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EXHIBIT 2031: Energetiq’s Laser-Driven Light Source Products and U.S. Pat. Nos. 8,969,841 and 9,048,000
`
`Energetiq’s Laser-Driven Light Source Products and U.S. Patent No. 8,969,841
`
`
`Claim
`1.
`
`Claim Element
`A laser driven light source
`comprising:
`
`Comments
`Energetiq’s EQ-1000, EQ-9, EQ-77, EQ-1500, EQ-90-FC, EQ-99, EQ-
`99X, EQ-99-FC, EQ-99X-FC, and EQ-400 laser-driven light source
`products (collectively “Energetiq’s laser-driven light source products”)
`are laser driven light sources. (Smith Decl. at ¶ 68 (Ex. 2016);
`Energetiq Laser-Driven Light Sources at 3, 9 (Ex. 2064).)
`Energetiq’s laser-driven light source products each include a sealed
`pressurized chamber having a gas at a pressure greater than 10
`atmospheres during operation. (Smith Decl. at ¶ 69 (Ex. 2016);
`Energetiq Laser-Driven Light Sources at 3, 9 (Ex. 2016).)
`Energetiq’s laser-driven light source products each include an igniter
`that serves to ionize the gas within the chamber. (EQ-1000 LDLS
`Manual at 19 (Ex. 2054); EQ-9 LDLS Manual at 12, 22 (Ex. 2062);
`EQ-77 LDLS Manual at 13, 23 (Ex. 2056); EQ-1500 LDLS Manual at
`7, 27 (Ex. 2055); EQ-90-FC LDLS Manual at 14, 25 (Ex. 2057); EQ-99
`LDLS Manual at 13, 24 (Ex. 2058); EQ-99X LDLS Manual at 13, 24
`(Ex. 2059); EQ-99-FC LDLS Manual at 13, 24 (Ex. 2060); EQ-99X-FC
`LDLS Manual at 14, 24 (Ex. 2061); EQ-400 LDLS Laser-Driven Light
`Source at 12 (Ex. 2063).
`Energetiq’s laser-driven light source products each use a continuous
`wave laser to provide substantially continuous laser energy at a
`wavelength of between 970-980 nm, except the EQ-400 which is about
`1070 nm. (EQ-1000 Manual at 3 (Ex. 2054) (“975 nm,” “CW”); EQ-9
`Manual at 3 (Ex. 2062) (“974 nm,” “CW”); EQ-77 Manual at 3 (Ex.
`
`a sealed pressurized chamber
`having a gas at a pressure
`greater than 10 atmospheres
`during operation;
`an ignition source for ionizing
`the gas within the chamber,
`and
`
`an at least substantially
`continuous laser for providing
`energy within a wavelength
`range from about 700 nm to
`2000 nm to the ionized gas to
`
`
`
`
`
`Energetiq Ex. 2031, page 1 - IPR2015-01375
`
`

`
`Claim
`
`Claim Element
`sustain a plasma within the
`chamber to produce a plasma-
`generated light having
`wavelengths greater than 50
`nm,
`
`Energetiq’s Laser-Driven Light Source Products and U.S. Patent No. 8,969,841
`
`
`Comments
`2056) (“974 nm,” “CW”); EQ-1500 Manual at 4 (Ex. 2055) (“975 nm,”
`“CW”); EQ-90-FC Manual at 4 (Ex. 2057) (“974 nm,” “CW”); EQ-99
`Manual at 4 (Ex. 2058) (“974 nm,” “CW”); EQ-99X Manual at 4 (Ex.
`2059) (“974 nm,” “CW”); EQ-99-FC Manual at 4 (Ex. 2060) (“974
`nm,” “CW”); EQ-99X-FC Manual at 4 (Ex. 2061) (“974 nm,” “CW”);
`Laser-Driven Light Sources at 3 (Ex. 2064); Smith Decl. at ¶ 70 (Ex.
`2016).)
`
`The continuous wave laser beam sustains a plasma within the chamber,
`producing plasma-generated light that includes wavelengths greater
`than 50 nm (e.g., in the UV and visible bands). (EQ-1000 LDLS
`Manual at 2 (Ex. 2054) (“The EQ-1000 uses a patented laser drive
`system to excite a plasma that radiates in the UV as well as the visible
`bands.”); EQ-9 LDLS Manual at 3 (Ex. 2062) (“The EQ-9-N uses a
`patented . . . laser drive system to excite a plasma that radiates in the
`UV as well as the visible bands.”); EQ-77 LDLS Manual at 3 (Ex.
`2056) (“The EQ-77 uses a patented* laser drive system to excite a
`plasma that radiates in the UV as well as the visible bands”); EQ-1500
`LDLS Manual at 4 (Ex. 2055) (“The EQ-1500 uses a patented . . . laser
`drive system to excite a plasma that radiates in the UV as well as the
`visible bands.”); EQ-90-FC LDLS Manual at 3 (Ex. 2057) (“The EQ-
`90-FC uses a patented . . . laser drive system to excite a plasma that
`radiates in the UV as well as the visible bands.”); EQ-99 LDLS Manual
`at 4 (Ex. 2058) (“The EQ-99 uses a patented . . . laser drive system to
`excite a plasma that radiates in the UV as well as the visible bands.”);
`
`
`
`2
`
`Energetiq Ex. 2031, page 2 - IPR2015-01375
`
`

