffuse
`Table 1: Embedded Laser Parameters
`
`
`No regular maintenance is required for the EQ-77. Any service to the system must be
`performed only by factory authorized and trained technicians. To avoid injury, under no
`circumstances should the user open or modify the Lamp House or Power Supply Controller
`enclosure.
`
`The unit must not be operated if the covers are removed or it is defective in any way. Contact
`Energetiq if any problems with the equipment are suspected.
`
` *
`
` US 7435982, 7786455, 8525138, 8969841, 9048000; Japan 5410958, 5628253; Korea 10-1507617; UK
`GB2450045
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`EQ-77 Operation Manual Rev. 2
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`Labels and Safety Notification
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`The following safety labels appear on the product. Figure 1 shows the location of each label
`on the EQ-77 system.
`
`UV Hazard warning label – indicates hazardous levels of UV
`light are present.
`
`
`
`Manufacturer’s identification label – gives the manufacturer’s
`name and address, and the model, serial number, and date of
`manufacture of the equipment.
`
`
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`Explanatory label – states the classification of the laser product.
`Class 1 is the lowest hazard level classification.
`
`Certification label – states that the equipment has been tested
`and verified to meet the standards indicated.
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`Non-interlocked housing label – notifies of a potential hazard
`when covers are removed.
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`Explanatory
`Label
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`Certification
`Label
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`Non-interlocked
`Housing Label
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`
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`UV Hazard
`Warning Label
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`Manufacturer’s
`Identification label
`
`Figure 1: Safety Label Locations
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`
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`Safety Interlocks
`The EQ-77 is equipped with interlocks to prevent operation of the device when any of the
`following conditions are present:
`1. An external interlock is open
`2. No bulb is installed
`
`External Interlock
`External interlock pins are provided for the customer’s use (see Chapter 3 for connection
`details). Any suitable normally-open contact or solid-state switch can operate the interlock
`circuit. The contact or switch should be rated for 80mA minimum at 5VDC.
`
`The interlock circuit must be connected to enable the operation of the unit. Should the
`interlock connection open during operation or standby, the source is immediately disabled, and
`all light output from the aperture ceases.
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`C h a p t e r 2
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`DESCRIPTION
`
`General
`The EQ-77 is a broad-band lamp system for use in a wide variety of applications. The lamp
`produces high brightness, broad-band light from DUV wavelengths through visible and
`beyond. The output is very stable, and has a long lifetime before any service is required. A
`simple control interface ensures ease of use.
`
`Some of the advantages of the EQ-77 include:
`
` Very high brightness across complete spectrum
`– 190nm through visible and beyond
` Eliminates need for multiple lamps (replaces D2/Tungsten/Xenon Arc)
`– Simplified optical system
` Excellent spatial stability
`– Repeatable measurements
` Superior short and long term power stability
`– Repeatable measurements
` Electrodeless operation for long life
`– Reduced consumable costs
`– Minimal recalibration of instrument
`
`
`
`The EQ-77 system consists of a Power Supply Controller unit, Lamp House unit, and
`interconnecting cable. Connection to AC power is required for operation. Connections to
`nitrogen purge gas and cooling water are required. See Chapter 3 for connection details.
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`Specifications
`Optical Performance
` Typical output spectrum: see Figure 2.
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`
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`Relative EQ-77 Spectral Radiant Flux (Typical)
`
`1.6
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`1.4
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`1.2
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`1.0
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`0.8
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`0.6
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`0.4
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`0.2
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`0.0
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`Relative Spectral Radiant Flux (a.u.)
`
`
`
`200 250 300 350 400 450 500 550 600 650 700 750 800 850
`Wavelength (nm)
`
`
`
`Figure 2: Typical Output Spectrum
`
`Physical Specifications
`Dimensions (H x W x D)
` Lamp House: 128 x 175 x 102 mm (5.0 x 6.9 x 4.0 in)
` Power Supply Controller: 152 x 250 x 132 mm (6.0 x 9.8 x 5.2 in)
`
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`Weight
` Lamp House: 2.2 kg (4.9 lb)
` Power Supply Controller: 2.9 kg (6.5 lb)
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`Utility Requirements
` Electrical: 100 – 240 V~, 50/60 Hz, 350 W
` Purge gas: clean dry nitrogen, filtered to 5um, 20 psig (0.14 MPa) supply pressure
`– Fittings: 4mm push-to-connect
` Cooling water: >= 1 liter/minute, 18 – 30 °C
`– Fittings: 1/4-inch Swagelok
`
`
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`Remote Interface
`Digital Inputs
` Type: Optocoupler LED
` Logic: Active High
`
`Input voltage: 5VDC
`
`Input current: 8mA
`
`
`External Interlock Input Only (pin 13)
` Type: Relay Coil
` Logic: Active High
`
`Input voltage: 5VDC
`
`Input current: 80mA
`
`
`Digital Outputs
` Type: Open collector to ground (digital common)
` Logic: Active Low
` Voltage: 30VDC max.
