LDLS™
`Laser-Driven Light Source
`
`EQ-1000
`High Brightness DUV Light Source
`
`
`
`
`Operation Manual
`Revision 5 August 2009
`
`
`
`
`
`
`
`Energetiq Ex. 2054, page 1 - IPR2015-01375
`
`

`
`
`
`Copyright © 2009 Energetiq Technology Inc. All rights reserved.
`
`Energetiq products are covered by US and foreign patents. All technical information, including
`drawings, schematics and specifications contained in this manual are the property of Energetiq
`and shall not be reproduced in whole or in part without the written consent of Energetiq. The
`content of this manual is subject to change without notice.
`
`Energetiq Technology Inc.
`7 Constitution Way, Woburn, MA 01801 USA
`Tel. +1 (781) 939-0763
`Fax +1 (781) 939-0769
`E-mail: support@energetiq.com
`http://www.energetiq.com
`
`Energetiq Ex. 2054, page 2 - IPR2015-01375
`
`

`
`TABLE OF CONTENTS
`
`
`Chapter 1
`General Information.................................................................................................................... 1
`Safety........................................................................................................................................ 1
`
`Chapter 2
`Description.................................................................................................................................... 7
`General.................................................................................................................................... 7
`Specifications.......................................................................................................................... 7
`Identification of Controls.................................................................................................... 9
`Power Supply Unit................................................................................................................ 9
`Lamp Unit ............................................................................................................................ 12
`
`Chapter 3
`Installation ................................................................................................................................... 15
`Facilities Requirements....................................................................................................... 15
`Installation procedure......................................................................................................... 17
`
`Chapter 4
`Operation..................................................................................................................................... 19
`Starting .................................................................................................................................. 19
`Stopping................................................................................................................................ 19
`
`Chapter 5
`Troubleshooting ......................................................................................................................... 21
`Interlock OK light not on ................................................................................................. 21
`
`
`
`Energetiq Ex. 2054, page 3 - IPR2015-01375
`
`

`
`Energetiq Ex. 2054, page 4 - |PR2015-01375
`
`Energetiq Ex. 2054, page 4 - IPR2015-01375
`
`

`
`C h a p t e r 1
`
`GENERAL INFORMATION
`
`
`WARNING
`
`This unit emits ultraviolet (UV) radiation that is harmful to
`humans when operated improperly. Make certain that the
`appropriate output beam shields and optics are in place prior
`to energizing the unit. All interlocks must be satisfied prior to
`operation; failure to do so may lead to hazardous conditions.
`
`CAUTION
`
`The EQ-1000 emits dangerous levels of UV radiation. Even
`short exposures to skin or eyes may cause burns. Ensure that
`only authorized personnel are in the vicinity of source during
`operation. Personnel in vicinity of operating source should
`wear protective eyewear, clothing, and gloves. Lighted UV
`warning lights and signs posted on doors to lab areas may help
`prevent accidental exposure.
`
`
`
`
`
`Safety
`
`
`
`
`
`General Precautions
`The output beam from the EQ-1000 should be blocked when not in use with an electronic
`shutter or other appropriate beam blocking device. Due to the absorption of the short
`wavelength light and the possibility of ozone production, the beam should always be either
`directly coupled to a fiber optic cable, or enclosed in an appropriate beam pipe, tube, or
`enclosed space. We suggest purging any beam transport space with dry Nitrogen gas, as this is
`also required for safe operation of the EQ-1000.
`
`The source must be purged with dry nitrogen gas via the Nitrogen input ¼” push-lock
`connector on the laser box. The nitrogen should have an inlet pressure of 20psig. The source
`
`EQ-1000 Operation Manual Rev. 5
`
`
`
`1
`
`Energetiq Ex. 2054, page 5 - IPR2015-01375
`
`