`
`Energetiq’s Laser-Driven Light Source Products and U.S. Patent No. 8,969,841
`
`
`Claim Element
`
`Comments
`EQ-99X LDLS Manual at 3 (Ex. 2059) (“The EQ-99X uses a patented .
`. . laser drive system to excite a plasma that radiates in the UV as well
`as the visible bands.”); EQ-99-FC LDLS Manual at 3 (Ex. 2060) (“The
`EQ-99-FC uses a patented . . . laser drive system to excite a plasma that
`radiates in the UV as well as the visible bands.”); EQ-99X-FC LDLS
`Manual at 3 (Ex. 2061) (“The EQ-99X-FC uses a patented . . . laser
`drive system to excite a plasma that radiates in the UV as well as the
`visible bands); EQ-400 LDLS Laser-Driven Light Source at 2 (Ex.
`2063) (“Broadest Spectrum: 170 nm-2100 nm”); Smith Decl. at ¶ 70
`(Ex. 2016); Energetiq Laser-Driven Light Sources at 3, 9 (Ex. 2064).)
`Energetiq’s laser-driven light source products each include a region of
`material that is transparent to at least a portion of the plasma-generated
`light and allows the portion of the plasma-generated light to exit the
`chamber. (Smith Decl. at ¶ 70 (Ex. 2016); Energetiq Laser-Driven
`Light Sources at 3, 9 (Ex. 2064).)
`
`the chamber further
`comprising a region of
`material that is transparent to
`at least a portion of the
`plasma-generated light and
`that allows said portion of the
`plasma-generated light to exit
`the chamber.
`
`
`
`3
`
`Claim
`
`
`
`
`
`Energetiq Ex. 2031, page 3 - IPR2015-01375
`
`