` Sink current: 30mA max.
`
`
`User Power
` Voltage: 5VDC, referenced to digital common
` Current: 400mA maximum
`
`Serial Interface
` Type: RS-485 4-wire (full duplex)
` Connector: Male 9-pin d-sub
` Termination: 120 ohms across receiver input (pins 2 and 7)
`
`Interface protocol: see Chapter 4.
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`Environmental Requirements
`Operating
` Ambient temperature: 15–35°C
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` Relative Humidity: non-condensing, 80% max. for temperatures up to 31°C,
`decreasing linearly to 50% max. at 35°C.
` Pollution Degree 2 (normally only non-conductive pollution; occasional,
`temporary condensation possible)
`
`Installation Category II
`
`Indoor use only
`Transport
` Temperature: -5–70°C
` Relative Humidity: non-condensing, 95% max.
`
`
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`System Description
`As shown in Figure 3 the EQ-77 system consists of a Power Supply Controller unit, Lamp
`House, Controller to Lamp house interconnect cable (not shown), and power input cable (not
`shown). I/O interface connections (also not shown) are provided by the user.
`
`The following sections provide descriptions of the system components and controls, and give
`an overview of their functions. Refer to the “Installation” section of this manual (Chapter 3)
`for more detailed information.
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`Optical Output
`(opposite side)
`
`Purge gas inlet/outlet
`fittings
`
`Retroreflector
`assembly
`
`Power Input
`Connector
`
`RS-485
`Connector
`
`Power Supply
`Controller
`
`Lamp
`House
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`
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`Power Supply Controller
`The Power Supply Controller contains:
` Laser power supply
` Thermo-electric cooler control system for laser
` Control electronics
` Status indicator LEDs
`
`Interface connectors
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`
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`External features (refer to Figure 3):
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`EQ-77 Operation Manual Rev. 2
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`Lamp House Control
`Connector
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`Water inlet/outlet
`fittings
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`Status
`Indicators
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`I/O Interface
`Connector
`
`Lamp House
`Control
`Connector
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`Figure 3: EQ-77 Lamp System
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` Status Indicator LEDs
`These five LEDs indicate the system status. The function of these indicators is shown below
`in
`
`Table 2.
`
`
`
`LED Label
`POWER ON
`LAMP ON
`LASER ON
`
`CONTROLLER FAULT
`
`LAMP MODULE FAULT
`
`Meaning (when lit)
`AC power is connected to the EQ-77 Power Supply Controller
`UV Light is on
`Laser power is ON and laser light is being produced within the Lamp
`House
`One of the following has occurred in the Power Supply Controller:
`1. External interlock open
`2. Controller internal temperature too high
`3. Laser power not reaching setpoint
`4. Laser temperature fault
`5.
`Internal power supply voltage low
`One of the following has occurred in the Lamp House module:
`1. Control Cable not connected properly
`2. Lamphouse internal temperature too high
`3.
`Ignition Failure
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`
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`Table 2: Status Indicator LED Functions
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`
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`Input/Output (I/O) Connector
`Provides access to control and status signals. See Chapter 3 for pin assignments and functions.
`
`This is the only operator interface to the EQ-77 – there are no local controls. Energetiq offers
`the EQ-99-RC Remote Control Module which connects to the Input/Output connector of
`the EQ-77 or EQ-99 and provides a means of local control. Contact Energetiq for additional
`information.
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`Power Input Connector
`This is an IEC 320 inlet connector for AC power input. See Chapter 3 for detailed
`information.
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`Lamp House Control Connector (21-pin mixed D-sub)
`Provides various power and control signals to/from the Lamp House module. No other
`connector or cable may be used with the EQ-77 other than the one supplied.
`
`RS-485 Connector (9-pin D-sub)
`Connector for optional RS-485 interface. See Chapters 3 and 4 for electrical details and
`commands.