`
`internally limits the flow at this pressure to approximately 2 slm. The unit must be purged for
`a minimum of 10 minutes prior to operation in order to ensure that no ozone is created by
`residual oxygen inside the unit. It is recommended that any beam transport be purged for a
`similar amount of time.
`
`The EQ-1000 source must be connected to an appropriate closed-loop water chiller system.
`The water system must be capable of maintaining 0.5gpm at 18°C with a minimum of 100W
`cooling capacity. The water is connected to the labeled water inlet and outlet Swagelok ports
`on the lamp unit.
`
`The EQ-1000 source must also be cabled correctly and connected to a socket with a protective
`earth ground prior to operation. Failure to do so may result in an electrical shock hazard.
`
`Refer to the Installation section of this manual (Chapter 3) for details of the facilities
`connections.
`
`There are no user-serviceable parts inside the EQ-1000. For any problems encountered during
`operation, please refer to the Troubleshooting section of this user manual. If there is a
`component failure, do not attempt to open the chassis of the EQ-1000.
`
`The EQ-1000 utilizes a quartz lamp containing a high-pressure gas fill. Explosion of the lamp
`and possible injury from flying fragments can occur if the lamp is mishandled. Never attempt
`to remove or replace the lamp. If there is a failure of the lamp, the unit must be shipped
`back to the factory for refurbishment.
`
`Do not open the chassis of either the lamp unit or the power supply unit. Dangerous
`invisible infrared laser beams and hazardous voltages exist inside the units. Opening
`the chassis both voids the warranty and exposes the user to dangerous radiation and hazardous
`voltages.
`
`CAUTION
`
`Use of controls or adjustments or performance of procedures
`other than those specified herein may result in hazardous
`radiation exposure.
`
`
`
`Laser Information
`The EQ-1000 uses a patented laser drive system to excite a plasma that radiates in the UV as
`well as the visible bands. Since the lamp unit contains an embedded laser, the EQ-1000 is
`defined as a Laser Product. However, the drive laser does not exit the system. The EQ-1000
`Laser Product is designated as Class 1 during all procedures of operation.
`
`The parameters of the non-accessible internal laser are given below in Table 1:
`
`2
`
`
`
`EQ-1000 Operation Manual Rev. 5
`
`Energetiq Ex. 2054, page 6 - IPR2015-01375
`
`

`
`Wavelength
`Emission Type
`Laser Power for classification
`
`Beam Diameter
`Divergence
`Transverse Beam Mode
`
`975 nm
`CW
`<40 mW via 7mm measurement
`aperture
`~25 mm at aperture
`>100 mRad
`Highly irregular, diffuse
`
`Table 1: Embedded Laser Parameters
`
`No regular service is required to keep the EQ-1000 in compliance as a Class 1 Laser Product.
`Any service to the system must be performed only by factory authorized and trained
`technicians. To avoid eye injury, under no circumstances should the user open or modify the
`lamp unit.
`
`The unit must not be operated if the covers are removed or it is defective in any way. Contact
`Energetiq if any problems with the equipment are suspected.
`
`Labels and Safety Notification
`The following laser safety labels appear on the product. Figure 1 shows the location of each
`label on the EQ-1000 lamp unit.
`
`
`
`
`
`Hazard symbol label – indicates that there are potential laser
`hazards present.
`
`Explanatory label – states the classification of the laser product.
`Class 1 is the lowest hazard level classification.
`
`Interlocked housing label – notifies of a potential hazard when
`covers are removed and interlocks failed or defeated.
`
`
`
`
`
`EQ-1000 Operation Manual Rev. 5
`
`
`
`3
`
`Energetiq Ex. 2054, page 7 - IPR2015-01375
`
`