`
`Energetiq’s Laser-Driven Light Source Products and U.S. Patent No. 9,048,000
`
`
`Claim
`1.
`
`Claim Element
`A method for illuminating
`features of a semiconductor
`wafer, comprising:
`
`Comments
`Energetiq’s EQ-1000, EQ-9, EQ-77, EQ-1500, EQ-90-FC, EQ-99, EQ-
`99X, EQ-99-FC, EQ-99X-FC, and EQ-400 laser-driven light source
`products (collectively “Energetiq’s laser-driven light source products”)
`which use a plasma to produce light, provide a method for illuminating
`the features of a semiconductor wafer. (Smith Decl. at ¶ 68 (Ex.2016);
`Energetiq Laser-Driven Light Sources at 3, 9 (Ex. 2064).)
`Energetiq’s laser-driven light source products each include an igniter
`that serves to ionize a gas within a sealed pressurized plasma chamber.
`(EQ-1000 LDLS Manual at 19 (Ex. 2054); EQ-9 LDLS Manual at 12,
`22 (Ex. 2062); EQ-77 LDLS Manual at 13, 23 (Ex. 2056); EQ-1500
`LDLS Manual at 7, 27 (Ex. 2055); EQ-90-FC LDLS Manual at 14, 25
`(Ex. 2057); EQ-99 LDLS Manual at 13, 24 (Ex. 2058); EQ-99X LDLS
`Manual at 13, 24 (Ex. 2059); EQ-99-FC LDLS Manual at 13, 24 (Ex.
`2060); EQ-99X-FC LDLS Manual at 14, 24 (Ex. 2061); EQ-400 LDLS
`Laser-Driven Light Source at 12 (Ex. 2063). The sealed pressurized
`plasma chamber of each of Energetiq’s laser-driven light source
`products is at least 10 atmospheres during operation. (Smith Decl. at ¶
`69 (Ex. 2016).)
`Energetiq’s laser-driven light source products each use a continuous
`wave laser to provide substantially continuous laser energy at a
`wavelength of between 970-980 nm, except the EQ-400 which is about
`1070 nm, to the ionized gas through a region of the material in the
`sealed pressurized chamber that is transparent to the substantially
`continuous laser energy. (EQ-1000 Manual at 3 (Ex. 2054) (“975 nm,”
`“CW”); EQ-9 Manual at 3 (Ex. 2062) (“974 nm,” “CW”); EQ-77
`
`ionizing a gas within a sealed
`pressurized plasma chamber
`having an operating pressure
`of at least 10 atmospheres;
`
`providing substantially
`continuous laser energy
`having a wavelength range of
`up to about 2000 nm through
`a region of material in the
`sealed pressurized chamber
`that is transparent to the
`
`
`
`4
`
`Energetiq Ex. 2031, page 4 - IPR2015-01375
`
`

`
`Energetiq’s Laser-Driven Light Source Products and U.S. Patent No. 9,048,000
`
`
`Claim
`
`Claim Element
`substantially continuous laser
`energy
`
`Comments
`Manual at 3 (Ex. 2056) (“974 nm,” “CW”); EQ-1500 Manual at 4 (Ex.
`2055) (“975 nm,” “CW”); EQ-90-FC Manual at 4 (Ex. 2057) (“974
`nm,” “CW”); EQ-99 Manual at 4 (Ex. 2058) (“974 nm,” “CW”); EQ-
`99X Manual at 4 (Ex. 2059) (“974 nm,” “CW”); EQ-99-FC Manual at 4
`(Ex. 2060) (“974 nm,” “CW”); EQ-99X-FC Manual at 4 (Ex. 2061)
`(“974 nm,” “CW”); Laser-Driven Light Sources at 3 (Ex. 2064); Smith
`Decl. at ¶ 70 (Ex. 2016).)
`The continuous wave laser energy of each of Energetiq’s laser-driven
`light source products is provided to the ionized gas to sustain a plasma
`within the pressurized plasma chamber to produce plasma-generated
`light having wavelengths greater than 50 nm (e.g., in the UV and visible
`bands). (EQ-1000 LDLS Manual at 2 (Ex. 2054) (“The EQ-1000 uses a
`patented laser drive system to excite a plasma that radiates in the UV as
`well as the visible bands.”); EQ-9 LDLS Manual at 3 (Ex. 2062) (“The
`EQ-9-N uses a patented . . . laser drive system to excite a plasma that
`radiates in the UV as well as the visible bands.”); EQ-77 LDLS Manual
`at 3 (Ex. 2056) (“The EQ-77 uses a patented* laser drive system to
`excite a plasma that radiates in the UV as well as the visible bands”);
`EQ-1500 LDLS Manual at 4 (Ex. 2055) (“The EQ-1500 uses a
`patented . . . laser drive system to excite a plasma that radiates in the
`UV as well as the visible bands.”); EQ-90-FC LDLS Manual at 3 (Ex.
`2057) (“The EQ-90-FC uses a patented . . . laser drive system to excite
`a plasma that radiates in the UV as well as the visible bands.”); EQ-99
`LDLS Manual at 4 (Ex. 2058) (“The EQ-99 uses a patented . . . laser
`drive system to excite a plasma that radiates in the UV as well as the
`
`to the ionized gas to sustain a
`plasma within the sealed
`pressurized plasma chamber
`to produce plasma-generated
`light having wavelengths
`greater than 50 nm; and
`
`
`
`5
`
`Energetiq Ex. 2031, page 5 - IPR2015-01375
`
`