`
`
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`Lamp House
`The Lamp House assembly contains:
` Lamp
`
`Igniter
` Laser
` Thermoelectric cooler
`
`IR pumping optics
` Output windows
` Retroreflector assembly
` Laser ON indicator
`
`Interface connectors
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`Lamp
`Window
`(opposite side)
`
`Nitrogen Purge
`Inlet
`
`Retroreflector
`Assembly
`
`Nitrogen Purge
`Outlet
`
`Laser ON
`Indicator
`
`Control
`Connector (to
`Controller)
`
`
`
`Cooling Water
`Inlet
`
`Cooling Water
`Outlet
`
`Figure 4: Lamp House Assembly
`
`
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`External features (refer to Figure 4):
`
`Lamp Windows
`The lamp windows at the optical output provide protection from the high pressure bulb inside
`the Lamp House. An internally-threaded SM1 adapter is provided for easy connection of
`optical hardware.
`
`Nitrogen Purge Inlet / Outlet
`These are the fittings for the required nitrogen purge gas. With no purge, ozone will form
`from atmospheric oxygen and attenuate the light output in the 220 – 280nm band. In
`addition, atmospheric oxygen and water vapor will attenuate the output below 200nm.
`
`Cooling Water Inlet / Outlet
`These fittings are for connection of cooling water required by the Lamp House.
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`Laser On Indicator
`This LED is illuminated when the laser is ON.
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`Control Connector (21-pin mixed D-sub)
`Provides various power and control signals to/from the Power Supply Controller. No other
`connector or cable may be used with the EQ-77 other than the one supplied.
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`C h a p t e r 3
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`INSTALLATION
`
`Unpacking
`Upon arrival, start by inspecting all parts of the system for completeness and any damage
`incurred in shipping. The EQ-77 shipping box should contain:
`
`1) EQ-77 Power Supply Controller unit
`1) EQ-77 Lamp House unit
`1) Black interconnecting cable from Lamp House to Power Supply Controller (21-
`pin mixed D-sub).
`
`OPTIONAL
`1) EQ-99-RC Remote Control Module with interlock connector
`1) I/O cable with 15 pin D- connector at each end
`
`If any part is missing or appears damaged, contact Energetiq immediately. Do not attempt to
`substitute any parts. There are no user-serviceable parts inside the EQ-77 Lamp House or
`Power Supply Controller unit.
`
`Connections
`Installation of the EQ-77 consists of connecting electrical, water, and purge gas supplies, and
`connecting the Lamp House module to the user’s equipment. Read "Installation Procedure"
`first before making any connections.
`
`Electrical Power
`The EQ-77 requires 100 – 240 V~, 50/60 Hz input voltage. Power consumption is 350 W
`maximum during normal operation. Some OEM versions have higher current requirements.
`
`Purge Gas
`Purge gas required for operation. With no purge, ozone will form from atmospheric oxygen
`and attenuate the light output in the 220 – 280nm band. In addition, atmospheric oxygen and
`water vapor will attenuate the output below 200nm.
`
`Connect a source of nitrogen purge gas to the port on the Lamp House. The fitting is a push-
`to-connect type, sized for 4mm O.D. tubing.
`
`Clean and dry nitrogen from either a Dewar or research-grade N2 bottle is recommended. Do
`not use any other purge gas. Grade 6 or better gas purity is recommended to maintain
`cleanliness of the optics, and gas should be filtered to <5um. Supply pressure should be 20
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`psig (0.14 MPa). With a 20 psig inlet pressure, the EQ-77 will consume approximately 0.5 slm
`of flow.
`
`Cooling Water
`Connect a source of cooling water to the 1/4-inch Swagelok fittings on the Lamp House. A
`flow rate of at least 1 liter/minute is required. Inlet temperature should be between 18°C and
`30°C
`
`Optical Interface
`See drawing OTD-7111 in Appendix A for mechanical layout of the Lamp House.
`
`Signal Connections
`The EQ-77 is controlled through the remote I/O connector.
`
`Table 3 gives the pin assignments and functions for this interface. Connect to the user’s
`control system using a suitable cable. Mating connector is a standard high-density 15-pin d-
`sub male (for example, Amp part no. 748364-1 with contacts 1658670-2).
`
`Optionally, connect a model EQ-99-RC remote control module to the I/O connector using
`the supplied cable
`
`User I/O can be powered either by the EQ-77 internal isolated power supply, or an external
`supply.