`
`Manufacturer’s identification label – gives the manufacturer’s
`name and address, and the model, serial number, and date of
`manufacture of the equipment.
`
`
`
`Certification label – states that the equipment has been tested
`and verified to meet the standards indicated.
`
`
`
` Certification
`Label
`
` Interlocked Housing
`Label
`
` Hazard Symbol
`Label
`
` Explanatory
`Label
`
`J1
`
`LAMP ON
`
`N2 RELIEF
`
`N2 INLET
`20PSIG
`
`WATER IN
`100 PSIG MAX
`
`WATER OUT
`
`U.S. PATENT #7,435,982
`OTHER PATENTS PENDING
`
`Manufacturer’s
`Identification
`Label
`
` Interlocked Housing
`Label
`
`Figure 1: Safety label locations
`
`
`
`
`
`Cover Interlocks
`The EQ-1000 is equipped with cover interlock switches to prevent operation of the source
`without the lamp unit covers in place. Since no user service is permitted, these switches are
`intended for the protection of factory service personnel.
`
`4
`
`
`
`EQ-1000 Operation Manual Rev. 5
`
`Energetiq Ex. 2054, page 8 - IPR2015-01375
`
`

`
`External Interlock
`An external interlock connector is provided for the customer’s use. Any suitable
`normally-open contact can operate the interlock circuit. The unit is shipped with a shorted
`connector which may be used to connect to the user’s interlock circuitry. The interlock circuit
`must not be grounded. The internal circuitry is shown in Figure 2 below.
`
`The interlock circuit must be connected to enable the operation of the unit. Should the
`interlock connection open during operation or standby, the source is immediately disabled, and
`all light output from the aperture ceases. The source is latched in the Fault state until the unit
`is reset by pressing the Operation Selector Switch to the “OFF” position momentarily.
`
`
`
`Figure 2: External Interlock circuit
`
`
`
`EQ-1000 Operation Manual Rev. 5
`
`
`
`5
`
`Energetiq Ex. 2054, page 9 - IPR2015-01375
`
`

`
`
`
`6
`
`
`
`EQ-1000 Operation Manual Rev. 5
`
`Energetiq Ex. 2054, page 10 - IPR2015-01375
`
`

`
`C h a p t e r 2
`
`DESCRIPTION
`
`General
`The EQ-1000 is a DUV lamp system for use in laboratory or test applications. The lamp
`features high brightness, broad-band light from DUV wavelengths through visible and beyond.
`The output is very stable, and has a long lifetime before any service is required. The interface
`is quite simple, but robust enough for any lab or industrial environment.
`
`The EQ-1000 system consists of a power supply unit, lamp unit, and interconnecting cable.
`Connections to AC power, cooling water, and purge gas are required for operation.
`
`Specifications
`DUV Performance
`• Power Output >0.03 mW/nm collected through a 1mm aperture from 180nm to
`800nm into 0.22NA
`• Power Output >0.75 mW/nm collected through a 5mm aperture from 180nm to
`800nm into 0.22NA
`• Typical output spectrum: see Figure 3.
`
`EQ-1000 Operation Manual Rev. 5
`
`
`
`7
`
`Energetiq Ex. 2054, page 11 - IPR2015-01375
`
`

`
`Figure 3: Typical output spectrum
`
`
`
`
`Physical Specifications
`System Dimensions (H x W x D), Weight
`• Lamp Unit 169 x 118 x 406 mm (6.65 x 4.65 x 16 in), 9 kg (20 lbs)
`• Power Supply Unit 127 x 254 x 318 mm (5” x 10” x 12.5” in), 4.5 kg (10 lbs)
`
`
`Utility Requirements
`• Electrical 100–240VAC ±10%, 50/60Hz, 300VA max.
`• Cooling Water 5–10 PSID, 0.5–1 GPM, 18°C inlet temperature, controlled within
`± 0.5°C
`• Dry Nitrogen, grade 6, 20 PSIG, 2 slm
`
`
`Environmental Requirements
`Operating
`• Temperature: 5–40°C
`• Relative Humidity: non-condensing, 80% max. for temperatures up to 31°C,
`decreasing linearly to 50% max. at 40°C
`
`8
`
`
`
`EQ-1000 Operation Manual Rev. 5
`
`Energetiq Ex. 2054, page 12 - IPR2015-01375
`
`