`
`Energetiq’s Laser-Driven Light Source Products and U.S. Patent No. 9,048,000
`
`
`Claim
`
`Claim Element
`
`Comments
`visible bands.”); EQ-99X LDLS Manual at 3 (Ex. 2059) (“The EQ-99X
`uses a patented . . . laser drive system to excite a plasma that radiates in
`the UV as well as the visible bands.”); EQ-99-FC LDLS Manual at 3
`(Ex. 2060) (“The EQ-99-FC uses a patented . . . laser drive system to
`excite a plasma that radiates in the UV as well as the visible bands.”);
`EQ-99X-FC LDLS Manual at 3 (Ex. 2061) (“The EQ-99X-FC uses a
`patented . . . laser drive system to excite a plasma that radiates in the
`UV as well as the visible bands); EQ-400 LDLS Laser-Driven Light
`Source at 2 (Ex. 2063) (“Broadest Spectrum: 170 nm-2100 nm”); Smith
`Decl. at ¶ 70 (Ex. 2016); Energetiq Laser-Driven Light Sources at 3, 9
`(Ex. 2064).)
`Energetiq’s laser-driven light source products illuminate a wafer with
`plasma-generated light having wavelengths greater than 50 nm (e.g., in
`the UV and visible bands) that exits the sealed pressurized chamber.
`(EQ-1000 LDLS Manual at 2 (Ex. 2054) (“The EQ-1000 uses a
`patented laser drive system to excite a plasma that radiates in the UV as
`well as the visible bands.”); EQ-9 LDLS Manual at 3 (Ex. 2062) (“The
`EQ-9-N uses a patented . . . laser drive system to excite a plasma that
`radiates in the UV as well as the visible bands.”); EQ-77 LDLS Manual
`at 3 (Ex. 2056) (“The EQ-77 uses a patented* laser drive system to
`excite a plasma that radiates in the UV as well as the visible bands”);
`EQ-1500 LDLS Manual at 4 (Ex. 2055) (“The EQ-1500 uses a
`patented . . . laser drive system to excite a plasma that radiates in the
`UV as well as the visible bands.”); EQ-90-FC LDLS Manual at 3 (Ex.
`2057) (“The EQ-90-FC uses a patented . . . laser drive system to excite
`
`illuminating the wafer with
`plasma-generated light having
`wavelengths greater than 50
`nm that exits the sealed
`pressurized chamber.
`
`
`
`6
`
`Energetiq Ex. 2031, page 6 - IPR2015-01375
`
`

`
`Energetiq’s Laser-Driven Light Source Products and U.S. Patent No. 9,048,000
`
`
`Claim Element
`
`Comments
`a plasma that radiates in the UV as well as the visible bands.”); EQ-99
`LDLS Manual at 4 (Ex. 2058) (“The EQ-99 uses a patented . . . laser
`drive system to excite a plasma that radiates in the UV as well as the
`visible bands.”); EQ-99X LDLS Manual at 3 (Ex. 2059) (“The EQ-99X
`uses a patented . . . laser drive system to excite a plasma that radiates in
`the UV as well as the visible bands.”); EQ-99-FC LDLS Manual at 3
`(Ex. 2060) (“The EQ-99-FC uses a patented . . . laser drive system to
`excite a plasma that radiates in the UV as well as the visible bands.”);
`EQ-99X-FC LDLS Manual at 3 (Ex. 2061) (“The EQ-99X-FC uses a
`patented . . . laser drive system to excite a plasma that radiates in the
`UV as well as the visible bands); EQ-400 LDLS Laser-Driven Light
`Source at 2 (Ex. 2063) (“Broadest Spectrum: 170 nm-2100 nm”); Smith
`Decl. at ¶ 70 (Ex. 2016); Energetiq Laser-Driven Light Sources at 3, 9
`(Ex. 2064).)
`
`7
`
`Claim
`
`
`
`
`
`Energetiq Ex. 2031, page 7 - IPR2015-01375

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