`
`Figure 5 shows connection schematics for both configurations.
`
`Lamp House I/O
`The black 21-pin mixed D-sub cable is used to connect the Lamp House to the Power Supply
`Controller. This cable should be connected before AC power is applied to the Power Supply
`Controller.
`
`RS-485 Interface
`Connector J2 is a standard 9-pin male d-sub. Mating connector is a standard 9-pin female d-
`sub (for example, AMP part no. 205203-3 with contacts 1-66504-0). See Table 4 for pin
`connections.
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`18
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`Description
`Commands (Inputs)
`LAMP OPERATE
`
`EXTERNAL INTERLOCK
`
`
`
`Status Indicators (Outputs)
`LAMP ON
`LASER ON
`LAMP MODULE FAULT
`CONTROLLER FAULT
`ISOLATED +5V SUPPLY
`DIGITAL COMMON
`RESERVED
`RESERVED
`
`Pin #
`
`
`Details
`
`
`12
`
`13
`
`OPERATE REQUEST, apply +5V (referenced to digital
`common) to initiate start cycle
`EXTERNAL INTERLOCK, apply +5V (referenced to
`digital common) to close interlock and allow operation.
`Current draw is 80mA at 5VDC.
`
`
`
`
`Pulled to digital common when ON
`1
`Pulled to digital common when ON
`2
`Pulled to digital common when OK, float on FAULT
`3
`Pulled to digital common when OK, float on FAULT
`4
`400mA maximum, referenced to digital common
`5
`6,7,8,9 Galvanically isolated from system
`10, 11
`Do not connect
`14,15
`Do not connect
`
`
`
`
`
`
`
`Description
`TRANSMIT A (–)
`TRANSMIT B (+)
`RECEIVE A (–)
`RECEIVE B (+)
`GROUND
`RESERVED
`
`Table 3: I/O Connector Pin Assignment
`
`Pin #
`8
`3
`7
`2
`5, 9
`1, 4, 6
`
`Details
`From EQ-77, connect to host RECEIVE A
`From EQ-77, connect to host RECEIVE B
`To EQ-77, connect to host TRANSMIT A
`To EQ-77, connect to host TRANSMIT B
`Galvanically isolated from system
`Do not connect
`
`Table 4: RS-485 Interface Pin Assignment
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`EQ-77 Operation Manual Rev. 2
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`Contact or
`solid-state switch
`
`Contact or
`solid-state switch
`
`Load
`
`Contact or
`solid-state switch
`
`Contact or
`solid-state switch
`
`Load
`
`+-
`
`User
`5VDC supply
`
`N/C
`
`N/C
`
`100
`
`5V Power
`Pin 5
`
`499
`
`0.1uF
`
`Input
`Pin 12
`
`Input
`Pin 13
`
`Outputs
`Pins 1, 2, 3, 4
`
`5V Return
`Pins 6, 7, 8, 9
`
`100
`
`5V Power
`Pin 5
`
`499
`
`0.1uF
`
`Input
`Pin 12
`
`Input
`Pin 13
`
`Outputs
`Pins 1, 2, 3, 4
`
`5V Return
`Pins 6, 7, 8, 9
`
`0.1uF
`
`Isolated
`5VDC supply
`
`+-
`
`0.1uF
`
`Isolated
`5VDC supply
`
`+-
`
`
`Figure 5: Remote Interface Schematic
`
`
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`Energetiq Ex. 2056, page 26 - IPR2015-01375
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`
`Installation Procedure
`1. Place the Power Supply Controller on a stable surface. The Power Supply Controller
`must be placed within 2 meters of the Lamp House due to the length of the
`interconnecting cable. See drawing OTD-6881 in Appendix A for dimensional details.
`2. Connect the Lamp House unit optical output to the user equipment (after removing
`the window cover). The beam should always be either directly coupled to a fiber optic
`cable, or enclosed in an appropriate beam pipe, tube, or enclosed space and purged
`with nitrogen. Operating the source without any output target or beam transport is
`not recommended, and may lead to unsafe operating conditions. Consult Energetiq for
`applications information and suggested configurations.
`The Lamp House should be mounted in the orientation shown in Figure 4, with the
`output window on the side and the lamp mounting surface oriented horizontally. The
`lamp has been factory aligned in this position. Mounting the lamp in a different
`orientation will cause the plasma position inside the bulb to shift slightly and may
`cause performance variations.