`
`• Altitude: 2000 m (6562 ft) max.
`• Pollution Degree 2 (normally only non-conductive pollution; occasional,
`temporary condensation possible)
`•
`Installation Category: Indoor use only
`Transport
`• Temperature: -5–95°C
`• Relative Humidity: non-condensing, 95% max.
`
`
`
`Identification of Controls
`The following sections show the location of controls and other features, and give an overview
`of their functions. Refer to the “Installation” section of this manual (Chapter 3) for more
`detailed information.
`
`Power Supply Unit
`
`Key Switch
`
`Operation
`Selector Switch
`
`Status Indicator
`LEDs
`
`Figure 4: Power supply unit front panel
`
`
`
`Key Switch
`Turns on AC power to the unit. The rear panel AC power switch must also be on – see
`“Power On/Off Switch” below.
`
`The key can only be removed when the switch is in the OFF position (fully counterclockwise).
`
`Operation Selector Switch
`Momentary switch used to start or stop UV light output.
`
`EQ-1000 Operation Manual Rev. 5
`
`
`
`9
`
`Energetiq Ex. 2054, page 13 - IPR2015-01375
`
`

`
`Status Indicator LEDs
`These five LEDs indicate the system status. The function of these indicators is shown below
`in Table 2.
`
`LED Label
`POWER ON
`LAMP ON
`INTERLOCK OK
`
`LASER TEMPERATURE OK
`N2 PURGE OK
`
`Meaning (when lit)
`AC power to the EQ-1000 is on
`UV Light is on
`All interlocks are satisfied (external interlock, cover switches, laser
`temperature, and N2 pressure)
`Laser temperature in lamp unit is within limits
`Pressure of nitrogen gas purge is within limits
`
`Table 2: Front Panel LED functions
`
`
`
`
`
` Fuse Drawer
`
`Power On/Off
`Switch
`
`Power Entry
`Connector
`
`
`
`J1 Lamp Unit
`Connector
`
`Interlock Connector
`(shown with jumper
`plug installed)
`
`Cooling Fan
`Exhaust
`
`Figure 5: Power supply unit rear panel
`
`
`J1 Lamp Unit Connector
`Provides power and control signals to the Lamp Unit. No other connector or cable may be
`used with the EQ-1000 other than the one supplied. When connecting the cable, the
`connnector mounting screws must be fully engaged and tightened to a torque of 12 in-lbs.
`Failure to do so may result in excessive heating and unreliable operation of the source.
`
`10
`
`
`
`EQ-1000 Operation Manual Rev. 5
`
`Energetiq Ex. 2054, page 14 - IPR2015-01375
`
`

`
`Interlock Connector
`Provides connection to the safety interlock circuit. We recommend that any door or enclosure
`switches used in the user’s system be added in series with this interlock connection.
`
`Power Entry Connector
`The power input connection to the EQ-1000 is made via a standard IEC 3-pin power entry
`module. A power cable is included with the system, but any standard cable can be used.
`
`Fuse Drawer
`Two AC line fuses are installed in this fuse holder. The value of these fuses must be correctly
`selected based on the line voltage being used. Refer to the Installation section in the next
`chapter for instructions on correct voltage and fuse combinations, and fuse replacement.
`
`Power On/Off Switch
`This switch is used as a main AC power switch. It can also be used as an emergency off
`switch. Note that the EQ-1000 does not power up until both this switch and the front-panel
`key switch are turned on.
`
`Cooling Fan Exhaust
`The internal laser power supply is air cooled. To avoid overheating, do not obstruct this fan
`exhaust.
`
`
`
`EQ-1000 Operation Manual Rev. 5
`
`
`
`11
`
`Energetiq Ex. 2054, page 15 - IPR2015-01375
`
`

`
`Lamp Unit
`
`Exit Aperture
`(shown with
`aperture cover
`installed)
`
`Y-axis Adjusting
`Screw
`
`X-axis Adjusting
`Screw
`
`Mounting Tab
`(1 of 3)
`
`Figure 6: Lamp unit front panel
`
`
`
`Exit Aperture/X-Y Stage
`The exit aperture consists of a standard 1” optical threaded tube with an x-y adjustment stage.
`The x-y stage allows the user to align the output of the lamp with his or her system. The exit
`aperture also includes a high UV transmission quartz window. Do not attempt to remove or
`otherwise disturb this window. Doing so voids your warranty and may result in unsafe
`operating conditions
`
`Mounting Tab
`The unit may be free standing or mounted rigidly via 3 tabs situated on the bottom of the unit.
`The mounting tabs are spaced as to be readily mounted to any standard optical breadboard
`with a 1” grid hole pattern.
`
`
`
`12
`
`
`
`EQ-1000 Operation Manual Rev. 5
`
`Energetiq Ex. 2054, page 16 - IPR2015-01375
`
`

`
`Lamp On
`Indicator
`
`Nitrogen Purge
`Relief Port
`(Do Not Obstruct!)
`
`Cooling Water
`Inlet
`
`J1 Power
`Connector
`
`Nitrogen Purge
`Inlet
`
`Cooling Water
`Outlet
`
`
`
`Figure 7: Lamp Unit Rear Panel
`
`
`
`J1 Power Connector
` As mentioned above, it is imperative that the mounting screws of this connector be
`tightened, otherwise undue heating will occur and unreliable lamp operation will result.
`
`Lamp On Indicator
`Has the same function as the “Lamp On” indicator on the front of the Power Supply Unit.
`Whenever the lamp is emitting light, this indicator is lit.
`
`Nitrogen Purge Inlet
`This is the inlet fitting for nitrogen purge gas. Purge gas is required to keep the optical
`components clean and prevent the formation of ozone from atmospheric oxygen.
`
`There is no return fitting for the purge nitrogen. The purge flow normally escapes within the
`lamp unit enclosure, and then to atmosphere.
`
`Nitrogen Purge Relief Port
`To prevent damage to internal piping and components, there is an overpressure relief valve in
`the nitrogen purge circuit. This port is the atmosphere side of that valve. Under normal
`conditions, there will be no flow from this port. To maintain safety and prevent equipment
`damage, do not make any connection or otherwise obstruct this port.
`
`EQ-1000 Operation Manual Rev. 5
`
`
`
`13
`
`Energetiq Ex. 2054, page 17 - IPR2015-01375
`
`

`
`Cooling Water Inlet/Outlet
`These are the connection points for cooling water used to cool the internal drive laser.
`
`14
`
`
`
`EQ-1000 Operation Manual Rev. 5
`
`Energetiq Ex. 2054, page 18 - IPR2015-01375
`
`

`
`C h a p t e r 3
`
`INSTALLATION
`
`Installation of the EQ-1000 consists of connecting electrical, water, and gas supplies, and
`connecting the lamp output to the user’s equimpent.
`
`Facilities Requirements
`Electrical Service
`The EQ-1000 is a universal input voltage device, and can be operated from 100VAC to
`240VAC, single-phase, 50-60Hz. Power consumption is approximately 200VA during normal
`operation, 300VA during lamp starting.
`
`The EQ-1000 uses a detachable three-wire standard IEC 60320 C13 cord for connection to
`the power source. The cord also provides the connection to the protective earth circuit.
`Exposed metal parts of the EQ-1000 are connected to the protective earth ground via the cord
`and the outlet ground, providing protection against electrical shock. Never operate the EQ-
`1000 from an outlet without a properly connected protective earth ground.
`
`There is no selection switch for line voltage, it is automatically adjusted internally.
`
`Line Fuse
`The unit is shipped with 5A fuses installed for 100-120VAC input. For use at 220-240 VAC,
`the line fuses must be changed to 2.5 A.
`
`In order to change the fuses, disconnect the power cord and open the fuse drawer by
`depressing the latch below the drawer. Slide out the drawer and replace the two fuses. The
`fuses are held in metal clips in the drawer. Replace the fuse drawer in the input connector; it is
`polarized and can only be installed in one orientation. The fuse drawer is properly seated
`when the edge is flush with the input connector body.
`
`The fuses for 100-120VAC operation are 5A, 250V, 5x20mm, fast-acting fuses. Fuses for
`220-240VAC operation are 2.5A, 250V, 5x20mm, fast-acting fuses. Consult factory if there
`are any questions regarding fuse selection.
`
`Cooling Water
`The EQ-1000 requires 0.5–1gpm water at a minimum of 20psi. The temperature must be held
`at 18 +/- 0.5 degrees C. The pressure drop at 1gpm through the cold plate is less than 10psi.
`There are several thermoelectric and direct water-to-water chillers that can satisfy these
`requirements. Tight temperature regulation is required for tight regulation in the lamp’s
`
`EQ-1000 Operation Manual Rev. 5
`
`
`
`15
`
`Energetiq Ex. 2054, page 19 - IPR2015-01375
`
`