`Setup the Lamp House unit with appropriate ultraviolet safety measures and laser light
`safety measures in place. It is recommended that any enclosure or aperture-blocking
`hardware utilize switches wired to the EQ-77 external interlock circuit.
`See drawing OTD-7111 in Appendix A for mechanical details of the Lamp House.
`3. Connect the black 21-pin mixed D-sub interconnect cable from the Power Supply
`Controller to the Lamp House.
`4. Connect nitrogen purge gas to the Lamp House. Refer to “Connections” above.
`5. Connect cooling water to the Lamp House. Refer to “Connections” above.
`6. Connect user’s control system to the I/O interface connector per Table 3 and Figure
`5.
`7. Alternately, if using the EQ-99-RC Remote Control Module, place it on a clean rigid
`surface. Install the supplied 15-pin cable from the Power Supply Controller to the
`EQ-99-RC.
`8. Connect AC input power source to the Controller Unit.
`
`
`The system is now ready to operate.
`
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`EQ-77 Operation Manual Rev. 2
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`C h a p t e r 4
`
`OPERATION
`
`Starting
`Once the lamp is set up properly, verify that all personnel that will be in contact with the lamp
`system are aware of the potential hazards involved. It is the responsibility of the user to verify
`that the lamp is being used safely.
`
`This example assumes the use of the EQ-99-RC Remote Control Module to provide local
`control. If using a custom control system, substitute the appropriate digital input and output
`lines from Table 3 for the switches and LEDs described below.
`
`1. With the EQ-99-RC Remote Control Module connected properly, review the status
`LEDs on the Power Supply Controller. The POWER ON LED should be lit, and
`neither the CONTROLLER FAULT nor LAMP MODULE FAULT LEDs should
`be lit.
`2. Turn on the OPERATE Switch (place switch in UP position).
`3. Within several seconds the LASER ON LED will light. Laser light is now present in
`the Lamp House.
`4. In approximately 20-150 seconds the igniter will be turned on automatically and the
`plasma will ignite. The LAMP ON LED will be lit. The duration of the warm up time
`(20-150 seconds) will depend on the temperature and previous operating condition of
`the EQ-77. The EQ-77 will automatically detect when the unit has reached the
`optimum conditions for ignition.
`5. If a bulb fails to ignite within 150 seconds after the OPERATE switch was activated,
`the LASER ON LED will go out, the LAMP FAULT LED will be lit, and LAMP ON
`LED will remain off. This is very unusual. However, if this occurs, turn the
`OPERATE switch to the OFF position (down) and begin at Step 1 again. If this
`occurs multiple times, contact Energetiq service
`
`Stopping
`To turn the LAMP off, simply turn the OPERATE Switch to the OFF position. If the lamp
`will not be used for some time, the AC supply can be turned off.
`
`To minimize wear on the ignition components, it is best to avoid frequently starting and
`stopping the lamp. It is recommended to run the lamp continuously if long off-periods are
`not required.
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`EQ-77 Operation Manual Rev. 2
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`Serial Interface
`The RS-485 serial interface is provided for user adjustment of laser operating power, in order
`to increase or decrease light output. The EQ-77 is shipped with the laser power set to a factory
`default value of 100% of full scale power. Laser power can be increased or decreased in
`increments of 0.5% of full scale. The following describes the serial commands and their
`functions.
`
` Commands consist of a single ASCII character, case-sensitive. This can be transmitted to the
`EQ-77 via a terminal emulation program, or the user's control system. Response from the
`EQ-77 will be a string of ASCII characters, format depending on the command issued.
`
`
`
`Command
`character
`U
`
`D
`
`Q
`
`F
`
`B
`
`?
`
`Increases the present laser power
`setpoint by 0.5% of full scale
`Decreases the present laser
`power setpoint by 0.5% of full
`scale
`Queries the value of the present
`laser power setpoint (in % of full
`scale)
`Resets laser power setpoint to
`factory default value
`Saves present settings to flash
`memory. This command should
`be issued after the settings are at
`their desired values. If not,
`changes will be lost if power to
`the EQ-77 is interrupted.
`Displays a help menu listing the
`available commands
`
`Function
`
`Reply from EQ-77
`
`Power = XX.X%
`
`Power = XX.X%
`
`Power = XX.X%
`
`Power = XX.X%
`
`Calibration data copied to FLASH
`Memory.
`
`EQ77 firmware v02d (FRM-7117 R005)
`build date 11/18/15