`
`output. If there are any questions or concerns, please contact the manufacturer for
`recommendations or guidance.
`
`The water connection fittings are standard 3/8” Swagelok® connectors. Do not attempt to
`use other non-Swagelok connectors, as they will not seal properly and will likely damage the
`unit.
`
`Purge Gas
`The EQ-1000 requires grade 6 or better Nitrogen purge gas. The requirement for purge gas is
`a result of the EQ-1000 lamp’s unique performance and operating principles. The EQ-1000
`produces UV radiation capable of generating ozone gas when exposed to atmospheric
`Oxygen. So first and foremost, the Nitrogen purge gas is intended to displace any Oxygen in
`the system’s optical chamber. The optics assembly is in direct contact with this purge gas. UV
`optics are quite prone to UV photocontamination. Clean and pure Nitrogen from either a
`dewar or research-grade N2 bottle is recommended. Do not use any other purge gas.
`Usage of compressed dry air (CDA) will destroy the optical chamber and likely
`produce Ozone gas, which is a potential inhalation hazard.
`
`The fitting is a push-to-connect gas fitting sized for 1/4” O.D. tubing. The suggested hose to
`mate to this fitting is either Nylon: Shore D 50-70, Polyethylene: Shore D 50-196, or Teflon
`1/4” O.D. tubing.
`
`There is no return fitting for the purge nitrogen. The purge flow normally escapes within the
`lamp unit enclosure, and then to atmosphere.
`
`Optical Interface
`The exit aperture consists of a standard 1” optical threaded tube with an x-y adjustment stage.
`The x-y stage allows the user to align the output of the lamp with his or her system. The barrel
`is made of nickel plated aluminum to minimize photocontamination at the short wavelengths
`exiting the lamp aperture. It is suggested that the user consider similar materials for his or her
`beamline to minimize the risk of photocontamination of optical surfaces.
`
`The nominal focus of the output is 0.4” past the quartz output window inside the threaded
`barrel. The user may want to place an aperture or other optic at or near this interface point.
`The optical tube makes this very simple. Figure 8 shows the details of the optical interface.
`
`Any beam transport space should be purged with dry Nitrogen to prevent the formation of
`ozone from atmospheric oxygen.
`
`16
`
`
`
`EQ-1000 Operation Manual Rev. 5
`
`Energetiq Ex. 2054, page 20 - IPR2015-01375
`
`

`
`Figure 8: Optical interface
`
`
`
`
`
`External Interlock (optional)
`The connector is a 2-pin circular connector, Hirose part no. RM12BPE-2PH. It can be
`connected to any suitable dry-contact switch, such as a snap switch for a beam line cover or
`other door switch. The contact should be rated for a minimum of 15mA at 15VDC.
`
`Installation procedure
`Upon arrival, start by inspecting all parts of the system for completeness and any damage
`incurred in shipping. The EQ-1000 shipping box should contain: 1) EQ-1000 power supply
`unit, 1) EQ-1000 lamp unit, 1) High Power Cable, 1) 2m IEC power cord, and 1) key for the
`keyswitch. If any part is missing or appears damaged, contact the manufacturer. Do not
`attempt to substitute any parts. There are no user-serviceable parts inside the EQ-1000 lamp
`unit or power supply unit.
`
`1. Mount the lamp unit rigidly to either an optical breadboard plate or another suitable
`mounting structure using the supplied 3 tabs on the bottom of the lamp unit. The
`holes are sized to accept standard ¼-20 optical bench hardware, and spaced to be
`compatible with a standard 1” grid mounting hole pattern..
`2. Connect the lamp unit output aperture to the user equipment. The light output is
`coupled via a standard optical 1” threaded barrel, mounted to an x-y stage for aligning
`
`EQ-1000 Operation Manual Rev. 5
`
`
`
`17
`
`Energetiq Ex. 2054, page 21 - IPR2015-01375
`
`

`
`the EQ-1000 output beam with any external detector, target, or fiber coupler. The
`beam should always be either directly coupled to a fiber optic cable, or enclosed in an
`appropriate beam pipe, tube, or enclosed space and purged with Nitrogen. Operating
`the source without any output target or beam transport is not recommended, and may
`lead to unsafe operating conditions. Consult Energetiq for applications information
`and suggested configurations.
`3. Setup the lamp unit with appropriate ultraviolet safety measures and laser light safety
`measures in place. It is recommended that any enclosure or aperture-blocking
`hardware utilize doors switches wired to the EQ-1000 external interlock circuit.
`4. Place the power supply unit no farther than 6 feet from the lamp unit, as the supplied
`High Power Cable is only 2 meters long. Do not block the air vents at the rear or sides
`of the lamp power supply unit.
`5. Connect the supplied High Power Cable to the lamp unit and the power supply unit.
`The connectors are polarized to prevent errors in setup. Be sure to screw the attached
`flathead connector mounting screws fully with 12 in-lbs torque. Failure to do so will
`result in undue heating in the connector body and unreliable lamp operation.
`6. Connect the lamp unit to cooling water and Nitrogen purge gas. Refer to “Facilities
`Requirements” above.
`7. Verify that both the main power switch on the back of the lamp power supply and the
`key switch on the front of the power supply unit are in the “OFF” position.
`8. Verify that the correct line fuses are installed (see “Facilities Requirements” above).
`Connect the supplied IEC cord to the lamp power supply unit and to the power
`source.
`9. Purge the EQ-1000 unit for at least 10 minutes prior to operation. Failure to purge
`the system properly will permanently damage the optics and may produce
`ozone gas.
`10. Verify that cooling water is flowing and the temperature is at maximum 18 degrees C.
`Operation of the EQ-1000 lamp at a higher temperature will result in reduced
`performance and possibly shorter lamp life.
`
`
`The system is now ready to operate.
`
`
`18
`
`
`
`EQ-1000 Operation Manual Rev. 5
`
`Energetiq Ex. 2054, page 22 - IPR2015-01375
`
`

`
`C h a p t e r 4
`
`OPERATION
`
`Starting
`Once the lamp is set up properly, verify that all personnel that will be in contact with the lamp
`unit are aware of the potential hazards involved with the lamp. It is up to the user to verify
`that the lamp is being used safely.
`
`The lamp is quite easy to operate. Begin by turning on the main power switch on the back of
`the unit. Verify that all safety measures are in place. Turn the key switch to the “ON”
`position. The lamp front panel lights should indicate power and the interlock status. If the
`interlocks are all satisfied, and the lamp is purged properly, you may push the Operation
`Selector Switch momentarily up to the “START” position. The EQ-1000 enters the start
`mode. While in the start mode, the lamp unit will click a few times, then the “LIGHT ON”
`indicator will come on. When the lamp is started, UV radiation is present at the exit aperture
`and the “LIGHT ON” indicator at the back of the lamp unit will also be lit. During this time,
`the lamp is in running mode.
`
`If the lamp does not start within approximately 16 seconds, start mode will terminate (i.e., the
`lamp stops trying to ignite). If this happens, just push the Operation Selector Switch to
`“START” to try again. If the lamp still does not ignite after 1 or 2 more attempts, raise the
`cooling water temperature to 25°C and try again. Once the lamp ignites, lower the
`temperature setpoint back to 18°C for normal operation.
`
`For optimal results, the EQ-1000 should be allowed to complete a warmup period of 5
`minutes. During this time the lamp output is stabilizing. The lamp may be operated after the
`warmup period for any length of time the user needs; continuous or short-period operation are
`both acceptable.
`
`Stopping
`When the user is finished using the lamp, he or she should simply push the Operation Selector
`Switch down momentarily to the “OFF” position. It is also possible to stop the lamp by
`opening the interlock chain or turning off the key switch. Opening the interlock chain will
`place the lamp into a Fault state, and the lamp is latched in this state until the Operation
`Selector Switch is reset by pushing the lever in the down “OFF” direction.
`
`EQ-1000 Operation Manual Rev. 5
`
`
`
`19
`
`Energetiq Ex. 2054, page 23 - IPR2015-01375
`
`

`
`
`
`20
`
`
`
`EQ-1000 Operation Manual Rev. 5
`
`Energetiq Ex. 2054, page 24 - IPR2015-01375
`
`

`
`C h a p t e r 5
`
`TROUBLESHOOTING
`
`Below is a simple error matrix that describes possible error conditions and the probable fix for
`the error. The front panel LEDs allow the user to diagnose several possible conditions that
`can prevent proper operation. For any fault conditions not addressed below, contact the
`manufacturer.
`
`
`Interlock OK light not on
`Always begin operation of the source by verifying the interlocks. Manually check that the
`purge gas pressure is sufficient, that the water temperature is within spec, and that the external
`interlock is satisfied. If all of these are OK and the interlock light is still not on, please contact
`the factory. Below in Table 3 is a simple troubleshooting error tree. A Green square indicates
`an illuminated light.
`
`External
`Interlock
`circuit not
`satisfied, or
`lamp unit
`cover
`loose or
`missing.
`Correct
`and reset.
`
`
`
`
`
`
`
`Cooling
`water
`insufficient
`to keep laser
`cool. Verify
`coolant flow
`and
`temperature,
`then reset.
`
`Nitrogen
`Purge gas
`insufficient
`pressure or
`flow. Verify
`pressure
`and flow
`then reset.
`
`Ready to
`operate
`
`Lamp On
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`AC power
`cord not
`connected,
`rear panel
`power
`switch off,
`fuse blown.
`
`Condition
`
`
`
`Power On
`Lamp On
`Interlock OK
`Laser Temperature
`OK
`N2 Purge OK
`
`
`
`
`
`
`
`
`Table 3: Front panel LED troubleshooting and operation matrix
`
`EQ-1000 Operation Manual Rev. 5
`
`
`
`21
`
`Energetiq Ex. 2054, page 25 - IPR2015-01375
`
`

`
`22
`
`
`
`EQ-1000 Operation Manual Rev. 5
`
`Energetiq Ex. 2054, page 26 - IPR2015-01375
`
`

`
`
`
`
`
`EQ-1000 Operation Manual Rev. 5
`
`
`
`23
`
`Energetiq Ex. 2054, page 27 - IPR2015-01375
`
`

`
`
`
`
`
`Copyright © 2009 Energetiq Technology Inc. All rights reserved.
`
`Energetiq products are covered by US and foreign patents. All technical information, including
`drawings, schematics and specifications contained in this manual are the property of Energetiq
`and shall not be reproduced in whole or in part without the written consent of Energetiq. The
`content of this manual is subject to change without notice.
`
`Energetiq Technology Inc.
`7 Constitution Way, Woburn, MA 01801 USA
`Tel. +1 (781) 939-0763
`Fax +1 (781) 939-0769
`E-mail: support@energetiq.com
`http://www.energetiq.com
`
`
`
`Energetiq Ex. 2054, page 28 - IPR2015-01375